JPH0348505Y2 - - Google Patents

Info

Publication number
JPH0348505Y2
JPH0348505Y2 JP1986021059U JP2105986U JPH0348505Y2 JP H0348505 Y2 JPH0348505 Y2 JP H0348505Y2 JP 1986021059 U JP1986021059 U JP 1986021059U JP 2105986 U JP2105986 U JP 2105986U JP H0348505 Y2 JPH0348505 Y2 JP H0348505Y2
Authority
JP
Japan
Prior art keywords
piezoelectric element
attached
vibrator
electrode
amplitude
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986021059U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62134036U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986021059U priority Critical patent/JPH0348505Y2/ja
Publication of JPS62134036U publication Critical patent/JPS62134036U/ja
Application granted granted Critical
Publication of JPH0348505Y2 publication Critical patent/JPH0348505Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
JP1986021059U 1986-02-17 1986-02-17 Expired JPH0348505Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986021059U JPH0348505Y2 (cs) 1986-02-17 1986-02-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986021059U JPH0348505Y2 (cs) 1986-02-17 1986-02-17

Publications (2)

Publication Number Publication Date
JPS62134036U JPS62134036U (cs) 1987-08-24
JPH0348505Y2 true JPH0348505Y2 (cs) 1991-10-16

Family

ID=30817153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986021059U Expired JPH0348505Y2 (cs) 1986-02-17 1986-02-17

Country Status (1)

Country Link
JP (1) JPH0348505Y2 (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6120826A (ja) * 1984-07-09 1986-01-29 Shinko Electric Co Ltd 振動体の振巾判別方法

Also Published As

Publication number Publication date
JPS62134036U (cs) 1987-08-24

Similar Documents

Publication Publication Date Title
US5166571A (en) Vibration gyro having an H-shaped vibrator
JP2011196823A5 (ja) ジャイロ素子、ジャイロセンサー、および電子機器
JPS61180109A (ja) 変位センサ
JPH0255585A (ja) 超音波モータ
JP3611840B2 (ja) 圧電装置
JPH0348505Y2 (cs)
EP0309963A2 (en) Vibration gyro having an H-shaped vibrator
JP2505464B2 (ja) 圧電振動子
JPS63258311A (ja) 圧電素子駆動型振動機
JPS62188975A (ja) 圧電体角速度センサ−
JP3618591B2 (ja) 静電式集塵装置
CN115980467B (zh) 一种压电驱动的mems型电场传感器
JPH0614062B2 (ja) 流速検出装置
JPS6067815A (ja) 角速度センサ
JPS5931889B2 (ja) 圧電振動子
JPS63192284A (ja) 圧電バイモルフ素子
CA1313065C (en) Vibration gyro having an h-shaped vibrator
JP2523065Y2 (ja) 圧電駆動形搬送装置
JP2956711B2 (ja) 表面電位センサ
JPH0736064U (ja) 衝撃センサ
JPH0730597U (ja) 圧電アクチュエータ
JPH11258286A (ja) 微少容量検出回路
JPS5915864A (ja) 表面電位検出装置
JPS6339654Y2 (cs)
JPS62204887A (ja) 振動機