JPH03291392A - Method for electroforming electroformed master disk and electroformed master disk - Google Patents
Method for electroforming electroformed master disk and electroformed master diskInfo
- Publication number
- JPH03291392A JPH03291392A JP9045690A JP9045690A JPH03291392A JP H03291392 A JPH03291392 A JP H03291392A JP 9045690 A JP9045690 A JP 9045690A JP 9045690 A JP9045690 A JP 9045690A JP H03291392 A JPH03291392 A JP H03291392A
- Authority
- JP
- Japan
- Prior art keywords
- master disk
- electroforming
- master
- electroformed
- recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005323 electroforming Methods 0.000 title claims abstract description 73
- 238000000034 method Methods 0.000 title claims description 22
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 230000005611 electricity Effects 0.000 claims description 7
- 229920002120 photoresistant polymer Polymers 0.000 abstract description 31
- 239000011521 glass Substances 0.000 abstract description 17
- 238000007747 plating Methods 0.000 abstract description 5
- 238000006243 chemical reaction Methods 0.000 abstract description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052709 silver Inorganic materials 0.000 abstract description 3
- 239000004332 silver Substances 0.000 abstract description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 85
- 229910052759 nickel Inorganic materials 0.000 description 43
- 230000003287 optical effect Effects 0.000 description 10
- 230000002093 peripheral effect Effects 0.000 description 8
- 239000008151 electrolyte solution Substances 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012805 post-processing Methods 0.000 description 2
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000010137 moulding (plastic) Methods 0.000 description 1
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 description 1
- DITXJPASYXFQAS-UHFFFAOYSA-N nickel;sulfamic acid Chemical compound [Ni].NS(O)(=O)=O DITXJPASYXFQAS-UHFFFAOYSA-N 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000010076 replication Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は光で検出できる光学的な変化で情報信号を記録
される光ディスクの製造方法に関し、特に記録原盤より
情報を転写して電鋳原版を作製するための電鋳方法に関
する。Detailed Description of the Invention (Industrial Application Field) The present invention relates to a method for manufacturing an optical disc in which information signals are recorded by optical changes that can be detected with light, and in particular to a method for producing an optical disc in which information is transferred from a recording master to an electroformed master plate. This invention relates to an electroforming method for producing.
近年、コンパクトディスク(CD)やレーザーディスク
(LD) 、光磁気ディスク等の様に、光スポットによ
って情報信号を記録/再生する光デイスク媒体が実用化
されている。これらは、非常に高密度の記録が可能とな
ると共に、アクセスが速く、信号面がすり減ることがな
いという特徴がある。In recent years, optical disk media such as compact disks (CDs), laser disks (LDs), and magneto-optical disks, which record and reproduce information signals using optical spots, have been put into practical use. These are characterized in that they enable very high density recording, are fast to access, and do not wear out the signal surface.
この欅な光デイスク媒体は、アナログ信号である情報信
号をデジタル信号に変換して記録することにより、ダイ
ナミックレンジを上げ、雑音に強い記録としている。一
般にアナログ信号からデジタル信号への変換はパルス符
号変調(PCM)により行われており、PCM信号に変
調された情報信号は、光スポットによりディスク上の記
録膜に凹凸のピット、反射膜の有無、変形、屈折率変化
、磁化反転といったマークを書き込むことにより記録さ
れている。This popular optical disc medium increases the dynamic range and records data by converting analog information signals into digital signals, making it resistant to noise. In general, conversion from analog signals to digital signals is performed by pulse code modulation (PCM), and the information signal modulated into the PCM signal is transmitted by a light spot to the recording film on the disk, such as uneven pits, presence or absence of a reflective film, etc. It is recorded by writing marks such as deformation, refractive index change, and magnetization reversal.
