JPH0233550A - Clean room - Google Patents

Abstract

PURPOSE:To make it possible to be able to adapt to any change in the main method of supplying fresh air by providing in the upper section in the wall on the side of the outer frame a supply air filtering ceiling which supports on lattice shaped frames HEPA filters or supply air shutting panels, both being freely replaceable mutually. CONSTITUTION:A supply air filtering ceiling 40 consists of a plurality of HEPA filters 41 with the same dimension as the lattice section or supply air shutting panels 42 of the same shape. It is, therefore, possible to change either to total surface vertical flow straightening type or to total surface vertical no-flow- straightening type by changing the number and position of arrangement of the filters 41 or panels 42. Further, when a lower stage lattice shaped frame 43' is installed below the frame 43, the type can be changed to a clean tunnel type. Furthermore, partition walls 47, 47 on the outside and partition walls 48, 48 on the inside are mounted on the lower surface of the frame 43, the type can be changed to a clean tube type. Accordingly with this arrangement it is possible to be adapted to any change in the main method of supplying fresh air.

Description

[Detailed description of the invention] (Industrial application field) The present invention relates to clean rooms.

(Conventional technology) Conventionally, clean rooms were installed in sets according to the required specifications for each location.

It is generally popular to have a HEPA filter installed on the ceiling.

(Problem to be solved by the invention) Conventional clean rooms are designed and manufactured according to specifications, so it is difficult to change the position of the HEPA filter during installation due to changes in the clean air supply procedure. Since the ceiling may need to be replaced, there is a problem in that it is not easy to adapt to changes in the clean air supply procedure.

The present invention has been made in view of the problems of the prior art, and its purpose is to provide a clean room that can easily accommodate changes in the clean air supply procedure after installation. It is something to do.

(Means for Solving the Problems) In order to achieve the above-mentioned object, the clean room according to the present invention is provided with an exhaust port in the lower part and an air supply port in the upper part of a corresponding pair of side walls, A door is attached to only one side wall of the other corresponding pair of side walls, and a ceiling is provided at the upper edge opening of the outer side wall constructed by connecting these side walls with a connector, and a ceiling is provided in the upper edge opening of the outer side wall. An access floor is provided at the bottom of the access floor, and an underfloor chamber communicating with the exhaust port is formed below the access floor, and at the upper part of the outer side wall, a lattice-like frame with only a HEPA filter or a supply air cut-off panel is installed. A clean room main body is provided with an air supply filtration ceiling supported by a ceiling chamber, and a ceiling chamber communicating with the air inlet is formed above the ceiling. An air conditioner that takes in air from inside the chamber and blows conditioned air into the ceiling chamber is closely fixed.

(Function) Since the clean room according to the present invention is configured as described above, in order to change the supply method of clean air, it is necessary to change the number of HEPA filters or supply air cutoff panels supported by the lattice frame. By changing the arrangement position, the method of supplying clean air can be changed.

(Example) Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

In the figure, X, X, , X, and X3 are clean rooms according to the present invention with different clean air supply methods, where X is a vertical rectification system on the entire surface, XI is a non-rectification system, and Xt is clean tunnel method, X3
This is a clean tube method.

In the figure, the same components and equivalent components of each component of clean room X in each of clean rooms X, , The same reference numerals are used to omit the explanation.

First, a unit-type clean room with vertical rectification system
Explain.

As shown in FIGS. 1 to 5, the clean room X consists of an outer wall 10, a ceiling 20, an access floor 30, an air supply filtering ceiling 40, and an air conditioner 50.

By the way, the above-mentioned outer side wall 10 is made up of a plurality of side wall forming wall panels 111. ...and the wall panel 11
It has the same shape as ゜, with an exhaust port 13 at the bottom and an air supply port 1 at the top.
Wall panel 1 with a plurality of openings each provided with 4
1□, ... and the wall panel 11. isomorphic,
Wall panel 11 with a door with a part cut out and a door 15 attached. In particular, the left side wall 121 has a plurality of wall panels 111.・・・・・・Wall panel with door 11. In addition, the right side wall 12□ is made up of multiple wall panels 111. ...
...Only the front wall 12. and the rear wall 124 are made of only a plurality of wall panels 11□, . . . with openings, or the wall panels 111. . . . and connect each adjacent panel to each other using connectors not shown in the drawings. When installed in a factory, the left side wall 123. Right side wall 12□.

