JPH0339833A - Noxious gas removing device for air purifying conditioning room - Google Patents
Noxious gas removing device for air purifying conditioning roomInfo
- Publication number
- JPH0339833A JPH0339833A JP1175272A JP17527289A JPH0339833A JP H0339833 A JPH0339833 A JP H0339833A JP 1175272 A JP1175272 A JP 1175272A JP 17527289 A JP17527289 A JP 17527289A JP H0339833 A JPH0339833 A JP H0339833A
- Authority
- JP
- Japan
- Prior art keywords
- harmful gas
- damper
- air
- conditioned room
- noxious gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002341 toxic gas Substances 0.000 title abstract description 10
- 230000003750 conditioning effect Effects 0.000 title 1
- 239000007789 gas Substances 0.000 claims abstract description 96
- 230000001143 conditioned effect Effects 0.000 claims description 9
- 238000004378 air conditioning Methods 0.000 abstract description 6
- 239000000428 dust Substances 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野）
本発明は清浄空調室の有害ガス除去装置に係り、特に外
気に含有する有害ガスを除去した外気を室内に供給する
清浄空調室の有害ガス除去装置に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a device for removing harmful gases from a clean air-conditioned room, and particularly relates to a device for removing harmful gases from a clean air-conditioned room that supplies outside air from which harmful gases contained in the outside air have been removed indoors. Relating to a removal device.
従来から、電子部品製造、文化財保存時は無塵環境を必
要とする為、通常清浄空ｗＩｌ室で行われる。Traditionally, electronic component manufacturing and cultural property preservation require a dust-free environment, so they are usually carried out in clean rooms.
一般に、清浄空調室は天井面に取付けられたファンとＨ
ＥＰＡフィルタから戊るフィルタユニットにエアーを通
過させて清浄エアーを室内に吹き出し、その室内のエア
ーを通気構造を有する床面グレーチングから吸い込んで
再び天井面のフィルタユニットに通過させるエアー循環
方式が採用され、清浄エアーが室内に於いてダウン７０
−（層流）される。Generally, clean air-conditioned rooms are equipped with ceiling-mounted fans and H
An air circulation system is adopted in which air is passed through a filter unit that is hollowed out from the EPA filter and blown out into the room, and the air inside the room is sucked through a floor grating with a ventilation structure and passed through the filter unit on the ceiling again. , clean air is down 70% indoors.
- (laminar flow).
ところで、外気を導入する清浄空調室ではｍ粒子除去フ
ィルタ、送風機等から戊る空調装置を設け、この微粒子
除去フィルタで除塵された外気を送風機によって清浄空
調室の室内に供給している。By the way, in a clean air-conditioned room where outside air is introduced, an air conditioner is installed that includes a particle removal filter, a blower, etc., and the outside air from which dust has been removed by the particulate removal filter is supplied into the clean air-conditioned room by the blower.
しかしながら、前記清浄空調室の近傍に化学工場や道路
が立設されている環境では、外気中にＳＯＸ、ＮＯＸ等
の有害ガスが高濃度で含有する。However, in an environment where a chemical factory or a road is located near the clean air-conditioned room, the outside air contains high concentrations of harmful gases such as SOX and NOX.
前記有害ガスが一定量を超えて外気に含有していると、
前記清浄空調室では有害ガスを除去することができず、
半導体製造等では製品の歩留り低下を発生させていたり
、文化財では美術品に損傷を与えていた。If the above harmful gas is contained in the outside air in excess of a certain amount,
The clean air-conditioned room cannot remove harmful gases,
In semiconductor manufacturing, etc., it caused product yields to drop, and in cultural properties, it caused damage to artwork.
