JPH0333023Y2 - - Google Patents

Info

Publication number
JPH0333023Y2
JPH0333023Y2 JP860086U JP860086U JPH0333023Y2 JP H0333023 Y2 JPH0333023 Y2 JP H0333023Y2 JP 860086 U JP860086 U JP 860086U JP 860086 U JP860086 U JP 860086U JP H0333023 Y2 JPH0333023 Y2 JP H0333023Y2
Authority
JP
Japan
Prior art keywords
tank
chamber
environmental
test
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP860086U
Other languages
Japanese (ja)
Other versions
JPS62121579U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP860086U priority Critical patent/JPH0333023Y2/ja
Publication of JPS62121579U publication Critical patent/JPS62121579U/ja
Application granted granted Critical
Publication of JPH0333023Y2 publication Critical patent/JPH0333023Y2/ja
Expired legal-status Critical Current

Links

Description

【考案の詳細な説明】 産業上の利用分野 本考案は、半導体などの電子部品を様々な温度
又は湿度の環境下で、それらの信頼性に関する通
電試験を行なうための環境試験装置に関するもの
で、特に試験装置そのものが耐えられない高温域
又は低温域における長時間の試験に適した環境試
験装置に関するものである。
[Detailed description of the invention] Industrial field of application The present invention relates to an environmental testing device for conducting electrical conduction tests on the reliability of electronic components such as semiconductors under various temperature or humidity environments. In particular, the present invention relates to an environmental testing device suitable for long-term tests in high-temperature or low-temperature regions that the test device itself cannot withstand.

従来技術 従来の環境試験装置としては、恒温恒湿装置内
に被試験物を入れ、その中で様々な環境試験を行
なうようにした固定型(バツチ型)のものや、第
2図に示すように、断熱材で覆われた高温槽1
と、中間槽2と低温槽3とからなり、高温槽1に
対して加熱専用恒温空気供給装置4から陽圧の高
温空気を送風するようにし、低温槽3に対して低
温用恒温空気供給装置5からやはり陽圧の低温空
気を送風するようにし、さらに中間槽2内部にヒ
ーター6を設置したものにおいて、各槽内に移動
する搬送ベルト7を装備し、該搬送ベルト7上に
載置された被試験物8を特定の場所において、検
査ステーシヨン9で通電試験を行なうようにした
ものがある。
Conventional technology Conventional environmental testing equipment includes a fixed type (batch type) in which the test object is placed in a constant temperature and humidity equipment and various environmental tests are performed therein, and a A high-temperature bath 1 covered with insulation material
, an intermediate tank 2 and a low temperature tank 3, positive pressure high temperature air is blown to the high temperature tank 1 from a constant temperature air supply device 4 for heating only, and a constant temperature air supply device for low temperature to the low temperature tank 3. 5 also blows low-temperature air under positive pressure, and a heater 6 is installed inside the intermediate tank 2, and a conveyor belt 7 that moves into each tank is equipped, and the intermediate tank 2 is equipped with a conveyor belt 7 that is placed on the conveyor belt 7. There is a test device in which an electrical current test is performed on a tested object 8 at a specific location at a testing station 9.

考案が解決しようとする問題点 しかしながらかかる従来の環境試験装置では、
様々な温度下において環境試験を行なうことがで
きるが、試験槽内に検査ステーシヨンを配置して
いるので、検査ステーシヨン自体が温度に耐えら
れず破損してしまうことがあつた。またかかる装
置では、特定の場所で通電試験を行なうようにし
ているために、連続して通電試験を行なうことは
不可能であつた。搬送ベルトの下方に検査ステー
シヨンを設置し、連続した通電試験を行なうこと
が考えられるが、かかる場合には検査ステーシヨ
ンが下方に設置されているので、検査の途中で試
験者が検査状態を目視できないといつた不都合が
あつた。
Problems that the invention attempts to solve However, with such conventional environmental test equipment,
Although environmental tests can be conducted at various temperatures, since the test station is placed inside a test chamber, the test station itself cannot withstand the temperature and may be damaged. Furthermore, in such devices, since the energization test is conducted at a specific location, it has been impossible to conduct the energization test continuously. It is conceivable to install an inspection station below the conveyor belt and perform continuous energization tests, but in such a case, the inspection station is installed below, so the tester cannot visually observe the inspection status during the inspection. There was an inconvenience.

