JPH03279283A - Tool part material of coated ceramic sintered material having excellent wear resistance - Google Patents
Tool part material of coated ceramic sintered material having excellent wear resistanceInfo
- Publication number
- JPH03279283A JPH03279283A JP8049890A JP8049890A JPH03279283A JP H03279283 A JPH03279283 A JP H03279283A JP 8049890 A JP8049890 A JP 8049890A JP 8049890 A JP8049890 A JP 8049890A JP H03279283 A JPH03279283 A JP H03279283A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- ceramic sintered
- outer layer
- inner layer
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims abstract description 59
- 239000000919 ceramic Substances 0.000 title claims abstract description 39
- 239000010410 layer Substances 0.000 claims abstract description 73
- 229910052751 metal Inorganic materials 0.000 claims abstract description 20
- 239000002184 metal Substances 0.000 claims abstract description 20
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 13
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 11
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 8
- 239000000956 alloy Substances 0.000 claims abstract description 8
- 229910052735 hafnium Inorganic materials 0.000 claims abstract description 8
- 150000002739 metals Chemical class 0.000 claims abstract description 8
- 150000004767 nitrides Chemical class 0.000 claims abstract description 8
- 239000002356 single layer Substances 0.000 claims abstract description 5
- 239000006104 solid solution Substances 0.000 claims abstract description 4
- 150000001247 metal acetylides Chemical class 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical class [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
- -1 oxynitrides Chemical class 0.000 claims description 2
- 150000004649 carbonic acid derivatives Chemical class 0.000 claims 1
- 239000010409 thin film Substances 0.000 abstract description 17
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 abstract description 8
- 239000011248 coating agent Substances 0.000 abstract description 7
- 238000000576 coating method Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 7
- 239000000758 substrate Substances 0.000 abstract description 5
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 abstract description 2
- 229910002651 NO3 Inorganic materials 0.000 abstract 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- 238000005520 cutting process Methods 0.000 description 31
- 230000000052 comparative effect Effects 0.000 description 26
- 239000010936 titanium Substances 0.000 description 19
- 238000011282 treatment Methods 0.000 description 11
- 239000011247 coating layer Substances 0.000 description 10
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 6
- 229910052574 oxide ceramic Inorganic materials 0.000 description 5
- 239000011224 oxide ceramic Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000011221 initial treatment Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- 238000005255 carburizing Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、酸化アルミニウム及び/又は酸化ジルコニウ
ムを主成分として含有してなる酸化物系セラミックス焼
結体の基材の表面に密着性及び耐摩耗性にすぐれた薄膜
を形成して、切削下見又は耐摩耗工具などの工具材料と
して適するようにした被覆セラミックス焼結体工具部材
に関するものである。Detailed Description of the Invention (Industrial Application Field) The present invention provides adhesiveness and resistance to the surface of a base material of an oxide ceramic sintered body containing aluminum oxide and/or zirconium oxide as a main component. The present invention relates to a coated ceramic sintered tool member on which a thin film with excellent abrasion resistance is formed, making it suitable as a tool material for cutting previews or wear-resistant tools.
(従来の技術)
従来から、セラミックス焼結体の表面に薄膜を形成し、
装飾用材料又は切削工具材料として応用しようという試
みが行われており、その代表的なものとして、特公昭6
1− 14942号公報、特開昭58= 217477
号公報及び特開昭58−217481号公報がある。(Conventional technology) Conventionally, a thin film is formed on the surface of a ceramic sintered body,
Attempts have been made to use it as a decorative material or cutting tool material, and a representative example is the
No. 1-14942, Japanese Patent Application Laid-open No. 1983-217477
There are Japanese Patent Laid-Open No. 58-217481.
(発明が解決しようとする課題)
特開昭51− 14942号公報には、アルミナ系セラ
ミックス焼結体やジルコニア系セラミックス焼結体の表
面にTiの金属又はTiC,ZrO□のセラミックスの
下層と、TiN、 ZrNの装飾的色彩の最外層とを形
成してなる装飾用多層被覆物が開示されている。この同
公報は、基材との結合強度を高めること、基材表面の凹
凸を平滑化するに充分な厚さであること、硬さ及び装飾
的色彩を有することを満足した被膜をセラミックス焼結
体の基材に形成して装飾用多層被覆物として完成させた
すぐれた発明である。しかしながら、同公報に開示の多
層被覆物は、装飾用として適するような被膜の構成にな
っているもので、これを工具材料として応用する場合に
は、基材と被膜との密着強度が劣り、その結果被膜の剥
離が生じるという問題がある。(Problems to be Solved by the Invention) JP-A-51-14942 discloses that a lower layer of Ti metal or TiC, ZrO□ ceramics is formed on the surface of an alumina ceramic sintered body or a zirconia ceramic sintered body, A decorative multilayer coating is disclosed comprising a decoratively colored outermost layer of TiN, ZrN. This publication states that ceramic sintering is used to create a coating that satisfies the following requirements: that it increases the bonding strength with the base material, that it is thick enough to smooth out unevenness on the base material surface, that it has hardness and a decorative color. This is an excellent invention that has been completed as a decorative multilayer coating by forming it on the base material of the body. However, the multilayer coating disclosed in the same publication has a coating structure suitable for decorative purposes, but when applied as a tool material, the adhesion strength between the base material and the coating is poor; As a result, there is a problem in that the film peels off.