従来、この様な光ディスクの製造工程としては、一般に
ガラス盤上に記録材料であるフォトレジスト又は金属層
を所定の厚さに形成し、レーザ光スポットで情報(ビッ
ト列)を露光記録して記録原盤を作製する。そして、前
記記録原盤をニッケル電鋳し、この記録原盤面からピッ
ト列を転写したニッケルマスター盤を得る。そして、剥
離膜処理をした前記ニッケルマスター盤を同様なメツキ
条件にて電鋳し、剥離して数枚のマザー盤を得る。Conventionally, the manufacturing process for such optical discs involves forming a photoresist or metal layer, which is a recording material, to a predetermined thickness on a glass disc, and exposing and recording information (bit strings) with a laser beam spot to create a recording master disc. Create. Then, the recording master disk is subjected to nickel electroforming to obtain a nickel master disk on which pit rows are transferred from the surface of the recording master disk. Then, the nickel master disk that has been treated with a peeling film is electroformed under the same plating conditions and peeled off to obtain several mother disks.
更に、各マザー盤を同様な処理をし電鋳してそれぞれ数
枚のスタンパ盤を得る。Further, each mother disk is subjected to the same treatment and electroformed to obtain several stamper disks.
そこで、該スタンパ盤を用いてプラス千ツク成形で大量
のプラスチック基板を作成する。更に、これらの方法で
前記記録原盤のピント列を転写したプラスチック基板は
用途に応じてそれぞれの膜が蒸着され、組立てられて最
終ディスクとなる。Therefore, a large amount of plastic substrates are produced by plastic molding using the stamper board. Further, on the plastic substrate onto which the focus row of the recording master is transferred by these methods, various films are deposited depending on the intended use, and the plastic substrate is assembled into a final disk.
尚、本明細書中においては、前記ニッケルマスター盤、
マザー盤及びスタンパ盤の如く、前記ビット列を転写す
るために電鋳して得られた電鋳層からなる転写盤を「電
鋳原版」と総称すると共に、マザー盤及びスタンパ盤を
得るために前記ニッケルマスター盤及びマザー盤の裏面
をガラス盤に密着させたものも便宜上「記録原盤」と総
称する。In addition, in this specification, the nickel master disc,
Transfer disks made of electroformed layers obtained by electroforming in order to transfer the bit strings, such as mother disks and stamper disks, are collectively referred to as "electroformed original plates," and For convenience, nickel master discs and mother discs whose backs are in close contact with glass discs are collectively referred to as "recording master discs."
例えば、ニッケルマスター盤の製造工程について図を参
照して説明すると、第3図に示す様に、フォトレジスト
原盤(記録原盤)10は、光学研磨されたガラス盤6上
に塗布されたフォトレジスト4にレーザ光スポットでピ
ット列13をカッティング後、現像することにより作製
されている。そして、該フォトレジスト原盤lOをニッ
ケル電鋳してニッケルマスター盤11を得るために、前
記フォトレジスト4の表面には銀鏡反応等により導電膜
5が形成されている。For example, to explain the manufacturing process of a nickel master disk with reference to the drawings, as shown in FIG. It is produced by cutting the pit row 13 with a laser beam spot and then developing it. In order to obtain a nickel master disk 11 by electroforming the photoresist master disk 10, a conductive film 5 is formed on the surface of the photoresist 4 by silver mirror reaction or the like.
そして、前記フォトレジスト原盤10を例えばスルファ
ミン酸ニッケル浴の電解液内に浸せきし、前記導電膜5
に通電することにより、前記導電膜5上に約0.3m−
程度の厚みの比較的肉厚のニッケル電鋳層3を形成する
わけであるが、マウンティングプレートの陰電極8によ
って前記導電膜5を直接に通電しようとすると、前記陰
電極8の構造が複雑になると共に前記導電膜5上に均一
な厚さでニッケル電鋳層3を形成するのが難しい。Then, the photoresist master 10 is immersed in an electrolytic solution of, for example, a nickel sulfamate bath, and the conductive film 5 is
By applying current to the conductive film 5, about 0.3 m-
However, if the conductive film 5 is directly energized by the negative electrode 8 of the mounting plate, the structure of the negative electrode 8 becomes complicated. At the same time, it is difficult to form the nickel electroformed layer 3 with a uniform thickness on the conductive film 5.
