JP3249277B2 - Wear resistant coating - Google Patents
Wear resistant coatingInfo
- Publication number
- JP3249277B2 JP3249277B2 JP34445093A JP34445093A JP3249277B2 JP 3249277 B2 JP3249277 B2 JP 3249277B2 JP 34445093 A JP34445093 A JP 34445093A JP 34445093 A JP34445093 A JP 34445093A JP 3249277 B2 JP3249277 B2 JP 3249277B2
- Authority
- JP
- Japan
- Prior art keywords
- coating
- titanium
- composite compound
- coated
- containing composite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【０００１】[0001]
【産業上の利用分野】本発明は、金属，合金またはセラ
ミックス焼結体の基材上に、非化学量論組成のセラミッ
クスの被膜を被覆して、耐摩耗性，高硬度性，耐剥離
性，高靭性，耐食性，装飾性のある構造用部材として適
する被覆体に関し、具体的には、例えば旋削工具，フラ
イス工具，エンドミル，ドリルに代表される切削工具、
スリッター，製缶工具，金型に代表される耐摩耗工具ま
たは釣具，時計用部材，メガネの枠，タイピン，ブロー
チに代表される装飾部品に適する耐摩耗性被覆部材に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-stoichiometric ceramic film coated on a base material of a metal, an alloy or a ceramic sintered body to obtain abrasion resistance, high hardness and peel resistance. , High-toughness, corrosion-resistant, decorative coatings suitable for decorative members, specifically cutting tools such as turning tools, milling tools, end mills, drills,
The present invention relates to a wear-resistant coating member suitable for a decorative component such as a wear-resistant tool or fishing gear represented by a slitter, a can-making tool, a metal mold, a clock member, a frame of glasses, a tie pin, and a broach.
【０００２】[0002]
【従来の技術】金属，合金またはセラミックス焼結体の
基材上に、周期律表の４ａ，５ａ，６ａ族金属の炭化
物，窒化物およびこれらの相互固溶体の中の１種の単層
または２種以上の多層でなる被膜を被覆した被覆部材が
多数提案され、その中の１部が実用されている。2. Description of the Related Art On a metal, alloy or sintered ceramic substrate, a single layer or a single layer of carbides, nitrides and mutual solid solutions of metals belonging to groups 4a, 5a and 6a of the periodic table is formed. Numerous coating members coated with multiple or more kinds of coatings have been proposed, and some of them have been put to practical use.
【０００３】これらの被覆部材は、被膜の優れた耐摩耗
性と基材の優れた靭性とを有効に利用しようとしたもの
であるが、基材と被膜との付着性に劣ること、多層にす
ると被膜間の付着性が劣ること、または被膜自体の有す
る耐摩耗性に満足できないという問題がある。[0003] These coated members are intended to effectively utilize the excellent abrasion resistance of the coating and the excellent toughness of the substrate, but have poor adhesion between the substrate and the coating and have a multilayer structure. Then, there is a problem that the adhesion between the coatings is inferior, or the abrasion resistance of the coatings themselves is not satisfactory.
【０００４】これらの問題点を解決しようとしたもの
に、固溶体の複合化合物被膜、特にＴｉの含有した複合
化合物被膜を基材上に被覆した被覆部材が多数提案され
ており、その代表的なものに、特開昭５５−５８３６４
号公報，特開昭６２−５６５６４号公報，特開昭６２−
１９２５７６号公報，特開昭６２−２７０７６４号公
報，特開平２−５０９４８号公報および特開平４−２９
７５６８号公報がある。In order to solve these problems, there have been proposed a large number of coated members in which a solid compound composite compound film, particularly a composite compound film containing Ti, is coated on a substrate. And JP-A-55-58364.
JP, JP-A-62-56564, JP-A-62-56564
192576, JP-A-62-270764, JP-A-2-50948 and JP-A-4-29.
No. 7568.
【０００５】[0005]
【発明が解決しようとする課題】金属，合金またはセラ
ミックス焼結体の基材上に、Ｔｉ含有複合化合物被膜を
被覆した被覆部材の内、特開昭５５−５８３６４号公報
には、超硬合金の表面に（Ｈｆ，Ｔｉ）Ｃ，（Ｈｆ，Ｔ
ｉ）Ｎ，（Ｈｆ，Ｔｉ）ＣＮの複合化合物被膜を被覆し
た被覆部材について記載されており、特開昭６２−５６
５６４号公報には基材の表面にＴｉとＺｒの炭化物，窒
化物，炭窒化物の１種の単層または２種以上の多層でな
る複合化合物被膜を被覆した被覆部材について記載され
ており、特開昭６２−１９２５７６号公報には超硬合
金、サーメットまたはセラミックス焼結体の基材の表面
に内層を介在させて、チタン・クロム・バナジウム・ジ
ルコニウムの炭化物，窒化物，炭窒化物でなる複合化合
物被膜を被覆した被覆部材について記載されており、特
開昭６２−２７０７６４号公報には基材の表面にＴｉと
ＺｒとＨｆの炭化物，窒化物，炭窒化物の１種の単層ま
たは２種以上の多層でなる複合化合物被膜を被覆した被
覆部材について記載されており、特開平４−２９７５６
８号公報には基材表面にＴｉとＣｒの炭化物，窒化物，
炭窒化物の１種の単層または２種以上の多層でなる複合
化合物被膜を被覆した被覆部材について記載されてい
る。これらの公報に記載されている複合化合物被膜は、
金属元素と非金属元素の原子比が１：１でなる化学量論
組成またはそれに近似した組成からなっており、そのた
めに、基材と複合化合物被膜間および複合化合物被膜と
他の被膜間における耐剥離性に劣ること、並びに複合化
合物被膜自体の耐摩耗性も劣ることから、切削工具のよ
うな苛酷な条件で使用すると短寿命になるという問題が
ある。[0005] Japanese Patent Application Laid-Open No. 55-58364 discloses a cemented carbide member in which a Ti-containing composite compound film is coated on a base material of a metal, alloy or ceramic sintered body. (Hf, Ti) C, (Hf, T
i) A coated member coated with a composite compound film of N and (Hf, Ti) CN is described in JP-A-62-56.
Japanese Patent Application Publication No. 564 describes a coated member in which the surface of a base material is coated with a single compound layer of a carbide, nitride or carbonitride of Ti and Zr or a composite compound film composed of two or more layers. Japanese Patent Application Laid-Open No. 62-192576 discloses a carbide, nitride or carbonitride of titanium, chromium, vanadium or zirconium with an inner layer interposed on the surface of a substrate of a cemented carbide, cermet or ceramic sintered body. JP-A-62-270764 describes a coated member coated with a composite compound film. JP-A-62-270764 discloses a single layer of one of carbides, nitrides and carbonitrides of Ti, Zr and Hf on the surface of a substrate. It describes a coated member coated with a composite compound film composed of two or more multilayers.
