JPS63174439U - - Google Patents
Info
- Publication number
- JPS63174439U JPS63174439U JP5642587U JP5642587U JPS63174439U JP S63174439 U JPS63174439 U JP S63174439U JP 5642587 U JP5642587 U JP 5642587U JP 5642587 U JP5642587 U JP 5642587U JP S63174439 U JPS63174439 U JP S63174439U
- Authority
- JP
- Japan
- Prior art keywords
- basket
- drive device
- cam
- swings
- outer periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5642587U JPS63174439U (de) | 1987-04-13 | 1987-04-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5642587U JPS63174439U (de) | 1987-04-13 | 1987-04-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63174439U true JPS63174439U (de) | 1988-11-11 |
Family
ID=30885214
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5642587U Pending JPS63174439U (de) | 1987-04-13 | 1987-04-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63174439U (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH062685U (ja) * | 1992-06-12 | 1994-01-14 | 株式会社カイジョー | 半導体基板自動処理装置 |
-
1987
- 1987-04-13 JP JP5642587U patent/JPS63174439U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH062685U (ja) * | 1992-06-12 | 1994-01-14 | 株式会社カイジョー | 半導体基板自動処理装置 |