そこで、前記フォトレジスト原盤lOの外周に電鋳用導
電リング12を載置し、該電鋳用導電リング12を介し
て前記導電膜5の全周囲から通電している。即ち、前記
電鋳用導電リング12は厚さ0.2++n程度のニッケ
ルやその他の導電性の素材からなるリング状部材であり
、前記フォトレジスト原盤10の外周から適宜張り出す
ように構成されているので、前記フォトレジスト原盤1
0から張り出した部分が、陰電極8と抑え部7からなる
マウンティングプレートと称される部材により挟持され
ており、前記陰電極8から前記電鋳用導電リング12を
介して前記導電膜5に通電できるようになっている。Therefore, a conductive ring 12 for electroforming is placed on the outer periphery of the photoresist master disk 1O, and electricity is supplied from the entire periphery of the conductive film 5 via the conductive ring 12 for electroforming. That is, the electroforming conductive ring 12 is a ring-shaped member made of nickel or other conductive material with a thickness of about 0.2++n, and is configured to protrude appropriately from the outer periphery of the photoresist master 10. Therefore, the photoresist master 1
The part protruding from 0 is held between a member called a mounting plate consisting of a negative electrode 8 and a holding part 7, and current is passed from the negative electrode 8 to the conductive film 5 via the electroforming conductive ring 12. It is now possible to do so.
従って、第4図に示すように、前記フォトレジスト原盤
IO上には前記ニッケル電鋳層3と前記電鋳用導電リン
グ12とが一体となったマスター盤11の原形が形成さ
れる。Therefore, as shown in FIG. 4, a master disk 11 in which the nickel electroforming layer 3 and the electroforming conductive ring 12 are integrated is formed on the photoresist master disk IO.
その後、前記フォトレジスト原盤10、前記ニッケル電
鋳層3および前記電鋳用導電リング12が一体となった
ものを前記電解液から取り出したのちに、前記ニッケル
電鋳層3の表面にッケルマスター盤11の裏面になる部
分)を研磨して平滑化処理を行い、その後に前記フォト
レジスト原盤10と前記ニッケル電鋳層3とを剥離する
ことにより、前記ニッケル電鋳層3と前記電鋳用導電リ
ング12とが一体となったニッケルマスター盤11が完
成する。Thereafter, after the photoresist master disk 10, the nickel electroformed layer 3, and the electroforming conductive ring 12 are taken out from the electrolytic solution, a nickel master disk 11 is placed on the surface of the nickel electroformed layer 3. The portion that will become the back surface of the nickel electroformed layer 3 and the electroformed conductive ring are polished and smoothed, and then the photoresist master 10 and the nickel electroformed layer 3 are separated. Nickel master board 11 is completed by combining 12 with nickel master board 11.
また、前記ニッケルマスター盤11の裏面をガラス盤に
密着させたものを同様なメツキ条件にて電鋳し、研磨及
び剥離して数枚のマザー盤を得る場合、或いは前記マザ
ー盤から同様な処理によってスタンパ盤を得る場合にお
いても同じように、ニッケル電鋳層と電鋳用導電リング
とが一体に形成される。In addition, when the back side of the nickel master disk 11 is brought into close contact with a glass disk and electroformed under similar plating conditions, polished and peeled to obtain several mother disks, or when the mother disk is subjected to similar treatment. In the case where a stamper plate is obtained by the same method, the nickel electroforming layer and the electroforming conductive ring are formed integrally.