Front wall 123. Each lower end portion of the rear wall 124 is fixed in a groove of a not-shown foliage having a U-shaped cross section, which is attached to the floor 34 of the factory building.

The ceiling 20 includes a plurality of ceiling forming ceiling panels 21,
. . . are supported by a support member (not shown) attached to the upper edge opening of the outer side wall 10.

The access floor 30 includes a plurality of access floor forming modules 31. At the lower part of the outer side wall 10, as shown in FIGS. 3 and 4, there are pillars 32° erected at intervals on the floor 34 of the factory building.
...Module support board 3 integrally formed at the upper end
3. The underfloor chamber 35 is formed between the access floor 30 and the floor 34 of the factory building, and the front end of the underfloor chamber 35 is and the rear end portion of the front wall 12. and the exhaust port 13 on the rear wall 124. It is necessary to communicate with...

The supply air filtration ceiling 40 includes a lattice-shaped frame 43 attached to the upper part of the outer side wall 10, and a plurality of lattice-shaped frames 43 having the same size as the lattice part dimension AXA (see FIG. 5) of the lattice-shaped frame 43. HEPA filter 41,...
- Chisel or same-shaped air supply cutoff panel 42°...
A ceiling chamber 44 is formed between the supply air filtration ceiling 40 and the ceiling 20, and the front end and rear end of this ceiling chamber 44 are connected to the front wall 12. ．． and the air supply port 13° on the rear wall 124...
・It is necessary to communicate with

Finally, the air conditioner 50 has a size corresponding to the size of two side-by-side wall panels 11□ with openings, and has an air intake at the bottom connected to the exhaust port 13. 53, a circulation blower 60 and a temperature/humidity control device 70 are installed in an air conditioner configuration outer body 51 having a back plate 52 provided with an air outlet 54 connected to the air outlet 14 at the upper part. A control panel 80 for controlling these is installed on the front wall 12. Wall panels 11□ with openings forming the rear wall 124 and the rear wall 124.
It is made by closely fixing it to ....

An air supply road 55 connecting the air outlet of the circulation blower 60 and the air outlet 54 is provided in the upper part of the outer shell 51.
At the bottom, air passages 56 are formed along the back plate 52 to connect the air intake 53 and the inlet of the circulation blower 60, and the temperature and humidity control device 70 is connected to the return air passage 56.
It is located inside.

An air conditioner 50. The clean room X according to the present invention is constructed by tightly fixing the...

Note that the ceiling chamber 44 is formed of the ceiling 20, the air supply filtering ceiling 40, and four low-height side walls instead of the one shown in the figure, and the front and rear walls each have an air supply port 14. This may be connected to an opening at the upper edge of the outer side wall where the air supply port 14 is not provided.

As shown in FIG. 6, the non-rectified clean room XI has a HEPA filter 41. . . . Part of the air supply cutoff panel 42.・
It is obtained by replacing with...

As shown in FIGS. 7 and 8, the above clean tunnel type clean room Lattice frame 4
3, the front wall 12 of the lattice frame 43. and parallel to the rear wall 124 and locally in the second and fifth rows counting from the front wall 12°, HEPA filters 41. ...
... and these HEPA filters 41. On the lower surface of the lattice part supporting . ...... are attached to the first, third, fourth, and sixth rows of the lower lattice frame 43', and HEPA filters 41゜... are installed in the second row. In the fifth row, air supply cutoff panels 42. ..., respectively, and a partition wall 46 is attached to the lower surface between the third and fourth rows of the lower lattice frame 43' to form a clean tunnel zone 23.23. It is.

Clean room X using the clean tube method mentioned above.

As shown in FIG. 9, HEPA filters 41 are installed in the second, third, and fifth columns of the lattice frame 43.
. . . In the fourth row, there is an air supply cutoff panel 42. ...
..., respectively, and outer partition walls 47° and 47
and an inner windowed partition wall 48.48 having a window 49, and the front wall 12. and first and sixth rows of HEPA filters 41. positioned below the lattice frame 43 between the rear wall 124 and the outer partition wall 47.47.・・・・Production zone 24゜2
4, a conveyance zone 25, 25, and a work space zone 26.

