JPH0339486Y2 - - Google Patents

Info

Publication number
JPH0339486Y2
JPH0339486Y2 JP1988035228U JP3522888U JPH0339486Y2 JP H0339486 Y2 JPH0339486 Y2 JP H0339486Y2 JP 1988035228 U JP1988035228 U JP 1988035228U JP 3522888 U JP3522888 U JP 3522888U JP H0339486 Y2 JPH0339486 Y2 JP H0339486Y2
Authority
JP
Japan
Prior art keywords
holder
cylinder
substrate
pin
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1988035228U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01142455U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988035228U priority Critical patent/JPH0339486Y2/ja
Publication of JPH01142455U publication Critical patent/JPH01142455U/ja
Application granted granted Critical
Publication of JPH0339486Y2 publication Critical patent/JPH0339486Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1988035228U 1988-03-18 1988-03-18 Expired JPH0339486Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988035228U JPH0339486Y2 (enrdf_load_html_response) 1988-03-18 1988-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988035228U JPH0339486Y2 (enrdf_load_html_response) 1988-03-18 1988-03-18

Publications (2)

Publication Number Publication Date
JPH01142455U JPH01142455U (enrdf_load_html_response) 1989-09-29
JPH0339486Y2 true JPH0339486Y2 (enrdf_load_html_response) 1991-08-20

Family

ID=31261880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988035228U Expired JPH0339486Y2 (enrdf_load_html_response) 1988-03-18 1988-03-18

Country Status (1)

Country Link
JP (1) JPH0339486Y2 (enrdf_load_html_response)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50131253A (enrdf_load_html_response) * 1974-04-03 1975-10-17

Also Published As

Publication number Publication date
JPH01142455U (enrdf_load_html_response) 1989-09-29

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