JPH0343204B2 - - Google Patents

Info

Publication number
JPH0343204B2
JPH0343204B2 JP10790983A JP10790983A JPH0343204B2 JP H0343204 B2 JPH0343204 B2 JP H0343204B2 JP 10790983 A JP10790983 A JP 10790983A JP 10790983 A JP10790983 A JP 10790983A JP H0343204 B2 JPH0343204 B2 JP H0343204B2
Authority
JP
Japan
Prior art keywords
stage
silicon
reactor
metal particles
cycle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10790983A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59232910A (ja
Inventor
Masayoshi Ito
Hiroji Myagawa
Toshihiro Abe
Kenji Iwata
Toshuki Tsukahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP10790983A priority Critical patent/JPS59232910A/ja
Publication of JPS59232910A publication Critical patent/JPS59232910A/ja
Publication of JPH0343204B2 publication Critical patent/JPH0343204B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP10790983A 1983-06-17 1983-06-17 高級塩素化ケイ素の製造方法 Granted JPS59232910A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10790983A JPS59232910A (ja) 1983-06-17 1983-06-17 高級塩素化ケイ素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10790983A JPS59232910A (ja) 1983-06-17 1983-06-17 高級塩素化ケイ素の製造方法

Publications (2)

Publication Number Publication Date
JPS59232910A JPS59232910A (ja) 1984-12-27
JPH0343204B2 true JPH0343204B2 (show.php) 1991-07-01

Family

ID=14471126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10790983A Granted JPS59232910A (ja) 1983-06-17 1983-06-17 高級塩素化ケイ素の製造方法

Country Status (1)

Country Link
JP (1) JPS59232910A (show.php)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4841083A (en) * 1987-06-03 1989-06-20 Mitsui Toatsu Chemicals, Incorporated Ladder polysilanes
DE102009027241A1 (de) 2009-06-26 2010-12-30 Wacker Chemie Ag Verfahren zur Herstellung von Oligohalogensilanen

Also Published As

Publication number Publication date
JPS59232910A (ja) 1984-12-27

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