JPH0332885B2 - - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a core for a cavity for the acceleration or control of charged particles. More specifically, it is used in particle accelerators, particle beam controllers, etc., in order to accelerate or control charged particles, it is excited with a pulsed current, magnetization is reversed with a large magnetic flux change width with low loss, and a pulsed electric field is generated. , relates to a core for a cavity that generates a magnetic field. Prior art and its problems Particle accelerators that accelerate charged particles such as various ions, electrons, and protons using electric or magnetic fields and give high kinetic energy include Kotscroft type,
In addition to direct current accelerators such as the Vandegraaf type, linear accelerators that use a changing electric or magnetic field, and rotary accelerators such as the cyclotron, synchrotron, and betatron are known. Among these, linear accelerators repeatedly accelerate charged particles using an alternating electric field to reach high energy. Generally, a high-voltage alternating electric field of 20 to 100 MHz is generated, and particles passing through the center are accelerated. It is something to do. On the other hand, among these linear accelerators, the linear induction accelerator (induction accelerator) is known as one for accelerating large currents (Review of Scientific Instruments Vol. 35, page 886, 1964, etc.) . As shown in Fig. 1, a toroidal core made of a soft magnetic material is used as a one-turn electric field converter, and a pulse current i is applied from a pulse generator perpendicular to the toroidal core 1. It uses a method of generating an electric field V in the direction,
It is seen as a promising means of heating high-temperature plasma for nuclear fusion. The core 1 for such a toroidal cavity is required to have the following characteristics. First, core 1 starts from -Br in the B-H loop to Bs
(Br is the residual magnetic flux density, Bs is the saturation magnetic flux density) and the energy applied to the charged particle is △
Since it is proportional to Bs=|−Br|+Bs, △Bs must be large. Then, the core volume required to give the desired acceleration energy is 1/(△
Bs) is proportional to ² . Second, since the device is operated by applying a pulse current of 100 nsec or less, energy loss during such short pulse excitation must be small. Thirdly, it is necessary that the characteristics change little over time. In addition, ease of manufacture, corrosion resistance, etc. are also required. By the way, ferrite is a material commonly used as various core materials. However, ferrite is particularly insufficient in the first to third magnetic properties described above, resulting in a large magnetic core and large loss. On the other hand, thin ribbons of amorphous magnetic alloys have been put into practical use as materials for forming magnetic cores, but those with normal compositions do not satisfy all of the above required properties and are difficult to heat treat. There are drawbacks. Purpose of the Invention The present invention was made in view of the above-mentioned circumstances, and its main purpose is to create an amorphous magnetic alloy that satisfies all of the above-mentioned required properties and is easy to manufacture in terms of heat treatment, etc. The object of the present invention is to provide a cavity core for accelerating or controlling charged particles. As a result of intensive research for this purpose, the inventors of the present invention have developed a method of winding a thin ribbon of an amorphous magnetic alloy with a predetermined composition range, partially precipitated crystalline material, and a predetermined thickness. It was discovered that a magnetic core formed by spinning achieves this purpose, and the following Nos. 1 to 5
The present invention has been completed. That is, the first invention partially contains crystalline material, has a composition represented by the following formula [], and has a thickness of
A core for a cavity for accelerating or controlling charged particles, characterized by being formed by winding an amorphous magnetic alloy ribbon of 15 μm or less. Formula [] Fe _x (Si _p B _q ) _y {In the above formula [], x+y=100at%, of which y is 21~
It is 25.5at%. Also, p+q=100%, of which p is
It is 40-75%. Furthermore, y≦0.5p+1, y≦0.1p+19, y≦0.3p+2, and y≧0.13p+13.7. } The second invention is a charged device characterized by being formed by winding an amorphous magnetic alloy thin ribbon having a thickness of 15 μm or less, which partially contains crystals and has a composition represented by the following formula []. Cavity core for particle acceleration or control. Formula [] Fe _x (Si _p B _q X〓 _r ) _y {In the above formula [], X〓 represents one or both of P and C. x+y=100at%, of which y is 21~
