JPH0342678Y2 - - Google Patents
Info
- Publication number
- JPH0342678Y2 JPH0342678Y2 JP804186U JP804186U JPH0342678Y2 JP H0342678 Y2 JPH0342678 Y2 JP H0342678Y2 JP 804186 U JP804186 U JP 804186U JP 804186 U JP804186 U JP 804186U JP H0342678 Y2 JPH0342678 Y2 JP H0342678Y2
- Authority
- JP
- Japan
- Prior art keywords
- steam
- pipe
- pure water
- heating tank
- inert gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 39
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 36
- 235000012431 wafers Nutrition 0.000 claims description 34
- 238000006243 chemical reaction Methods 0.000 claims description 30
- 239000004065 semiconductor Substances 0.000 claims description 24
- 239000007789 gas Substances 0.000 claims description 22
- 239000011261 inert gas Substances 0.000 claims description 14
- 239000012159 carrier gas Substances 0.000 claims description 11
- 230000003647 oxidation Effects 0.000 claims description 10
- 238000007254 oxidation reaction Methods 0.000 claims description 10
- 230000001590 oxidative effect Effects 0.000 claims description 7
- 238000010926 purge Methods 0.000 claims description 6
- 238000011109 contamination Methods 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP804186U JPH0342678Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-01-23 | 1986-01-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP804186U JPH0342678Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-01-23 | 1986-01-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62120347U JPS62120347U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-07-30 |
| JPH0342678Y2 true JPH0342678Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-09-06 |
Family
ID=30792056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP804186U Expired JPH0342678Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-01-23 | 1986-01-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0342678Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2574766B2 (ja) * | 1986-07-15 | 1997-01-22 | ロ−ム株式会社 | 半導体製造装置 |
-
1986
- 1986-01-23 JP JP804186U patent/JPH0342678Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62120347U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-07-30 |