しかしながら、上記の如き電鋳工程において得られた電
鋳層及び導電リングから成る電鋳原版は、前記導電リン
グの外周端がガラス盤の外周端から張り出した状態で該
ガラス盤に密着されているので、電鋳工程後における水
洗い工程や裏面の研磨工程といった後工程中に前記導電
リングの外周端が他の部材に接触し易く、前起電梼原版
とガラス盤とが剥離するといった問題がある。However, the electroformed original plate comprising the electroformed layer and the conductive ring obtained in the electroforming process as described above is tightly attached to the glass disk with the outer peripheral end of the conductive ring protruding from the outer peripheral end of the glass disk. Therefore, the outer peripheral edge of the conductive ring tends to come into contact with other members during post-processes such as washing with water and polishing the back surface after the electroforming process, resulting in problems such as separation of the pre-electromotive Yusuhara plate and the glass plate. .
このように、電鋳直後における上記の如き電鋳原版とガ
ラス盤との剥離は、その後の製造工程において、例えば
フォトレジスト層の確実な固定が失われると、該フォト
レジスト層により形成される各複製層等にキズが発生す
るといった問題があったり、また、この剥離した部分か
ら前記電鋳原版とガラス盤との間に、研磨液や電解液が
侵入することにより、異物が付着して傷の発生を多くす
るといった極めて大きな問題があった。As described above, the above-mentioned separation between the electroforming original plate and the glass disk immediately after electroforming may occur during the subsequent manufacturing process, for example, if the secure fixation of the photoresist layer is lost, each layer formed by the photoresist layer will peel off. There may be problems such as scratches occurring on the replication layer, etc. Also, if the polishing liquid or electrolyte enters between the electroformed original plate and the glass disk from this peeled part, foreign matter may adhere and cause scratches. There was an extremely serious problem in that the number of occurrences increased.
本考案の目的は上記問題点を解消することにあり、ガラ
ス盤と電鋳原版との剥離を防止し、このガラス盤と電鋳
原版との間に水分が侵入することを防止できる電鋳方法
を提供することにある。The purpose of this invention is to solve the above problems, and is an electroforming method that can prevent separation between the glass disk and the electroformed original plate, and prevent moisture from entering between the glass disk and the electroformed original plate. Our goal is to provide the following.
本発明の上記目的は、記録原盤の記録面上に電鋳層を形
成することにより前記記録原盤の情報を転写した電鋳原
版を作製する電鋳方法において、前記記録原盤の外径以
下の外径を有する電鋳用導電リングを前記記録原盤の記
録面外周に載置し、該電鋳用導電リングを介して前記記
録原盤の記録面を通電することにより前記記録原盤の記
録面上に電鋳層を電鋳して電鋳原版を作製することを特
徴とする電鋳原版電鋳方法により達成される。The above-mentioned object of the present invention is to provide an electroforming method for producing an electroformed original plate to which information of the recording master is transferred by forming an electroformed layer on the recording surface of the recording master, the outer diameter of which is equal to or less than the outer diameter of the recording master. An electroforming conductive ring having a diameter is placed on the outer periphery of the recording surface of the recording master, and electricity is applied to the recording surface of the recording master through the electroforming conductive ring. This is achieved by an electroforming original plate electroforming method characterized by producing an electroforming original plate by electroforming a cast layer.
又、他の手段によれば、記録原盤の情報を転写するため
に前記記録原盤の記録面上に電鋳層を形成して成る電鋳
原版であって、前記記録原盤の外径以下の外径を有する
と共に前記記録原盤の記録面外周に載置される電鋳用導
電リングと、該電鋳用導電リングを介して前記記録原盤
の記録面を通電することにより前記記録原盤の記録面上
に電鋳される電鋳層とからなる電鋳原版により達成され
〔実施態様〕
以下、添付図面を参照して本発明の一実施態様を詳細に
説明する。According to another means, there is provided an electroformed original plate comprising an electroformed layer formed on the recording surface of the recording master in order to transfer information on the recording master, the outer diameter of which is equal to or less than the outer diameter of the recording master. a conductive ring for electroforming that has a diameter and is placed on the outer periphery of the recording surface of the recording master; and by applying electricity to the recording surface of the recording master through the conductive ring for electroforming, the recording surface of the recording master is [Embodiment] Hereinafter, one embodiment of the present invention will be described in detail with reference to the accompanying drawings.
