JPH0346943B2 - - Google Patents
Info
- Publication number
- JPH0346943B2 JPH0346943B2 JP57227413A JP22741382A JPH0346943B2 JP H0346943 B2 JPH0346943 B2 JP H0346943B2 JP 57227413 A JP57227413 A JP 57227413A JP 22741382 A JP22741382 A JP 22741382A JP H0346943 B2 JPH0346943 B2 JP H0346943B2
- Authority
- JP
- Japan
- Prior art keywords
- anode
- cathode
- potential
- ions
- hollow part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000000149 penetrating effect Effects 0.000 claims 2
- 150000002500 ions Chemical class 0.000 description 43
- 238000010884 ion-beam technique Methods 0.000 description 11
- 238000005315 distribution function Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000005658 nuclear physics Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002336 sorption--desorption measurement Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/08—Ion sources; Ion guns using arc discharge
- H01J27/14—Other arc discharge ion sources using an applied magnetic field
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57227413A JPS59121735A (ja) | 1982-12-28 | 1982-12-28 | イオン発生装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57227413A JPS59121735A (ja) | 1982-12-28 | 1982-12-28 | イオン発生装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59121735A JPS59121735A (ja) | 1984-07-13 |
| JPH0346943B2 true JPH0346943B2 (forum.php) | 1991-07-17 |
Family
ID=16860447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57227413A Granted JPS59121735A (ja) | 1982-12-28 | 1982-12-28 | イオン発生装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59121735A (forum.php) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4868330B2 (ja) | 2004-10-08 | 2012-02-01 | 独立行政法人科学技術振興機構 | 多価イオン発生源およびこの発生源を用いた荷電粒子ビーム装置 |
-
1982
- 1982-12-28 JP JP57227413A patent/JPS59121735A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59121735A (ja) | 1984-07-13 |
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