JPH0328507Y2 - - Google Patents

Info

Publication number
JPH0328507Y2
JPH0328507Y2 JP1981086330U JP8633081U JPH0328507Y2 JP H0328507 Y2 JPH0328507 Y2 JP H0328507Y2 JP 1981086330 U JP1981086330 U JP 1981086330U JP 8633081 U JP8633081 U JP 8633081U JP H0328507 Y2 JPH0328507 Y2 JP H0328507Y2
Authority
JP
Japan
Prior art keywords
magazine
cassette
electron beam
beam lithography
installation seat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981086330U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57197637U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981086330U priority Critical patent/JPH0328507Y2/ja
Publication of JPS57197637U publication Critical patent/JPS57197637U/ja
Application granted granted Critical
Publication of JPH0328507Y2 publication Critical patent/JPH0328507Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1981086330U 1981-06-12 1981-06-12 Expired JPH0328507Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981086330U JPH0328507Y2 (enExample) 1981-06-12 1981-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981086330U JPH0328507Y2 (enExample) 1981-06-12 1981-06-12

Publications (2)

Publication Number Publication Date
JPS57197637U JPS57197637U (enExample) 1982-12-15
JPH0328507Y2 true JPH0328507Y2 (enExample) 1991-06-19

Family

ID=29881554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981086330U Expired JPH0328507Y2 (enExample) 1981-06-12 1981-06-12

Country Status (1)

Country Link
JP (1) JPH0328507Y2 (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4968656A (enExample) * 1972-11-06 1974-07-03
JPS54159963A (en) * 1978-06-06 1979-12-18 Shiroyama Kogyo Kk Articulated arm type manipulator

Also Published As

Publication number Publication date
JPS57197637U (enExample) 1982-12-15

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