JPS57197637U - - Google Patents
Info
- Publication number
- JPS57197637U JPS57197637U JP8633081U JP8633081U JPS57197637U JP S57197637 U JPS57197637 U JP S57197637U JP 8633081 U JP8633081 U JP 8633081U JP 8633081 U JP8633081 U JP 8633081U JP S57197637 U JPS57197637 U JP S57197637U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981086330U JPH0328507Y2 (enExample) | 1981-06-12 | 1981-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981086330U JPH0328507Y2 (enExample) | 1981-06-12 | 1981-06-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57197637U true JPS57197637U (enExample) | 1982-12-15 |
| JPH0328507Y2 JPH0328507Y2 (enExample) | 1991-06-19 |
Family
ID=29881554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981086330U Expired JPH0328507Y2 (enExample) | 1981-06-12 | 1981-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0328507Y2 (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4968656A (enExample) * | 1972-11-06 | 1974-07-03 | ||
| JPS54159963A (en) * | 1978-06-06 | 1979-12-18 | Shiroyama Kogyo Kk | Articulated arm type manipulator |
-
1981
- 1981-06-12 JP JP1981086330U patent/JPH0328507Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4968656A (enExample) * | 1972-11-06 | 1974-07-03 | ||
| JPS54159963A (en) * | 1978-06-06 | 1979-12-18 | Shiroyama Kogyo Kk | Articulated arm type manipulator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0328507Y2 (enExample) | 1991-06-19 |