JPH0330981B2 - - Google Patents

Info

Publication number
JPH0330981B2
JPH0330981B2 JP21810184A JP21810184A JPH0330981B2 JP H0330981 B2 JPH0330981 B2 JP H0330981B2 JP 21810184 A JP21810184 A JP 21810184A JP 21810184 A JP21810184 A JP 21810184A JP H0330981 B2 JPH0330981 B2 JP H0330981B2
Authority
JP
Japan
Prior art keywords
decomposition
semiconductor thin
hydrofluoric acid
thin film
decomposition liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP21810184A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6196736A (ja
Inventor
Ayako Shimazaki
Rie Yamayoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Toshiba Electronic Device Solutions Corp
Original Assignee
Toshiba Corp
Toshiba Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Microelectronics Corp filed Critical Toshiba Corp
Priority to JP21810184A priority Critical patent/JPS6196736A/ja
Publication of JPS6196736A publication Critical patent/JPS6196736A/ja
Publication of JPH0330981B2 publication Critical patent/JPH0330981B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP21810184A 1984-10-17 1984-10-17 半導体薄膜の分解装置 Granted JPS6196736A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21810184A JPS6196736A (ja) 1984-10-17 1984-10-17 半導体薄膜の分解装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21810184A JPS6196736A (ja) 1984-10-17 1984-10-17 半導体薄膜の分解装置

Publications (2)

Publication Number Publication Date
JPS6196736A JPS6196736A (ja) 1986-05-15
JPH0330981B2 true JPH0330981B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-05-01

Family

ID=16714646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21810184A Granted JPS6196736A (ja) 1984-10-17 1984-10-17 半導体薄膜の分解装置

Country Status (1)

Country Link
JP (1) JPS6196736A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2909086B2 (ja) * 1989-01-20 1999-06-23 株式会社東芝 半導体基板表面の不純物回収方法及び装置
JP4516379B2 (ja) * 2004-08-18 2010-08-04 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 処理装置
JP4769439B2 (ja) * 2004-08-18 2011-09-07 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 処理装置
JP4769440B2 (ja) * 2004-08-18 2011-09-07 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 処理装置

Also Published As

Publication number Publication date
JPS6196736A (ja) 1986-05-15

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