JPH0334988B2 - - Google Patents

Info

Publication number
JPH0334988B2
JPH0334988B2 JP11626485A JP11626485A JPH0334988B2 JP H0334988 B2 JPH0334988 B2 JP H0334988B2 JP 11626485 A JP11626485 A JP 11626485A JP 11626485 A JP11626485 A JP 11626485A JP H0334988 B2 JPH0334988 B2 JP H0334988B2
Authority
JP
Japan
Prior art keywords
aerosol
processing chamber
coating
chamber
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11626485A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61274767A (ja
Inventor
Takashi Yonehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOKYO COPAL CHEM
Original Assignee
TOKYO COPAL CHEM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOKYO COPAL CHEM filed Critical TOKYO COPAL CHEM
Priority to JP11626485A priority Critical patent/JPS61274767A/ja
Publication of JPS61274767A publication Critical patent/JPS61274767A/ja
Publication of JPH0334988B2 publication Critical patent/JPH0334988B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
JP11626485A 1985-05-29 1985-05-29 表面改質剤等の塗布液の塗布法 Granted JPS61274767A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11626485A JPS61274767A (ja) 1985-05-29 1985-05-29 表面改質剤等の塗布液の塗布法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11626485A JPS61274767A (ja) 1985-05-29 1985-05-29 表面改質剤等の塗布液の塗布法

Publications (2)

Publication Number Publication Date
JPS61274767A JPS61274767A (ja) 1986-12-04
JPH0334988B2 true JPH0334988B2 (enrdf_load_stackoverflow) 1991-05-24

Family

ID=14682790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11626485A Granted JPS61274767A (ja) 1985-05-29 1985-05-29 表面改質剤等の塗布液の塗布法

Country Status (1)

Country Link
JP (1) JPS61274767A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS61274767A (ja) 1986-12-04

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