第1図は光デイスク記録媒体の製造工程における本発明
の電鋳方法を用いたニッケルマスター盤の電鋳工程を示
す要部断面図である。FIG. 1 is a sectional view of a main part showing the electroforming process of a nickel master disk using the electroforming method of the present invention in the manufacturing process of an optical disk recording medium.
先ず、従来同様に、フォトレジスト原盤(記録原盤)1
0は、光学研磨されたガラス盤6上に塗布されたフォト
レジスト4にレーザ光スポットでピット列13をカッテ
ィング後、現像することにより作製されている。そして
、該フォトレジスト原盤IOをニッケル電鋳してニッケ
ルマスター盤lを得るために、前記フォトレジスト4の
表面には銀鏡反応等により導電膜5が形成される。First, as before, photoresist master (recording master) 1
0 is produced by cutting pit rows 13 with a laser beam spot on a photoresist 4 coated on an optically polished glass disk 6, and then developing the photoresist 4. Then, in order to obtain a nickel master disk 1 by electroforming the photoresist master disk IO with nickel, a conductive film 5 is formed on the surface of the photoresist 4 by silver mirror reaction or the like.
そして、前記フォトレジスト原g110表面の外周に該
フォトレジスト原盤10の外径とほぼ同じ外径を有する
電鋳用導電リング2を載置し、該フォトレジスト原盤1
0を陰電極8と抑え部7からなるマウンティングプレー
トと称される部材にセットする。この時、円環状の導電
プレート9が、前記電鋳用導電リング2と前記陰電極8
との間に連架され、前記電鋳用導電リング2と前記陰電
極8とを導通する。Then, an electroforming conductive ring 2 having an outer diameter approximately the same as the outer diameter of the photoresist master 10 is placed on the outer periphery of the surface of the photoresist master g110, and the photoresist master 1
0 is set on a member called a mounting plate consisting of a negative electrode 8 and a holding part 7. At this time, the annular conductive plate 9 connects the electroforming conductive ring 2 and the cathode 8.
The conductive ring 2 for electroforming and the negative electrode 8 are connected to each other.
そこで、前記フォトレジスト原盤lOを例えばスルファ
ミン酸ニンケル浴の電解液内に浸せきし、前記導電プレ
ート9及び電鋳用導電リング2を介して前記導電膜5の
全周囲から通電することにより、該導電膜5上に均一な
厚さでニッケル電鋳層3を形成することができる。そし
て、前記マウンティングプレートから前記フォトレジス
ト原盤10を取り外すと共に前記導電プレート9も前記
電鋳用導電リング2から外すことにより、第2図に示す
ように、前記フォトレジスト原盤10上には前記ニッケ
ル電鋳層3と電鋳用導電リング2とが一体となったマス
ター盤1の原形が形成される。Therefore, the photoresist master 1O is immersed in an electrolytic solution such as a sulfamic acid nickel bath, and electricity is applied from the entire periphery of the conductive film 5 through the conductive plate 9 and the conductive ring 2 for electroforming. The electroformed nickel layer 3 can be formed on the film 5 with a uniform thickness. By removing the photoresist master 10 from the mounting plate and also removing the conductive plate 9 from the electroforming conductive ring 2, as shown in FIG. The original shape of the master disk 1 in which the cast layer 3 and the electroforming conductive ring 2 are integrated is formed.