Hereinafter, the operation of the clean room X of the full vertical rectification type according to the present invention will be mainly explained.

Air conditioner50. Upon activation, the air within the clean zone 22 flows through the access floor 30, the underfloor chamber 35, and the wall panels 11 with openings forming the front wall 12s and the rear wall 124. Exhaust port 13. Yu...
・Air conditioner 50. Air intake port 53 of...
and the air outlet 54, the wall panel 11□,...
Air supply port 14 provided in... . . . and the HEPA filter 41 of the ceiling chamber 44 and the supply air filtration ceiling 40. After passing through... into Lean Zone 22,
That is, the air in the clean zone 22 is circulated as shown by white arrows a, b, and c in FIG. It is conditioned by humidity.

Next, in order to change the supply method of clean air, first, the HEPA filter 41 supported by the grid frame 43 in the clean room X. . . . Part of the air supply cutoff panel 42. When replaced by . . . , the full vertical rectification method is changed to a non-rectification method.

On the other hand, clean room X uses a non-rectifying method.

Air supply cutoff panel 42. All of...... are HEPA filter 41. . . . , the non-rectifying method is changed to the full-scale vertical rectifying method.

Further, a lower lattice frame 43' having the same shape as the lattice frame 43 is installed below the lattice frame 43 in the clean room
A square tubular hanging wall 45° is attached to the lower surface of the lattice part, and a partition wall 46 is attached to the lower surface of the lower lattice frame 43', as shown in FIGS. 7 and 8. , HE
PA filter 41. ...and the air supply cutoff panel 42. By supporting . 47 and inner partition walls 48 and 48 with windows are attached, and the HEPA filter 41.48 is installed as shown in FIG.・
By supporting . . . and the air supply cut-off panel 42, .

(Effects of the Invention) Since the present invention is configured as described above, by replacing the HEPA filter with the air supply cutoff panel without removing the lattice frame, the clean air supply method can be changed to the full vertical rectification system. It is possible to change between the non-rectified flow method and the clean tunnel method or clean tube method by adding a lower lattice frame, hanging walls, partition walls, etc. This has the excellent effect of being able to easily respond to subsequent changes in the clean air supply procedure.

[Brief explanation of the drawing]

The drawings show an embodiment of the present invention, in which Fig. 1 is a perspective view with a part of the air conditioner removed, and Fig. 2 is a full-scale vertical rectification system along the line ■-■ in Fig. 1. Vertical side view of the clean room, Figures 3 and 4 are access floors.
A plan view and a side view showing the support method of 1. Figure 5 is a perspective view of the lattice frame, Figure 6 is a vertical side view of a non-rectified clean room, Figure 7 is a vertical side view of a clean tunnel type clean room, and Figure 8 is ■-■ in Figure 7.
Figure 9 is a cross-sectional plan view of the main parts along the line, and Figure 9 is a vertical cross-sectional side view of a clean tube type clean room. Constituent parts equivalent to the constituent parts are given the same reference numerals as the respective constituent parts of X. X: tX. 10: 13: 15: 30: 40: 41: 42: 44: Full-scale vertical rectification clean room; Non-rectification clean room: Clean tunnel clean room: Clean tube clean room Outer side wall: Left side wall: Front wall exhaust port Door access floor - air supply filtration ceiling HEPA filter air supply cutoff panel ceiling chamber 43: lattice frame 50: air conditioner 12□: right side wall 124z rear wall 14: air supply port 20: ceiling 35: underfloor chamber

Claims (1)

[Claims] A corresponding pair of side walls is provided with an exhaust port at the bottom and an air supply port at the top, and a door is attached to only one side wall of the other corresponding set of side walls to connect these side walls. A ceiling is provided at the upper edge opening of the outer side wall connected by a fitting, an access floor is provided at the lower part of the outer side wall, and an underfloor chamber communicating with the exhaust port is formed below the access floor; An air supply filtration ceiling is provided in the upper part of the outer side wall, and the ceiling is made up of a lattice-like frame supporting only a HEPA filter or an air supply cutoff panel, and above the ceiling is a ceiling chamber that communicates with the air supply port. An air conditioner that takes in air from the underfloor chamber and blows conditioned air into the ceiling chamber is closely fixed to a side wall of the formed clean room main body where the exhaust port and the air supply port are provided. A clean room characterized by: