JPH0345761B2 - - Google Patents

Info

Publication number
JPH0345761B2
JPH0345761B2 JP59083709A JP8370984A JPH0345761B2 JP H0345761 B2 JPH0345761 B2 JP H0345761B2 JP 59083709 A JP59083709 A JP 59083709A JP 8370984 A JP8370984 A JP 8370984A JP H0345761 B2 JPH0345761 B2 JP H0345761B2
Authority
JP
Japan
Prior art keywords
measured
optical path
displacement
path length
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59083709A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60228903A (ja
Inventor
Sadao Mori
Toshio Akatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59083709A priority Critical patent/JPS60228903A/ja
Publication of JPS60228903A publication Critical patent/JPS60228903A/ja
Publication of JPH0345761B2 publication Critical patent/JPH0345761B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/0201—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal phase variation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP59083709A 1984-04-27 1984-04-27 変位の光学的測定方法 Granted JPS60228903A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59083709A JPS60228903A (ja) 1984-04-27 1984-04-27 変位の光学的測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59083709A JPS60228903A (ja) 1984-04-27 1984-04-27 変位の光学的測定方法

Publications (2)

Publication Number Publication Date
JPS60228903A JPS60228903A (ja) 1985-11-14
JPH0345761B2 true JPH0345761B2 (enrdf_load_stackoverflow) 1991-07-12

Family

ID=13810022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59083709A Granted JPS60228903A (ja) 1984-04-27 1984-04-27 変位の光学的測定方法

Country Status (1)

Country Link
JP (1) JPS60228903A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008123104A1 (ja) * 2007-03-27 2008-10-16 Nec Corporation 微小変位測定装置及び微小変位測定方法，微小変位測定用プログラム

Also Published As

Publication number Publication date
JPS60228903A (ja) 1985-11-14

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