No. 8 discloses that Ti and Cr carbides, nitrides,
It describes a coated member coated with a single compound layer of carbonitride or a composite compound film composed of two or more layers. The composite compound coatings described in these publications are:
It is composed of a stoichiometric composition or a composition close to the stoichiometric composition in which the atomic ratio of the metal element and the nonmetal element is 1: 1. Therefore, the resistance between the base material and the composite compound film and between the composite compound film and the other films is high. Due to poor peelability and poor abrasion resistance of the composite compound film itself, there is a problem that the service life becomes short when used under severe conditions such as a cutting tool.
【０００６】また、特開平２−５０９４８号公報には、
超硬合金の基材表面に（Ｔｉ，Ｚｒ，Ｈｆ）Ｎ0.8〜1.0
の複合化合物被膜を被覆した被覆部材について記載され
ている。同公報に記載されている被覆部材は、前述の特
開昭５５−５８３６４号公報に記載されている被覆部材
に比べて、基材と被膜との密着性および、耐摩耗性を高
めたものではあるが、耐剥離性および耐摩耗性で満足で
きるまでに達してなく、切削工具として用いると短寿命
になるという問題がある。[0006] Japanese Patent Application Laid-Open No. 2-50948 discloses that
(Ti, Zr, Hf) N 0.8 to 1.0
A coated member coated with the composite compound film of the above is described. The coating member described in the publication has an improved adhesion and abrasion resistance between the substrate and the coating as compared with the coating member described in the above-mentioned JP-A-55-58364. However, there is a problem that the durability is not sufficiently satisfied with the peeling resistance and the abrasion resistance, and the life is short when used as a cutting tool.
【０００７】本発明は、上述のような問題点を解決した
もので、具体的には、基材の表面上に最適な特性を保持
させた非化学量論組成の被膜を被覆し、硬度，耐摩耗
性，耐剥離性，耐熱性，耐酸化性および耐欠損性を高め
た耐摩耗性被覆部材の提供を目的とする。The present invention has solved the above-mentioned problems. Specifically, the present invention covers a substrate having a non-stoichiometric composition having optimal properties on its surface, and has a hardness, An object of the present invention is to provide a wear-resistant coated member having improved wear resistance, peel resistance, heat resistance, oxidation resistance, and fracture resistance.
【０００８】[0008]
【課題を解決するための手段】本発明者は、超硬合金ま
たはサーメットの表面上にＴｉの化合物を被覆した被覆
部材を切削工具として用いた場合における寿命向上につ
いて検討していたところ、Ｔｉの化合物でなる被膜の組
成成分を調整すること、具体的には、非金属元素を過剰
に含有した非化学量論組成のＴｉ含有複合化合物被膜に
することにより、被膜に高い圧縮応力が残存し、その結
果高硬度となること、被膜自体の潤滑性、耐酸化性がす
ぐれること、および耐剥離性に優れることから、切削工
具として用いた場合に寿命を顕著に向上することができ
るという知見を得て、本発明を完成するに至ったもので
ある。Means for Solving the Problems The inventors of the present invention have studied the improvement of the service life when a coated member in which a Ti compound is coated on the surface of a cemented carbide or cermet is used as a cutting tool. By adjusting the composition components of the film made of a compound, specifically, by forming a Ti-containing composite compound film having a non-stoichiometric composition containing an excessive amount of nonmetallic elements, a high compressive stress remains in the film, As a result, the fact that the hardness is high, the lubricity of the coating itself, the oxidation resistance is excellent, and the exfoliation resistance is excellent, the knowledge that the life can be remarkably improved when used as a cutting tool. As a result, the present invention has been completed.
【０００９】すなわち、本発明の被覆部材は、金属，合
金またはセラミックス焼結体の基材上に、（Ｔｉａ，Ｍ
ｂ）（ＣX，ＮY）R（但し、Ｔｉはチタン、ＭはＺｒ，
Ｈｆ，Ｖ，Ｎｂ，Ｔａ，Ｃｒ，Ｍｏ，Ｗの中の少なくと
も１種の元素を示し、Ｃは炭素、Ｎは窒素を示し、ａお
よびｂは金属元素であるＴｉとＭとのそれぞれの原子比
を表わし、ＸおよびＹは非金属元素であるＣとＮとのそ
れぞれの原子比を表わし、ＲはＴｉとＭとを合計した金
属元素に対するＣとＮとを合計した非金属元素の原子比
を表わし、それぞれは、ａ＋ｂ＝１、１＞ａ＞０、Ｘ＋
Ｙ＝１、１≧Ｘ≧０、１．８≧Ｒ≧１．０１の関係にあ
る。）の式で表わされる非化学量論組成のチタン含有複
合化合物被膜が被覆されていることを特徴とする。That is, the coating member of the present invention is formed by coating (Tia, M
b) (C X , N Y ) R (where Ti is titanium, M is Zr,
Hf, V, Nb, Ta, Cr, Mo, W represent at least one element, C represents carbon, N represents nitrogen, and a and b represent respective atoms of metal elements Ti and M X and Y represent the respective atomic ratios of the non-metallic elements C and N, and R is the atomic ratio of the non-metallic element summing C and N to the metal element summing Ti and M. Where a + b = 1, 1>a> 0, X +
Y = 1, 1 ≧ X ≧ 0, 1.8 ≧ R ≧ 1.01. ) Is coated with a non-stoichiometric titanium-containing composite compound film represented by the formula:
【００１０】本発明の被覆部材における基材は、具体的
には、例えば周期律表の４ａ，５ａ，６ａ族の金属，Ｃ
ｕ，Ａｌ，Ｆｅ，Ｎｉ，Ｃｏの金属、ステンレス鋼，高
速度鋼，耐熱合金，Ｔｉ合金，Ａｌ合金，Ｃｕ合金また
はサーメット，超硬合金に代表される焼結合金、Ａｌ2
Ｏ3基セラミックス焼結体，Ｓｉ3Ｎ4基セラミックス焼
結体，サイアロン基セラミックス焼結体，ＺｒＯ2基セ
ラミックス焼結体，ＳｉＣ基セラミックス焼結体，Ａｌ
Ｎ基セラミックス焼結体を挙げることができる。The base material of the coating member of the present invention is, for example, a metal of Group 4a, 5a or 6a of the periodic table,
u, Al, Fe, Ni, Co metals, stainless steel, high-speed steel, heat-resistant alloys, Ti alloys, Al alloys, Cu alloys or cermets, sintered alloys represented by cemented carbides, Al 2
O 3 based ceramic sintered body, Si 3 N 4 based ceramic sintered body, Sialon based ceramic sintered body, ZrO 2 based ceramic sintered body, SiC based ceramic sintered body, Al
An N-based ceramic sintered body can be used.