そこで、前述した環境下に設置される清浄空調室は、第
４図に示すように有害ガス除去部１２、空調装置１４等
を有している。有害ガス除去部１２はその内部に活性炭
等が充填され、一端が清浄空調室外に設けられた外気取
入口２８に連通されている。また、有害ガス除去部１２
の他端は、微粒子除去フィルタ３０．Ｈ温、調湿機３２
及び送風機３４から成る空調装置１４に連通されている
。Therefore, the clean air-conditioned room installed in the above-mentioned environment has a harmful gas removal section 12, an air conditioner 14, etc., as shown in FIG. The inside of the harmful gas removal section 12 is filled with activated carbon or the like, and one end thereof is communicated with an outside air intake port 28 provided outside the clean air-conditioned room. In addition, the harmful gas removal section 12
The other end is a particulate removal filter 30. H temperature, humidity controller 32
and an air conditioner 14 consisting of a blower 34.
前記空調装！！ｔ１４は、清浄空調室１６内に設けられ
たエアー吹出口３６に連通されている。Said air conditioner! ! t14 communicates with an air outlet 36 provided in the clean air-conditioned room 16.
従って、有害ガスを含有する外気は、送風機３４によっ
て外気取入口２８から吸引され、有害ガス除去部１２を
通過することによって有害ガスが除去される。有害ガス
が除去された外気は、空調装［１４で除塵、空調された
後、送風機３４によってエアー吹出口３６から清浄空調
室１６内に向けて吹き出される。Therefore, the outside air containing harmful gases is sucked through the outside air intake port 28 by the blower 34, and the harmful gases are removed by passing through the harmful gas removal section 12. The outside air from which harmful gases have been removed is dust-removed and air-conditioned by the air conditioner [14], and then blown out from the air outlet 36 into the clean air-conditioned room 16 by the blower 34.
しかしながら、従来の清浄空調室の有害ガス除去装置で
は、外気の有害ガス濃度が清浄空調室内を汚染しない低
い場合でも、外気を有害ガス除去部に通過させるので、
有害ガス除去部の寿命が短くなるという欠点がある。However, in conventional harmful gas removal devices for clean air-conditioned rooms, even when the concentration of harmful gases in the outside air is low enough to not contaminate the inside of the clean air-conditioned room, the outside air is passed through the harmful gas removal unit.
This has the disadvantage that the life of the harmful gas removal section is shortened.
また、全ての空気が有害ガス除去部を通過するので負荷
が高くなり、送風機の出力を高くしなければならないと
いう問題がある。Further, since all the air passes through the harmful gas removal section, the load becomes high, and there is a problem that the output of the blower must be increased.
本発明はこのような事情に鑑みてなされたもので、有害
ガス除去部の寿命を長くすることができる清浄空調室の
有害ガス除去装置を提供することを目的とする。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a harmful gas removal device for a clean air-conditioned room that can extend the life of the harmful gas removal section.
本発明は、前記目的を達成する為に、清浄空調室の外部
から送風機で吸引された外気をクリ清浄空調室内に供給
する際に、有害ガス除去部に通過させて外気に含有する
有害ガスを除去するり清浄空調室外ａ害ガス除去装置に
於いて、前記有害ガス除去部（工２）の入口側に設けら
れ、有害ガスの人口を開閉する第一のダンパ（２２）と
、−ｉが有害ガス除去部（１２）の入口側に連通され、
他端が有害ガス除去部（１２）の出口側に連通され、前
記有害ガス除去部（１２）のバイパス通路を形成してバ
イパス開路を開閉する第二のダンパ（２４）と、外気中
の有害ガス濃度が基準渣より高い時に第一のダンパ（２
２）を開口し、基準慣より低い時に第二のダンパ（２４
）を開口してバ・イバス開路を開口する制御手段（１０
）と、から成ることを特徴とする。In order to achieve the above object, the present invention, when supplying outside air sucked in by a blower from outside the clean air conditioned room into the clean air conditioned room, passes it through a harmful gas removal section to remove the harmful gases contained in the outside air. In the harmful gas removal device outside the air-conditioned room, there is a first damper (22) that is installed on the inlet side of the harmful gas removal section (work 2) and that opens and closes the population of harmful gas; communicated with the inlet side of the harmful gas removal section (12),
A second damper (24) whose other end communicates with the outlet side of the harmful gas removing section (12) and which forms a bypass passage of the harmful gas removing section (12) to open and close the bypass passage; When the gas concentration is higher than the reference residue, the first damper (2
2) is opened, and when the temperature is lower than the standard damper, the second damper (24
) to open the bus opening circuit (10);
).