そこで本考案は、かかる従来技術の欠点に鑑
み、連続した通電試験が可能であると共に、検査
状態をいつでも目視できるような装置を提供する
ことを目的とする。
SUMMARY OF THE INVENTION In view of the drawbacks of the prior art, it is an object of the present invention to provide an apparatus that is capable of conducting continuous energization tests and that allows the inspection state to be visually observed at any time.

問題点を解決するための手段 すなわち本考案は、環境試験槽と、該環境試験
槽内を連続して移動する搬送手段と、該搬送手段
上に立設された環境試験槽の上壁まで伸びる垂直
板とからなり、少なくとも前記搬送手段及び垂直
板により環境試験槽内が恒温槽と常温槽とに区画
された前記搬送手段上方の常温槽側に環境装置が
配置され、搬送手段の下方が給電エリアとされ、
給電エリアと常温槽とを連通させると共に常温槽
を構成する底壁又は側壁に外気導入のための開口
を設け、常温槽又は給電エリアにフアン等の空気
循環手段を設けたライン型環境試験装置により本
目的を達成する。
Means for Solving the Problems In other words, the present invention includes an environmental test chamber, a conveyance means that continuously moves within the environmental test chamber, and an environmental test chamber that extends up to the upper wall of the environmental test chamber erected on the conveyance means. The environmental test chamber is divided into a constant temperature chamber and a normal temperature chamber by at least the conveying means and the vertical plate.An environmental device is arranged on the normal temperature chamber side above the conveying means, and a power supply is provided below the conveying means. It is considered as an area,
A line-type environmental test device is used, which communicates the power supply area with the room temperature chamber, has an opening for introducing outside air into the bottom wall or side wall of the room temperature chamber, and has an air circulation means such as a fan in the room temperature chamber or the power supply area. Achieve this purpose.

垂直板は、長手方向に搬送手段と同じ長さのも
のを固着する。
The vertical plate has the same length as the conveying means in the longitudinal direction.

作 用 本考案の装置では、駆動装置の作動により搬送
手段が連続的に移動し、それと共に搬送手段上の
試験装置、垂直板及び被試験物が搬送される。そ
の際、ダクト等を通じて恒温空気が環境試験装置
内の高温槽側に送り込まれる。
Function In the apparatus of the present invention, the transport means is continuously moved by the operation of the drive device, and the test device, vertical plate, and test object on the transport means are transported together with the transport means. At this time, constant temperature air is sent into the high temperature tank side of the environmental test equipment through a duct or the like.

しかし環境試験槽内が、連続する搬送手段及び
該搬送手段に固着された垂直板等により恒温槽、
常温槽及び給電エリアとに区画されていること並
びに常温槽又は給電エリアの空気循環手段により
外気が導入されるので、常温槽および給電エリア
内は常温に保たれる。
However, the inside of the environmental test chamber is a constant temperature chamber, with a continuous conveyance means and a vertical plate fixed to the conveyance means.
Since the room is divided into a normal temperature tank and a power supply area, and outside air is introduced by the air circulation means in the room temperature tank or power supply area, the room temperature inside the room temperature tank and power supply area is maintained at room temperature.

実施例 以下に本考案の図面に示された一実施例に従つ
て詳細に説明する。
Embodiment Hereinafter, the present invention will be described in detail according to an embodiment shown in the drawings.

第1図において、10は断熱材11からなる環
境試験槽であり、該環境試験槽10はダクト12
を通じて図示しない恒温空気供給装置と接続され
ている。
In FIG. 1, 10 is an environmental test tank made of a heat insulating material 11, and the environmental test tank 10 has a duct 12.
It is connected to a constant temperature air supply device (not shown) through.

