JPH0338629U - - Google Patents

Info

Publication number
JPH0338629U
JPH0338629U JP9980389U JP9980389U JPH0338629U JP H0338629 U JPH0338629 U JP H0338629U JP 9980389 U JP9980389 U JP 9980389U JP 9980389 U JP9980389 U JP 9980389U JP H0338629 U JPH0338629 U JP H0338629U
Authority
JP
Japan
Prior art keywords
processing
liquid
carrier
large number
semiconductor wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9980389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9980389U priority Critical patent/JPH0338629U/ja
Publication of JPH0338629U publication Critical patent/JPH0338629U/ja
Pending legal-status Critical Current

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  • Weting (AREA)
JP9980389U 1989-08-25 1989-08-25 Pending JPH0338629U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9980389U JPH0338629U (de) 1989-08-25 1989-08-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9980389U JPH0338629U (de) 1989-08-25 1989-08-25

Publications (1)

Publication Number Publication Date
JPH0338629U true JPH0338629U (de) 1991-04-15

Family

ID=31648842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9980389U Pending JPH0338629U (de) 1989-08-25 1989-08-25

Country Status (1)

Country Link
JP (1) JPH0338629U (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012064646A (ja) * 2010-09-14 2012-03-29 Tokyo Electron Ltd 基板処理方法、その基板処理方法を実行させるためのプログラムを記録した記録媒体及び基板処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012064646A (ja) * 2010-09-14 2012-03-29 Tokyo Electron Ltd 基板処理方法、その基板処理方法を実行させるためのプログラムを記録した記録媒体及び基板処理装置

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