本発明によれば、外気中の有害ガス濃度がＭ単筒を超え
た場合には、制御手段（工０）から信号を伝送して第一
のダンパ（２２）を開ける。これによって、全ての外気
は有害ガス除去部（１２＞に送り込まれ、有害ガスが除
去された後、送風機（３４〉で清浄空調室（１６）内に
供給することができる。According to the present invention, when the concentration of harmful gas in the outside air exceeds the M single cylinder, a signal is transmitted from the control means (operation 0) to open the first damper (22). As a result, all the outside air is sent to the harmful gas removal section (12>), and after the harmful gases are removed, it can be supplied into the clean air-conditioned room (16) by the blower (34>).
また、外気中の有害ガス濃度がＭ準値よりも低い場合に
は、制御手段（１０）から信号を伝送して第二のダンパ
（２４〉を開ける。これによって、全ての外気はバイパ
ス通路（２４ａ、２４ｂ）を介して送風機（３４）に直
接送り込まれて清浄空調室（１６〉内に供給することが
できる。Further, when the concentration of harmful gases in the outside air is lower than the M standard value, a signal is transmitted from the control means (10) to open the second damper (24>. As a result, all the outside air is removed from the bypass passage ( 24a, 24b) directly to the blower (34) and can be supplied into the clean air-conditioned room (16>).
以下添付図面に従って本発明に係る清浄空調室の有害ガ
ス除去装置の好ましい実施例について詳説する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a harmful gas removal device for a clean air-conditioned room according to the present invention will be described in detail below with reference to the accompanying drawings.
第１図は本発明に係る清浄空調室の有害ガス除去装置の
第１実施例を示す構造図が示され、第４図に示した従来
例中と同一の部材又は類似の部材については、同一の符
号を付して説明する。FIG. 1 is a structural diagram showing a first embodiment of the harmful gas removal device for a clean air-conditioned room according to the present invention, and the same members or similar members as in the conventional example shown in FIG. 4 are the same. The explanation will be given with reference numerals.
第１図に於いて、この清浄空調室の有害ガス除去装置は
有害ガス濃度モニタＩＯ１有害ガス除去部１２及び空調
装置１４等から構成されている。In FIG. 1, the harmful gas removal device for this clean air-conditioned room is comprised of a harmful gas concentration monitor IO1, a harmful gas removal section 12, an air conditioner 14, and the like.
前記有害ガス濃度モニタ１０は、清浄空調室１６の外側
に設置され、外気中に於けるＮＯＸ、ＳＯｘ等の有害ガ
ス濃度を検出している。即ち、有害ガス濃度モニタ１０
には、清浄空調室１６の室内２６に於ける汚染の対象と
ならない有害ガス濃度の基準値がメモリされ、外気中の
有害ガス濃度がその基準値を越えた場合には、ケーブル
１８を介してダンパ２２を開く信号を伝達し、また、基
準値よりも低い場合にはケーブル２０を介してダンパ２
４を開く信号を伝達する。The harmful gas concentration monitor 10 is installed outside the clean air-conditioned room 16, and detects the concentration of harmful gases such as NOX and SOx in the outside air. That is, the harmful gas concentration monitor 10
The reference value of the concentration of harmful gases that are not subject to contamination in the interior 26 of the clean air-conditioned room 16 is stored in memory, and when the concentration of harmful gases in the outside air exceeds the reference value, the It transmits a signal to open the damper 22, and also transmits a signal to open the damper 22 via the cable 20 when the value is lower than the reference value.
Transmits a signal to open 4.