It is 25.5at%. p+q+r=100%, of which p is 40
~75%, r is 0.01-24%. Further, y≦0.5p+1, y≦0.1p+19, y≧0.3p+2, and y≧0.13p+13.7. } The third invention is a charged device comprising a partially crystalline material, having a composition represented by the following formula [], and wound with an amorphous magnetic alloy ribbon having a thickness of 15 μm or less. Cavity core for particle acceleration or control. Formula [] Fe _a T〓 _b ) _x X _y {In the above formula [], T〓 represents Co and/or Ni. X represents Si and B, or a combination of Si and B with P and/or C. x+y=100at%, of which y is 21~
It is 25.5at%. Also, a+b=100%, of which b is
It is 0.1-20%. Furthermore, when the content ratio of Si in X is p%,
p is 40 to 75%, and y≦0.5p+1, y≦0.1p+19, y≧0.3p+2, and y≧0.13p+13.7. When P and/or C are included in X, the total amount of P and C is 0.01 to 24% of X. } The fourth invention is a charged device comprising a wound amorphous magnetic alloy thin ribbon having a thickness of 15 μm or less and having a composition represented by the following formula [], which partially contains crystals. Cavity core for particle acceleration or control. Formula [] (T〓 _c Mn _d ) _x X _y {In the above formula [], T〓 represents Fe or Fe and Co and/or Ni. X represents Si and B, or a combination of Si and B with P and/or C. x+y=100at%, of which y is 21~
It is 25.5at%. Moreover, c+d=100%, and d is 0.1 to 10%. Furthermore, when Co and/or Ni are included in T, the total amount of Co and Ni is 0.1 to 20% of T
It is. In addition, when the content ratio of Si in X is p%,
p is 40 to 75%, and y≦0.5p+1, y≦0.1p+19, y≧0.3p+2, and y≧0.13p+13.7. When P and/or C are included in X, the total amount of P and C is 0.01 to 24% of X. } The fifth invention is a charged device comprising a wound amorphous magnetic alloy ribbon having a thickness of 15 μm or less, which partially contains crystals and has a composition represented by the following formula []. Cavity core for particle acceleration or control. Formula [] (T〓 _e T〓 _f ) _x X _y {In the above formula [], T〓 represents Fe or a combination of Fe and one or more of Co, Ni and Mn, and T〓 represents one or more B group elements, X represents Si and B, or a combination of Si and B with P and/or C. x+y=100at%, of which y is 21~
It is 25.5at%. Further, e+f=100%, and f is 0.1 to 10%. Furthermore, when Co and/or Ni are included in T, the total amount of Co and Ni is 0.1 to 20% of T
And, when Mn is included in T〓, Mn is 0.1 to 10% in T〓. In addition, when the content ratio of Si in X is p%,
p is 40 to 75%, and y≦0.5p+1, y≦0.1p+19, y≧0.3p+2, and y≧0.13p+13.7. When P and/or C are included in X, the total amount of P and C is 0.01 to 24% of X. } Specific Configuration of the Invention The specific configuration of the present invention will be described in detail below. The amorphous magnetic alloy ribbon forming the cavity core of the present invention partially contains crystalline material. In the ribbon, the crystalline material partially contained in the amorphous material is generally precipitated microcrystals and mixed in the amorphous material. Therefore, when a ribbon is subjected to X-ray diffraction, the diffraction spectrum shows a pattern in which a peak indicating the presence of crystalline material is superimposed on a halo characteristic of amorphous materials, and the diffraction image shows a pattern in which peaks indicating the presence of crystalline materials are superimposed on a halo characteristic of amorphous materials. The spots are superimposed and a Debye-Schiler ring with a predetermined diameter and width appears. Then, by taking the area ratio between the halo and the peak of the diffraction spectrum, the abundance ratio of crystalline and amorphous in the ribbon can be determined. , usually preferably about 0.1 to 50%. Further, the precipitated microcrystals are generally considered to have an average grain size of approximately 10 to 1000 A, based on the Debye-Scherer ring diameter and ring width. When the magnetic core of the present invention is formed from a ribbon containing partially existing microcrystals as described above,
Energy loss during pulse excitation of 100 nsec or less is significantly reduced. Also, △Bs increases,
The required core volume is also reduced. Furthermore, deterioration of these magnetic properties over time due to repeated operations and storage over a long period of time is extremely reduced. Next, the composition of the amorphous magnetic alloy ribbon used in the present invention will be explained. First, the ribbon consists of a transition metal component and a vitrification element component. The transition metal component includes Fe as an essential element (formula []), and Co and/or Ni as necessary.
