JPH03292478A - 制動器付アクチュエータ - Google Patents

制動器付アクチュエータ

Info

Publication number
JPH03292478A
JPH03292478A JP2320172A JP32017290A JPH03292478A JP H03292478 A JPH03292478 A JP H03292478A JP 2320172 A JP2320172 A JP 2320172A JP 32017290 A JP32017290 A JP 32017290A JP H03292478 A JPH03292478 A JP H03292478A
Authority
JP
Japan
Prior art keywords
movable member
brake
actuator
valve
valve body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2320172A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0563672B2 (OSRAM
Inventor
Shigekazu Nagai
茂和 永井
Tetsuo Kukuminato
久々湊　哲夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Priority to JP2320172A priority Critical patent/JPH03292478A/ja
Publication of JPH03292478A publication Critical patent/JPH03292478A/ja
Publication of JPH0563672B2 publication Critical patent/JPH0563672B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
  • Actuator (AREA)
JP2320172A 1990-11-22 1990-11-22 制動器付アクチュエータ Granted JPH03292478A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2320172A JPH03292478A (ja) 1990-11-22 1990-11-22 制動器付アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2320172A JPH03292478A (ja) 1990-11-22 1990-11-22 制動器付アクチュエータ

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP22028483A Division JPS60113878A (ja) 1983-11-23 1983-11-23 制動器付アクチュエ−タの制御方法および装置

Publications (2)

Publication Number Publication Date
JPH03292478A true JPH03292478A (ja) 1991-12-24
JPH0563672B2 JPH0563672B2 (OSRAM) 1993-09-13

Family

ID=18118501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2320172A Granted JPH03292478A (ja) 1990-11-22 1990-11-22 制動器付アクチュエータ

Country Status (1)

Country Link
JP (1) JPH03292478A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103591362A (zh) * 2013-11-15 2014-02-19 河北工业大学 一种通断控制器专用执行器

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109538570A (zh) * 2018-12-10 2019-03-29 江苏大学 一种预紧式压电堆致密封圈振动的低摩擦气缸

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5164190A (ja) * 1974-11-30 1976-06-03 Toyoda Chuo Kenkyusho Kk Ryutaiakuchueetanoseigyohoho oyobi sonosochi
JPS58169201U (ja) * 1982-04-09 1983-11-11 三菱重工業株式会社 往復駆動装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5164190A (ja) * 1974-11-30 1976-06-03 Toyoda Chuo Kenkyusho Kk Ryutaiakuchueetanoseigyohoho oyobi sonosochi
JPS58169201U (ja) * 1982-04-09 1983-11-11 三菱重工業株式会社 往復駆動装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103591362A (zh) * 2013-11-15 2014-02-19 河北工业大学 一种通断控制器专用执行器

Also Published As

Publication number Publication date
JPH0563672B2 (OSRAM) 1993-09-13

Similar Documents

Publication Publication Date Title
US4765140A (en) Piezoelectric servomechanism apparatus
KR100388348B1 (ko) 전기기계식위치결정기
EP0471371A2 (en) Displacement-measuring apparatus
US20020148518A1 (en) Piezoelectrically actuated single-stage servovalve
BR0014967A (pt) Sistemas atuador e de controle de fluxo, e, métodos para controlar um atuador
EP0148630B1 (en) Actuator for control valves and related systems
JPH06323457A (ja) 圧電形圧力制御弁
US6836056B2 (en) Linear motor having piezo actuators
CA2323189A1 (en) Dual motion electrostatic actuator design for mems micro-relay
AU2001264608A1 (en) Linear actuator control structure
KR102242758B1 (ko) 전기 기계적 소자를 활성시키는 방법
WO2001071823A3 (en) Method of control for a self-sensing magnetostrictive actuator
JPH03292478A (ja) 制動器付アクチュエータ
JPH01321873A (ja) 圧電式トルク・モータ
JPH07108101B2 (ja) リニアアクチュエータ駆動制御装置
JP2002534764A (ja) タッチモード静電作動器の寿命を増加させるツイン構成
EP0508781A2 (en) Proportional solenoid actuator and pump system including same
JPS60113878A (ja) 制動器付アクチュエ−タの制御方法および装置
US6279871B1 (en) Actuator device
US20050067236A1 (en) Piezoelectric actuator
JP3624635B2 (ja) 積層型アクチュエータおよび移動装置
EP1232355A1 (en) Piezo electric valve
JPH10178032A (ja) ワイヤクランプ機構およびこれを用いたワイヤボンディング装置
JPH0265939A (ja) 静圧流体軸受摺動体の駆動装置
JP2622344B2 (ja) 電−空変換装置およびこれを用いたアクチュエータシステム