【００１１】これらの基材上に被覆される（Ｔｉａ，Ｍ
ｂ）（ＣX，ＮY）Rの式で表わされるチタン含有複合化
合物被膜は、具体的には、例えば（Ｔｉ，Ｚｒ）ＣR，
（Ｔｉ，Ｈｆ）ＣR，（Ｔｉ，Ｔａ）ＣR，（Ｔｉ，Ｎ
ｂ）ＣR，（Ｔｉ，Ｖ）ＣR，（Ｔｉ，Ｃｒ）ＣR，（Ｔ
ｉ，Ｍｏ）ＣR，（Ｔｉ，Ｗ）ＣR，（Ｔｉ，Ｚｒ）
ＮR，（Ｔｉ，Ｈｆ）ＮR，（Ｔｉ，Ｔａ）ＮR，（Ｔ
ｉ，Ｎｂ）ＮR，（Ｔｉ，Ｖ）ＮR，（Ｔｉ，Ｃｒ）
ＮR，（Ｔｉ，Ｍｏ）ＮR，（Ｔｉ，Ｗ）ＮR，（Ｔｉ，
Ｚｒ）（Ｃ，Ｎ）R，（Ｔｉ，Ｈｆ）（Ｃ，Ｎ）R，（Ｔ
ｉ，Ｔａ）（Ｃ，Ｎ）R，（Ｔｉ，Ｎｂ）（Ｃ，Ｎ）R，
（Ｔｉ，Ｖ）（Ｃ，Ｎ）R，（Ｔｉ，Ｃｒ）（Ｃ，
Ｎ）R，（Ｔｉ，Ｍｏ）（Ｃ，Ｎ）R，（Ｔｉ，Ｗ）
（Ｃ，Ｎ）R，（Ｔｉ，Ｚｒ，Ｈｆ）ＣR，（Ｔｉ，Ｔ
ａ，Ｈｆ）ＣR，（Ｔｉ，Ｗ，Ｈｆ）ＣR，（Ｔｉ，Ｗ，
Ｔａ）ＣR，（Ｔｉ，Ｃｒ，Ｚｒ）ＣR，（Ｔｉ，Ｚｒ，
Ｈｆ）ＮR，（Ｔｉ，Ｔａ，Ｈｆ）ＮR，（Ｔｉ，Ｗ，Ｚ
ｒ）ＮR，（Ｔｉ，Ｃｒ，Ｚｒ）ＮR，（Ｔｉ，Ｚｒ，Ｈ
ｆ）（Ｃ，Ｎ）R，（Ｔｉ，Ｔａ，Ｈｆ）（Ｃ，Ｎ）R，
（Ｔｉ，Ｗ，Ｚｒ）（Ｃ，Ｎ）R，（Ｔｉ，Ｃｒ，Ｚ
ｒ）（Ｃ，Ｎ）R，を挙げることができる。Coated on these substrates (Tia, M
b) The titanium-containing composite compound film represented by the formula of (C X , N Y ) R is specifically, for example, (Ti, Zr) C R ,
(Ti, Hf) C R, (Ti, Ta) C R, (Ti, N
b) C R , (Ti, V) C R , (Ti, Cr) C R , (T
i, Mo) C R , (Ti, W) C R , (Ti, Zr)
N R , (Ti, Hf) N R , (Ti, Ta) N R , (T
i, Nb) N R , (Ti, V) N R , (Ti, Cr)
N R , (Ti, Mo) N R , (Ti, W) N R , (Ti,
Zr) (C, N) R , (Ti, Hf) (C, N) R , (T
i, Ta) (C, N) R , (Ti, Nb) (C, N) R ,
(Ti, V) (C, N) R , (Ti, Cr) (C,
N) R , (Ti, Mo) (C, N) R , (Ti, W)
(C, N) R , (Ti, Zr, Hf) C R , (Ti, T
a, Hf) C R , (Ti, W, Hf) C R , (Ti, W,
Ta) C R , (Ti, Cr, Zr) C R , (Ti, Zr,
Hf) N R , (Ti, Ta, Hf) N R , (Ti, W, Z
r) N R , (Ti, Cr, Zr) N R , (Ti, Zr, H
f) (C, N) R , (Ti, Ta, Hf) (C, N) R ,
(Ti, W, Zr) (C, N) R , (Ti, Cr, Z
r) (C, N) R.
【００１２】この（Ｔｉａ，Ｍｂ）（ＣX，ＮY）Rの式
で表わされるチタン含有複合化合物被膜におけるＲが
１．０１未満になるか、またはＲが１．８を超えて多く
なると、硬さおよび耐摩耗性の低下が顕著になることか
ら、Ｒは１．０１〜１．８と定めたものであり、特に高
硬度性および優れた耐摩耗性を保持させるために、Ｒは
１．０５〜１．７が好ましいことである。When R in the titanium-containing composite compound coating represented by the formula of (Tia, Mb) (C X , N Y ) R is less than 1.01 or R is more than 1.8, R is determined to be 1.01 to 1.8 because the decrease in hardness and abrasion resistance becomes remarkable. In order to maintain high hardness and excellent abrasion resistance, R is preferably 1 to 1. 0.05 to 1.7 is preferred.
【００１３】また、チタン含有複合化合物被膜は、炭化
物，窒化物または炭窒化物からなるために、１≧Ｘ≧
０、１≧Ｙ≧０、Ｘ＋Ｙ＝１からなるものである。Further, since the titanium-containing composite compound coating is made of carbide, nitride or carbonitride, 1 ≧ X ≧
0, 1 ≧ Y ≧ 0, and X + Y = 1.
【００１４】このチタン含有複合化合物被膜の式におけ
るａが零になると、相対的にｂが１となり、その結果耐
熱衝撃性，耐衝撃性の低下が著しくなることから、１＞
ａ＞０と定めたものであり、特に耐熱衝撃性，耐衝撃性
を高めるために、１＞ａ＞０．５からなることが好まし
い。When a in the formula of the titanium-containing composite compound coating becomes zero, b becomes relatively one, and as a result, the thermal shock resistance and the impact resistance are significantly reduced.
a> 0, and preferably 1>a> 0.5 in order to particularly enhance the thermal shock resistance and the impact resistance.
【００１５】このチタン含有複合化合物被膜の膜厚さ
は、基材上に被覆される被膜の膜質の構成および用途や
形状等により異なり、例えば被膜の膜質の構成がチタン
含有複合化合物被膜のみからなる場合、または被膜へ及
ぼす衝撃が弱いような用途の場合には、チタン含有複合
化合物被膜の膜厚さを厚くする方向が好ましく、逆に被
膜の構成がチタン含有複合化合物被膜と他の膜質でなる
被膜との組合わせからなる場合、または被膜へ及ぼす衝
撃が強いような用途の場合には、チタン含有複合化合物
被膜の膜厚さを薄くする方向で使い分けることが好まし
く、具体的には、チタン含有複合化合物被膜の膜厚さが
前者の場合に１〜１５μｍであり、後者の場合に０．５
〜１０μｍであり、前者または後者として使い分けしな
い場合には１〜１０μｍが好ましく、特に好ましくは１
〜５μｍである。The thickness of the titanium-containing composite compound film varies depending on the composition, use, shape and the like of the film to be coated on the base material. For example, the composition of the film consists only of the titanium-containing composite compound film. In the case where the impact on the coating is weak, it is preferable to increase the thickness of the titanium-containing composite compound coating, and conversely, the configuration of the coating is composed of the titanium-containing composite compound coating and another film quality In the case of a combination with a coating or an application in which the impact on the coating is strong, it is preferable to selectively use the titanium-containing composite compound coating in the direction of decreasing the film thickness. The film thickness of the composite compound coating is 1 to 15 μm in the former case, and 0.5 in the latter case.