前記ダンパ２２は、一端がダクト２７を介して外気取入
口２８に連通され、他端がダクト２９を介して前記有害
ガス除去部１２の一端に連通されている。The damper 22 has one end communicated with the outside air intake port 28 via a duct 27, and the other end communicated with one end of the harmful gas removal section 12 via a duct 29.
有害ガス除去部１２は、その内部に活性炭等の粒が詰め
られて構成され、外気取入口２８からダクト２７、ダン
パ２２及びダクト２９を介して送り込まれた外気中の有
害ガスを除去している。この有害ガス除去部１２の他端
は、ダク）３１を介して空調装置１４に連通されている
。The harmful gas removal unit 12 is configured with particles of activated carbon or the like packed therein, and removes harmful gases from the outside air sent from the outside air intake port 28 through the duct 27, damper 22, and duct 29. . The other end of this harmful gas removal section 12 is communicated with an air conditioner 14 via a duct 31.
一方、前記ダンパ２４は、一端がバイパスダクト２４ａ
を介して前記ダクト２７に連通され、他端がバイパスダ
クト２４ ｂ、ダクト３１を介して空調装置１４に連通
されている。On the other hand, the damper 24 has one end connected to the bypass duct 24a.
The other end is connected to the air conditioner 14 via a bypass duct 24b and a duct 31.
前記空調装置１４は微粒子除去フィルタ３０、調温、調
ｉ機３２及び送風機３４から構成され、外気を微粒子除
去フィルタ３０に通過させて除塵して調温し、調湿機３
２で空調した後、送風機３６でエアー吹出口３６から吹
き出している。The air conditioner 14 is composed of a particulate removal filter 30, a temperature controller 32, and a blower 34. The air conditioner 14 passes outside air through the particulate removal filter 30 to remove dust and adjust the temperature.
After the air conditioning is performed in step 2, air is blown out from the air outlet 36 by the blower 36.
次に、前記の如く構成された清浄空調室の有害ガス除去
装置の作用について説明する。Next, the operation of the noxious gas removal device for a clean air-conditioned room constructed as described above will be explained.
先ず、外気の有害ガス濃度が前述した基準値を越えた場
合について説明する。有害ガス濃度モニタｌＯが基１値
を越えたガス濃度を検知すると、ケーブル１８を介して
信号を伝達してダンパ２２を開は又はダンパ２４を閉め
る。これによって、外気は全て有害ガス除去部１２を通
過するので、外気中に於けるＮＯＸ ｓｏｘ等の有
害ガスを除去することができる。有害ガスが除去された
外気は、前述した空調装置１４にダクト３１を介して送
り込まれ除塵されて空調された後、エアー吹出口３６か
ら清浄空調室１６内に向けて吹き出される。First, a case will be described in which the concentration of harmful gases in the outside air exceeds the above-mentioned reference value. When the harmful gas concentration monitor lO detects a gas concentration exceeding a base value, it transmits a signal via the cable 18 to open the damper 22 or close the damper 24. As a result, all the outside air passes through the harmful gas removal section 12, so that harmful gases such as NOX and sox in the outside air can be removed. The outside air from which harmful gases have been removed is sent to the air conditioner 14 described above through the duct 31, where it is dust-removed and air-conditioned, and then blown out from the air outlet 36 into the clean air-conditioned room 16.
次に、外気の有害ガス濃度が基準値よりも低い場合につ
いて説明する。有害ガス濃度モニタＩＯが前記基準値よ
りも低いガス濃度を検知すると、ケーブル２０を介して
信号を伝達してダンパ２４を開け、それと同時にケーブ
ル１８を介してダンパ２２に伝達されていた信号を停止
する。従って、ダンパ２２は閉じられるので全ての外気
はダンパ２４を介して空調装置１４に直接送り込まれる
。Next, a case where the concentration of harmful gases in the outside air is lower than the reference value will be described. When the harmful gas concentration monitor IO detects a gas concentration lower than the reference value, it transmits a signal via the cable 20 to open the damper 24, and at the same time stops the signal transmitted to the damper 22 via the cable 18. do. Therefore, damper 22 is closed and all outside air is sent directly to air conditioner 14 via damper 24.