環境試験槽10内は、その両側壁に固着された
支持部材13,14と該支持部材13,14に接
続された枕木材15,16を介して案内レール1
7,18が敷設されている。この案内レール1
7,18上には図示しない駆動手段によつて連続
して移動する搬送手段19が載置されている。
Inside the environmental test tank 10, the guide rail 1 is connected via support members 13 and 14 fixed to both side walls and sleepers 15 and 16 connected to the support members 13 and 14.
7 and 18 are installed. This guide rail 1
A conveyance means 19 is placed on the conveyance means 7 and 18 and is continuously moved by a drive means (not shown).

各搬送手段19上の中央部には、環境試験槽1
0内を恒温槽20と常温槽21とに区画する断熱
材よりなる搬送手段19と同じ長さの垂直板22
が長手方向に案内レールと平行に立設されてお
り、該垂直板22の上部は環境試験槽10の上壁
まで伸びている。
An environmental test tank 1 is located in the center of each conveyance means 19.
A vertical plate 22 having the same length as the conveying means 19 made of a heat insulating material that divides the inside of the room into a constant temperature bath 20 and a normal temperature bath 21.
is erected in parallel with the guide rail in the longitudinal direction, and the upper part of the vertical plate 22 extends to the upper wall of the environmental test chamber 10.

この垂直板22と環境試験槽10内の上壁との
間には、恒温槽20と常温槽21との隙間をなく
すべくパツキン23が上壁に装着されている。2
4は各搬送手段19の恒温槽20側に載置された
被試験物であり、25は搬送手段19の常温槽2
1側に装着された試験装置であり、26は試験装
置25の表示部である。
A gasket 23 is attached to the upper wall between the vertical plate 22 and the upper wall of the environmental test chamber 10 in order to eliminate the gap between the constant temperature chamber 20 and the normal temperature chamber 21. 2
4 is a test object placed on the constant temperature bath 20 side of each conveyance means 19; 25 is a test object placed on the constant temperature bath 20 side of each conveyance means 19;
1 is a test device mounted on the test device 25, and 26 is a display section of the test device 25.

また27は環境試験槽10の常温槽21側の側
壁に設けた表示部26を目視するための窓であ
る。28は搬送手段19の下方の給電エリアであ
る。該給電エリア28には給電手段31が搬送手
段19の下方に装着されている。
Further, reference numeral 27 denotes a window for visually checking the display section 26 provided on the side wall of the environmental test chamber 10 on the room temperature chamber 21 side. Reference numeral 28 denotes a power feeding area below the conveyance means 19. In the power feeding area 28, a power feeding means 31 is installed below the conveying means 19.

さらに本考案では、常温槽21内の温度上昇を
おさえるべく、外気導入のために環境試験槽10
の底壁に開口部29及び開口部29から離れた位
置に通気口(図示せず)を設け、該開口部29に
空気循環用のフアン30を装着している。
Furthermore, in the present invention, in order to suppress the temperature rise in the normal temperature chamber 21, the environmental test chamber 10 is used to introduce outside air.
An opening 29 and a vent hole (not shown) are provided at a position away from the opening 29 in the bottom wall of the air conditioner, and a fan 30 for air circulation is attached to the opening 29.

尚本考案にかかる装置では、恒温槽20と常温
槽21(給電エリアを含む)とは、連続して移動
する搬送手段19、該搬送手段19に立設された
垂直板22、案内レール17、枕木材15及び支
持部材13により隔離されている。
In the apparatus according to the present invention, the constant temperature bath 20 and the normal temperature bath 21 (including the power supply area) are composed of a continuously moving conveyance means 19, a vertical plate 22 erected on the conveyance means 19, a guide rail 17, They are separated by sleepers 15 and support members 13.

