JPH0328775B2 - - Google Patents

Info

Publication number
JPH0328775B2
JPH0328775B2 JP58016635A JP1663583A JPH0328775B2 JP H0328775 B2 JPH0328775 B2 JP H0328775B2 JP 58016635 A JP58016635 A JP 58016635A JP 1663583 A JP1663583 A JP 1663583A JP H0328775 B2 JPH0328775 B2 JP H0328775B2
Authority
JP
Japan
Prior art keywords
electric field
field
electrode
electrodes
uniform magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58016635A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59143252A (ja
Inventor
Norihiro Naito
Morio Ishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP58016635A priority Critical patent/JPS59143252A/ja
Publication of JPS59143252A publication Critical patent/JPS59143252A/ja
Publication of JPH0328775B2 publication Critical patent/JPH0328775B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP58016635A 1983-02-03 1983-02-03 重畳場質量分析装置 Granted JPS59143252A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58016635A JPS59143252A (ja) 1983-02-03 1983-02-03 重畳場質量分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58016635A JPS59143252A (ja) 1983-02-03 1983-02-03 重畳場質量分析装置

Publications (2)

Publication Number Publication Date
JPS59143252A JPS59143252A (ja) 1984-08-16
JPH0328775B2 true JPH0328775B2 (enExample) 1991-04-22

Family

ID=11921814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58016635A Granted JPS59143252A (ja) 1983-02-03 1983-02-03 重畳場質量分析装置

Country Status (1)

Country Link
JP (1) JPS59143252A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61110957A (ja) * 1984-11-06 1986-05-29 Jeol Ltd 重畳場質量分析装置
GB8912580D0 (en) * 1989-06-01 1989-07-19 Vg Instr Group Charged particle energy analyzer and mass spectrometer incorporating it
JP3867048B2 (ja) 2003-01-08 2007-01-10 株式会社日立ハイテクノロジーズ モノクロメータ及びそれを用いた走査電子顕微鏡

Also Published As

Publication number Publication date
JPS59143252A (ja) 1984-08-16

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