JPS6343422U - - Google Patents
Info
- Publication number
- JPS6343422U JPS6343422U JP13621286U JP13621286U JPS6343422U JP S6343422 U JPS6343422 U JP S6343422U JP 13621286 U JP13621286 U JP 13621286U JP 13621286 U JP13621286 U JP 13621286U JP S6343422 U JPS6343422 U JP S6343422U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- semiconductor device
- device manufacturing
- silica
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
- 239000004744 fabric Substances 0.000 claims description 2
- 239000000835 fiber Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000011810 insulating material Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000012774 insulation material Substances 0.000 description 2
- 239000012209 synthetic fiber Substances 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案の第１の実施例の半導体装置の
製造装置を示す断面図、第２図は本考案の第２の
実施例の半導体装置の製造装置を示す断面図、第
３図は従来の一例を示す断面図、第４図は従来の
他例を示す断面図である。
１……ヒーター部、２……炉芯管、３……ガス
導入口、４……前部炉芯管サポート断熱材、４ａ
，５ａ……アルミナ・シリカ合成繊維、４ｂ，５
ｂ……アルミナ・シリカ成形固形化品、４ｃ，５
ｃ，６ｃ，７ｃ……シリカ・フアイバ布、５……
後部炉芯管サポート断熱材、６……前部ヒーター
部キヤツプ、７……後部ガス導入口断熱キヤツプ
。
FIG. 1 is a cross-sectional view showing a semiconductor device manufacturing apparatus according to a first embodiment of the present invention, FIG. 2 is a cross-sectional view showing a semiconductor device manufacturing apparatus according to a second embodiment of the present invention, and FIG. FIG. 4 is a cross-sectional view showing one conventional example, and FIG. 4 is a cross-sectional view showing another conventional example. 1...Heater part, 2...Furnace core tube, 3...Gas inlet, 4...Front furnace core tube support insulation material, 4a
, 5a...Alumina-silica synthetic fiber, 4b, 5
b...Alumina/silica molded solidified product, 4c, 5
c, 6c, 7c...Silica fiber cloth, 5...
Rear furnace core tube support insulation material, 6... Front heater section cap, 7... Rear gas inlet insulating cap.
Claims (1)
体装置の製造装置において、前記ヒーター部と離
間して前記炉芯管を固定する断熱材として、アル
ミナ及びシリカからなる材料を成形固形化し、こ
の固形表面をシリカ・フアイバの布で覆い縫合し
たものを設けたことを特徴とする半導体装置の製
造装置。 In a semiconductor device manufacturing apparatus that uses a furnace core tube and performs heat treatment in a heater section, a material made of alumina and silica is molded and solidified as a heat insulating material that fixes the furnace core tube apart from the heater section. 1. A semiconductor device manufacturing device characterized by having a surface covered with a silica fiber cloth and sewn together.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13621286U JPS6343422U (en) | 1986-09-04 | 1986-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13621286U JPS6343422U (en) | 1986-09-04 | 1986-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6343422U true JPS6343422U (en) | 1988-03-23 |
Family
ID=31039120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13621286U Pending JPS6343422U (en) | 1986-09-04 | 1986-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6343422U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63288014A (en) * | 1988-04-22 | 1988-11-25 | Canon Inc | Printing device |
| JP2009253179A (en) * | 2008-04-10 | 2009-10-29 | Koyo Thermo System Kk | Horizontal furnace |
-
1986
- 1986-09-04 JP JP13621286U patent/JPS6343422U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63288014A (en) * | 1988-04-22 | 1988-11-25 | Canon Inc | Printing device |
| JP2009253179A (en) * | 2008-04-10 | 2009-10-29 | Koyo Thermo System Kk | Horizontal furnace |