If it is not used as the former or the latter, it is preferably 1 to 10 μm, particularly preferably 1 to 10 μm.
５5 μm.
【００１６】本発明の被覆部材は、基材の表面に直接、
上述のチタン含有複合化合物被膜を被覆する被膜構成と
することも好ましく、また基材とチタン含有複合化合物
被膜との間にＴｉの炭化物，窒化物，炭窒化物の中の１
種の単層または２種以上の多層でなる内層を介在させる
ことも好ましく、さらに基材の表面に直接チタン含有複
合化合物被膜を被覆し、このチタン含有複合化合物被膜
の表面にＴｉの炭化物，窒化物，Ａｌの酸化物，窒化物
およびこれらの相互固溶体の中の１種の単層または２種
以上の多層でなる外層が被覆されていることも好まし
く、基材上に内層とチタン含有複合化合物被膜と外層と
を順次被覆した被膜構成にすることも好ましいことであ
る。[0016] The coating member of the present invention can be directly applied to the surface of a substrate.
It is also preferable that the above-mentioned titanium-containing composite compound film is coated. Further, one of Ti carbides, nitrides, and carbonitrides is provided between the substrate and the titanium-containing composite compound film.
It is also preferable to interpose an inner layer consisting of a single kind of layer or two or more kinds of layers. Further, the surface of the base material is directly coated with a titanium-containing composite compound film, and the surface of the titanium-containing composite compound film is coated with Ti carbide, nitride, etc. , An oxide, a nitride of Al and a mutual solid solution thereof, it is also preferable that one or a plurality of outer layers are coated, and the inner layer and the titanium-containing composite compound are coated on the base material. It is also preferable to form a coating in which a coating and an outer layer are sequentially coated.
【００１７】このときの外層は、具体的には、ＴｉＣ，
ＴｉＮ，Ｔｉ（Ｃ，Ｎ），Ａｌ2Ｏ3，ＡｌＮ，Ａｌ
（Ｏ，Ｎ）（Ｔｉ，Ａｌ）Ｎ，（Ｔｉ，Ａｌ）（Ｃ，
Ｎ），（Ｔｉ，Ａｌ）Ｃ，（Ｔｉ，Ａｌ）（Ｎ，Ｏ），
（Ｔｉ，Ａｌ）（Ｃ，Ｏ）（Ｔｉ，Ａｌ）（Ｃ，Ｎ，
Ｏ）を挙げることができる。この外層および内層は、そ
れぞれの膜厚さが０．１〜５μｍ、好ましくは０．５〜
３μｍ、その組成成分が化学量論組成、または金属元素
に対する非金属元素の少ない場合もしくは多い場合から
なる非化学量論組成からなるものである。The outer layer at this time is, specifically, TiC,
TiN, Ti (C, N), Al 2 O 3 , AlN, Al
(O, N) (Ti, Al) N, (Ti, Al) (C,
N), (Ti, Al) C, (Ti, Al) (N, O),
(Ti, Al) (C, O) (Ti, Al) (C, N,
O). The outer layer and the inner layer each have a thickness of 0.1 to 5 μm, preferably 0.5 to 5 μm.
3 μm, the composition of which is composed of a stoichiometric composition or a non-stoichiometric composition in which the amount of nonmetallic elements relative to metal elements is small or large.
【００１８】また、本発明の被覆部材における別の被膜
構成としては、内層とチタン含有複合化合物被膜を１サ
イクルとする被膜の場合に、これを２サイクル以上繰り
返して積層する場合、またはチタン含有複合化合物被膜
と外層を１サイクルとする被膜の場合に、これを２サイ
クル以上繰り返して積層する場合、さらに内層とチタン
含有複合化合物被膜と外層を１サイクルとする被膜の場
合に、これを２サイクル以上繰り返して積層する場合も
被膜の強度向上から好ましい。Further, as another coating constitution of the coating member of the present invention, as a coating in which the inner layer and the titanium-containing composite compound coating are made into one cycle, when this is repeated two or more cycles, or when the titanium-containing composite compound In the case of a film in which a compound film and an outer layer constitute one cycle, when this is repeated and repeated two or more times, and in the case of a film in which an inner layer, a titanium-containing composite compound film and an outer layer constitute one cycle, this is repeated two or more cycles. Repeated lamination is also preferable from the viewpoint of improving the strength of the coating.
【００１９】以上、詳述してきた本発明の被覆部材にお
ける総被膜厚さは、用途や形状により種々選定すること
ができるが、耐剥離性から２０μｍ以下、好ましくは１
０μｍ以下であり、特に切削工具のような大きな衝撃が
加わる用途では５μｍ以下の総被膜厚さでなることが好
ましい。The total coating thickness of the coating member of the present invention described in detail above can be variously selected depending on the application and the shape.
The thickness is preferably 0 μm or less, and particularly in applications where a large impact is applied, such as a cutting tool, the total coating thickness is preferably 5 μm or less.
【００２０】本発明の被覆部材における被膜は、できる
だけ微細粒からなっていることが好ましく、特にチタン
含有複合化合物被膜が粒径の微細化の目安となるＸ線回
折線の半価幅、具体的にはＣｕ−Ｋα線による（１１
１）および／または（２００）結晶面の半価幅が０．６
以上からなることが好ましい。The coating in the coated member of the present invention is preferably composed of as fine grains as possible. In particular, the titanium-containing composite compound coating has a half-value width of X-ray diffraction lines which is a standard for refining the particle size. Has a Cu-Kα ray (11
1) and / or (200) crystal plane having a half width of 0.6
It is preferable to consist of the above.
【００２１】本発明の被覆部材は、従来から市販または
提案されている各種の基材を用いて、従来から行われて
いるＣＶＤ法やＰＶＤ法を応用することにより作製する
ことができる。具体的には、ＣＶＤ法やＰＶＤ法におけ
るガス圧の調整が重要である。また、イオンプレーティ
ング法やスパッタ法のＰＶＤ法により、本発明の被覆部
材を作製すると、Ｒの大きい被膜で、かつ被膜に大きな
圧縮応力を残留させやすく、そうすると、耐欠損性が顕
著に優れることから好ましいことである。The coating member of the present invention can be produced by using various conventional or commercially available substrates and applying a conventional CVD method or PVD method. Specifically, it is important to adjust the gas pressure in the CVD method or the PVD method. Further, when the coated member of the present invention is manufactured by a PVD method such as an ion plating method or a sputtering method, it is a film having a large R, and a large compressive stress is easily left in the film, so that the fracture resistance is remarkably excellent. This is preferable.
