JPH0379424U - - Google Patents
Info
- Publication number
- JPH0379424U JPH0379424U JP13976789U JP13976789U JPH0379424U JP H0379424 U JPH0379424 U JP H0379424U JP 13976789 U JP13976789 U JP 13976789U JP 13976789 U JP13976789 U JP 13976789U JP H0379424 U JPH0379424 U JP H0379424U
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- wafer
- processing
- processing liquid
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 claims 6
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13976789U JPH0379424U (de) | 1989-11-30 | 1989-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13976789U JPH0379424U (de) | 1989-11-30 | 1989-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0379424U true JPH0379424U (de) | 1991-08-13 |
Family
ID=31686793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13976789U Pending JPH0379424U (de) | 1989-11-30 | 1989-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0379424U (de) |
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1989
- 1989-11-30 JP JP13976789U patent/JPH0379424U/ja active Pending