(formula []), Mn and optionally Co and/or
Contains Ni (formula []), group B elements (Cr, Mo, W) and, if necessary, one or more of Co, Ni, and Mn (formula []). On the other hand, the vitrification element component includes Si and B as essential elements (formula []), and optionally contains P and/or C (formulas [] to []). In this case, the content y of vitrifying elements consisting of Si and B, and optionally P and/or C
(Formula [] to [] above) is 21.0 to 25.5 at%. Vitrification element Si in the above formulas [] to []
When the content y of +B (formula []), Si+B+X (formula []), and X (formula [] to []) exceeds 25.5 at%, energy loss increases. Moreover, the magnetic properties deteriorate and the core volume must be increased to obtain the same properties. On the other hand, when y is less than 21.0 at%, it becomes difficult to form a thin ribbon, the manufacturing yield becomes poor, and the surface properties of the ribbon deteriorate. Moreover, the crystallization temperature decreases, and the temperature and time limits for heat treatment for precipitation of microcrystals described above become difficult, making heat treatment difficult, and as described above, it becomes difficult to partially contain crystalline material. Become. On the other hand, when y is in the range of 21.0 to 25.5at%,
Energy losses are extremely low and other disadvantages mentioned above are eliminated. On the other hand, Si in the vitrification elemental component consisting of Si, B, and P and/or C as necessary.
The content ratio p (%) is 40 to 75%. When p is less than 40%, energy loss increases. Moreover, the change in magnetic properties over time becomes large. On the other hand, when p exceeds 75%, it becomes difficult to form a thin ribbon, the manufacturing yield becomes poor, and the surface properties of the ribbon deteriorate. Furthermore, the total content of vitrification elements yat%,
Between the Si content ratio p% in the vitrification element, z≦
0.5p+1, and z≦0.1p+19, and z≦0.3p+2,
And the relationship z≦0.13p+13.7 must be satisfied. That is, to explain these conditions based on Figure 2, when expressed in coordinates (p, y),
Point A (40, 21.0), B (45, 23.5), C (65, 25.5),
D (75, 25.5), E (75, 24.5), F (70, 23.0), G
(55, 21.0) and A are successively connected by straight lines, and the area surrounded by these straight lines is the condition where the above-mentioned y and p of the ribbon in the invention of this application are satisfied. Only within this region, energy loss is significantly reduced, the core can be made extremely compact, and changes over time are significantly reduced. In addition, above the illustrated C-D line (y=25.5) (y>
25.5) and G-A line (y=21.0) downward (y<
21.0) and left of point A (p<40) and D-E
The disadvantages on the right side (p>75) of the line (p=75) are as described above, but the illustrated line A-B (z=0.5+1) and line B-C (z=0.1p+19)
Above, energy loss increases and
The magnetic properties are poor, the core volume and the entire cavity become large, and the change over time is large. Also, the E-F line (z=0.3p+2) and the F-G line
Below the line (z = 0.13p + 13.7), there is a drawback that it is difficult to obtain an amorphous ribbon using the high-speed quenching method. Furthermore, below the E-F line and the F-G line, the heat treatment conditions for microcrystal precipitation are severe;
Difficult to have crystalline material partially present. In such a basic composition, it is preferable that P and/or C be contained in the vitrification element component. This is because by containing P and/or C in the vitrification element component (formulas [] to []), deterioration over time of core properties, especially energy loss, ΔBs, etc., becomes extremely small. In this way, when P and/or C are contained in the vitrification element component, the content ratio of P and/or C in the vitrification element is preferably 0.01 to 24%. If the content is less than 0.01%, the effect of adding P and/or C will not be effective, and the core properties will deteriorate significantly over time. In addition, it becomes difficult to form a thin ribbon. In such a case, P is included in the vitrification element component.