特開昭58−217477号公報には、少なくとも刃先
部分の表面が、金属の炭化物、窒化物、炭窒化物及び/
又は酸化物の1層又は2層以上で20μm以下の被覆層
で覆われているセラミックス・スロアウエイヂップが開
示されている。また、特開昭58−217481号公報
には、少なくとも刃先部分の表面が、1種又は2種以上
の金属又は合金の20μm以下の被覆層で覆われている
セラミックス・スローアウェイチップが開示されている
。これら両公報には、切削工具として使用する場合、使
用前後の刃先の識別が容易になるように、 i、0.
系セラミックス焼結体の表面に被覆層を形成したという
もので、切削工具の使用管理が容易になるものである。JP-A No. 58-217477 discloses that at least the surface of the cutting edge portion is made of metal carbide, nitride, carbonitride and/or
Or, a ceramic throwaway coated with one or more layers of oxide and a coating layer of 20 μm or less is disclosed. Further, JP-A-58-217481 discloses a ceramic indexable tip in which at least the surface of the cutting edge portion is covered with a coating layer of 20 μm or less of one or more metals or alloys. There is. In both of these publications, when used as a cutting tool, i, 0.
A coating layer is formed on the surface of a ceramic sintered body, making it easier to manage the use of cutting tools.
しかしながら、前者の公報に開示のセラミックス・スロ
ーアウェイチップは、被覆層が厚(て、剥離しやすく、
被覆層の剥離時に基材も緒に欠損すること、又は脆性な
被覆層に入った微細なりラックが基材内部に伝播して被
覆層と基材とを一緒に欠損させるという問題がある。ま
た、後者の公報に開示のセラミックス・スローアウェイ
チップは、被覆層が厚くて軟質であることから塑性変形
しやすいこと、及び相手材である被削材と相互反応しや
すいことから、刃先に圧着分離及び溶着剥離が繰り返し
生じて、被覆層と基材とが緒に欠損してしまうという問
題がある。これら両公報に開示の工具部材は、耐摩耗性
の向トという点から見ると理想的でなく問題がある。However, the ceramic indexable tip disclosed in the former publication has a thick coating layer that easily peels off.
There is a problem in that when the coating layer is peeled off, the base material is also damaged, or that fine cracks that have entered the brittle coating layer propagate inside the base material and cause the coating layer and the base material to be damaged together. In addition, the ceramic indexable insert disclosed in the latter publication has a thick and soft coating layer, so it easily deforms plastically, and it also tends to interact with the work material, which is the mating material, so it is crimped onto the cutting edge. There is a problem in that separation and welding and peeling occur repeatedly, resulting in damage to the coating layer and the base material. The tool members disclosed in both of these publications are not ideal and have problems in terms of wear resistance.
本発明は、−ト述のような問題点を解決したもので、具
体的には、セラミックス焼結体の基材の表面に金属又は
合金の内層とセラミックスの外層とからなる非常に薄い
薄膜を形成して、耐剥離性。The present invention solves the above-mentioned problems. Specifically, the present invention is to form a very thin film consisting of an inner layer of metal or alloy and an outer layer of ceramics on the surface of a base material of a ceramic sintered body. Formed and peel resistant.
耐塑性変形性、耐溶着性の向上してなる耐摩耗性にすぐ
れた被覆セラミックス焼結体工具部材の提供を目的とす
るものである。The object of the present invention is to provide a coated ceramic sintered tool member with excellent wear resistance due to improved plastic deformation resistance and welding resistance.
