JPH0443525Y2 - - Google Patents

Description

[Detailed description of the invention] "Field of industrial application" The invention relates to a hollow frame material used in a clean room.

``Prior Art'' Vertical laminar flow clean rooms used in semiconductor manufacturing factories and the like usually have the structure shown in FIG. In the figure, 1 is a frame, 2 is a grid for mounting a ceiling filter formed by assembling hollow frame materials (steel materials, etc.), 3... is a ceiling filter supported by the grid, 4 is a ceiling chamber, and 5 is a ceiling filter. , a ventilated floor stand; 6... is a ventilated floor material such as grating or perforated metal supported by the stand; and 7 is a retan chamber.

Then, the clean air from the air conditioner is sent to the ceiling chamber 4 through the ventilation duct, and is passed through the ceiling filter 3.
The indoor air is supplied as a laminar flow into the room by passing through ..., and the air in the room is sent to the retan chamber 7 via the ventilated flooring 6 and returned to the retan outlet of the air conditioner. There is.

``The problem that the invention attempts to solve'' By the way, the manufacturing process in this clean room has a short life cycle, and once every few years,
Significant changes will be made.

In response to this modification, the conventional clean room
The space lacks flexibility and requires extensive remodeling work. For example, as shown in FIG. 8, in order to provide a partition wall 8, a specially sized ceiling filter 3 and ventilation flooring 6 are provided, joists 9 are built in, and steel members 91 for forming the partition wall are attached to the joists. However, it requires support frames 10, 10 for receiving the ends of the specially sized ceiling filter 3 on the ceiling, and also requires a seal to ensure airtightness between the support frames, the ceiling filter, and the partition wall.

In addition, there are similar difficulties in installing or changing the arrangement of ceiling lighting equipment, etc. Even if it is installed on the ceiling lattice 2, the main part of the hollow frame material forming the lattice is a single layer structure, and each Even if sealing measures are taken at the joint, the reliability of the airtightness is poor, and the mounting part,
The detachable portion requires a separate sealing means, which is very troublesome. In other words, since the main part has a single-layer structure, even if a sealing method is applied to the entire joint surface at the joint part, the airtightness is easy to break due to a single layer between the inside and outside of the main part, for example, the airtightness at the upper part If the roof is torn, dust from behind the ceiling will enter the main part, and when installing partition walls, lighting equipment, etc. to the main part, inserting electrical wiring, etc., or changing their positions, it is necessary to drill holes in the main part. This is because if a means such as screwing is applied, the dust inside the main part will leak out from the part into the clean room.

The present invention attempts to solve such problems.

"Means for Solving the Problems" The present invention provides a hollow frame material having a main part 1211 with a square cross section and integrally provided with a protrusion 1212 for mounting at a proper position on the upper surface of the main part 1211 of the hollow frame material. The inside of 1211 is characterized by being formed into a multi-layered structure in which at least the upper layer part a is not affected by the protrusions 1212 and is airtightly isolated from other layer parts and the outside air, forming upper and lower layers.

"Function" The above hollow frame material is assembled into the ceiling filter mounting grid 12 in a clean room and built into the ceiling.
Suspended from the hanging bolts 26 hanging from the ceiling slab by the protrusions 1212, and by taking airtight measures such as silicone seals at each connecting part in the upper part a of the main part 1211, the entire ceiling filter mounting grid is assembled. In addition, appropriate sealing means are provided on the upper layer a of the main part of the ceiling filter mounting grid, and hanging bolts 26..., protrusions 12
12 etc., the ceiling filter 13 is airtightly mounted using appropriate support means, and then the main part 1211
Insert electrical wiring, etc. into the lower part b of the building, and install partition walls, lighting equipment, etc.

"Embodiment" FIG. 1 shows an embodiment of a hollow frame material according to the present invention, in which the hollow frame material 121 has a hollow main part 1211 made of aluminum or steel and has a cross-section shaped like a Japanese letter. A hollow protrusion 1212 having a convex cross-section and long in the length direction of the main part is integrally attached to the center part in the width direction of the upper surface of the main part, and an assembly screw is screwed into the inside of the upper layer a of the main part. A plurality of grooves 1213 having an arcuate cross section are arranged in parallel.

