JPH0346957U - - Google Patents

Info

Publication number
JPH0346957U
JPH0346957U JP10783689U JP10783689U JPH0346957U JP H0346957 U JPH0346957 U JP H0346957U JP 10783689 U JP10783689 U JP 10783689U JP 10783689 U JP10783689 U JP 10783689U JP H0346957 U JPH0346957 U JP H0346957U
Authority
JP
Japan
Prior art keywords
connector
airtight
sample
socket
mounting section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10783689U
Other languages
English (en)
Other versions
JPH0747790Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989107836U priority Critical patent/JPH0747790Y2/ja
Publication of JPH0346957U publication Critical patent/JPH0346957U/ja
Application granted granted Critical
Publication of JPH0747790Y2 publication Critical patent/JPH0747790Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図は本考案実施例の要部断面説明図、第２
図は本考案実施例の試料搭載部の断面説明図、第
３図は従来の試料搭載部の要部断面説明図、第４
図は従来の試料搭載部の断面説明図、第５図はコ
ンタクトプローブの構成を示す断面図。 図において、１……気密コネクタ、２……気密
端子ピン、３……同軸ケーブル、４……ソケツト
コネクタ、５……ピンコネクタ、７……コンタク
トプローブ、１５……試料、１９……ケース、２
０……熱伝導気密フランジ、２２……加熱冷却器
、２８……電子ビームテスタ、３４……ＬＳＩテ
スタヘツド。

Claims (1)

  1. 【実用新案登録請求の範囲】 電子ビームテスタの真空室に試料を設置し、外
    部のＬＳＩテスタから試験信号を気密コネクタを
    介して試料に伝送する配線を有する試料搭載部に
    おいて、 該気密コネクタ１を貫通して植設された気密端
    子ピン２の両端をピン形状とし、該気密端子ピン
    ２の一方を、ソケツトコネクタを有する同軸ケー
    ブル３と嵌合接続し、 該気密端子ピンの他方を、ソケツトコネクタを
    有するコンタクトプローブ７と嵌合接続せしめた
    事を特徴とする電子ビームテスタの試料搭載部。
JP1989107836U 1989-09-14 1989-09-14 電子ビームテスタ Expired - Lifetime JPH0747790Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989107836U JPH0747790Y2 (ja) 1989-09-14 1989-09-14 電子ビームテスタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989107836U JPH0747790Y2 (ja) 1989-09-14 1989-09-14 電子ビームテスタ

Publications (2)

Publication Number Publication Date
JPH0346957U true JPH0346957U (ja) 1991-04-30
JPH0747790Y2 JPH0747790Y2 (ja) 1995-11-01

Family

ID=31656506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989107836U Expired - Lifetime JPH0747790Y2 (ja) 1989-09-14 1989-09-14 電子ビームテスタ

Country Status (1)

Country Link
JP (1) JPH0747790Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008059759A (ja) * 2006-08-29 2008-03-13 Horiba Ltd 真空装置及び真空装置に用いられる高電圧印加ユニット

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63152565U (ja) * 1987-03-25 1988-10-06
JPH0192136U (ja) * 1987-12-10 1989-06-16

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63152565U (ja) * 1987-03-25 1988-10-06
JPH0192136U (ja) * 1987-12-10 1989-06-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008059759A (ja) * 2006-08-29 2008-03-13 Horiba Ltd 真空装置及び真空装置に用いられる高電圧印加ユニット

Also Published As

Publication number Publication date
JPH0747790Y2 (ja) 1995-11-01

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