【００２２】[0022]
【作用】本発明の被覆部材は、基材上の被覆されたチタ
ン含有複合化合物被膜における金属元素に対する非金属
元素の原子比が被膜の硬さを高める作用をし、その結果
間接的に耐摩耗性を高める作用となり、特にＰＶＤ法に
より作製されたチタン含有複合化合物被膜の場合には、
被膜に大きい圧縮応力を残留させる作用が生じ、その結
果被膜の強度および耐摩耗性を高める間接的作用があ
る。In the coated member of the present invention, the atomic ratio of the non-metallic element to the metallic element in the coated titanium-containing composite compound coating on the substrate acts to increase the hardness of the coating and, as a result, indirectly reduces wear resistance. In the case of a titanium-containing composite compound film produced by a PVD method,
The action of leaving a large compressive stress in the coating occurs, which has the indirect effect of increasing the strength and wear resistance of the coating.
【００２３】[0023]
【実施例１】イオンプレーティング装置の反応容器内
に、市販の超硬合金（ＪＩＳ規格、Ｐ３０相当材種、Ｓ
ＤＫＮ４２ＺＴＮ形状）の基材を設置した後、加熱工
程、Ａｒのエッチング工程および被覆工程を施して、本
発明品１〜５と比較品１〜２を得た。この内、本発明品
１〜５は、基材を設置した電子加熱式反応容器内を１×
１０-5Ｔｏｒｒ真空排気した後、Ａｒガスを導入し、２
×１０-3Ｔｏｒｒの圧力とし、本発明品１，２，４，５
については、出力１０ｋｗで６０分間電子加熱し、本発
明品３については、出力１２ｋｗで６０分間電子加熱
し、本発明品１，２の基材温度を４００℃、本発明品３
の基材温度を３８０℃、本発明品４の基材温度を３９０
℃、本発明品５の基材温度を３９５℃に保持する加熱工
程と、圧力１×１０-3ＴｏｒｒのＡｒガス中、直流電圧
３００Ｖを印加してグロー放電を発生させて、基材表面
を３０分間Ａｒイオンボンバード処理によるＡｒのエッ
チング工程と、表１に示したそれぞれの被覆条件（窒素
ガス純度５Ｎ使用）による被覆工程でもって作製した。Example 1 A commercially available cemented carbide (JIS standard, P30 equivalent grade, S) was placed in a reaction vessel of an ion plating apparatus.
After installing the base material (DKN42ZTN shape), a heating step, an Ar etching step, and a coating step were performed to obtain inventive products 1 to 5 and comparative products 1 and 2. Among them, the present invention products 1 to 5 are 1 × in an electron heating type reaction vessel in which a base material is installed.
After evacuation at 10 -5 Torr, Ar gas was introduced and
× 10 −3 Torr and the products of the present invention 1, 2, 4, 5
Is electronically heated at an output of 10 kW for 60 minutes, and the product 3 of the present invention is electronically heated at an output of 12 kW for 60 minutes.
380 ° C., and the substrate temperature of the product 4 of the present invention was 390 ° C.
C., a heating step of maintaining the substrate temperature of the product 5 of the present invention at 395 ° C., and applying a DC voltage of 300 V in Ar gas at a pressure of 1 × 10 −3 Torr to generate a glow discharge, thereby causing the substrate surface to be exposed. It was produced by an Ar etching process by Ar ion bombardment for 30 minutes and a coating process under the respective coating conditions shown in Table 1 (using nitrogen gas purity of 5N).
【００２４】比較品１〜２は、基材を設置した抵抗加熱
式反応容器内を１×１０-5Ｔｏｒｒ真空排気した後、Ａ
ｒガスを導入し、比較品１，２については、４×１０-4
〜１×１０-4Ｔｏｒｒの圧力、出力２０ｋｗ、６０分間
加熱により５００℃に保持し、圧力８×１０-2Ｔｏｒｒ
のＡｒガス中、直流電圧６００Ｖを印加して基材表面を
１０分間Ａｒイオンボンバード処理し、表１に示したそ
れぞれの被覆条件による被覆工程でもって作製した。The comparative products 1 and 2 were prepared by evacuating the inside of the resistance heating type reaction vessel having the base material to 1 × 10 −5 Torr,
r gas was introduced, and for comparative products 1 and 2, 4 × 10 -4
１1 × 10 -4 Torr pressure, output 20 kW, heated at 500 ° C. for 60 minutes, pressure 8 × 10 −2 Torr
In this Ar gas, a DC voltage of 600 V was applied, and the substrate surface was subjected to Ar ion bombardment treatment for 10 minutes, and the substrate was produced by a coating process under the respective coating conditions shown in Table 1.
【００２５】こうして得た本発明品１〜５および比較品
１〜２のそれぞれの被膜厚さは、走査型電子顕微鏡で調
べたところ、約３．５μｍであり、被膜組成成分は、Ｘ
線回折装置およびグロー放電発光分光分析装置により解
析し、表２に示した。また、それぞれの被膜表面からの
硬さ、ＣｕーＫα線によるＸ線回折法による被膜の残留
応力および被膜の（１１１）結晶面における半価幅を求
めて表２に併記した。The coating thickness of each of the thus-obtained products 1 to 5 of the present invention and comparative products 1 and 2 was about 3.5 μm when examined with a scanning electron microscope.
The results were analyzed by a line diffraction apparatus and a glow discharge emission spectrometer, and are shown in Table 2. The hardness from the surface of each film, the residual stress of the film by X-ray diffraction using Cu-Kα ray, and the half width at the (111) crystal plane of the film were also shown in Table 2.
【００２６】次に、本発明品１〜５および比較品１〜２
を用いて、被削材：Ｓ４８Ｃ（ＨＢ＝２２４〜２４
２）、工具形状：ＳＤＫＮ４２ＺＴＮ、切削速度：１３
０ｍ／ｍｉｎ、切込み：１ｍｍ、送り：０．２ｍｍ／ｒ
ｅｖ、湿式旋削による切削条件でもって１００分間切削
し、そのときのそれぞれの逃げ面摩耗量を測定し、表２
に併記した。Next, products 1 to 5 of the present invention and comparative products 1 to 2
Work material: S48C (HB = 224 to 24)
2), tool shape: SDKN42ZTN, cutting speed: 13
0m / min, depth of cut: 1mm, feed: 0.2mm / r
ev, cutting was performed for 100 minutes under the cutting conditions by wet turning, and the respective flank wear amounts at that time were measured.
It was also described in.