但し枕木材16及び支持部材14は、常温槽2
1の上部と下部とを連通させている。
However, the pillow wood 16 and the support member 14 are placed in the room temperature bath 2.
The upper and lower parts of 1 are communicated with each other.

次に本考案にかかる実施例の作用を説明する
と、ダクト12を介して恒温空気供給手段より恒
温槽20内に例えば高温の空気が供給されると、
環境試験槽10内は、恒温槽20側が高温にな
り、高温下にて温度適用試験を行なうことができ
る。
Next, the operation of the embodiment according to the present invention will be explained. When high temperature air is supplied into the thermostatic chamber 20 from the thermostatic air supply means through the duct 12,
Inside the environmental test chamber 10, the temperature on the constant temperature chamber 20 side becomes high, and a temperature application test can be performed at high temperature.

常温槽21及び給電エリア28は、垂直板2
2、搬送手段19等により恒温槽20と区画され
ているので、常温槽21及び給電エリア28側に
高温空気は流れ込みにくい。
The normal temperature bath 21 and the power supply area 28 are connected to the vertical plate 2
2. Since it is separated from the constant temperature bath 20 by the conveying means 19 and the like, high temperature air is difficult to flow into the normal temperature bath 21 and the power supply area 28 side.

しかし、常温槽21及び給電エリア28と恒温
槽20とは隣り合わせている関係で熱が伝わりや
すく次第にに常温槽21及び給電エリア28内の
温度が上昇しようとする。
However, since the temperature chamber 21 and the power supply area 28 and the constant temperature chamber 20 are adjacent to each other, heat is easily transferred to the temperature chamber 21 and the power supply area 28, so that the temperature inside the temperature chamber 21 and the power supply area 28 gradually rises.

常温槽21内の温度が上昇すると被試験物を検
査するための試験装置25及び試験装置25に電
気を供給する給電エリア28内の給電手段31の
配線等に悪影響を及ぼすことになる。
If the temperature in the room temperature chamber 21 increases, it will have a negative effect on the test device 25 for inspecting the test object and the wiring of the power supply means 31 in the power supply area 28 that supplies electricity to the test device 25.

しかしながら環境試験槽10の底壁に開口部2
9を設け、該開口部29に空気循環用のフアン3
0を装着し、常温槽21及び給電エリア28内に
熱エネルギーをためることなく、分散させるよう
に構成したので、給電手段31及び試験装置25
の加熱による故障を防ぐことができる。
However, the opening 2 in the bottom wall of the environmental test chamber 10
9, and a fan 3 for air circulation is provided in the opening 29.
0 is attached to the room temperature chamber 21 and the power supply area 28, and the thermal energy is dispersed without accumulating in the power supply means 31 and the test device 25.
Failure due to overheating can be prevented.

また試験装置を搬送手段の上部に装着し、さら
に環境試験槽の側壁に窓を設けたので、通電試験
結果を常時窓を介して目視することができる。
Furthermore, since the test device was mounted on the top of the transport means and a window was provided on the side wall of the environmental test tank, the energization test results could be visually observed through the window at all times.

尚本実施例では、開口部を給電エリア28内の
環境試験槽の底壁に設けたが、これに限定される
ものではなく、常温槽側の側壁や上壁に設けたも
のでもよい。また、開口部に空気循環用のフアン
を装着するように構成したが、常温槽内に装着し
てもよい。
In this embodiment, the opening is provided on the bottom wall of the environmental test tank in the power supply area 28, but the opening is not limited to this, and may be provided on the side wall or top wall of the room-temperature tank. Furthermore, although a fan for air circulation is attached to the opening, it may be attached inside the room temperature bath.

第2図は本考案にかかる装置の他の実施例を示
すもので、環境試験槽10の両内側壁に案内レー
ル17,18を固着し、該案内レール17,18
上に搬送手段19を載置したもので、常温槽21
と給電エリア28とを区画している搬送手段に通
気用の穴32を設けている。
FIG. 2 shows another embodiment of the device according to the present invention, in which guide rails 17 and 18 are fixed to both inner walls of the environmental test tank 10.
A transport means 19 is placed on top of the room temperature tank 21.
A ventilation hole 32 is provided in the conveying means that partitions the power supply area 28 and the power supply area 28.