The hollow frame material 121 is assembled into a ceiling filter mounting grid 12 shown in FIGS. 4 and 5. In this assembly, the hollow frames are connected at intersections, etc., and for this connection, as shown in Fig. 3, the ends of the appropriately cut hollow frames 121... 123 and 124 are applied to create a groove 1213 with an arc cross section...
Fix it with a screw (not shown) screwed into...
Hook pieces 1231, 1241 that correspond to the metal fittings on both ends
are attached and engaged with each other, and one hook piece 1231
A tongue piece 1232 is made to protrude integrally from the body, and the tongue piece is fixed to the other end metal fitting 124 with a bolt 125, and a silicon seal 126 is provided between the main parts and between the main part and the end metal fitting.

The main portion 1211 of the hollow frame material 121 is not limited to a diagonal cross-section, and may have a multilayer structure of three or more layers. The bottom layer may be open downward. The protrusion 1212 on the upper surface of the hollow frame member 121 is not limited to a convex shape in cross section, but may be any suitable shape. The protrusions 1212 and the grooves 1213 having an arcuate cross section inside the main portion may be omitted as long as appropriate supporting means and connecting means can be provided. Appropriate sealing means such as a sealing material such as a synthetic resin or a liquid sealing means may be provided on the upper surface of the hollow frame member 121.

Further, corner members 122 shown in FIG. 2 are used at the peripheral edge of the ceiling filter mounting grid 12. The corner member has a hollow main part 1221 made of aluminum or steel and having a rectangular cross-section, and a hollow protrusion 1222 with a convex cross-section is integrally attached to the upper surface of the main part and is offset toward the outer edge. , a groove 1223 with an arc cross section for screwing an assembly screw into the inside of the main part...
are installed in parallel.

It goes without saying that the main portion of this corner member 122 may also have a multi-layer structure.

Ceiling filter mounting grid 12 configured in this way
As shown in FIGS. 6 and 7, it is supported by hanging bolts 26 suspended from the ceiling slab or beam, and the hanging bolts have a U-shaped metal fitting 26 at the lower end.
1..., and the U-shaped hardware is fitted onto the protrusion 1212 of the hollow frame member 121 of the ceiling filter mounting grid 12, and connected with screws 262.... Further, as shown in FIG. 2, the outer circumferential surface of the ceiling filter mounting grid 12, that is, the outer surface of the corner member 122, is adjacent to the circumferential wall of the frame 1, and a silicon seal 127 is placed between this outer surface and the circumferential wall. , 128.

A ceiling filter is fitted into each grid in the ceiling filter mounting grid 12, and the peripheral edge of each ceiling filter is connected to the hollow frame member 121 and the corner member 122.
The main parts 1211 and 1221 of the main parts 1211 and 1221 are placed on the upper surfaces of the main parts 1211 and 1221, and supported airtightly. At this time, in particular, the connection between the hollow frame material 121 and the ceiling filter 13 is performed at the upper layer a of the main portion 1211 of the hollow frame material. The peripheral part of each ceiling filter, the hollow frame material 121 and the main part 1 of the corner member 122
211 and 1221, various conventionally used means may be used. For example, silicone seals or other synthetic resin sealing materials, liquid sealing means, etc. may be interposed between each ceiling, and Attach the peripheral edge of the filter to the hanging bolt 26...
...or supported by appropriate supporting hardware etc. attached to the protrusions 1212, 1222.

As shown in FIGS. 4 and 6, the ventilated floor is provided with joists 15 assembled in a lattice shape with modules the same as or an integral multiple of the ceiling filter mounting lattice 12, and the joists are connected to height adjustment adjusters 20. A support member 1 for supporting a partition wall is placed between the adjacent flooring materials 16 and 16 at the center of the upper surface of the joist, and the retentive chamber is maintained and supported on the slab by a stand 19 with an attached stand 19.
8 are arranged and fixed in parallel, and ventilating flooring materials 16 such as gratings and punched metal are fitted into each lattice formed by the receiving materials and the joists, and the peripheral edges of these flooring materials are supported by the joists. Note that the joists 15 and the receiving material 18 may be formed integrally.