このように、有害ガス濃度が基準値よりも低い場合には
、空調装置１４に外気を直接送り込むようにしたので、
有害ガス除去部１２に外気を全て通過させていた従来の
清浄空調室の有害ガス除去装置と比較し、有害ガス除去
部１２の寿命を長くすることができる。In this way, when the concentration of harmful gases is lower than the standard value, outside air is sent directly to the air conditioner 14.
Compared to a conventional harmful gas removal device for a clean air-conditioned room in which all the outside air passes through the harmful gas removing part 12, the life of the harmful gas removing part 12 can be extended.
第２図は本発明に係る清浄空調室の有害ガス除去装置の
第二実施例を示す構造図が示されている。FIG. 2 is a structural diagram showing a second embodiment of the harmful gas removal device for a clean air-conditioned room according to the present invention.
前記実施例はダンパ２２．２４を使用したが第二実施例
ではこれに代えてダンパ３８を使用した。Although the dampers 22 and 24 were used in the previous embodiment, the second embodiment uses a damper 38 instead.
第２図に示すように、この清浄空調室の有害ガス除去装
置はダンパ３８を有している。このダンバ３８は、第３
図に示すように弁４０が回動軸４２を回動支点として矢
印Ａ、Ｂ方向に回動し、バイパスダク） ２４ ａ、ダ
クト２９の各開口部を開閉することができる。As shown in FIG. 2, this harmful gas removal device for a clean air-conditioned room has a damper 38. This damper 38 is the third
As shown in the figure, the valve 40 rotates about the rotation shaft 42 in the directions of arrows A and B, thereby opening and closing each opening of the bypass duct 24a and the duct 29.
前記第二実施例の清浄空調室の有害ガス除去装置によれ
ば、外気の有害ガス濃度が基準値を超えた場合に、有害
ガス濃度モニタ１０からケーブル１８を介してダンパ３
８に信号を伝達する。これによって、弁４０は回動軸４
２を回動支点として矢印入方向に回動しバイパスダク）
２４ａの開口部を閉じる。従って、外気は全てダクト２
９に送り込まれ有害ガス除去部１２を通過する。According to the harmful gas removal device for a clean air-conditioned room of the second embodiment, when the harmful gas concentration in the outside air exceeds the reference value, the harmful gas concentration monitor 10 sends the damper 3 through the cable 18.
8. This allows the valve 40 to
2 as the rotation fulcrum and rotate in the direction of the arrow (bypass duct)
Close the opening of 24a. Therefore, all the outside air is duct 2
9 and passes through the harmful gas removal section 12.
また、外気の有害ガス濃度が基準値よりも低い場合には
、有害ガス濃度モニタｌＯから信号が伝達されないので
、弁４０は矢印Ｂ方向に回動しダクト２９の開口部を閉
じる。従って、外気は全てバイパスダクト２４ａを介し
て空調装Ｗ１４に直接送り込まれる。Further, when the concentration of harmful gases in the outside air is lower than the reference value, no signal is transmitted from the harmful gas concentration monitor 10, so the valve 40 rotates in the direction of arrow B and closes the opening of the duct 29. Therefore, all outside air is sent directly to the air conditioner W14 via the bypass duct 24a.
また、前記弁４０の外周にパツキン４４を取付けること
によって、外気の漏れを防止することができる。更に、
外気の有害ガス濃度に応じて、弁４０の開閉角度αを適
宜に制御し、バイパスダク）２４ａ％ダクト２９の両方
に外気を送り込むようにしても良い。Further, by attaching a gasket 44 to the outer periphery of the valve 40, leakage of outside air can be prevented. Furthermore,
Depending on the concentration of harmful gases in the outside air, the opening/closing angle α of the valve 40 may be appropriately controlled to send outside air into both the bypass ducts 24a and 29.
