JPH0331085B2 - - Google Patents

Info

Publication number
JPH0331085B2
JPH0331085B2 JP59164738A JP16473884A JPH0331085B2 JP H0331085 B2 JPH0331085 B2 JP H0331085B2 JP 59164738 A JP59164738 A JP 59164738A JP 16473884 A JP16473884 A JP 16473884A JP H0331085 B2 JPH0331085 B2 JP H0331085B2
Authority
JP
Japan
Prior art keywords
gas
cylindrical filter
introduction pipe
impeller
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59164738A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6142321A (ja
Inventor
Fujio Noguchi
Toshiro Kato
Koji Nagai
Isao Motohori
Yoshihiro Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP59164738A priority Critical patent/JPS6142321A/ja
Publication of JPS6142321A publication Critical patent/JPS6142321A/ja
Publication of JPH0331085B2 publication Critical patent/JPH0331085B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
JP59164738A 1984-08-06 1984-08-06 シランガス処理装置 Granted JPS6142321A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59164738A JPS6142321A (ja) 1984-08-06 1984-08-06 シランガス処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59164738A JPS6142321A (ja) 1984-08-06 1984-08-06 シランガス処理装置

Publications (2)

Publication Number Publication Date
JPS6142321A JPS6142321A (ja) 1986-02-28
JPH0331085B2 true JPH0331085B2 (enExample) 1991-05-02

Family

ID=15798962

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59164738A Granted JPS6142321A (ja) 1984-08-06 1984-08-06 シランガス処理装置

Country Status (1)

Country Link
JP (1) JPS6142321A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0344252Y2 (enExample) * 1984-12-28 1991-09-18
JP4497726B2 (ja) 1998-12-01 2010-07-07 株式会社荏原製作所 排ガス処理装置
KR100644994B1 (ko) 1998-12-01 2006-11-10 가부시키가이샤 에바라 세이사꾸쇼 배기가스처리장치
JP5750337B2 (ja) * 2011-08-15 2015-07-22 大陽日酸株式会社 ガス処理方法、ガス処理装置、微粉末の形成方法及び微粉末形成装置
CN112915748B (zh) * 2021-02-03 2021-10-08 湖州加怡新市热电有限公司 一种烟气脱硫系统

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49119869U (enExample) * 1973-02-12 1974-10-14
JPS5312777A (en) * 1976-07-22 1978-02-04 Sony Corp Centrifugal gas washing and separation apparatus
JPS54101675U (enExample) * 1977-12-28 1979-07-18
JPS5657423A (en) * 1979-10-16 1981-05-19 Matsushita Electric Industrial Co Ltd Central cleaner
JPS5658515A (en) * 1979-10-17 1981-05-21 Hitachi Ltd Dust collecting apparatus
JPS6038968B2 (ja) * 1979-12-12 1985-09-04 製鉄化学工業株式会社 半導体用ガスの除害法
JPS5794323A (en) * 1980-12-03 1982-06-11 Stanley Electric Co Ltd Treating method for waste gas of cvd apparatus

Also Published As

Publication number Publication date
JPS6142321A (ja) 1986-02-28

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