【００２７】[0027]
【表１】 [Table 1]
【００２８】[0028]
【表２】 [Table 2]
【００２９】[0029]
【実施例２】実施例１で用いた同一装置および基材を用
いて、同様の工程を施して、本発明品６〜１１および比
較品３〜６を得た。この内、本発明品６，１１は、実施
例１の本発明品１，２と同様の加熱条件、Ａｒのエッチ
ング条件で処理した後、表３に示した被覆条件（基材の
表面に第１層、第２層、第３層と順次被覆）による被覆
工程を施して作製した。本発明品７は、Ａｒエッチング
工程中のボンバード処理時間を２０分間とした以外は、
本発明品６，１１と同様の加熱条件，Ａｒのエッチング
条件で処理した後、表３に示した被覆条件による被覆工
程を施して作製した。本発明品８は、加熱工程中の出力
８．５ｋｗ、加熱時間７０分、基材温度３８０℃、Ａｒ
のエッチング工程中のボンバード処理時間を２５分間と
した以外は、本発明品６，１１と同様の加熱条件，Ａｒ
のエッチング条件で処理した後、表３に示した被覆条件
による被覆工程を施して作製した。本発明品９は、加熱
工程中の出力８．５ｋｗ、加熱温度３５０℃とした以外
は、本発明品６，１１と同様の加熱条件，Ａｒのエッチ
ング条件で処理した後、表３に示した被覆条件による被
覆工程を施して作製した。本発明品１０は、加熱工程中
の加熱時間６５分間，加熱温度４１０℃とした以外は、
本発明品６，１１と同様の加熱条件，Ａｒのエッチング
条件で処理した後、表３に示した被覆条件による被覆工
程を施して作製した。Example 2 Using the same apparatus and substrate used in Example 1, the same steps were performed to obtain products 6 to 11 of the present invention and comparative products 3 to 6. Of these, products 6 and 11 of the present invention were treated under the same heating conditions and Ar etching conditions as those of products 1 and 2 of the present invention, and then coated under the coating conditions shown in Table 3 (A single layer, a second layer, and a third layer in this order). The product 7 of the present invention was the same as the product 7 except that the bombarding time during the Ar etching step was set to 20 minutes.
After being treated under the same heating conditions and Ar etching conditions as those of the products 6 and 11 of the present invention, a coating process under the coating conditions shown in Table 3 was performed. The product 8 of the present invention has an output of 8.5 kw during the heating step, a heating time of 70 minutes, a substrate temperature of 380 ° C., and an Ar
The heating conditions were the same as those of the products 6 and 11 of the present invention except that the bombarding time during the etching step was 25 minutes.
After processing under the etching conditions described in Table 3, the coating process was performed under the coating conditions shown in Table 3 to produce the substrate. The product 9 of the present invention was treated under the same heating conditions and Ar etching conditions as those of the products 6 and 11 of the present invention except that the output during the heating step was 8.5 kw and the heating temperature was 350 ° C., and shown in Table 3. It was produced by applying a coating process under coating conditions. The product 10 of the present invention has a heating time of 65 minutes during the heating step and a heating temperature of 410 ° C.
After processing under the same heating conditions and Ar etching conditions as those of the products 6 and 11 of the present invention, a coating process under the coating conditions shown in Table 3 was performed.
【００３０】比較品３，４，６は、実施例１の比較品
１，２と同様の加熱条件，Ａｒのエッチング条件で処理
した後、表４に示した被覆条件による被覆工程を施して
作製した。比較品５は、加熱工程中の出力１８ｋｗ、加
熱温度４５０℃とした以外は、比較品１，２と同様の加
熱条件，Ａｒのエッチング条件で処理した後、表３に示
した被覆条件による被覆工程を施して作製した。The comparative products 3, 4, and 6 were prepared by treating them under the same heating conditions and Ar etching conditions as those of the comparative products 1 and 2 of Example 1, and then performing a coating process under the coating conditions shown in Table 4. did. Comparative product 5 was treated under the same heating conditions and Ar etching conditions as those of Comparative products 1 and 2, except that the output during the heating step was 18 kw and the heating temperature was 450 ° C., and then the coating was performed under the coating conditions shown in Table 3. It was produced by performing the steps.
【００３１】こうして得た本発明品６〜１１と比較品３
〜６のそれぞれの被膜を実施例１に記載した方法で調べ
た結果、第１層の膜厚略１μｍ、第２層の膜厚略２μ
ｍ、第３層の膜厚略０．３μｍからなっており、被膜組
成成分，被膜硬さ，被膜の残留応力を表５に示した。ま
た、本発明品６〜１１と比較品３〜６を用いて、実施例
１における湿式旋削による切削条件でもって切削試験を
行い、その結果を表５に併記した。The inventive products 6 to 11 thus obtained and the comparative product 3
As a result of examining each of the coating films Nos. To 6 by the method described in Example 1, the film thickness of the first layer was approximately 1 μm, and the film thickness of the second layer was approximately 2 μm.
m, the thickness of the third layer was about 0.3 μm. Table 5 shows the composition of the coating, the hardness of the coating, and the residual stress of the coating. Further, cutting tests were performed using the products 6 to 11 of the present invention and the comparative products 3 to 6 under the cutting conditions by wet turning in Example 1, and the results are also shown in Table 5.
【００３２】次に、本発明品８と比較品３の被覆部材で
なる直径８ｍｍのスパイラルドリルを用いて、被削材：
ＳＣＭ４４０（ＨＢ＝２３０〜２５０）、切削速度：６
０ｍ／ｍｉｎ、送り：０．２ｍｍ／ｒｅｖ、加工深さ：
３０ｍｍ、の条件で１５ｍ、穴あけ加工を行った結果、
本発明品８の平均逃げ面摩耗量は、０．１５ｍｍであっ
たのに対し、比較品３の逃げ面摩耗量は、０．２ｍｍで
あった。Next, using a spiral drill having a diameter of 8 mm which is a covering member of the product 8 of the present invention and the comparative product 3, a work material:
SCM440 (HB = 230-250), cutting speed: 6
0m / min, feed: 0.2mm / rev, machining depth:
As a result of drilling 15m under the condition of 30mm,
The average flank wear of the product 8 of the present invention was 0.15 mm, while the flank wear of the comparative product 3 was 0.2 mm.