(課題を解決するための手段)
本発明者らは、他の工具材料に比べて、酸化物系セラミ
ックス焼結体、特に酸化アルミニウム系セラミックス焼
結体は、鋼糸の被削材を切削する工具材料としては耐摩
耗性が劣ることから、酸化アルミニウム系セラミックス
焼結体の表面にセラミックスの薄膜を形成して耐摩耗性
の向上を計ることを検討していた所、
第1に、酸化アルミニウム系セラミックス焼結体の基材
の表面にTi、 Zr、 INの活性金属を被覆すると
、基材と活性金属との密着性が顕著に向1−すること、
この活性金属の表面にTi、 Zr、 Hfの炭化物、
窒化物などのセラミックスの薄膜を形成すると、活性金
属とセラミックスの薄膜との密着強度が顕著に向上する
という知見を得た。(Means for Solving the Problems) The present inventors have found that oxide-based ceramic sintered bodies, particularly aluminum oxide-based ceramic sintered bodies, are more effective in cutting steel thread work materials than other tool materials. As a tool material, it has poor wear resistance, so we were considering forming a thin ceramic film on the surface of an aluminum oxide ceramic sintered body to improve wear resistance. First, aluminum oxide When the surface of the base material of a ceramic sintered body is coated with active metals such as Ti, Zr, and IN, the adhesion between the base material and the active metal is significantly improved;
On the surface of this active metal, carbides of Ti, Zr, and Hf,
We have found that when a thin film of ceramic such as nitride is formed, the adhesion strength between the active metal and the thin ceramic film is significantly improved.
第2に、酸化アルミニウム系セラミックス焼結体の基材
の表面にTi、 Zr、 Hfの活性金属の内層と、金
属の炭化物、窒化物などのセラミックスの外層とを形成
して、切削工具部材として用いると、圧力や熱を伴なう
苛酷な切削条件により、内層及び外層の薄膜の厚さと薄
膜の耐剥離性及び耐塑性変形性との相関性が大きく現わ
れ、特に内層と外層とを合計した薄膜の厚さを薄くする
と耐剥離性及び耐塑性変形性の向上が顕著で、その結果
耐摩耗性の向上が著しくなるという知見を得た。Second, an inner layer of active metals such as Ti, Zr, and Hf and an outer layer of ceramics such as metal carbides and nitrides are formed on the surface of the base material of the aluminum oxide ceramic sintered body, and the material is used as a cutting tool member. When used, severe cutting conditions involving pressure and heat show that there is a significant correlation between the thickness of the thin film of the inner and outer layers and the peeling resistance and plastic deformation resistance of the thin film, especially when the sum of the inner and outer layers is We have found that when the thickness of the thin film is reduced, the peeling resistance and plastic deformation resistance are significantly improved, and as a result, the wear resistance is significantly improved.
以−トの第1及び第2の知見に基づいて、本発明を完成
するに至ったものである。The present invention has been completed based on the above first and second findings.
すなわち、本発明の耐摩耗性にすぐれた被覆セラミック
ス焼結体は、酸化物系セラミックス焼結体の基材の少な
くとも一面に内層と外層とを形成してなる被覆セラミッ
クス焼結体であって、該内層がTi、 Zr、 Hfの
金属及びこれらの相互合金の中の少なくとも1種の単層
又は複層でなり、該外層がTi、 Zr、 Hfの炭化
物、窒化物、炭酸化物、窒酸化物、酸化アルミニウム及
びこれらの相互固溶体の中の少なくとも1種の単層又は
複層でなり、かつ該内層と該外層との合計厚さが1.5
μm以下であることを特徴とするものである。That is, the coated ceramic sintered body with excellent wear resistance of the present invention is a coated ceramic sintered body formed by forming an inner layer and an outer layer on at least one surface of a base material of an oxide ceramic sintered body, The inner layer is a single layer or a multilayer of at least one of Ti, Zr, and Hf metals and mutual alloys thereof, and the outer layer is a carbide, nitride, carbonate, and nitride of Ti, Zr, and Hf. , aluminum oxide and a mutual solid solution thereof, and the total thickness of the inner layer and the outer layer is 1.5
It is characterized by being smaller than μm.
この本発明の耐摩耗性にすぐれた被覆セラミックス焼結
体における基材は、酸化アルミニウム及び/又は酸化ジ
ルコニウムが主成分として含有している焼結体で、他の
残部としては、例えば周期律表4a、 5a、 6a族
金属の炭化物、窒化物、酸化物。The base material of the coated ceramic sintered body with excellent wear resistance of the present invention is a sintered body containing aluminum oxide and/or zirconium oxide as a main component, and other components include, for example, Carbides, nitrides, and oxides of Group 4a, 5a, and 6a metals.
