JPH03275119A - Apparatus for treating exhaust gas with plasma - Google Patents
Apparatus for treating exhaust gas with plasmaInfo
- Publication number
- JPH03275119A JPH03275119A JP2073482A JP7348290A JPH03275119A JP H03275119 A JPH03275119 A JP H03275119A JP 2073482 A JP2073482 A JP 2073482A JP 7348290 A JP7348290 A JP 7348290A JP H03275119 A JPH03275119 A JP H03275119A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- exhaust gas
- catalytic function
- discharge
- discharge electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003197 catalytic effect Effects 0.000 claims abstract description 21
- 239000000126 substance Substances 0.000 abstract description 7
- 239000003989 dielectric material Substances 0.000 description 13
- 239000007789 gas Substances 0.000 description 13
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 239000003054 catalyst Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 210000002700 urine Anatomy 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
- Exhaust Gas Treatment By Means Of Catalyst (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は燃焼排ガスなどの産業用及び自動車用等の排ガ
ス処理装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for treating combustion exhaust gas and other industrial and automobile exhaust gases.
排ガス中に含まれるNOx、及びCO等の有害ガスの処
理法として、従来は炉内DeNoxや触媒DeNoxの
ように熱又は熱および触媒の力で化学反応を起させ分解
させていた。Conventionally, as a treatment method for harmful gases such as NOx and CO contained in exhaust gas, chemical reactions have been caused to cause decomposition using heat or the power of heat and a catalyst, such as in-furnace DeNox or catalytic DeNox.
ところが従来の技術では、下記に示す例のように非常に
高い熱エネルギーとN1(3等の反応促進剤が必要とさ
れ、コスト的にもかなり高いものであった。However, the conventional techniques require very high thermal energy and a reaction accelerator such as N1 (3) as shown in the example shown below, and are also quite expensive.
(1)火炉内DeNOxの場合
温度800〜900°C+ NH3
(2)触媒DeNOxの場合
温度400″C十 触媒+(N113)〔課題を解決す
るための手段〕
本発明は上記課題を解決するため次の手段を講する。(1) In the case of DeNOx in the furnace, the temperature is 800 to 900°C + NH3 (2) In the case of catalyst DeNOx, the temperature is 400'' Take the following measures.
すなわち、プラズマ排ガス処理装置として、放電極と、
同放電極に対向するアース電極と、上記放電極およびア
ース電極の間に設けられる触媒機能を持つ誘電体と、上
記放電極およびアース電極に接続される高電圧源とを備
え、処理対象の排ガスを上記放電極とアース電極との間
の空間を通すようにした。That is, as a plasma exhaust gas treatment device, a discharge electrode,
A ground electrode facing the discharge electrode, a dielectric having a catalytic function provided between the discharge electrode and the earth electrode, and a high voltage source connected to the discharge electrode and the earth electrode. was made to pass through the space between the discharge electrode and the ground electrode.
上記手段により、放電極とアース電極間に高電尿温から
直流、交流あるいは、パルス状の高電圧を印加すると、
空間部にはス1−リーマやグロー状コロナ、またセラミ
ンクスや酸化金属などの触媒機能を持つ誘電体間には、
ミクロな放電がそれぞれ起こり、電極近傍や触媒機能を
持つ誘電体表面がプラズマ状態となる。When a direct current, alternating current, or pulsed high voltage is applied between the discharge electrode and the earth electrode from a high urine temperature using the above means,
There is a 1-reamer and glow-like corona in the space, and between dielectric materials with catalytic functions such as ceramics and metal oxides,
Each microscopic discharge occurs, and the vicinity of the electrode and the surface of the dielectric material that has a catalytic function become in a plasma state.
ここ乙こ、有害物質を含んだ処理対象の排ガスを通すと
触媒機能を持つ誘電体表面近傍の高密度のプラズマによ
って、低温度域においても有害物質が分解除去されると
ともに触媒機能によって分解反応がさらに促進される。Here, when the exhaust gas containing harmful substances is passed through, the high-density plasma near the surface of the dielectric material with a catalytic function decomposes and removes the harmful substances even at low temperatures, and the catalytic function also causes a decomposition reaction. further promoted.
このようにして、低温において容易に有害物質が分解さ
れるようになる。In this way, harmful substances can be easily decomposed at low temperatures.
〔実施例]
本発明の第1実施例を第1図と第2図によって説明する
。四角なダクト7中に、同軸に四角なダクト状のアース
電極2が設けられアースされる。[Example] A first example of the present invention will be described with reference to FIGS. 1 and 2. A square duct-shaped ground electrode 2 is provided coaxially within the square duct 7 and is grounded.
またアース電極2の内面は触媒機能を持つ誘電体3の層
で覆われる。触媒機能を持つ誘電体3の層は多孔質、ま
たは粒状や粒状焼結板を使用して固体板状または管状に
形成したものである。さらにアース電極2と同軸−ヒに
、アース電極2の面に乗直に向けたとげaを持つ球体を
ほぼ等間隔に配置し、その間を線すてつないだ放電極1
が設けられる。放電極1は高電圧電源4につながれてい
る。Further, the inner surface of the earth electrode 2 is covered with a layer of a dielectric material 3 having a catalytic function. The layer of dielectric material 3 having a catalytic function is porous, or formed in the shape of a solid plate or tube using granular or granular sintered plates. Further, on the same axis as the earth electrode 2, spheres with barbs a facing perpendicular to the surface of the earth electrode 2 are arranged at approximately equal intervals, and a wire is connected between them.
will be provided. The discharge electrode 1 is connected to a high voltage power source 4.
