JPH0333169B2 - - Google Patents

Info

Publication number
JPH0333169B2
JPH0333169B2 JP14959283A JP14959283A JPH0333169B2 JP H0333169 B2 JPH0333169 B2 JP H0333169B2 JP 14959283 A JP14959283 A JP 14959283A JP 14959283 A JP14959283 A JP 14959283A JP H0333169 B2 JPH0333169 B2 JP H0333169B2
Authority
JP
Japan
Prior art keywords
formula
polymer
fluorine
trifluoromethyl acrylate
polymerization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14959283A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6042411A (ja
Inventor
Toshio Koishi
Isao Tanaka
Takashi Yasumura
Iwao Oshima
Takamasa Fuchigami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Glass Co Ltd
Sagami Chemical Research Institute
Original Assignee
Central Glass Co Ltd
Sagami Chemical Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Glass Co Ltd, Sagami Chemical Research Institute filed Critical Central Glass Co Ltd
Priority to JP14959283A priority Critical patent/JPS6042411A/ja
Publication of JPS6042411A publication Critical patent/JPS6042411A/ja
Publication of JPH0333169B2 publication Critical patent/JPH0333169B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP14959283A 1983-08-18 1983-08-18 含フツ素共重合体の製造法 Granted JPS6042411A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14959283A JPS6042411A (ja) 1983-08-18 1983-08-18 含フツ素共重合体の製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14959283A JPS6042411A (ja) 1983-08-18 1983-08-18 含フツ素共重合体の製造法

Publications (2)

Publication Number Publication Date
JPS6042411A JPS6042411A (ja) 1985-03-06
JPH0333169B2 true JPH0333169B2 (enrdf_load_stackoverflow) 1991-05-16

Family

ID=15478568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14959283A Granted JPS6042411A (ja) 1983-08-18 1983-08-18 含フツ素共重合体の製造法

Country Status (1)

Country Link
JP (1) JPS6042411A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6354411A (ja) * 1986-08-22 1988-03-08 Kao Corp ワツクス状フツ素含有共重合体
JP3714870B2 (ja) 2000-12-28 2005-11-09 セントラル硝子株式会社 透明性含フッ素共重合体
US7358027B2 (en) 2002-03-04 2008-04-15 International Business Machines Corporation Copolymer for use in chemical amplification resists
JP4697406B2 (ja) * 2004-08-05 2011-06-08 信越化学工業株式会社 高分子化合物,レジスト保護膜材料及びパターン形成方法
CA2576263A1 (en) * 2004-08-11 2006-02-16 Kuraray Medical Inc. Dental polymerizable composition
EP1795960B1 (en) * 2005-12-09 2019-06-05 Fujifilm Corporation Positive resist composition, pattern forming method using the positive resist composition, use of the positive resit composition

Also Published As

Publication number Publication date
JPS6042411A (ja) 1985-03-06

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