ホウ化物及びこれらの相互固溶体、窒化アルミニウム、
窒化ケイ素、酸化ケイ素、希土類金属の酸化物、酸化カ
ルシウムなどの金属化合物又は SiCウィスカー、
5IsNaウイスカー、カーボンウィスカーなどの少な
くとも1種もしくは製造工程から混入する微量の鉄族金
属を含有している場合もあるもので、具体的には、例え
ば八β203 MgO系焼結体、 八2.203−
TiC系焼結体、 Al220゜Ti fc、 Nl
系焼結体、 Al203−TiN系焼結体。Borides and their mutual solid solutions, aluminum nitride,
Metal compounds such as silicon nitride, silicon oxide, rare earth metal oxides, calcium oxide, or SiC whiskers,
It may contain at least one kind of 5IsNa whiskers, carbon whiskers, etc., or trace amounts of iron group metals mixed in from the manufacturing process, specifically, for example, 8β203 MgO-based sintered bodies, 82.203 −
TiC-based sintered body, Al220°Ti fc, Nl
system sintered body, Al203-TiN system sintered body.
Al2 zO−T+ (C,N、 ol系焼結体、
Aj! 、03− SiCウィスカー系焼結体、ZrO
□−Y203系焼結体。Al2 zO-T+ (C, N, ol-based sintered body,
Aj! , 03- SiC whisker-based sintered body, ZrO
□-Y203 series sintered body.
ARzOs −ZrL系焼結体、Aρ20s ZrL
sicウィスカー系焼結体を挙げることができる。ARzOs-ZrL sintered body, Aρ20s ZrL
Examples include SIC whisker-based sintered bodies.
この基材の表面に被覆させる内層は、 Ti、 7.r
。The inner layer coated on the surface of this base material is Ti; 7. r
.
Hfの金属及びこれらの相互合金の中の少なくとも1種
の活性金属又は活性な合金からなるもので、特に、この
内層の厚さは、耐塑性変形性及び耐剥離性から 05μ
m以下が好ましく、基材と内層との密着性の強度をも加
味すると、より好ましくは01〜03μm厚さである。It is made of at least one active metal or active alloy among Hf metals and their mutual alloys, and in particular, the thickness of this inner layer is 0.5 μm from the viewpoint of plastic deformation resistance and peeling resistance.
The thickness is preferably 01 to 03 μm or less, taking into account the strength of the adhesion between the base material and the inner layer.
この内層の表面に被覆させる外層は、具体的には、例え
ばTiC,ZrC,HfC,TiN、 ZrN、 Ti
fC,01゜ZrfC,0)、 Ti(N、01. Z
r(N、0)、 (Ti、Zr)C。Specifically, the outer layer coated on the surface of the inner layer is, for example, TiC, ZrC, HfC, TiN, ZrN, Ti.
fC,01゜ZrfC,0), Ti(N,01.Z
r(N, 0), (Ti, Zr)C.
[Ti、Zr) (C,0)、 (Ti、Zrl f
N、01. Ti (C0N、01゜(T+、 Zr)
fc、 N、 ol 、 Al220sなどを挙げ
ることができる。この外層は、非化学量論組成になって
いる場合もあり、その厚さは、耐剥離性及び耐チッピン
グ性から、特に 1.0μm以下が好ましく、ずきとり
状の摩耗に対する耐摩耗性を加味すると、より好ましく
は0.5〜0.9μmである。これらの内層と外層との
合計の厚さが1.5μmを超えて多くなると、切削工具
又は耐摩耗工具のような苛酷な工具材料として用いる場
合には被覆層内での剥離又はチッピングが生じ、これに
伴って基材にまで欠損又はチッピングが生じて短寿命に
なる。このために、内層と外層との合計の厚さは、 1
5μm以下、より好ましくは 1.0μm以下である。[Ti, Zr) (C, 0), (Ti, Zrl f
N, 01. Ti (C0N, 01°(T+, Zr)
Examples include fc, N, ol, Al220s, and the like. This outer layer may have a non-stoichiometric composition, and its thickness is preferably 1.0 μm or less from the viewpoint of peeling resistance and chipping resistance. Taking this into account, it is more preferably 0.5 to 0.9 μm. When the total thickness of these inner and outer layers exceeds 1.5 μm, peeling or chipping occurs within the coating layer when used as a harsh tool material such as a cutting tool or a wear-resistant tool. As a result, damage or chipping occurs even in the base material, resulting in a shortened lifespan. For this, the total thickness of the inner and outer layers is 1
It is 5 μm or less, more preferably 1.0 μm or less.
