JPH0341547B2 - - Google Patents

Info

Publication number
JPH0341547B2
JPH0341547B2 JP63301147A JP30114788A JPH0341547B2 JP H0341547 B2 JPH0341547 B2 JP H0341547B2 JP 63301147 A JP63301147 A JP 63301147A JP 30114788 A JP30114788 A JP 30114788A JP H0341547 B2 JPH0341547 B2 JP H0341547B2
Authority
JP
Japan
Prior art keywords
target
plate
sputtering
round bar
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63301147A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02159373A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP30114788A priority Critical patent/JPH02159373A/ja
Publication of JPH02159373A publication Critical patent/JPH02159373A/ja
Publication of JPH0341547B2 publication Critical patent/JPH0341547B2/ja
Granted legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
JP30114788A 1988-11-30 1988-11-30 多棒式マグネットロンスパッタリング装置 Granted JPH02159373A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30114788A JPH02159373A (ja) 1988-11-30 1988-11-30 多棒式マグネットロンスパッタリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30114788A JPH02159373A (ja) 1988-11-30 1988-11-30 多棒式マグネットロンスパッタリング装置

Publications (2)

Publication Number Publication Date
JPH02159373A JPH02159373A (ja) 1990-06-19
JPH0341547B2 true JPH0341547B2 (member.php) 1991-06-24

Family

ID=17893351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30114788A Granted JPH02159373A (ja) 1988-11-30 1988-11-30 多棒式マグネットロンスパッタリング装置

Country Status (1)

Country Link
JP (1) JPH02159373A (member.php)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61206672U (member.php) * 1985-06-12 1986-12-27

Also Published As

Publication number Publication date
JPH02159373A (ja) 1990-06-19

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