It is preferable that C and C be contained at the same time. When P and C are contained in the vitrification element component, the content ratio of P in the vitrification element component is
It is preferably 0.01 to 5%, more preferably 0.01 to 2%. This is because when it exceeds 0.01%, energy loss decreases and deterioration of various magnetic properties and core properties over time becomes smaller, but when it exceeds 5%, these properties deteriorate. On the other hand, in the vitrification element component, the value obtained by dividing the C content ratio in the vitrification element component by the P content ratio in the vitrification element component is preferably 0.03 to 0.4. When it is 0.03% or more, energy loss becomes sufficiently small and changes in core properties over time become sufficiently small. However, if it exceeds 0.4, it becomes difficult to make it into a thin ribbon.
Energy loss increases. In addition, the vitrification element components include Al,
One or more of Be, Ge, Sb, In, etc. may be further included. However, the content ratio of these vitrification elements in the components is usually within 10%. This is because if it exceeds 10%, the magnetic properties will deteriorate. On the other hand, the transition metal component usually consists of only Fe (formulas [] and []), but in addition to Fe, the transition metal component may also contain other transition metal elements (Sc
~Zn, Y-Cd, La~Hg, Ac or more) may be included. One of the transition metal elements preferably contained is one or two of Co and Ni, which are iron group elements. When containing Co, ΔBs is improved and the core volume becomes smaller. Furthermore, when Ni is contained, heat treatment becomes easier and the squareness becomes better, so ΔBs increases and the core volume can be reduced. In such a case, when Co and/or Ni are T〓, the content ratio of T〓 T〓/(T〓+Fe)×100 is,
It is preferably 0.1 to 20%. This is because when it is less than 0.1%, these effects become ineffective, and when it exceeds 20%, the core characteristics, especially the loss, become large. In addition, Co/(Co+Fe)×100 is 0.1 to 10%,
(Ni/Ni+Fe)×100 is preferably 0.1 to 15%. Further, another example of a transition metal element that is preferably included is Mn. Mn is effective in reducing the aging deterioration of magnetic properties required for core properties, and also increases the crystallization temperature, easing the temperature and time restrictions required for heat treatment for microcrystal precipitation, making it easier. This makes it possible to introduce microcrystals into the ribbon. However, if the Mn content ratio in the transition metal component exceeds 10%, Bs will decrease, core properties will deteriorate, deterioration over time will increase, and it will be difficult to form a ribbon, so the Mn content ratio should be 0.1 to 10%. , more preferably
It is preferably 0.1 to 5%, more preferably 0.1 to 3%. Further, it is preferable that the transition metal component contains one or more of group B elements (Cr, Mo, W). Addition of group B elements reduces changes in core properties over time and improves corrosion resistance. However, the content ratio of group B elements in the transition metal components is
When it exceeds 10%, △Bs decreases rapidly and it becomes difficult to form a thin ribbon, so the content ratio of group B elements is
It is preferably 0.1 to 10%, more preferably 0.1 to 7%, even more preferably 0.1 to 4%. In addition, examples of suitable transition metal elements include Cu, Nb, Ti, V, Zr, Ta, and Y. However, the content ratio is 10% from the point of view of core properties.
%, particularly preferably 5% or less. The amorphous magnetic alloy ribbon having such a composition is not particularly limited as long as it satisfies the conditions detailed above. However, as a result of partially introducing crystalline material into the ribbon, especially when magnetic anisotropy is imparted in a predetermined direction within the ribbon surface, magnetic permeability is improved and energy loss is further reduced. Furthermore, it is preferable because it facilitates adjustment of various magnetic properties. In this case, it is preferable that the magnetic anisotropy be introduced in one predetermined direction within the plane of the ribbon, usually as uniaxial anisotropy. When microcrystals are precipitated in the longitudinal direction of the ribbon by applying a magnetic field and heat-treating it before or after winding the ribbon, uniaxial anisotropy is imparted to the longitudinal direction of the ribbon, and the squareness ratio and ΔBs etc. can be adjusted as desired, and energy loss can be further reduced. The existence of such magnetic anisotropy is explained by the conventional method,
This can be easily verified by drawing a torque curve. Such ribbons have a thickness of less than 15 μm and approximately
It is a long thin plate with a width of 10 to 200 cm, especially 12.7 to 127 cm. In this case, if the thickness exceeds 15 μm, the energy loss during pulse excitation will increase and the amount of heat generated will increase. The thinner the thin ribbon is than 15 μm, the smaller the energy loss. However, if the thickness becomes too thin, it will be difficult to manufacture and the yield will be low.