本発明の耐摩耗性にすぐれた被覆セラミックス焼結体工
具部材を作製する場合は、従来の酸化物系セラミックス
焼結体を研摩面の状態、又は焼結後や熱処理後の表面状
態にし、次いで、その表面に従来から行われているイオ
ンブレーティング。When producing the coated ceramic sintered compact tool member of the present invention with excellent wear resistance, the conventional oxide ceramic sintered compact is brought into a polished surface state, or a surface state after sintering or heat treatment, and then , ion blating is traditionally performed on its surface.
スパッター、レーザなどによる物理蒸着法+PVD法)
でもって内層を形成し、引続き PVD法でもって外層
を形成する方法、又は外層の形成は、従来から行われて
いる化学蒸着法fCVD法)、もしくはプラズマ CV
D法でもって行うことができる。physical vapor deposition method + PVD method using sputtering, laser, etc.)
This method forms an inner layer, and then the outer layer is formed using a PVD method, or the outer layer is formed using a conventional chemical vapor deposition method (CVD method) or a plasma CVD method.
This can be done using method D.
このときの製造条件、特に外層を形成するための処理温
度によっては、基材と内層、及び内層と外層との相互反
応が生じることがある。この場合は、外層に隣接する内
層内、又は基材に隣接する内層内に、非金属元素の侵入
した状態となる。この内層内への非金属元素の侵入をで
きるだけ抑制するために、内層及び外層の処理温度を低
くする方向が好ましいことである。Depending on the manufacturing conditions at this time, particularly the processing temperature for forming the outer layer, mutual reactions may occur between the base material and the inner layer, and between the inner layer and the outer layer. In this case, a nonmetallic element will enter into the inner layer adjacent to the outer layer or the inner layer adjacent to the base material. In order to suppress the intrusion of nonmetallic elements into the inner layer as much as possible, it is preferable to lower the processing temperature of the inner layer and the outer layer.
(作用)
本発明の耐摩耗性にすぐれた被覆セラミックス焼結体工
具部材は、内層が基材と外層との密着性の媒介的作用を
し、しかも苛酷な衝撃や熱が加わるような条件に用いた
とき、工具材料における緩衝的作用及び放熱作用をして
いるものであり、外層が耐摩耗性を高める作用をしてい
るものである。(Function) The coated ceramic sintered tool member with excellent wear resistance of the present invention has an inner layer that acts as a mediator for adhesion between the base material and the outer layer, and is also suitable for use under conditions where severe impact or heat is applied. When used, it has a buffering effect and a heat dissipation effect on the tool material, and the outer layer has a function of increasing wear resistance.
(実施例)
実施例1
市販されているAl;l 、0.−30wL%Ti (
C,Nl系セラミックス焼結体を基材として用いて、こ
の基材を中空熱陰極方式のイオンブレーティングの反応
答器内に設置し、反応容器内雰囲気^「、圧力10−’
Torr、40v1500Aによる電子ビーム、基材温
度200℃の条件でもってチタン金属を基材の表面に被
覆し、(第1次処理)、次いで反応容器内雰囲気50v
of1%Ar−50von%Nz 、圧力In−’T
orr、基材温度500℃で処理して(第2次処理)本
発明品1を得た。(Example) Example 1 Commercially available Al;l, 0. -30wL%Ti (
Using a C,Nl ceramic sintered body as a base material, this base material was installed in a hollow hot cathode type ion brating reactor, and the atmosphere inside the reaction vessel was set to 10-', a pressure of 10-'.
Torr, electron beam at 40v 1500A, substrate temperature 200°C to coat titanium metal on the surface of the substrate (first treatment), then atmosphere inside the reaction vessel at 50V
of1%Ar-50von%Nz, pressure In-'T
orr and a substrate temperature of 500° C. (secondary treatment) to obtain product 1 of the present invention.
比較として、上述の第1次処理及び第2次処理のそれぞ
れの処理時間を約2〜3倍に保持し、他は同一条件で行
って比較量1を得た。また、上述の第1次処理を施さず
に第2次処理のみ施して、他は同一条件で行って比較量
2を得た。さらに、上述の第1次処理のみ施し、第2次
処理を施さずに、他は同一条件で行って比較量3を得た
。For comparison, a comparison amount of 1 was obtained by maintaining the treatment times of the above-mentioned primary treatment and secondary treatment approximately 2 to 3 times longer, and performing the other treatment under the same conditions. In addition, comparative amount 2 was obtained by performing only the secondary treatment without performing the above-mentioned primary treatment, and performing the other treatment under the same conditions. Further, Comparative Amount 3 was obtained by performing only the above-mentioned first treatment and not performing the second treatment under the same conditions.
