JPH034816B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a clean room employed in a semiconductor manufacturing factory.

[Prior Art and Problems to be Solved by the Invention] Vertical laminar flow clean rooms used in semiconductor manufacturing factories and the like usually have the structure shown in FIG. In the figure, 1 is a building frame, 2 is a ceiling filter mounting grid formed by assembling hollow steel members, and 3 is a
... is a ceiling filter supported by the grid, 4 is a ceiling chamber, 5 is a ventilation floor stand, 6... is,
The ventilated flooring material 7, such as grating or perforated metal, supported by the stand is a retina chamber.

Then, the clean air from the air conditioner is sent to the ceiling chamber 4 through the ventilation duct, and the ceiling filter 3
... is supplied into the room as a laminar flow, and indoor air is sent to the lettuce chamber 7 via the ventilation flooring 6 and returned to the lettuce port of the air conditioner.

By the way, the manufacturing process in this clean room has a short life cycle, and is carried out once every few years.
Significant changes will be made.

In response to this modification, the conventional clean room
The space lacks flexibility and requires extensive remodeling work. For example, as shown in FIG. 6, even if one partition wall 8 is provided, a specially sized ceiling filter 3 and ventilation flooring 6 are provided, a joist 9 is built in, and a steel member 91 is installed on the joist to receive the partition wall. It is necessary to attach frame members 10, 10 to receive the ends of the specially sized ceiling filter 3 on the ceiling, and to provide an airtight seal between the frame members, the ceiling filter, and the partition wall. In addition, it is not easy to change the arrangement of lighting equipment on the ceiling, and even if it is possible to attach it to the ceiling lattice, if you simply attach it, it will lack the airtightness of the lattice, so it must be sealed separately. It is very troublesome and requires a lot of effort.

The present invention attempts to solve such problems.

[Means for Solving the Problems] The present invention comprises assembling a ceiling filter mounting grid using an airtight multi-layered hollow frame member, and installing one to several ceiling filters in each square of the grid. In addition, the joists that receive the flooring material are assembled in a lattice pattern, and the receiving material that receives the partition wall, etc. is interposed between the adjacent flooring materials on the upper surface of the joists, and is integrated or installed. Separately installed in parallel, the receiving material joists are formed into a module that is the same as or an integral multiple of the ceiling filter mounting lattice, and each square formed by the receiving material joists is provided with a respective grating, punched metal, etc. for ventilation. The flooring material is fitted with flooring material, and the peripheral edges of these flooring materials are supported by joists.

[Example] Fig. 1 shows the ceiling and floor modules, and Fig. 2 shows the lower surface of a part of the ceiling. In the figure, 12 is a ceiling filter mounting grid, 13...
14 is a ceiling filter supported by the lattice; 14 is a ceiling chamber; 15 is a joist for forming a ventilation floor; 16... is a ventilation floor such as grating or punched metal supported by the joist; is formed into a module that is the same as or an integral multiple of the ceiling mounting grid 12.

The ceiling filter mounting lattice 12 is constructed by assembling hollow frame members 121 of a multi-layered structure, which are airtightly isolated from the top and bottom, as shown in FIG. 3, into a lattice as shown in FIGS. 1 and 2. The hollow frame material 121 is made of aluminum, steel, etc. and has a hollow main part 1211 with a diagonal cross-section and two layers, upper and lower, and a hollow protrusion 1212 with a convex cross-section is integrally formed in the center of the upper surface of the main part. It is attached to.

The ceiling filter mounting grid 12 made of such a hollow frame material 121 is supported by hanging bolts 26 suspended from the ceiling slab or beam as shown in FIG. 4, but as shown in FIGS. , hanging bolt 2
6. Provide a U-shaped hardware 261 at the lower end of the U-shaped hardware, fit the U-shaped hardware into the protrusion 1212 of the hollow frame material 121,
They are connected by screws 262... Further, the outer circumferential surface of the lattice 12 supported in this manner will be adjacent to the circumferential wall of the frame, and a silicon seal is applied between this outer circumferential surface and the circumferential wall.

A ceiling filter 13 is fitted into each square in the ceiling filter mounting grid 12, and the peripheral edge of each ceiling filter is placed on the upper surface of the main part 1211 of the hollow frame material 121 constituting the grid. and airtightly support it to the upper layer a of the main part.

Note that the ceiling filter mounting grid 12 is preferably blocked off at a portion where the hollow frame material 121 is joined, for example, at or around the intersection so as not to cause air permeability. The main portion 1211 of the hollow frame material 121 is not limited to a diagonal cross-section, and may have a multilayer structure of three or more layers. Further, the layering may be in the horizontal direction instead of the vertical direction. The shape of the hollow is not limited to a rectangular cross section, but may be circular or other shapes. The protruding stripes 1212 on the upper surface of the hollow frame member 121 are not limited to stepped convex stripes, but may be any suitable strip. The protrusion 1212
is not necessarily required, and may be omitted if support means are provided. Appropriate sealing means such as a sealing material such as a synthetic resin or a liquid sealing means may be provided on the upper surface of the hollow frame member 121.

