JPH0338524B2 - - Google Patents

Info

Publication number
JPH0338524B2
JPH0338524B2 JP60204185A JP20418585A JPH0338524B2 JP H0338524 B2 JPH0338524 B2 JP H0338524B2 JP 60204185 A JP60204185 A JP 60204185A JP 20418585 A JP20418585 A JP 20418585A JP H0338524 B2 JPH0338524 B2 JP H0338524B2
Authority
JP
Japan
Prior art keywords
determining
surface shape
point
phase
dimensionally
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60204185A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6176906A (ja
Inventor
Horaiaua Moorisu
Surinibaasan Benyugoparu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New York Institute of Technology
Original Assignee
New York Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by New York Institute of Technology filed Critical New York Institute of Technology
Publication of JPS6176906A publication Critical patent/JPS6176906A/ja
Publication of JPH0338524B2 publication Critical patent/JPH0338524B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP60204185A 1984-09-14 1985-09-14 物体の表面形状決定方法及び装置 Granted JPS6176906A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US650824 1984-09-14
US06/650,824 US4641972A (en) 1984-09-14 1984-09-14 Method and apparatus for surface profilometry
US753722 1985-07-10

Publications (2)

Publication Number Publication Date
JPS6176906A JPS6176906A (ja) 1986-04-19
JPH0338524B2 true JPH0338524B2 (US06639685-20031028-M00048.png) 1991-06-11

Family

ID=24610465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60204185A Granted JPS6176906A (ja) 1984-09-14 1985-09-14 物体の表面形状決定方法及び装置

Country Status (2)

Country Link
US (1) US4641972A (US06639685-20031028-M00048.png)
JP (1) JPS6176906A (US06639685-20031028-M00048.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011043504A (ja) * 2009-08-20 2011-03-03 Carl Zeiss Oim Gmbh 対象物の表面を光学検査するための装置および方法

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011043504A (ja) * 2009-08-20 2011-03-03 Carl Zeiss Oim Gmbh 対象物の表面を光学検査するための装置および方法

Also Published As

Publication number Publication date
JPS6176906A (ja) 1986-04-19
US4641972A (en) 1987-02-10

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