こうして得た本発明品lと比較量1〜3を走査型電子顕
微鏡、走査型オージェ電子顕微鏡及びX線解析でもって
調査した所、本発明品1は内層03μm厚さのTi、外
層06μm厚さのTiNからなっており、比較量lは内
層0.6μm厚さのTi、外層 1.5μm厚さのTi
Nからなっており、比較量2は25μm厚さのTiN層
のみからなり、比較量3は30μm厚さのT1層のみか
らなっていた。When the product 1 of the present invention thus obtained and comparative amounts 1 to 3 were investigated using a scanning electron microscope, a scanning Auger electron microscope, and an X-ray analysis, it was found that product 1 of the present invention had an inner layer of Ti with a thickness of 03 μm and an outer layer with a thickness of 06 μm. The comparison amount l is Ti with a thickness of 0.6 μm in the inner layer and Ti with a thickness of 1.5 μm in the outer layer.
Comparative amount 2 consisted of only a 25 μm thick TiN layer, and comparative amount 3 consisted of only a 30 μm thick T1 layer.
これらの本発明品lと比較量1〜3に、上述の基材のみ
でなるものを比較量4として、下記の(Al旋削試験条
件でもって切削試験を行い、それぞれの試料の切削時間
における平均逃げ面摩耗量を求めて、その結果を第1表
に示した。A cutting test was conducted under the following (Al turning test conditions) using these inventive products 1 and comparative quantities 1 to 3, and a comparative quantity 4 consisting only of the above-mentioned base material, and the average cutting time of each sample was The amount of flank wear was determined and the results are shown in Table 1.
iAl旋削試験条件
被削材 SCM 415浸炭焼入れIHRc 601
切削速度 10Om/min
切込み 0.2mm
送 リ 0.1 mm/rev工具形
状 5NGN 120408
ブレホーニングロ+5X−256
湿式切削
以下余白
第1表に示した各切削時間ごとにおける各試料の摩耗損
傷状態を観察した所、本発明品1は、60分間切削後も
薄膜の剥離が生じてなく正常な摩耗形態であったのに対
し、比較量1は、40分間切削後に薄膜に微小剥離が生
じ、比較量2は、30分間切削後に薄膜の剥離が生じ、
比較量3は、20分間切削後に薄膜にむしれ状の剥離が
生じ、比較量]、2.3は、60分間切削後には本発明
品1に比べて被削材の表面粗さが少々粗い傾向であった
。iAl turning test conditions Work material SCM 415 Carburizing and quenching IHRc 601
Cutting speed 100m/min Depth of cut 0.2mm Feed rate 0.1 mm/rev Tool shape 5NGN 120408 Brehoning Gro+5X-256 Wet cutting Below margin Observe the wear and damage state of each sample at each cutting time shown in Table 1 As a result, inventive product 1 had a normal wear pattern with no peeling of the thin film even after 60 minutes of cutting, whereas comparative material 1 showed slight peeling of the thin film after 40 minutes of cutting. 2, the thin film peeled off after 30 minutes of cutting;
Comparative amount 3 caused peel-like peeling of the thin film after 20 minutes of cutting, and comparative amount 2.3 had a slightly rougher surface roughness of the workpiece material than inventive product 1 after 60 minutes of cutting. It was a trend.
実施例2
市販されているAl2 zos −40wt%Zr0i
系セラミツクス焼結体を基材として用いて、実施例1の
本発明品lと同様に第1次処理及び第2次処理を行って
、本発明品2を得た。Example 2 Commercially available Al2zos-40wt%Zr0i
Using the ceramic sintered body as a base material, the first treatment and the second treatment were carried out in the same manner as inventive product 1 of Example 1 to obtain inventive product 2.
比較として、本発明品2と同様の基材を用いて、実施例
】の比較量1と同様の表面処理を行って、比較量5を得
た。また、同様の基材を用いて、実施例1の比較量2と
同様の表面処理を行って、比較量6を得た。さらに、同
様の基材を用いて、実施例1の比較量3と同様の表面処
理を行って、比較量7を得た。For comparison, Comparative Amount 5 was obtained by using the same base material as Invention Product 2 and subjecting it to the same surface treatment as Comparative Amount 1 in Example. Further, using the same base material, the same surface treatment as Comparative Amount 2 of Example 1 was performed to obtain Comparative Amount 6. Furthermore, using the same base material, the same surface treatment as Comparative Amount 3 of Example 1 was performed to obtain Comparative Amount 7.