【００３３】[0033]
【表３】 [Table 3]
【００３４】[0034]
【表４】 [Table 4]
【００３５】[0035]
【表５】 [Table 5]
【００３６】[0036]
【実施例３】逃げ面の被膜構成が実施例２における本発
明品８の内、第２層厚さのみ１μｍの他は略本発明品８
の被膜構成からなる本発明品１２と、逃げ面の被膜構成
が実施例２における比較品３の内、第２層厚さのみ１μ
ｍの他は略比較品３の被膜構成に相当し、すくい面の被
膜構成が比較品３の被膜構成からなる比較品７とを用い
て、被削材：ＳＣＭ（ＨＢ＝２４０〜２６０、６穴
付）、切削速度：１５０ｍ／ｍｉｎ、送り：０．２５ｍ
ｍ／刃、切込み：２ｍｍ、工具形状：ＳＤＫＮ４２ＺＴ
Ｎ、乾式フライス切削を行った結果、本発明品１２は、
加工長さ４ｍ時における最大逃げ摩耗量が０．０５ｍｍ
で、正常摩耗であったのに対し、比較品７は、加工長さ
４ｍ時における最大逃げ面摩耗量が０．１ｍｍで、被膜
の剥離が少々発生していた。Embodiment 3 Of the product 8 of the present invention in the second embodiment, the coating on the flank is substantially the same as the product 8 of the present invention except that only the second layer thickness is 1 μm.
The product 12 of the present invention having the film configuration of the present invention and the film configuration of the flank of the comparative product 3 of the second embodiment.
Other than m, the film configuration of the comparative product 3 substantially corresponds to that of the comparative product 7. The work material: SCM (HB = 240 to 260, 6) With hole), Cutting speed: 150m / min, Feed: 0.25m
m / blade, depth of cut: 2 mm, tool shape: SDKN42ZT
N, as a result of performing dry milling, the product 12 of the present invention
Maximum relief wear at machining length 4m is 0.05mm
In contrast, the comparative product 7 had a maximum flank wear amount of 0.1 mm when the processing length was 4 m, and the coating film was slightly peeled off.
【００３７】[0037]
【実施例４】市販の高速度鋼，Ｔｉ合金，窒素含有炭化
チタン（ＴｉＣ−ＴｉＮ）基サーメット，窒化ケイ素基
セラミックス，酸化アルミニウム基（Ａｌ2Ｏ3−Ｔｉ
Ｃ）セラミックスの基材をそれぞれ用いて、実施例１に
おける本発明品２と略同様に処理して被覆部材を作製
し、それぞれを本発明品１３，１４，１５，１６，１７
とした。Example 4 Commercially available high speed steel, Ti alloy, nitrogen containing titanium carbide (TiC-TiN) based cermet, a silicon group nitride ceramics, aluminum oxide-based (Al 2 O 3 -Ti
C) Using each of the ceramic base materials, treatment was performed in substantially the same manner as that of the product 2 of the present invention in Example 1 to produce a covering member, and each of them was coated with the products 13, 14, 15, 16 and 17 of the present invention.
And
【００３８】比較として、本発明品１３〜１７で用いた
同一基材を用いて、実施例１における比較品１と略同様
に処理して被覆部材を作製し、それぞれを比較品８，
９，１０，１１，１２とした。As a comparison, the same base material used in the products 13 to 17 of the present invention was treated in substantially the same manner as the comparative product 1 in Example 1 to produce a covering member.
9, 10, 11, and 12.
【００３９】こうして得た本発明品１３〜１７と比較品
８〜１２の被膜の組成成分および被膜硬さを実施例１で
行った方法で調べたところ、本発明品１３〜１７は、本
発明品２と略同様で２８１０±５０（ＨV）の高硬度被
膜であったのに対し、比較品８〜１２は、比較品１と略
同様で被膜硬さ２４００±５０（ＨV）であった。The composition and hardness of the coatings of the inventive products 13 to 17 thus obtained and the comparative products 8 to 12 were examined by the method performed in Example 1. whereas the a high hardness coating goods 2 substantially the same at 2810 ± 50 (H V), comparative 8-12 met comparative 1 with substantially the same as a coating hardness 2400 ± 50 (H V) Was.
【００４０】[0040]
【発明の効果】本発明の被覆部材は、化学量論組成に近
似した被膜からなる従来の被覆部材に比べて、被膜の硬
さが約７〜３２％高く、被膜の残留圧縮応力が約２１〜
１９２％高く、切削試験における耐摩耗性が約１０〜６
９％も向上し、被膜の耐剥離性も優れており、長寿命に
なるという顕著な効果がある。The coated member of the present invention has a hardness of about 7 to 32% higher and a residual compressive stress of the coated film of about 21 to 21% as compared with a conventional coated member having a coating having a similar stoichiometric composition. ~
192% higher, wear resistance in cutting test about 10-6
It has a remarkable effect of improving the coating film by 9%, having excellent peeling resistance, and having a long life.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) C23C 14/00 - 14/58 C23C 16/00 - 16/56 B23B 27/14 C04B 35/42 - 35/51 C01B 21/076 ──────────────────────────────────────────────────続 き Continued on the front page (58) Fields surveyed (Int. Cl. 7 , DB name) C23C 14/00-14/58 C23C 16/00-16/56 B23B 27/14 C04B 35/42-35 / 51 C01B 21/076
Claims (5)
基材上に、次式（Ａ）で表わされる非化学量論組成のチ
タン含有複合化合物被膜が被覆されていることを特徴と
する耐摩耗性被覆部材。 （Ｔｉａ，Ｍｂ）（ＣX，ＮY）R ‥‥‥（Ａ） 〔但し、（Ａ）式中のＴｉはチタン、ＭはＺｒ，Ｈｆ，
Ｖ，Ｎｂ，Ｔａ，Ｃｒ，Ｍｏ，Ｗの中の少なくとも１種
の元素を示し、Ｃは炭素、Ｎは窒素を示し、ａおよびｂ
は金属元素であるＴｉとＭとのそれぞれの原子比を表わ
し、ＸおよびＹは非金属元素であるＣとＮとのそれぞれ
の原子比を表わし、ＲはＴｉとＭとを合計した金属元素
に対するＣとＮとを合計した非金属元素の原子比を表わ
し、それぞれは、ａ＋ｂ＝１、１＞ａ＞０、Ｘ＋Ｙ＝
１、１≧Ｘ≧０、１．８≧Ｒ≧１．０１の関係にあ
る。〕An abrasion resistance characterized in that a non-stoichiometric titanium-containing composite compound film represented by the following formula (A) is coated on a base material of a metal, alloy or ceramic sintered body. Coating member. (Tia, Mb) (C X , N Y ) R ‥‥‥ (A) [where, in the formula (A), Ti is titanium, and M is Zr, Hf,
V, Nb, Ta, Cr, Mo, W represents at least one element, C represents carbon, N represents nitrogen, a and b
Represents the atomic ratio of each of the metal elements Ti and M, X and Y represent the atomic ratios of the non-metal elements C and N, and R represents the total metal element of Ti and M Represents the atomic ratio of the non-metallic element sum of C and N, where a + b = 1, 1>a> 0, X + Y =
1, 1 ≧ X ≧ 0, 1.8 ≧ R ≧ 1.01. ]
合化合物被膜は、１＞ａ≧０．５、１．７≧Ｒ≧１．０
５の関係にあることを特徴とする請求項１記載の耐摩耗
性被覆部材。2. The titanium-containing composite compound film represented by the above formula (A) has a relation of 1> a ≧ 0.5, 1.7 ≧ R ≧ 1.0.