As described above, the joists 15 are constructed in the form of a lattice of modules that are the same as or an integral multiple of the ceiling filter mounting lattice 12, but as shown in FIG. Keep and support the lettuce chamber on the slab, and its joist 1
At the center of the upper surface of 5, a partition wall supporting material 18 interposed between adjacent flooring materials 16, 16 is installed and fixed as one piece or separately, and grating, punching metal, etc. are attached to each square formed by the joists attached to the receiving material. Ventilated flooring materials 16 are fitted, and the peripheral edges of these flooring materials are supported by joists.

[Function] As shown above, since the ceiling filter mounting grid 12 and the support material 18 attachment joist 15 are set to the same module or an integral multiple of the modules, the ceiling filter mounting grid 12
Any hollow frame material 121 and the corresponding receiving material 1
8 can be appropriately selected and a partition wall 21 can be built between the hollow frame material and the receiving material, and in this construction, as shown in Fig. 4, the lower end of the partition wall It is engaged with the receiving material, the upper end is brought into contact with the lower surface of the hollow frame material, and it is fixed to the main lower layer b of the hollow frame material with screws 27.

Further, by appropriately selecting an arbitrary hollow frame material 121 on the ceiling filter mounting grid 12, lighting fixtures 28... and other fixtures can be freely mounted as shown in FIG. To do this, the upper surface of the lighting fixture 28, etc. is brought into contact with the lower surface of the hollow frame member 121, and the screw 27 is attached to the main lower layer part b of the hollow frame member.
Fix it with.

Wiring for lighting equipment, etc. should be done in the main lower layer b of the hollow frame material.
Insert it into.

Furthermore, it is also possible to attach punching faces for adjusting the wind speed to each square of the ceiling filter mounting grid 12 directly below the ceiling filters 13. In that case, as shown in FIG. A groove-shaped support frame 29 is airtightly fixed to the side surface of the lower part b in the part 1211, and the punching face 30
An engaging edge 301 is provided on the periphery of the support frame 29, and the engaging edge is engaged with the support frame 29.

[Effects of the Invention] According to the present invention, it is possible to attach a ceiling filter mounting grid to the ceiling and to attach the ceiling filter to the squares of the grid, using the airtightly sealed multi-layer structure that constitutes the grid. It is possible to carry out the installation of partition walls, lighting equipment, etc. on one layer of the hollow frame material, and to perform the subsequent installation of partition walls, lighting equipment, etc. on the other layer of the hollow frame material.
Even if screws or the like are used or holes are made, the layers of the hollow frame material are airtightly isolated from each other, so that the airtightness does not deteriorate, and there is no need to take sealing measures each time the product is installed. As a result, partition walls, lighting fixtures, etc. can be easily installed, and their positions can be changed extremely easily.

In addition, since the ceiling filter mounting grid and the floor support joists are constructed into modules that are the same or an integral multiple, the partition wall can be constructed using any hollow frame material for the ceiling filter mounting grid. This can be easily done by appropriately selecting the receiving material to be used, and the position can also be easily changed.

Therefore, it is possible to have flexibility even in the case of major changes in the manufacturing process, and major modification work is not required.

[Brief explanation of drawings]

1 to 5 show embodiments of the present invention.
The figure is an explanatory diagram showing the ceiling and floor modules.
The figure is an enlarged suppressed view of a part of the ceiling, Fig. 3 is an enlarged sectional view of the hollow frame material, Fig. 4 is an enlarged sectional view of the main part showing the installation state of the partition wall and punching face, and Fig. 5 FIG. 6 is an enlarged cutaway perspective view of a main part showing the installation of a lighting fixture, and FIG. 6 is a sectional view of the main structure of a conventional example. 12... Ceiling filter mounting grid, 13... Ceiling filter, 14... Ceiling chamber, 15... Joist, 16
...Breathable flooring, 17...Letan chamber, 18...Receiving material, 19...Stand, 20...Adjuster, 21...
Partition wall, 26...hanging bolt, 27...screw, 28
...Lighting equipment, 30...Punching face.

Claims (1)

[Claims] 1. Assemble a ceiling filter mounting lattice using an airtight multi-layered hollow frame material, fit one to several ceiling filters into each square of the lattice,
In addition, the joists that receive the flooring materials are arranged in a grid pattern, and the receiving material that receives the partition walls, etc. is interposed between the adjacent flooring materials on the upper surface of the joists, either in one body or separately. At the same time, the receiving material joist is formed into a module that is the same as or an integral multiple of the ceiling filter mounting lattice, and ventilation flooring materials such as grating, punched metal, etc. are fitted into each square formed by the receiving material joist. , a clean room characterized by having the periphery of these flooring materials covered with joists.