こうして得た本発明品2と比較量5〜7を実施例1と同
様にして調査した所、本発明品1は内層0.3μm厚さ
のTI、外層1.0μm厚さのTiNからなっており、
比較量5は内層0.7μm厚さのT1、外層17μm厚
さのTiNからなっており、比較量6は26μm厚さの
TiN層のみからなり、比較量7は3.1μm厚さのT
i層のみからなっていた。Inventive product 2 thus obtained and comparative amounts 5 to 7 were investigated in the same manner as in Example 1, and it was found that inventive product 1 consisted of an inner layer of TI with a thickness of 0.3 μm and an outer layer of TiN with a thickness of 1.0 μm. Ori,
Comparison amount 5 consists of an inner layer of T1 with a thickness of 0.7 μm and an outer layer of TiN with a thickness of 17 μm, comparison amount 6 consists of only a 26 μm thick TiN layer, and comparison amount 7 consists of a T1 layer with a thickness of 3.1 μm.
It consisted only of the i-layer.
これらの本発明品2と比較量5〜7に、上述の基材のみ
でなるものを比較量8として、下記の(Bl旋削試験条
件でもって切削試験を行い、それぞれの試料の切削時間
における平均逃げ面摩耗量を求めて、その結果を第2表
に示した。A cutting test was conducted under the following (Bl turning test conditions) using these invention products 2 and comparative quantities 5 to 7, and a comparative quantity 8 consisting only of the above-mentioned base material, and the average cutting time of each sample was The amount of flank wear was determined and the results are shown in Table 2.
(Bl旋削試験条件
被削材 SCM 415浸炭焼入れ
fHRc 5B −63)
切削速度 150 m/min
切込み 0.5mm
送 リ 0.1 mm/rev
工具形状5NGN 120408
ブレホーニング0
15× −
5
乾式切削
以下余白
第2表に示した各切削時間ごとにおける各試料の摩耗損
傷状態を観察した所1本発明品2は、20分間切削後も
薄膜の剥離が生じてなく、正常な摩耗形態であったのに
対し、比較量5及び6は、20分間切削後に薄膜に微小
剥離が生じ、比較量7は、15分間切削後に薄膜にむし
れ状の剥離が生じていた。(BL turning test conditions Work material SCM 415 carburized and quenched fHRc 5B-63) Cutting speed 150 m/min Depth of cut 0.5 mm Feed 0.1 mm/rev
Tool shape 5NGN 120408 Brehoning 0 15× - 5 Dry cutting Below margin We observed the wear and damage state of each sample at each cutting time shown in Table 2. No peeling occurred and the wear pattern was normal, whereas Comparative Sizes 5 and 6 had slight peeling on the thin film after 20 minutes of cutting, and Comparative Size 7 had a peel-like appearance on the thin film after 15 minutes of cutting. Peeling had occurred.
(発明の効果)
本発明の耐摩耗性にすぐれた被覆セラミックス焼結体工
具部材は、従来の比較量及び本発明から外れた比較量に
比べて薄膜が生じ難く、薄膜の剥離に伴なう基材の微小
チッピングも生じ難く、その結果耐摩耗性を高め得るこ
と、及び被削材などの相手材の表面粗さを低下させ難い
という効果があること、特に、乾式切削においては、比
較量に比べて5〜10分間寿命が向上し、湿式切削にお
いては、比較量に比べて20〜30分間寿命が向」する
という、湿式切削においての効果が顕著である。また、
本発明の耐摩耗性にすぐれた被覆セラミックス焼結体工
具部材は、基材の色彩と、薄膜、特に外層の色彩とを違
えることにより、従来品が備えているような工具部材の
使用前後の識別という使用上の管理効果も当然備えてい
るもので、産業上有用な材料である。(Effects of the Invention) The coated ceramic sintered tool member with excellent wear resistance of the present invention is less likely to form a thin film than the conventional comparative quantity and the comparative quantity deviated from the present invention, and is less susceptible to peeling of the thin film. Micro-chipping of the base material is less likely to occur, and as a result, wear resistance can be improved, and the surface roughness of the other material such as the workpiece is less likely to decrease.Especially in dry cutting, comparative amount The effect in wet cutting is remarkable, with the lifespan being improved by 5 to 10 minutes compared to the comparative amount, and the life being improved by 20 to 30 minutes in wet cutting compared to the comparative amount. Also,
The coated ceramic sintered tool member with excellent wear resistance of the present invention has different colors of the base material and the thin film, especially the outer layer, so that it can be used before and after use, unlike conventional products. Naturally, it also has the control effect of identification, making it an industrially useful material.