以上説明したように本発明に係る清浄空調室の有害ガス
除去装置によれば、外気の有害ガス濃度が基準値を超え
た場合には、外気を有害ガス除去部に通過させ、前記基
準値よりも低い場合にはバイパス通路を今して空ｍ装置
に直接送り込むようにしたので、有害ガス除去部の寿命
を長くすることができ、また、送風機の出力を低くする
ことができる。As explained above, according to the harmful gas removal device for a clean air-conditioned room according to the present invention, when the harmful gas concentration of the outside air exceeds the standard value, the outside air is passed through the harmful gas removal section, and the If the air pressure is low, the bypass passage is now opened and the air is sent directly to the air device, so the life of the harmful gas removal section can be extended, and the output of the blower can be lowered.
第１図は本発明に係る清浄空調室の有害ガス除去装置の
第一実施例を示す構造図、第２図は本発明に係る清浄空
調室の有害ガス除去装置の第二実施例を示す構造図、第
３図は第２図の要部断面図、第４図は従来の清浄空調室
の有害ガス除去装置の実施例を示すＩ透間である。
０・・・有害ガス濃度モニタ、
２・・・有害ガス
除去部、
４・・・空調装置、
６・・・清浄空調室、
２２．
２４、
８・・・ダンパ、
ａｓ
・・・バイパスダクト。FIG. 1 is a structural diagram showing a first embodiment of a harmful gas removal device for a clean air-conditioned room according to the present invention, and FIG. 2 is a structural diagram showing a second embodiment of the harmful gas removal device for a clean air-conditioned room according to the present invention. FIG. 3 is a sectional view of the main part of FIG. 2, and FIG. 4 is an I-transmission space showing an embodiment of a conventional harmful gas removal device for a clean air-conditioned room. 0...Harmful gas concentration monitor, 2...Harmful gas removal unit, 4...Air conditioner, 6...Clean air conditioned room, 22. 24, 8...damper, as...bypass duct.
Claims (2)
清浄空調室内に供給する際に、有害ガス除去部に通過さ
せて外気に含有する有害ガスを除去する清浄空調室の有
害ガス除去装置に於いて、前記有害ガス除去部の入口側
に設けられ、有害ガスの入口を開閉する第一のダンパと
、 一端が有害ガス除去部の入口側に連通され、他端が有害
ガス除去部の出口側に連通され、前記有害ガス除去部の
バイパス通路を形成してバイパス開路を開閉する第二の
ダンパと、外気中の有害ガス濃度が基準値より高い時に
第一のダンパを開口し、基準値より低い時に第二のダン
パを開口してバイパス開路を開口する制御手段と、 から成ることを特徴とする清浄空調室の有害ガス除去装
置。(1) A harmful gas removal device for a clean air conditioned room that removes harmful gases contained in the outside air by passing it through a harmful gas removal section when supplying outside air sucked in by a blower from outside the clean air conditioned room into the clean air conditioned room. A first damper is provided on the inlet side of the harmful gas removing section and opens and closes the inlet of the harmful gas; one end is communicated with the inlet side of the harmful gas removing section, and the other end is connected to the inlet side of the harmful gas removing section. a second damper that communicates with the outlet side and opens and closes the bypass passage by forming a bypass passage of the harmful gas removal section; A control means for opening a second damper to open a bypass circuit when the value is lower than the threshold value, and a control means for opening a bypass circuit.