5. The wear-resistant covering member according to claim 1, wherein said member has a relationship of 5.
基材上に、次式（Ａ）で表わされる非化学量論組成のチ
タン含有複合化合物被膜が被覆されており、該基材と該
チタン含有複合化合物被膜との間に、Ｔｉの炭化物，窒
化物および炭窒化物の中の１種の単層または２種以上の
多層でなる内層が被覆されていることを特徴とする耐摩
耗性被覆部材。 （Ｔｉａ，Ｍｂ）（ＣX，ＮY）R ‥‥‥（Ａ） 〔但し、（Ａ）式中のＴｉはチタン、ＭはＺｒ，Ｈｆ，
Ｖ，Ｎｂ，Ｔａ，Ｃｒ，Ｍｏ，Ｗの中の少なくとも１種
の元素を示し、Ｃは炭素、Ｎは窒素を示し、ａおよびｂ
は金属元素であるＴｉとＭとのそれぞれの原子比を表わ
し、ＸおよびＹは非金属元素であるＣとＮとのそれぞれ
の原子比を表わし、ＲはＴｉとＭとを合計した金属元素
に対するＣとＮとを合計した非金属元素の原子比を表わ
し、それぞれはａ＋ｂ＝１、１＞ａ＞０、Ｘ＋Ｙ＝１、
１≧Ｘ≧０、１．８≧Ｒ≧１．０１の関係にある。〕3. A non-stoichiometric titanium-containing composite compound film represented by the following formula (A) is coated on a base material of a metal, alloy or ceramic sintered body. An abrasion-resistant coating characterized in that an inner layer comprising one kind of a single layer or two or more kinds of Ti carbides, nitrides and carbonitrides is coated between the coating and the composite compound coating. Element. (Tia, Mb) (C X , N Y ) R ‥‥‥ (A) [where, in the formula (A), Ti is titanium, and M is Zr, Hf,
V, Nb, Ta, Cr, Mo, W represents at least one element, C represents carbon, N represents nitrogen, a and b
Represents the atomic ratio of each of the metal elements Ti and M, X and Y represent the atomic ratios of the non-metal elements C and N, and R represents the total metal element of Ti and M Represents the atomic ratio of the non-metallic element sum of C and N, where a + b = 1, 1>a> 0, X + Y = 1,
1 ≧ X ≧ 0 and 1.8 ≧ R ≧ 1.01. ]
合化合物被膜は、１＞ａ≧０．５、１．７≧Ｒ≧１．０
５の関係にあることを特徴とする請求項３記載の耐摩耗
性被覆部材。4. The titanium-containing composite compound film represented by the above formula (A) has a relation of 1> a ≧ 0.5, 1.7 ≧ R ≧ 1.0.
4. A wear-resistant covering member according to claim 3, wherein said member has a relationship of 5.
合化合物被膜の表面に、Ｔｉの炭化物，窒化物，Ａｌの
酸化物，窒化物およびこれらの相互固溶体の中の１種の
単層または２種以上の多層でなる外層が被覆されている
ことを特徴とする請求項３または４記載の耐摩耗性被覆
部材。5. A single layer of one of Ti carbides, nitrides, Al oxides, nitrides, and mutual solid solutions thereof on the surface of the titanium-containing composite compound film represented by the formula (A). 5. The wear-resistant covering member according to claim 3, wherein two or more kinds of outer layers are coated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34445093A JP3249277B2 (en) | 1993-12-17 | 1993-12-17 | Wear resistant coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34445093A JP3249277B2 (en) | 1993-12-17 | 1993-12-17 | Wear resistant coating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07173608A JPH07173608A (en) | 1995-07-11 |
| JP3249277B2 true JP3249277B2 (en) | 2002-01-21 |
Family
ID=18369362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34445093A Expired - Fee Related JP3249277B2 (en) | 1993-12-17 | 1993-12-17 | Wear resistant coating |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3249277B2 (en) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100633286B1 (en) | 1998-10-27 | 2006-10-11 | 미츠비시 마테리알 고베 툴스 가부시키가이샤 | Covering member having hard coating on its surface excellent in abrasion resistance |
| DE10002861A1 (en) * | 2000-01-24 | 2001-08-09 | Walter Ag | Cutting tool with carbonitride coating |
| SE0004203D0 (en) * | 2000-11-16 | 2000-11-16 | Haakan Hugosson | A surface coating |
| KR100791112B1 (en) * | 2005-12-23 | 2008-01-04 | 한국야금 주식회사 | CVD multi composite film for cutting tools |
| JP4863070B2 (en) * | 2006-10-19 | 2012-01-25 | 三菱マテリアル株式会社 | Surface-coated cutting tool with excellent chipping resistance with a hard coating layer in high-speed intermittent cutting of high-hardness steel |
| JP4863071B2 (en) * | 2006-10-25 | 2012-01-25 | 三菱マテリアル株式会社 | Surface coated cutting tool with excellent wear resistance due to hard coating layer |
| IL182741A (en) | 2007-04-23 | 2012-03-29 | Iscar Ltd | Coatings |
| JP5003308B2 (en) * | 2007-06-27 | 2012-08-15 | 三菱マテリアル株式会社 | Surface coated cutting tool |
| WO2009016938A1 (en) * | 2007-08-02 | 2009-02-05 | Kabushiki Kaisha Kobe Seiko Sho | Hard coating film, material covered with hard coating film, mold for cold plastic forming, and method for forming hard coating film |
| JP4774080B2 (en) | 2007-08-02 | 2011-09-14 | 株式会社神戸製鋼所 | Hard coating material and cold plastic working mold |
| WO2009025112A1 (en) * | 2007-08-22 | 2009-02-26 | Sumitomo Electric Industries, Ltd. | Surface-coated cutting tool |
| JP5019257B2 (en) * | 2007-08-31 | 2012-09-05 | 三菱マテリアル株式会社 | Surface coated cutting tool |
| JP5019258B2 (en) * | 2007-08-31 | 2012-09-05 | 三菱マテリアル株式会社 | Surface coated cutting tool |
| US8080324B2 (en) | 2007-12-03 | 2011-12-20 | Kobe Steel, Ltd. | Hard coating excellent in sliding property and method for forming same |
| JP5214075B1 (en) * | 2011-08-29 | 2013-06-19 | 京セラ株式会社 | Cutting tools |
| JP6084286B2 (en) * | 2013-03-29 | 2017-02-22 | シチズン時計株式会社 | Rigid decorative member with gray tone layer |
| JP2017110248A (en) * | 2015-12-15 | 2017-06-22 | 株式会社神戸製鋼所 | Hard film and metal mold |
| EP3592880B1 (en) * | 2017-03-09 | 2022-08-03 | Sandvik Intellectual Property AB | A coated cutting tool |
-
1993
- 1993-12-17 JP JP34445093A patent/JP3249277B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07173608A (en) | 1995-07-11 |
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