Claims (3)
一面に内層と外層とを形成してなる被覆セラミックス焼
結体であって、該内層がTi,Zr,Hfの金属及びこ
れらの相互合金の中の少なくとも1種の単層又は複層で
なり、該外層がTi,Zr,Hfの炭化物、窒化物、炭
酸化物、窒酸化物、酸化アルミニウム及びこれらの相互
固溶体の中の少なくとも1種の単層又は複層でなり、か
つ該内層と該外層との合計厚さが1.5μm以下である
ことを特徴とする耐摩耗性にすぐれた被覆セラミックス
焼結体工具部材。(1) A coated ceramic sintered body comprising an inner layer and an outer layer formed on at least one surface of a base material of an oxide-based ceramic sintered body, the inner layer being made of metals such as Ti, Zr, and Hf or mutual alloys thereof. The outer layer is a single layer or a multilayer of at least one of Ti, Zr, Hf carbides, nitrides, carbonates, oxynitrides, aluminum oxides, and mutual solid solutions thereof. 1. A coated ceramic sintered tool member with excellent wear resistance, comprising a single layer or multiple layers, and having a total thickness of the inner layer and the outer layer of 1.5 μm or less.
徴とする特許請求の範囲第1項記載の耐摩耗性にすぐれ
た被覆セラミックス焼結体工具部材。(2) A coated ceramic sintered tool member with excellent wear resistance as set forth in claim 1, wherein the inner layer has a thickness of 0.5 μm or less.
徴とする特許請求の範囲第1項又は第2項記載の耐摩耗
性にすぐれた被覆セラミックス焼結体工具部材。(3) A coated ceramic sintered tool member with excellent wear resistance according to claim 1 or 2, wherein the outer layer has a thickness of 1.0 μm or less.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2080498A JP3009174B2 (en) | 1990-03-28 | 1990-03-28 | Coated ceramic sintered body tool member with excellent wear resistance |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2080498A JP3009174B2 (en) | 1990-03-28 | 1990-03-28 | Coated ceramic sintered body tool member with excellent wear resistance |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03279283A true JPH03279283A (en) | 1991-12-10 |
JP3009174B2 JP3009174B2 (en) | 2000-02-14 |
Family
ID=13719975
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2080498A Expired - Fee Related JP3009174B2 (en) | 1990-03-28 | 1990-03-28 | Coated ceramic sintered body tool member with excellent wear resistance |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3009174B2 (en) |
-
1990
- 1990-03-28 JP JP2080498A patent/JP3009174B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP3009174B2 (en) | 2000-02-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI537405B (en) | Cutting tool | |
CN100478498C (en) | Insertion piece with hard metal coating | |
KR101194206B1 (en) | A coated cemented carbide cutting tool insert and method of making it | |
KR20040004091A (en) | Wear resistant coating with enhanced toughness | |
JP2011045994A (en) | Cutting tool | |
US20110268514A1 (en) | Pvd coated tool | |
JPH09323204A (en) | Multilayer coated hard tool | |
JP3249277B2 (en) | Wear resistant coating | |
JPH10330914A (en) | Laminated coating member containing crystal orientated hard coating | |
RU2096518C1 (en) | Layered composite coating on cutting and stamping tools | |
JP2002346811A (en) | Coated sintered tool | |
JPH05177411A (en) | Cover cutting tool and its manufacture | |
JP3159572B2 (en) | High-strength coated object | |
JP3360339B2 (en) | Coated cutting tool | |
JP3130734B2 (en) | Heat resistant coating | |
JPH03279283A (en) | Tool part material of coated ceramic sintered material having excellent wear resistance | |
JP6344011B2 (en) | Cutting tools | |
JP4569981B2 (en) | Hard coating tool | |
JP3358696B2 (en) | High strength coating | |
JP3179645B2 (en) | Wear resistant coating | |
JP2000210801A (en) | Aluminum oxide coating tool member | |
JP3009177B2 (en) | Coated ceramic sintered body with excellent adhesion | |
JP3333080B2 (en) | High-strength coated members with consistent interfaces | |
JPH0820871A (en) | Wear resistant coating member | |
JPH10310878A (en) | Cutting tool made of surface-coated cemented carbide having hard coating layer excellent in wear resistance |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
R370 | Written measure of declining of transfer procedure |
Free format text: JAPANESE INTERMEDIATE CODE: R370 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081203 Year of fee payment: 9 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081203 Year of fee payment: 9 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091203 Year of fee payment: 10 |
|
LAPS | Cancellation because of no payment of annual fees |