さらに試験装置の外壁に常温空気が試験装置内
を通過しやすいように常温空気出入口を穿孔する
と共に、試験装置の常温空気出入口に空気循環用
のフアン30を装着したものからなる。
Further, a normal temperature air inlet/outlet is bored in the outer wall of the test apparatus so that normal temperature air can easily pass through the test apparatus, and a fan 30 for air circulation is attached to the normal temperature air inlet/outlet of the test apparatus.

効 果 以上説明したように本考案にかかる装置では、
垂直板、搬送手段等により環境試験槽内を恒温槽
と常温槽とを区画し、該試験装置を有する常温槽
内に外気等の冷却空気を導入するように構成した
ので、常温槽内が高温になりにくく、試験装置及
び給電手段等の故障を最小限に抑えることができ
る。
Effects As explained above, the device according to the present invention has
The environmental test chamber is divided into a constant temperature chamber and a normal temperature chamber using vertical plates, conveyance means, etc., and cooling air such as outside air is introduced into the chamber containing the test equipment, so that the temperature inside the chamber is high. It is possible to minimize failures of test equipment, power supply means, etc.

垂直板により搬送手段上を恒温側と常温側とに
区画したことにより、該常温側に試験装置を載置
することが可能であるために、搬送手段下部の給
電エリアを広くすることができると共に、試験中
の試験状態を目視することができる。
By dividing the transport means into a constant temperature side and a room temperature side using a vertical plate, it is possible to place the test equipment on the room temperature side, which makes it possible to widen the power supply area at the bottom of the transport means. , the test status during the test can be visually observed.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案にかかる装置の一実施例を示す
装置の横断面図、第2図は他の実施例を示す装置
の横断面図、第3図は従来技術を示す装置の縦断
面図である。 1……高温槽、2……中間槽、3……低温槽、
4,5……空気供給装置、6……ヒーター、7…
…搬送ベルト、8……被試験物、9……検査ステ
ーシヨン、10……環境試験槽、11……断熱
材、12……ダクト、13,14……支持部材、
15,16……枕木材、17,18……案内レー
ル、19……搬送手段、20……恒温槽、21…
…常温槽、22……垂直板、23……パツキン、
24……被試験物、25……試験装置、26……
表示部、27……窓、28……給電エリア、29
……開口部、30……フアン、31……給電手
段。
FIG. 1 is a cross-sectional view of the device showing one embodiment of the device according to the present invention, FIG. 2 is a cross-sectional view of the device showing another embodiment, and FIG. 3 is a vertical cross-sectional view of the device showing the prior art. It is. 1...High temperature tank, 2...Intermediate tank, 3...Low temperature tank,
4, 5...Air supply device, 6...Heater, 7...
...Transport belt, 8...Test object, 9...Inspection station, 10...Environmental test tank, 11...Insulation material, 12...Duct, 13, 14...Support member,
15, 16... sleeper wood, 17, 18... guide rail, 19... transportation means, 20... constant temperature bath, 21...
... normal temperature bath, 22 ... vertical plate, 23 ... packing,
24... Test object, 25... Test device, 26...
Display section, 27...Window, 28...Power supply area, 29
...opening, 30...fan, 31...power supply means.