その後、前記フォトレジスト原盤10、前記ニッケル電
鋳層3および前記電鋳用導電リング2が一体となったも
のを前記電解液から取り出したのちに、前記ニッケル電
鋳層3の表面にッケルマスター盤1の裏面になる部分)
を研磨して平滑化処理を行い、その後に前記フォトレジ
スト原盤IOと前記ニッケル電鋳層3とを剥離すること
により、前記ニッケル電鋳層3と前記電鋳用導電リング
2とが一体となったニッケルマスター盤lが完成する。Thereafter, after the photoresist master disk 10, the nickel electroformed layer 3, and the electroforming conductive ring 2 are taken out from the electrolytic solution, a nickel master disk 1 is placed on the surface of the nickel electroformed layer 3. )
By polishing and smoothing, and then peeling off the photoresist master IO and the nickel electroformed layer 3, the nickel electroformed layer 3 and the electroforming conductive ring 2 are integrated. The nickel master edition is completed.
この時、本発明に基づ(上記電鋳方法によれば、前記電
鋳用導電リング2の外周端が前記ガラス盤6の外周端か
ら張り出すことなく、ニッケルマスター盤lが前記フォ
トレジスト原盤10上に密着されているので、上記の如
き後処理工程中に前記電鋳用導電リング2の外周端が他
の部材に接触して前記ニッケルマスター盤1とガラス盤
10とが剥離する危険を回避することができる。At this time, based on the present invention (according to the above-mentioned electroforming method), the outer peripheral end of the electroforming conductive ring 2 does not protrude from the outer peripheral end of the glass disk 6, and the nickel master disk l is connected to the photoresist master disk. 10, there is no risk that the outer peripheral end of the electroforming conductive ring 2 will come into contact with other members during the post-processing process as described above, and the nickel master disk 1 and the glass disk 10 will separate. can be avoided.
従って、前記ニッケルマスター盤1とガラス盤10とが
剥離した部分から該ニッケルマスター盤lとガラス盤1
0との間に、研磨液や電解液が侵入することにより、異
物が付着して前記ニッケルマスター盤1に発生する傷を
防ぐことができる。Therefore, from the part where the nickel master disk 1 and the glass disk 10 are separated, the nickel master disk 1 and the glass disk 1 are separated.
By entering the polishing liquid or electrolyte between the nickel master disk 1 and the nickel master disk 1, it is possible to prevent foreign matter from adhering to the nickel master disk 1 and causing scratches on the nickel master disk 1.
なお、上記実施態様においては、ニッケルマスター盤の
電鋳工程について述べたが、本発明はこれに限定される
ものではなく、前記ニッケルマスター盤の裏面をガラス
盤に密着させたものを同様なメツキ条件にて電鋳し、研
磨及び剥離して数枚のマザー盤を得る場合、或いは前記
マザー盤から同様な処理によってスタンパ盤を得る場合
においても同じように応用することができる。In the above embodiment, the electroforming process of the nickel master disk was described, but the present invention is not limited thereto. The present invention can be similarly applied to the case where several mother disks are obtained by electroforming under certain conditions, polished and peeled, or when a stamper disk is obtained from the mother disk through similar processing.
以上述べたように、本発明によれば、記録原盤の記録面
上に電鋳層を形成することにより前記記録原盤の情報を
転写した電鋳原版を作製する電鋳方法において、前記記
録原盤の外径以下の外径を有する電鋳用導電リングを前
記記録原盤の記録面外周に載置し、該電鋳用導電リング
を介して前記記録原盤の記録面を通電することにより前
記記録原盤の記録面上に電鋳層を電鋳して電鋳原版を作
製する。As described above, according to the present invention, in the electroforming method of producing an electroformed master plate to which information of the recording master is transferred by forming an electroformed layer on the recording surface of the recording master, A conductive ring for electroforming having an outer diameter equal to or less than the outer diameter is placed on the outer periphery of the recording surface of the recording master, and electricity is applied to the recording surface of the recording master through the conductive ring for electroforming, thereby forming the recording master. An electroformed original plate is produced by electroforming an electroformed layer on the recording surface.
