JPH0349688B2 - - Google Patents
Info
- Publication number
- JPH0349688B2 JPH0349688B2 JP3957084A JP3957084A JPH0349688B2 JP H0349688 B2 JPH0349688 B2 JP H0349688B2 JP 3957084 A JP3957084 A JP 3957084A JP 3957084 A JP3957084 A JP 3957084A JP H0349688 B2 JPH0349688 B2 JP H0349688B2
- Authority
- JP
- Japan
- Prior art keywords
- electrolytic
- abrasive
- action
- electrode
- electrolyte
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 239000003792 electrolyte Substances 0.000 claims description 14
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 12
- 239000000956 alloy Substances 0.000 claims description 12
- 229910045601 alloy Inorganic materials 0.000 claims description 12
- 239000010936 titanium Substances 0.000 claims description 12
- 229910052719 titanium Inorganic materials 0.000 claims description 12
- 239000004094 surface-active agent Substances 0.000 claims description 9
- 239000006061 abrasive grain Substances 0.000 claims description 7
- 239000008151 electrolyte solution Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 7
- 238000010828 elution Methods 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 238000005299 abrasion Methods 0.000 claims description 3
- 238000003754 machining Methods 0.000 description 15
- 239000003082 abrasive agent Substances 0.000 description 8
- 239000008399 tap water Substances 0.000 description 8
- 235000020679 tap water Nutrition 0.000 description 8
- 239000002131 composite material Substances 0.000 description 5
- 239000012530 fluid Substances 0.000 description 5
- 230000003746 surface roughness Effects 0.000 description 5
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 4
- 238000005868 electrolysis reaction Methods 0.000 description 4
- 238000002386 leaching Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004745 nonwoven fabric Substances 0.000 description 2
- 239000011780 sodium chloride Substances 0.000 description 2
- VWDWKYIASSYTQR-UHFFFAOYSA-N sodium nitrate Chemical compound [Na+].[O-][N+]([O-])=O VWDWKYIASSYTQR-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 238000010612 desalination reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000013535 sea water Substances 0.000 description 1
- 239000008149 soap solution Substances 0.000 description 1
- 235000010344 sodium nitrate Nutrition 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H5/00—Combined machining
- B23H5/06—Electrochemical machining combined with mechanical working, e.g. grinding or honing
- B23H5/08—Electrolytic grinding
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3957084A JPS60186318A (ja) | 1984-02-29 | 1984-02-29 | チタンおよびその合金の鏡面加工方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3957084A JPS60186318A (ja) | 1984-02-29 | 1984-02-29 | チタンおよびその合金の鏡面加工方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60186318A JPS60186318A (ja) | 1985-09-21 |
| JPH0349688B2 true JPH0349688B2 (https=) | 1991-07-30 |
Family
ID=12556732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3957084A Granted JPS60186318A (ja) | 1984-02-29 | 1984-02-29 | チタンおよびその合金の鏡面加工方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60186318A (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0669648B2 (ja) * | 1986-04-17 | 1994-09-07 | 株式会社神戸製鋼所 | Ｔｉ，Ｚｒ，Ｎｂ，Ｔａまたはそれらの合金の電解研削方法 |
| JP2693432B2 (ja) * | 1987-03-26 | 1997-12-24 | 工業技術院長 | チタン材の鏡面研磨法 |
| JPH0627020U (ja) * | 1992-09-08 | 1994-04-12 | 西山ステンレスケミカル株式会社 | 複合電解研磨装置 |
| US5486282A (en) * | 1994-11-30 | 1996-01-23 | Ibm Corporation | Electroetching process for seed layer removal in electrochemical fabrication of wafers |
| US6582281B2 (en) | 2000-03-23 | 2003-06-24 | Micron Technology, Inc. | Semiconductor processing methods of removing conductive material |
-
1984
- 1984-02-29 JP JP3957084A patent/JPS60186318A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60186318A (ja) | 1985-09-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |