JPH0338543B2 - - Google Patents
Info
- Publication number
- JPH0338543B2 JPH0338543B2 JP57011638A JP1163882A JPH0338543B2 JP H0338543 B2 JPH0338543 B2 JP H0338543B2 JP 57011638 A JP57011638 A JP 57011638A JP 1163882 A JP1163882 A JP 1163882A JP H0338543 B2 JPH0338543 B2 JP H0338543B2
- Authority
- JP
- Japan
- Prior art keywords
- wave
- surface acoustic
- waves
- sample
- ultrasonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010897 surface acoustic wave method Methods 0.000 claims description 39
- 239000010409 thin film Substances 0.000 claims description 16
- 230000002452 interceptive effect Effects 0.000 claims description 4
- 238000002604 ultrasonography Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 230000007547 defect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000001902 propagating effect Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- NCGICGYLBXGBGN-UHFFFAOYSA-N 3-morpholin-4-yl-1-oxa-3-azonia-2-azanidacyclopent-3-en-5-imine;hydrochloride Chemical group Cl.[N-]1OC(=N)C=[N+]1N1CCOCC1 NCGICGYLBXGBGN-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57011638A JPS58129354A (ja) | 1982-01-29 | 1982-01-29 | 超音波顕微鏡 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57011638A JPS58129354A (ja) | 1982-01-29 | 1982-01-29 | 超音波顕微鏡 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58129354A JPS58129354A (ja) | 1983-08-02 |
| JPH0338543B2 true JPH0338543B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-06-11 |
Family
ID=11783479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57011638A Granted JPS58129354A (ja) | 1982-01-29 | 1982-01-29 | 超音波顕微鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58129354A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4620443A (en) * | 1984-12-13 | 1986-11-04 | The Board Of Trustees Of The Leland Stanford Junior University | Low frequency acoustic microscope |
-
1982
- 1982-01-29 JP JP57011638A patent/JPS58129354A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58129354A (ja) | 1983-08-02 |