JPH0328075B2 - - Google Patents

Info

Publication number
JPH0328075B2
JPH0328075B2 JP61067363A JP6736386A JPH0328075B2 JP H0328075 B2 JPH0328075 B2 JP H0328075B2 JP 61067363 A JP61067363 A JP 61067363A JP 6736386 A JP6736386 A JP 6736386A JP H0328075 B2 JPH0328075 B2 JP H0328075B2
Authority
JP
Japan
Prior art keywords
superconductor
superconductor electrode
electrode
layer
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61067363A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62224988A (ja
Inventor
Hisanao Tsuge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP61067363A priority Critical patent/JPS62224988A/ja
Publication of JPS62224988A publication Critical patent/JPS62224988A/ja
Publication of JPH0328075B2 publication Critical patent/JPH0328075B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP61067363A 1986-03-27 1986-03-27 トンネル型ジヨセフソン素子の製造方法 Granted JPS62224988A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61067363A JPS62224988A (ja) 1986-03-27 1986-03-27 トンネル型ジヨセフソン素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61067363A JPS62224988A (ja) 1986-03-27 1986-03-27 トンネル型ジヨセフソン素子の製造方法

Publications (2)

Publication Number Publication Date
JPS62224988A JPS62224988A (ja) 1987-10-02
JPH0328075B2 true JPH0328075B2 (en:Method) 1991-04-17

Family

ID=13342852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61067363A Granted JPS62224988A (ja) 1986-03-27 1986-03-27 トンネル型ジヨセフソン素子の製造方法

Country Status (1)

Country Link
JP (1) JPS62224988A (en:Method)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60208873A (ja) * 1984-04-03 1985-10-21 Nec Corp ジヨセフソン接合素子の製造方法

Also Published As

Publication number Publication date
JPS62224988A (ja) 1987-10-02

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term