JPH0329319Y2 - - Google Patents

Info

Publication number
JPH0329319Y2
JPH0329319Y2 JP1984142325U JP14232584U JPH0329319Y2 JP H0329319 Y2 JPH0329319 Y2 JP H0329319Y2 JP 1984142325 U JP1984142325 U JP 1984142325U JP 14232584 U JP14232584 U JP 14232584U JP H0329319 Y2 JPH0329319 Y2 JP H0329319Y2
Authority
JP
Japan
Prior art keywords
electrode
rotating shaft
cooling
water supply
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984142325U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6159662U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984142325U priority Critical patent/JPH0329319Y2/ja
Publication of JPS6159662U publication Critical patent/JPS6159662U/ja
Application granted granted Critical
Publication of JPH0329319Y2 publication Critical patent/JPH0329319Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Physical Vapour Deposition (AREA)
JP1984142325U 1984-09-21 1984-09-21 Expired JPH0329319Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984142325U JPH0329319Y2 (enExample) 1984-09-21 1984-09-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984142325U JPH0329319Y2 (enExample) 1984-09-21 1984-09-21

Publications (2)

Publication Number Publication Date
JPS6159662U JPS6159662U (enExample) 1986-04-22
JPH0329319Y2 true JPH0329319Y2 (enExample) 1991-06-21

Family

ID=30700649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984142325U Expired JPH0329319Y2 (enExample) 1984-09-21 1984-09-21

Country Status (1)

Country Link
JP (1) JPH0329319Y2 (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5220521Y2 (enExample) * 1972-02-21 1977-05-12
JPS5812267U (ja) * 1981-07-14 1983-01-26 株式会社リコー 真空蒸着装置における支持体

Also Published As

Publication number Publication date
JPS6159662U (enExample) 1986-04-22

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