JPH033376B2 - - Google Patents

Info

Publication number
JPH033376B2
JPH033376B2 JP61016737A JP1673786A JPH033376B2 JP H033376 B2 JPH033376 B2 JP H033376B2 JP 61016737 A JP61016737 A JP 61016737A JP 1673786 A JP1673786 A JP 1673786A JP H033376 B2 JPH033376 B2 JP H033376B2
Authority
JP
Japan
Prior art keywords
pattern
reticle
line
exposure
shielding film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61016737A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63126221A (ja
Inventor
Akihiko Nakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Priority to JP61016737A priority Critical patent/JPS63126221A/ja
Publication of JPS63126221A publication Critical patent/JPS63126221A/ja
Publication of JPH033376B2 publication Critical patent/JPH033376B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP61016737A 1986-01-30 1986-01-30 パタ−ン形成方法 Granted JPS63126221A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61016737A JPS63126221A (ja) 1986-01-30 1986-01-30 パタ−ン形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61016737A JPS63126221A (ja) 1986-01-30 1986-01-30 パタ−ン形成方法

Publications (2)

Publication Number Publication Date
JPS63126221A JPS63126221A (ja) 1988-05-30
JPH033376B2 true JPH033376B2 (enrdf_load_stackoverflow) 1991-01-18

Family

ID=11924580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61016737A Granted JPS63126221A (ja) 1986-01-30 1986-01-30 パタ−ン形成方法

Country Status (1)

Country Link
JP (1) JPS63126221A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS63126221A (ja) 1988-05-30

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