JPH0460544U - - Google Patents
Info
- Publication number
- JPH0460544U JPH0460544U JP10270990U JP10270990U JPH0460544U JP H0460544 U JPH0460544 U JP H0460544U JP 10270990 U JP10270990 U JP 10270990U JP 10270990 U JP10270990 U JP 10270990U JP H0460544 U JPH0460544 U JP H0460544U
- Authority
- JP
- Japan
- Prior art keywords
- heating device
- heating
- configuration diagram
- heating element
- schematic cross
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 13
- 239000012212 insulator Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 3
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Description
第１図は本考案の一実施例による加熱装置の概
略断面構成図、第２図は前記加熱装置が採用され
たスパツタリング装置の概略断面構成図、第３図
は本考案の他の実施例による加熱装置の概略構成
図、第４図は本考案のさらに他の実施例による加
熱装置を適用した縦型２面方式のスパツタリング
装置の概略断面構成図、第５図は第４図の実施例
のさらに変形例を示す加熱装置の概略断面構成図
、第６図はランプヒータによる従来の加熱装置の
構成図、第７図はシーズヒータを用いた従来の加
熱装置の一部断面構成図である。
２……発熱体、３ａ，３ｂ……絶縁体。
FIG. 1 is a schematic cross-sectional configuration diagram of a heating device according to an embodiment of the present invention, FIG. 2 is a schematic cross-sectional configuration diagram of a sputtering apparatus in which the heating device is adopted, and FIG. 3 is a schematic cross-sectional configuration diagram of a sputtering device according to another embodiment of the present invention. FIG. 4 is a schematic cross-sectional diagram of a vertical two-sided sputtering device to which a heating device according to yet another embodiment of the present invention is applied, and FIG. 5 is a schematic diagram of a heating device according to the embodiment of FIG. Further, FIG. 6 is a schematic cross-sectional configuration diagram of a heating device showing a modified example, FIG. 6 is a configuration diagram of a conventional heating device using a lamp heater, and FIG. 7 is a partial cross-sectional configuration diagram of a conventional heating device using a sheathed heater. 2... Heating element, 3a, 3b... Insulator.
Claims (1)
、 発熱体と、 前記発熱体を両側から挟み込むように配置され
、赤外線が透過可能な絶縁体と、 を備えた加熱装置。[Claims for Utility Model Registration] A heating device for heating inside a vacuum chamber, comprising: a heating element; and an insulator arranged to sandwich the heating element from both sides and through which infrared rays can pass. heating device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10270990U JPH0460544U (en) | 1990-09-27 | 1990-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10270990U JPH0460544U (en) | 1990-09-27 | 1990-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0460544U true JPH0460544U (en) | 1992-05-25 |
Family
ID=31847188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10270990U Pending JPH0460544U (en) | 1990-09-27 | 1990-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0460544U (en) |
-
1990
- 1990-09-27 JP JP10270990U patent/JPH0460544U/ja active Pending