JPH0342676Y2 - - Google Patents
Info
- Publication number
- JPH0342676Y2 JPH0342676Y2 JP3243987U JP3243987U JPH0342676Y2 JP H0342676 Y2 JPH0342676 Y2 JP H0342676Y2 JP 3243987 U JP3243987 U JP 3243987U JP 3243987 U JP3243987 U JP 3243987U JP H0342676 Y2 JPH0342676 Y2 JP H0342676Y2
- Authority
- JP
- Japan
- Prior art keywords
- resist
- cap
- groove
- pipe
- bin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011248 coating agent Substances 0.000 claims description 12
- 238000000576 coating method Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Closures For Containers (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3243987U JPH0342676Y2 (US07655688-20100202-C00010.png) | 1987-03-05 | 1987-03-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3243987U JPH0342676Y2 (US07655688-20100202-C00010.png) | 1987-03-05 | 1987-03-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63140623U JPS63140623U (US07655688-20100202-C00010.png) | 1988-09-16 |
| JPH0342676Y2 true JPH0342676Y2 (US07655688-20100202-C00010.png) | 1991-09-06 |
Family
ID=30839119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3243987U Expired JPH0342676Y2 (US07655688-20100202-C00010.png) | 1987-03-05 | 1987-03-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0342676Y2 (US07655688-20100202-C00010.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6192595B2 (ja) * | 2014-06-02 | 2017-09-06 | 東京エレクトロン株式会社 | 半導体製造用処理液配管継手 |
-
1987
- 1987-03-05 JP JP3243987U patent/JPH0342676Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63140623U (US07655688-20100202-C00010.png) | 1988-09-16 |
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