As shown above, if the ceiling filter mounting grid 12, the receiving material 18, and the joist 15 are set to the same module or integral multiple modules, the ceiling filter mounting grid 12
Any hollow frame material 121 and the corresponding receiving material 1
8 can be appropriately selected and a partition wall 21... can be built between the hollow frame material and the receiving material, and in this construction, as shown in FIG. is engaged with the receiving material, its upper end is brought into contact with the lower surface of the hollow frame material, and is fixed to the lower layer b of the main portion of the hollow frame material with screws 27.

Further, by appropriately selecting an arbitrary hollow frame material 121 to the ceiling filter mounting grid 12, lighting fixtures 28... and other fixtures can be freely attached as shown in FIG. For installation, the upper surface of the lighting fixture 28, etc. is fixed to the lower layer b of the main part of the hollow frame member with screws 27. Wiring for lighting equipment, etc. is inserted into the lower layer b of the main part of the hollow frame material.

Furthermore, it is also possible to attach punching faces for adjusting the wind speed to each grid of the ceiling filter mounting grid 12 directly below the ceiling filter 13. In that case, as shown in FIG. A groove-shaped support frame 29 is airtightly fixed to the side surface of the lower part b of the main part 1211, and an engaging edge 301 is provided on the periphery of the punching face 30.
The engaging edge is engaged with the support frame 29.

"Effect of the invention" According to the invention, inside the main part 1211 having a square cross section, at least the upper layer a is not affected by the protrusions 1212 and is airtightly isolated from other layer parts and the outside air, forming vertical layers. Because it is formed into a multi-layer structure,
Using this hollow frame material, it is possible to assemble a grid for installing a ceiling filter and build it into the ceiling, but at that time,
At each connection part, by simply taking airtight measures in the upper layer a of the main part, the airtightness of the entire ceiling filter mounting grid can be easily ensured, and the airtightness can be obtained throughout the upper layer a. Therefore, it can be made reliable, and appropriate sealing means such as a sealing material such as synthetic resin or a liquid sealing means is provided on this upper layer a, and the hanging bolts and protrusions 12
The ceiling filter can be easily and airtightly installed by attaching supporting hardware etc. to 12, and since airtightness can be ensured only in the upper layer a, the lower layer b can be used for partition walls, lighting fixtures, etc. It is extremely easy to install and insert electrical wiring, etc., while always maintaining airtightness without requiring any consideration for airtightness such as screwing in screws or drilling holes. Therefore, the arrangement of partition walls and lighting fixtures can be easily changed, and even large-scale changes to the interior of the room can be made without any problems, thereby achieving the desired purpose.

[Brief explanation of the drawing]

Figures 1 to 7 show embodiments of the present invention.
The figure is a sectional view of the hollow frame material, FIG. 2 is a sectional view of the corner member, and FIG. 3 is a sectional view showing the connection of the hollow frame material.
Figure 4 is an explanatory diagram showing the ceiling and floor modules;
Figure 5 is an enlarged elevational view of a part of the ceiling, and Figure 6 is
FIG. 7 is a cross-sectional view of the main parts showing how the partition wall and punching face are installed, FIG. 7 is a cutaway perspective view of the main parts showing how the lighting equipment is installed, and FIG. 8 is a cross-sectional view of the main components of a conventional example. 12... Ceiling filter mounting grid, 13... Ceiling filter, 15... Joist, 16... Ventilated flooring, 18... Receiving material, 19... Stand, 20...
Adjuster, 21... Partition wall, 26... Hanging bolt, 27... Screw, 28... Lighting equipment, 30...
...Punching face, 121...Hollow frame material, 1
22...Corner member.

Claims (1)

[Scope of utility model registration request] In a hollow frame material in which a protrusion 1212 for attachment is integrally attached to the upper surface of a hollow frame main part 1211 with a square cross section, at least the upper layer a has the above protrusion 1212 inside the main part 1211 with a square cross section. A hollow frame material characterized in that it is formed into a multi-layered structure with upper and lower layers that are airtightly isolated from other layers and the outside air without being affected by the air.