JPS63174439U - - Google Patents

Info

Publication number
JPS63174439U
JPS63174439U JP5642587U JP5642587U JPS63174439U JP S63174439 U JPS63174439 U JP S63174439U JP 5642587 U JP5642587 U JP 5642587U JP 5642587 U JP5642587 U JP 5642587U JP S63174439 U JPS63174439 U JP S63174439U
Authority
JP
Japan
Prior art keywords
basket
drive device
cam
swings
outer periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5642587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5642587U priority Critical patent/JPS63174439U/ja
Publication of JPS63174439U publication Critical patent/JPS63174439U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP5642587U 1987-04-13 1987-04-13 Pending JPS63174439U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5642587U JPS63174439U (de) 1987-04-13 1987-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5642587U JPS63174439U (de) 1987-04-13 1987-04-13

Publications (1)

Publication Number Publication Date
JPS63174439U true JPS63174439U (de) 1988-11-11

Family

ID=30885214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5642587U Pending JPS63174439U (de) 1987-04-13 1987-04-13

Country Status (1)

Country Link
JP (1) JPS63174439U (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH062685U (ja) * 1992-06-12 1994-01-14 株式会社カイジョー 半導体基板自動処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH062685U (ja) * 1992-06-12 1994-01-14 株式会社カイジョー 半導体基板自動処理装置

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