It is preferable that it is ~15 μm, more preferably 8-12 μm. The magnetic core of the present invention is formed by winding a ribbon as detailed above. That is, the magnetic core is usually formed from the wound body itself, which is formed by winding a thin ribbon. When constructing a magnetic core from a wound body in this way, the wound body is formed by winding a ribbon around a predetermined winding frame, winding core, etc., and fixing the ends thereof. In this case, the structure, shape, etc. of the magnetic frame, winding core, etc. can be varied. The material may be other metals such as porcelain, glass, and resin, and the ends may be fixed by adhesive, welding, tape, etc., or by being provided on the winding frame, etc. It may also be caulked with a caulking nail. Note that it is preferable to interpose an insulator made of various organic and inorganic materials between the wound ribbons. The thickness of this interlayer insulating layer is preferably about 0.1 to 25 μm. Also, unlike the above, it does not use a winding frame or core, etc.
For example, the shape can be fixed by impregnating it with a resin or the like. In addition, the ribbon winding shape is
Various modifications are possible, such as a circular ring shape and a square ring shape. The cavity core of the present invention is usually produced as follows. First, a nearly completely amorphous ribbon is obtained from a master alloy having a corresponding composition according to a known high-speed quenching method. This ribbon is then usually subjected to a treatment for precipitation of microcrystals. Such treatment is usually preferably carried out by heating in a magnetic field at a temperature below the Curie point for an appropriate period of time, followed by cooling, for example air cooling. The heating temperature, heating time, cooling rate, etc. can be easily determined experimentally depending on the required characteristic values. The atmosphere for such heat treatment is
It may be in air, vacuum, inert gas, non-oxidizing gas, etc. The magnetic field during such heat treatment is usually applied in the longitudinal direction of the ribbon, and the applied magnetic field is, for example, about 50e or more, particularly about 100e or more. At this time, anisotropy is imparted in the longitudinal direction within the ribbon surface. Note that the heat treatment can also be performed while applying a magnetic field and tension to the ribbon. Next, as described above, this ribbon is wound, preferably with an interlayer insulating layer interposed, to obtain a wound body, which is used as a magnetic core. In this case, to provide an interlayer insulating layer, a thin strip of insulating material may be wound together with the thin strip, or a thin strip having an insulating layer applied or adhered to it before or after heat treatment may be wound. good. Specific effects of the invention The magnetic core as described above is wound in a predetermined manner,
Other predetermined processing is performed to form a core for a cavity for accelerating or controlling charged particles, as shown in FIG. 1, for example. Usually, a cavity is formed by arranging a plurality of these cores linearly, winding each core with one turn, and connecting it to a pulse generator. Specific Effects of the Invention The core of the present invention provides extremely good characteristics as a core for a cavity for accelerating or controlling charged particles. That is, the squareness is good, the Br/B ₁₀ is 0.7 or more, the saturability is good, and good characteristics are obtained. In addition, μsat is as small as about 1 to 10, allowing the core volume to be extremely small. And μunsat is large, μunsat/μsat is
It shows a large value of up to 500. Furthermore, Bs is extremely large, and △Bs=
|−Br|+Bs is also extremely large, approximately 25 to 32 kg. Therefore, the magnetic core volume becomes even smaller. Moreover, the loss during excitation with pulses with a pulse width of 100 nsec or less is extremely small, and the energy loss during operation is extremely low. Furthermore, changes in core properties over time are also small. And the conditions for heat treatment are wide-ranging,
Easy to manufacture. Furthermore, corrosion resistance etc. are also good. Si and B are used as vitrification element components.
