JPS59143252A - 重畳場質量分析装置 - Google Patents

重畳場質量分析装置

Info

Publication number
JPS59143252A
JPS59143252A JP58016635A JP1663583A JPS59143252A JP S59143252 A JPS59143252 A JP S59143252A JP 58016635 A JP58016635 A JP 58016635A JP 1663583 A JP1663583 A JP 1663583A JP S59143252 A JPS59143252 A JP S59143252A
Authority
JP
Japan
Prior art keywords
electric field
electrodes
potential
electrode
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58016635A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0328775B2 (enExample
Inventor
Norihiro Naito
統広 内藤
Morio Ishihara
石原　盛男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
NTT Inc
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP58016635A priority Critical patent/JPS59143252A/ja
Publication of JPS59143252A publication Critical patent/JPS59143252A/ja
Publication of JPH0328775B2 publication Critical patent/JPH0328775B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP58016635A 1983-02-03 1983-02-03 重畳場質量分析装置 Granted JPS59143252A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58016635A JPS59143252A (ja) 1983-02-03 1983-02-03 重畳場質量分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58016635A JPS59143252A (ja) 1983-02-03 1983-02-03 重畳場質量分析装置

Publications (2)

Publication Number Publication Date
JPS59143252A true JPS59143252A (ja) 1984-08-16
JPH0328775B2 JPH0328775B2 (enExample) 1991-04-22

Family

ID=11921814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58016635A Granted JPS59143252A (ja) 1983-02-03 1983-02-03 重畳場質量分析装置

Country Status (1)

Country Link
JP (1) JPS59143252A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61110957A (ja) * 1984-11-06 1986-05-29 Jeol Ltd 重畳場質量分析装置
JP2857686B2 (ja) * 1989-06-01 1999-02-17 マイクロマス リミテッド 荷電粒子エネルギー分析器及びそれを組み込んだ質量分析計
JP2004214111A (ja) * 2003-01-08 2004-07-29 Hitachi High-Technologies Corp モノクロメータ及びそれを用いた走査電子顕微鏡

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61110957A (ja) * 1984-11-06 1986-05-29 Jeol Ltd 重畳場質量分析装置
JP2857686B2 (ja) * 1989-06-01 1999-02-17 マイクロマス リミテッド 荷電粒子エネルギー分析器及びそれを組み込んだ質量分析計
JP2857685B2 (ja) * 1989-06-01 1999-02-17 マイクロマス リミテッド マルチチャンネル検出器を有する質量分析計
JP2004214111A (ja) * 2003-01-08 2004-07-29 Hitachi High-Technologies Corp モノクロメータ及びそれを用いた走査電子顕微鏡
US7022983B2 (en) 2003-01-08 2006-04-04 Hitachi High-Technologies Corporation Monochromator and scanning electron microscope using the same
US7315024B2 (en) 2003-01-08 2008-01-01 Hitachi High-Technologies Corporation Monochromator and scanning electron microscope using the same
US7838827B2 (en) 2003-01-08 2010-11-23 Hitachi High-Technologies Corporation Monochromator and scanning electron microscope using the same

Also Published As

Publication number Publication date
JPH0328775B2 (enExample) 1991-04-22

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