即ち、前記電鋳用導電リングの外周端が前記記録原盤の
外周端から張り出すことなく、前記電鋳原版が前記記録
原盤上に密着されているので、上記の如き後処理工程中
に前記電鋳用導電リングの外周端が他の部材に接触して
前記記録原盤と電鋳原版とが剥離する危険を回避するこ
とができる。That is, since the outer peripheral end of the electroforming conductive ring does not protrude from the outer peripheral end of the recording master, and the electroforming master is in close contact with the recording master, the electroforming during the post-processing process as described above. It is possible to avoid the risk that the outer circumferential end of the conductive ring for casting will come into contact with another member and the recording master and the electroforming master will separate.
従って、前記記録原盤と電鋳原版との間の剥離が回避さ
れ、該記録原盤と電鋳原版との剥離現象による水分等の
侵入が回避されるので、前記電鋳原版の電鋳層のキズ等
の発生を防止することができる良好な電鋳方法を提供で
きる。Therefore, peeling between the recording master and the electroformed master is avoided, and the intrusion of moisture and the like due to the peeling phenomenon between the recording master and the electroformed master is avoided, so that scratches on the electroformed layer of the electroformed master are avoided. It is possible to provide a good electroforming method that can prevent the occurrence of such problems.
第1図は本発明の一実施11樟に基づく光ディスクの製
造工程における電鋳方法を用いたニッケルマスター盤の
電鋳工程を示す要部断面図、第2図は本発明の一実施U
様に基づくニッケルマスター盤の断面図、第3図は従来
の光ディスクの製造工程における電鋳方法を用いたニッ
ケルマスター盤の電鋳工程を示す要部断面図、第4図は
従来のニッケルマスター盤の断面図である。
(図中符号)
1−・ニッケルマスター盤
2・電鋳用導電リング 3−電鋳層
5−導電膜
フォトレジスト
ガラス盤
陰電極
フォトレジスト原盤
ニッケルマスター盤
電鋳用導電リング 13− ビット列。
7−抑え部
9・−導電プレート
(ほか3名)
1、事件の表示
平成2年特許順第90456 号
2、発明の名称
電鋳原版電鋳方法及び電鋳原版
3、補正をする者
事件との関係:特許出願人
名称 (520)富士写真フィルム株式会社4、代理
人 〒100
住所 東泉1盲恒亜帽勤v13丁目8番1号虎の門三
井ビルU階栄光特許事務所
6、補正により増加する請求項の数:07、補正の対象
: 明細書の「発明の詳細な説明」の櫂8、補正の内容
:
(1)明細書第7頁17行目の「付着して傷jの後に「
あるいはディフェクト」を挿入する。FIG. 1 is a sectional view of a main part showing the electroforming process of a nickel master disk using the electroforming method in the manufacturing process of an optical disk based on Embodiment 11 of the present invention, and FIG. 2 is an embodiment U of the present invention.
Figure 3 is a cross-sectional view of the main parts of a nickel master disc using the electroforming method in the conventional optical disc manufacturing process, and Figure 4 is a cross-sectional view of a conventional nickel master disc. FIG. (Symbols in the diagram) 1--Nickel master disk 2-Electroforming conductive ring 3-Electroforming layer 5-Conductive film photoresist glass disk negative electrode Photoresist master disk Nickel master disk electroforming conductive ring 13-Bit string. 7 - Retaining part 9 - Conductive plate (3 others) 1. Indication of the case Patent Order No. 90456 of 1990 2. Name of the invention Electroforming original plate Electroforming method and electroforming original plate 3. Person making the amendment Case and Relationship: Patent Applicant Name (520) Fuji Photo Film Co., Ltd. 4, Agent 100 Address: Tosen 1 Boku Koya Hatsutsugu v 13-chome 8-1 Toranomon Mitsui Building U Floor Eiko Patent Office 6, by amendment Increased number of claims: 07, subject of amendment: paddle 8 in the “Detailed Description of the Invention” of the specification, content of the amendment: (1) “Adhesive scratches j” on page 7, line 17 of the specification. later"
Or insert "Defect".