In the second invention containing P and/or C in addition to P and/or C, changes in these properties over time are extremely small. In addition, Co and/or
In the third invention containing Ni, the magnetic properties are improved,
Alternatively, the heat treatment conditions may be relaxed to facilitate manufacturing. Furthermore, in the fourth invention containing Mn, the change over time is further reduced. In addition, in the fifth invention containing a group B element, changes over time are reduced and corrosion resistance is improved. Specific Examples of the Invention Hereinafter, specific examples of the present invention will be shown and the present invention will be explained in further detail. Example 1 Composition Fe ₇₈ Si ₁₁ B ₁₁ (y
= 22 at%, p = 50%) and a composition Fe ₇₈ Si ₁₃ B ₁₃ (y
= 26%, p = 50%) Amorphous magnetic alloy ribbon B
was obtained by a high-speed quenching method. Both are almost completely amorphous, and both have a thickness of 15 μm and a width of 25.4 mm. Next, for each of these ribbons A and B, 5
One of them was not subjected to any treatment, and the other four were heat treated while applying an applied magnetic field of 200 e in the longitudinal direction of the ribbon at the temperature and time shown in Table 1 below. , samples A-1 to A-5 and sample B-1
~B-5 was obtained. When X-ray diffraction was performed on these samples A-1 to B-5, the results shown in Table 1 below were obtained.

[Table]

[Table] Next, using each of the above ribbons A-1 to B-5,
Each layer is made of polyethylene terephthalate film (PFT) with a thickness of 10 μm, with an inner diameter of 9 inches,
It was wound into a toroidal shape with an outer diameter of 11 inches and a height of 7 inches to obtain a total of 10 wound bodies. Each of the cores A-1 to B-5 thus obtained was wound with one turn to form a cavity. Next, each core A-1 to B-5 was
We connected the magnetic switch proposed in No. 174795 as a pulse generator and investigated the core characteristics. Note that the inductance of each core was in the range of several to several tens of μH. A 250KV, 60nsec pulse was generated using a magnetic switch, and the energy loss at that time was measured. The results are shown in Table 2.

[Table] Furthermore, the magnetic cores A-1 to B-5 used in the test are
After being kept in a constant temperature bath at 120°C for 1000 hours, energy loss was measured in the same manner as above to evaluate changes in characteristics over time. The results are also listed in Table 2 above. In the table, × indicates that there was a large change, △ indicates that there was a change, and ○ indicates that there was almost no change. From the results shown in Table 2, it is clear that the ribbon of the invention of this application, which has the composition shown by the above formula and partially contains crystalline materials, has an excellent effect when used as a magnetic core for a magnetic switch. Example 2 In the above formula [], the amount of vitrification element component y
Various thin ribbons were produced by changing the Si content ratio p in the vitrification element component and the Si content ratio p in the vitrification element components. Next, in the same manner as in Example 1, heat treatment was performed at 400° C. for 2 hours while applying an applied magnetic field of 200 e in the longitudinal direction of the ribbon to obtain a sample. As a result of the heat treatment performed in this manner, a halo and a peak were present in the X-ray diffraction spectrum of each ribbon. Next, the thickness of each thin strip obtained in this way is
A core was prepared by winding 10 μm PET between layers into a toroidal shape with an inner diameter of 9 inches, an outer diameter of 11 inches, and a height of 7 inches, similar to that in Example 1. Next, under the same conditions as in Example 1, a pulse of 250 KV and 60 nsec was generated from a magnetic switch to excite the core, and the energy loss in the core was examined. The inductance of the core at this time was in the range of several to several tens of μH. Figure 3 shows the results of measuring energy loss. Figure 3 shows the vitrification element components in the ribbon.
Taking the Si content ratio p as the horizontal axis, the amount of vitrification element component Y
is taken as the vertical axis, and the energy loss in magnetic cores obtained from various ribbons with different y and p is
Composition lines are shown that are 1.3J, 1.9J, and 2.6J, respectively. From the results shown in Figure 3, A-B-C-D-
The magnetic core obtained from the ribbon of this application having a composition within the region surrounded by E-F-G-A exhibits an energy loss of approximately 1.9 J or less, whereas the core obtained from the ribbon outside the above region shows an energy loss of approximately 1.9 J or less. It can be seen that the energy loss increases with the magnetic core. Next, for each magnetic core, the voltage V applied to both ends of the core was measured, and the ΔBs of the magnetic core was measured according to the table below. ∫Vdt≒<V>×τ=N・A・△Bs V: Voltage applied to the core <V>: Average value of the voltage applied to the core τ: Time during which the voltage is applied N: Winding of the core , Here, N = 2 turns A: Core cross-sectional area Also, from the calculated △Bs, the relationship between the core volume required to transmit the same energy (energy) / (core volume) ∝ (△Bs) ² ,
The relative percentage of the core volume to the core volume at ΔBs=3T was determined. Figure 4 shows the composition line of ΔBs and relative magnetic core volume.