Claims (1)

【実用新案登録請求の範囲】 (1) 環境試験槽と、該環境試験槽内を連続して移
動する搬送手段と、該搬送手段上に立設された
環境試験槽の上壁まで伸びる垂直板とからな
り、少なくとも前記搬送手段及び垂直板により
環境試験槽内が恒温槽と常温槽とに区画された
前記搬送手段上方の常温槽側に環境装置が配置
され、搬送手段の下方が給電エリアとされ、給
電エリアと常温槽とを連通させると共に常温槽
を構成する底壁又は側壁に外気導入のための開
口を設け、常温槽又は給電エリアにフアン等の
空気循環手段を設けたことを特徴とするライン
型環境試験装置。 (2) 試験装置の外壁に常温空気が試験装置内を通
過するための常温空気出入口を穿孔したことを
特徴とする実用新案登録請求の範囲第1項記載
のライン型環境試験装置。
[Scope of Claim for Utility Model Registration] (1) An environmental test tank, a conveyor that moves continuously within the environmental test tank, and a vertical plate that extends to the top wall of the environmental test tank that is erected on the conveyor. The environmental test chamber is divided into a constant temperature chamber and a normal temperature chamber by at least the conveyance means and the vertical plate, and an environmental device is disposed on the temperature chamber side above the conveyance means, and the lower part of the conveyance means is a power supply area. The power feeding area and the normal temperature tank are communicated with each other, and an opening for introducing outside air is provided in the bottom wall or side wall constituting the normal temperature tank, and an air circulation means such as a fan is provided in the normal temperature tank or the power feeding area. Line-type environmental testing equipment. (2) The line-type environmental testing device according to claim 1 of the utility model registration claim, characterized in that the outer wall of the testing device is provided with a room temperature air inlet/outlet for allowing room temperature air to pass through the testing device.
JP860086U 1986-01-24 1986-01-24 Expired JPH0333023Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP860086U JPH0333023Y2 (en) 1986-01-24 1986-01-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP860086U JPH0333023Y2 (en) 1986-01-24 1986-01-24

Publications (2)

Publication Number Publication Date
JPS62121579U JPS62121579U (en) 1987-08-01
JPH0333023Y2 true JPH0333023Y2 (en) 1991-07-12

Family

ID=30793127

Family Applications (1)

Application Number Title Priority Date Filing Date
JP860086U Expired JPH0333023Y2 (en) 1986-01-24 1986-01-24

Country Status (1)

Country Link
JP (1) JPH0333023Y2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007292654A (en) * 2006-04-26 2007-11-08 Toyota Motor Corp Durability tester for on-board battery
JPWO2008142754A1 (en) * 2007-05-18 2010-08-05 株式会社アドバンテスト Electronic component testing apparatus and electronic component testing method
JP5193917B2 (en) * 2009-03-24 2013-05-08 エスペック株式会社 Temperature and humidity treatment equipment

Also Published As

Publication number Publication date
JPS62121579U (en) 1987-08-01

Similar Documents

Publication Publication Date Title
KR101411233B1 (en) Battery testing device
US6373270B1 (en) Product carrier for environmental test system
US5767690A (en) Test head cooling system
US7650762B2 (en) Cooling air flow control valve for burn-in system
JP4152316B2 (en) Electronic component handling apparatus and temperature control method for electronic component
TWI405970B (en) Interface elements, test unit and electronic components test device
US5065089A (en) Circuit handler with sectioned rail
JPH0333023Y2 (en)
US6628132B2 (en) Methods and apparatus for testing a semiconductor structure using improved temperature desoak techniques
US4692694A (en) Load testing apparatus for electronic components
TWI757473B (en) Wafer Inspection Device
JPH0330863Y2 (en)
JP2009002609A (en) Wall structure for air-conditioned room
JPH0322579B2 (en)
JPH0645910Y2 (en) Dew condensation prevention device for socket board
JP3254775B2 (en) IC device constant temperature test equipment
JP6729959B1 (en) Semiconductor device testing apparatus and semiconductor device testing method
JPH075425Y2 (en) Condensation preventive device for measuring part
CN215005675U (en) Box type equipment aging trolley
JPH0229188B2 (en)
KR102342165B1 (en) Thermal Shock Test Equipment For Electronic Device Using Localized Air Current
JPS62204173A (en) Aging device
CN219831247U (en) AC/DC ground insulation impedance monitoring device of inverter
JPH0539500Y2 (en)
CN219659267U (en) Storage battery constant temperature control cabinet based on electric control system