清浄空調室内に供給する際に、有害ガス除去部に通過さ
せて外気に含有する有害ガスを除去する清浄空調室の有
害ガス除去装置に於いて、有害ガス除去部の入口側に設
けられ、一方の開口部が有害ガス除去部の入口側に連通
され、他方の開口部が有害ガス除去部の出口側に連通さ
れてバイパス通路を形成し、一方と他方の開口部を開閉
するダンパと、 外気中の有害ガス濃度が基準値より高い時にダンパの一
方の開口部を開口し、基準値より低い時に他方の開口部
を開口する制御手段と、 から成ることを特徴とする清浄空調室の有害ガス除去装
置。(2) A harmful gas removal device for a clean air conditioned room that removes harmful gases contained in the outside air by passing it through a harmful gas removal section when supplying outside air sucked in by a blower from outside the clean air conditioned room into the clean air conditioned room. The bypass passage is provided on the inlet side of the harmful gas removing section, one opening is communicated with the inlet side of the harmful gas removing section, and the other opening is communicated with the outlet side of the harmful gas removing section. A damper that opens and closes one opening and the other opening, and a control that opens one opening of the damper when the concentration of harmful gas in the outside air is higher than a standard value, and the other opening when it is lower than the standard value. A harmful gas removal device for a clean air-conditioned room, characterized by comprising: means;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1175272A JPH0697105B2 (en) | 1989-07-06 | 1989-07-06 | Clean air conditioning room toxic gas removal device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1175272A JPH0697105B2 (en) | 1989-07-06 | 1989-07-06 | Clean air conditioning room toxic gas removal device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0339833A true JPH0339833A (en) | 1991-02-20 |
| JPH0697105B2 JPH0697105B2 (en) | 1994-11-30 |
Family
ID=15993242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1175272A Expired - Lifetime JPH0697105B2 (en) | 1989-07-06 | 1989-07-06 | Clean air conditioning room toxic gas removal device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0697105B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000046400A (en) * | 1998-07-29 | 2000-02-18 | Taisei Corp | Outdoor air treating device for clean room |
| JP2009285592A (en) * | 2008-05-30 | 2009-12-10 | Panasonic Corp | Denitrification apparatus |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4551337B2 (en) * | 2006-01-30 | 2010-09-29 | 株式会社ソダ工業 | Climate-following air conditioning control method and apparatus for preservation of cultural properties |
-
1989
- 1989-07-06 JP JP1175272A patent/JPH0697105B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000046400A (en) * | 1998-07-29 | 2000-02-18 | Taisei Corp | Outdoor air treating device for clean room |
| JP2009285592A (en) * | 2008-05-30 | 2009-12-10 | Panasonic Corp | Denitrification apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0697105B2 (en) | 1994-11-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5519294B2 (en) | Control system for controlling the air conditioning system | |
| KR100360506B1 (en) | Cleanroom and Cleanroom Ventilation Method | |
| EP4023949B1 (en) | Switchable filtration system | |
| US7331854B2 (en) | Common filtration unit for building makeup air and emergency exhaust | |
| KR102342941B1 (en) | Booth apparatus for dry room | |
| JPH0339833A (en) | Noxious gas removing device for air purifying conditioning room | |
| JPH11201511A (en) | Air cleaning system | |
| JP2005326093A (en) | Simplified bioclean room | |
| JPS6124933A (en) | Air-conditioning system | |
| JP2580375B2 (en) | Clean room | |
| JP2580893B2 (en) | Clean room fan filter unit | |
| KR100531084B1 (en) | A air cleaning system and a driving method thereof | |
| JP2001522448A (en) | Air treatment device, equipment and method | |
| JP3427921B2 (en) | Semiconductor device production clean room and semiconductor device production method | |
| JP2007105231A (en) | Sterilizing apparatus | |
| JP2536957B2 (en) | Clean room | |
| JP3521801B2 (en) | Clean room equipment | |
| JPH03148543A (en) | Ventilation device | |
| JPH02208433A (en) | Air cleaner device for clean room | |
| JP3208753B2 (en) | Air conditioner for clean room | |
| JPS61186746A (en) | Clean room | |
| JPS61168735A (en) | Clean room | |
| JPH0268437A (en) | Ventilation device for semiconductor manufacturing facility | |
| JPS6346328A (en) | Method of ventilation for building with clean room | |
| JP2021148347A (en) | Air purification system |