In addition, △Bs of ordinary Mn-Zn ferrite is
It is 0.5T. From the results shown in FIG. 4, it can be seen that the core of the present invention exhibits extremely high ΔBs, and the core volume can also be made small. Furthermore, as in Example 1, the core was heated at 120℃ and 1000℃.
Changes in energy loss over time after time aging were measured. The results are shown in Figure 5. From the results shown in FIG. 5, it can be seen that the present invention exhibits extremely good aging characteristics. In addition, by heat treatment for 120 minutes for each composition,
Energy loss is 1.9J or less and aging is 10
The allowable width △Tan of the heat treatment temperature Tan to obtain properties of less than % was determined. Figure 6 shows composition lines where ΔTan is 25°C and 50°C, respectively. From the results shown in FIG. 6, it can be seen that A-B- of the present invention
It can be seen that the ribbon having a composition within the region surrounded by C-D-E-F-G-A exhibits an allowable heat treatment temperature range of 25° C. or higher. Note that all ribbons having compositions within the region surrounded by A-B-C-D-E-F-G-A exhibited excellent corrosion resistance. Example 3 The thickness of the amorphous magnetic alloy composition A used in Example 1 was changed as shown in Table 3 below, and the heat treatment of A-4 was performed with the same core dimensions as in Example 1. A magnetic core for saturated inductor _L3 was produced, and energy loss was measured in the same manner as in Example 1. The results are shown in Table 3.

[Table] From the results shown in Table 3, the thickness of the ribbon is 15μ
It can be seen that the energy loss increases when the thickness exceeds m, so the thickness must be 15 μm or less. Example 4 An amorphous magnetic alloy ribbon having the composition shown in Table 4 below was obtained. Using these ribbons, a core was formed in the same manner as in Example 1, and various characteristics of the core were examined, namely energy loss, ΔBs, relative magnetic core volume required for the same acceleration energy transfer, change in energy loss over time, The allowable range of heat treatment temperature △Tan was measured. The results are shown in Table 4. In addition, in both cases, a halo and a peak were present as a result of X-ray diffraction. Further, in this example, a corrosion resistance test was also conducted. Test conditions were at a temperature of 55℃ and humidity of 95%.
The ribbon was aged for 1000 hours and the presence or absence of rust on the surface of the ribbon was examined. The results are shown in Table 4. In Table 4, △ indicates that less than 10% rust occurred, and ○ indicates that no rust was observed. Furthermore, in the change over time, ◎ indicates that there was no significant change under the conditions of Example 1. In addition, the allowable range of heat treatment temperature △Tan was measured in the same manner as in Example 2, 〇 means △Tan < 25℃, △ means 25℃≦△
Tan<50°C, × indicates 50°C<△Tan. Additionally, the relative core volume is a relative value in this example. Note that Table 4 also includes the results for Mn-Zn ferrite.

[Table] From the results shown in Table 4, the effects of the first to fifth inventions of this application are clear.

[Brief explanation of drawings]

FIG. 1 shows a circuit diagram of a cavity for accelerating or controlling charged particles using the core of the present invention. FIG. 2 is a p-y coordinate diagram for explaining the relationship between the Si content ratio p in the vitrification element component and the amount y of the vitrification element component in the present invention. Figure 3~
Figure 6 shows the energy loss in the p-y coordinate (Figure 3), ΔBs and the relative magnetic core volume required for the same energy transfer (Figure 4), the change in energy loss over time (Figure 5), It is also a graph showing the composition line (FIG. 6) of the allowable range of heat treatment temperature (ΔTan).