Claims (2)
より前記記録原盤の情報を転写した電鋳原版を作製する
電鋳方法において、前記記録原盤の外径以下の外径を有
する電鋳用導電リングを前記記録原盤の記録面外周に載
置し、該電鋳用導電リングを介して前記記録原盤の記録
面を通電することにより前記記録原盤の記録面上に電鋳
層を電鋳して電鋳原版を作製することを特徴とする電鋳
原版電鋳方法。(1) In an electroforming method for producing an electroformed original plate to which information of the recording master is transferred by forming an electroformed layer on the recording surface of the recording master, the outer diameter is equal to or less than the outer diameter of the recording master. An electroforming conductive ring is placed on the outer periphery of the recording surface of the recording master, and electricity is applied to the recording surface of the recording master through the electroforming conductive ring to form an electroformed layer on the recording surface of the recording master. An electroforming method for an electroforming original plate, which is characterized by producing an electroforming original plate by electroforming.
の記録面上に電鋳層を形成して成る電鋳原版であって、
前記記録原盤の外径以下の外径を有すると共に前記記録
原盤の記録面外周に載置される電鋳用導電リングと、該
電鋳用導電リングを介して前記記録原盤の記録面を通電
することにより前記記録原盤の記録面上に電鋳される電
鋳層とからなる電鋳原版。(2) An electroformed master plate comprising an electroformed layer formed on the recording surface of the recording master in order to transfer information on the recording master,
an electroforming conductive ring having an outer diameter equal to or less than the outer diameter of the recording master and placed on the outer periphery of the recording surface of the recording master, and supplying electricity to the recording surface of the recording master through the electroforming conductive ring; An electroformed original plate comprising an electroformed layer electroformed on the recording surface of the recording master.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2090456A JP2916542B2 (en) | 1990-04-06 | 1990-04-06 | Electroforming method of electroforming original plate and electroforming original plate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2090456A JP2916542B2 (en) | 1990-04-06 | 1990-04-06 | Electroforming method of electroforming original plate and electroforming original plate |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03291392A true JPH03291392A (en) | 1991-12-20 |
JP2916542B2 JP2916542B2 (en) | 1999-07-05 |
Family
ID=13999120
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2090456A Expired - Lifetime JP2916542B2 (en) | 1990-04-06 | 1990-04-06 | Electroforming method of electroforming original plate and electroforming original plate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2916542B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0907165A1 (en) * | 1997-02-24 | 1999-04-07 | Seiko Epson Corporation | Original board for manufacturing optical disk stampers, optical disk stamper manufacturing method, and optical disk |
CN103966632A (en) * | 2014-04-26 | 2014-08-06 | 昆山允升吉光电科技有限公司 | Manufacture method for mask plate |
CN103974548A (en) * | 2014-04-26 | 2014-08-06 | 昆山允升吉光电科技有限公司 | Method for manufacturing mask plate |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61191467U (en) * | 1985-05-17 | 1986-11-28 | ||
JPS6244070U (en) * | 1985-09-04 | 1987-03-17 |
-
1990
- 1990-04-06 JP JP2090456A patent/JP2916542B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61191467U (en) * | 1985-05-17 | 1986-11-28 | ||
JPS6244070U (en) * | 1985-09-04 | 1987-03-17 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0907165A1 (en) * | 1997-02-24 | 1999-04-07 | Seiko Epson Corporation | Original board for manufacturing optical disk stampers, optical disk stamper manufacturing method, and optical disk |
EP0907165A4 (en) * | 1997-02-24 | 2003-01-02 | Seiko Epson Corp | Original board for manufacturing optical disk stampers, optical disk stamper manufacturing method, and optical disk |
CN103966632A (en) * | 2014-04-26 | 2014-08-06 | 昆山允升吉光电科技有限公司 | Manufacture method for mask plate |
CN103974548A (en) * | 2014-04-26 | 2014-08-06 | 昆山允升吉光电科技有限公司 | Method for manufacturing mask plate |
Also Published As
Publication number | Publication date |
---|---|
JP2916542B2 (en) | 1999-07-05 |
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