Claims (1)

[Claims] 1. A charged device comprising a partially crystalline material, having a composition represented by the following formula [], and formed by winding an amorphous magnetic alloy ribbon with a thickness of 15 μm or less. Cavity core for particle acceleration or control. Formula [] Fe _x (Si _p B _q ) _y {In the above formula [], x+y=100at%, of which y is 21~
It is 25.5at%. Also, p+q=100%, of which p is
It is 40-75%. Furthermore, y≦0.5p+1, y≦0.1p+19, y≧0.3p+2, and y≧0.13p+13.7. } 2 Claim 1 whose thickness is 5 to 15 μm
A core for a cavity for accelerating or controlling charged particles as described in Section 1. 3. A device for accelerating or controlling charged particles, which is formed by winding an amorphous magnetic alloy ribbon with a thickness of 15 μm or less, which partially contains crystals and has a composition represented by the following formula []. Core for cavity. Formula [] Fe _x (Si _p B _q X〓 _r ) _y {In the above formula [], X〓 represents one or both of P and C. x+y=100at%, of which y is 21~
It is 25.5at%. p+q+r=100%, of which p is 40
~75%, r is 0.01-24%. Further, y≦0.5p+1, y≦0.1p+19, y≧0.3p+2, and y≧0.13p+13.7. } 4 _X is P _{and C} , and under the conditions of The core for a cavity for accelerating or controlling charged particles according to claim 3, wherein t/q is 0.03 to 0.4. 5. A method for accelerating or controlling charged particles, which is formed by winding an amorphous magnetic alloy ribbon with a thickness of 15 μm or less, which partially contains crystals and has a composition represented by the following formula []. Core for cavity. Formula [] Fe _a T〓 _b ) _x X _y {In the above formula [], T〓 represents Co and/or Ni. X represents Si and B, or a combination of Si and B with P and/or C. x+y=100at%, of which y is 21~
It is 25.5at%. Also, a+b=100%, of which b is
It is 0.1-20%. Furthermore, when the content ratio of Si in X is p%,
p is 40 to 75%, and y≦0.5p+1, y≦0.1p+19, y≧0.3p+2, and y≧0.13p+13.7. When P and/or C are included in X, the total amount of P and C is 0.01 to 24% of X. } 6. Acceleration or control of charged particles characterized by winding an amorphous magnetic alloy ribbon with a thickness of 15 μm or less, which partially contains crystals and has a composition represented by the following formula [] Core for cavity. Formula [] (T〓 _c Mn _d ) _x X _y {In the above formula [], T〓 represents Fe or Fe and Co and/or Ni. X represents Si and B, or a combination of Si and B with P and/or C. x+y=100at%, of which y is 21~
It is 25.5at%. Moreover, c+d=100%, and d is 0.1 to 10%. Furthermore, when Co and/or Ni are included in T, the total amount of Co and Ni is 0.1 to 20% of T
It is. In addition, when the content ratio of Si in X is p%,
p is 40 to 75%, and y≦0.5p+1, y≦0.1p+19, y≧0.3p+2, and y≧0.13p+13.7. When P and/or C are included in X, the total amount of P and C is 0.01 to 24% of X. } 7. Acceleration or control of charged particles characterized by winding an amorphous magnetic alloy ribbon with a thickness of 15 μm or less, which partially contains crystals and has a composition represented by the following formula [] Core for cavity. Formula [] (T〓 _e T〓 _f ) _x X _y {In the above formula [], T〓 represents Fe or a combination of Fe and one or more of Co, Ni and Mn, and T〓 represents one or more B group elements, X represents Si and B, or a combination of Si and B with P and/or C. x+y=100at%, of which y is 21~
It is 25.5at%. Further, e+f=100%, and f is 0.1 to 10%. Furthermore, when Co and/or Ni are included in T, the total amount of Co and Ni is 0.1 to 20% of T
And, when Mn is included in T〓, Mn is 0.1 to 10% in T〓. In addition, when the content ratio of Si in X is p%,
p is 40 to 75%, and y≦0.5p+1, y≦0.1p+19, y≧0.3p+2, and y≧0.13p+13.7. When P and/or C are included in X, the total amount of P and C is 0.01 to 24% of X. }