図中8は遮へい物を示す。8 in the figure indicates a shield.
以上の構成において、アース電極2の中に処理対象の排
ガスを流すとともに放電極1とアース電極2間に高電圧
電源4より直流、交流あるいはパルス状の高電圧を印加
すると、
例えば
(1) 交流あるいは交番のパルス高電圧を印加した
場合、放電極1よりグロー状の放電が発生し、触媒機能
を持つ誘電体3へと進展し、ガス通路全体がプラズマ状
態となる。In the above configuration, when the exhaust gas to be treated flows through the earth electrode 2 and a DC, AC, or pulsed high voltage is applied between the discharge electrode 1 and the earth electrode 2 from the high voltage power supply 4, for example, (1) AC Alternatively, when an alternating pulsed high voltage is applied, a glow-like discharge is generated from the discharge electrode 1 and progresses to the dielectric material 3 having a catalytic function, so that the entire gas passage becomes in a plasma state.
また触媒機能を持つ誘電体3の層内においてもミクロな
放電が起きる。Further, microscopic discharge occurs within the layer of the dielectric material 3 having a catalytic function.
(2)負極直流高電圧を印加した場合、多孔質の触媒機
能を持つ誘電体3層内において、正極の逆電離が発生し
グロー状コロナ放電がガス通路全域に広がる。このよう
な放電6U 域の中を排ガスが流れると排ガス中の有害
物質、例えば
NOx、CO等は、高密度な電気エネルギーによってm
、 (2)式に示すような反応あるいは分解を起こし、
除去される。(2) When a negative electrode DC high voltage is applied, reverse ionization of the positive electrode occurs within the three porous dielectric layers having a catalytic function, and a glow-like corona discharge spreads throughout the gas passage. When exhaust gas flows through such a 6U discharge area, harmful substances in the exhaust gas, such as NOx and CO, are removed by high-density electrical energy.
, causing a reaction or decomposition as shown in equation (2),
removed.
2NO−> N2+ 02 ・・・(1)C
O+−0□→CO2・・・(2)
第2の実施例としてアース電極2aを円筒型としたもの
を第3図に示す。作用は前記と同様なので省略する。2NO->N2+ 02...(1)C
O+-0□→CO2...(2) A second embodiment in which the earth electrode 2a has a cylindrical shape is shown in FIG. The operation is the same as above, so the explanation will be omitted.
第3の実施例を第4図に示す。ダクト7内に同軸に上下
に2分割された角形のアース電極2bが設&Jられる。A third embodiment is shown in FIG. A rectangular ground electrode 2b which is divided into upper and lower halves is provided coaxially within the duct 7.
またアース電極2bの水平面の間にダクト7の軸と垂直
、かつ水平に、ダクト7の軸に沿ってほぼ等間隔に棒状
の放電極1aが配置される。Furthermore, rod-shaped discharge electrodes 1a are arranged at approximately equal intervals along the axis of the duct 7, perpendicularly and horizontally to the axis of the duct 7, between the horizontal surfaces of the ground electrodes 2b.
さらに放電極1aを挟んで上流端を放電極1aの上下の
面につけ、かつ下流側に順次間隔を減少し、下流端を接
触して閉端とした多孔質の触媒機能を持つ誘電体板3b
を設けたものである。作用は前記とほぼ同様なので説明
を省略する。Further, a dielectric plate 3b having a porous catalytic function whose upstream ends are attached to the upper and lower surfaces of the discharge electrode 1a across the discharge electrode 1a, and the interval is gradually decreased toward the downstream side, and the downstream ends are brought into contact and closed.
It has been established. The operation is almost the same as described above, so the explanation will be omitted.
第4の実施例を第5図に示す。ダクト7内を上下3層に
多孔質の触媒機能を持つ誘電体3cの層で区切り、さら
にその上層と下層との後流端を同層の触媒機能を持つ誘
電体でつなぎ、閉とし、さらに中層の前流端を同層の触
媒機能を持つ誘電体でつなぎ閉としたものである。また
触媒機能を持つ誘電体3cの中には、平板状、多孔状又
は繊維状などからなるアース電極2cが挾み込まれたり
、埋め込まれている。またアース電極2cの間にはダク
ト7の軸と垂直かつ水平に、ダクト7の軸に沿ってほぼ
等間隔に棒状の放電極1bが設けられる。作用は前記と
ほぼ同様なので説明を省略する。A fourth embodiment is shown in FIG. The interior of the duct 7 is divided into upper and lower layers by three layers of porous dielectric material 3c having a catalytic function, and the wake ends of the upper and lower layers are connected with the same layer of dielectric material having a catalytic function to close the duct. The front end of the middle layer is closed by connecting it with a dielectric material in the same layer that has a catalytic function. Further, a ground electrode 2c having a flat, porous, or fibrous shape is sandwiched or embedded in the dielectric material 3c having a catalytic function. Further, between the ground electrodes 2c, rod-shaped discharge electrodes 1b are provided at approximately equal intervals along the axis of the duct 7, perpendicularly and horizontally to the axis of the duct 7. The operation is almost the same as described above, so the explanation will be omitted.
第5の実施例を第6図に示す。ダクト7の軸に垂直な面
の多孔板またはメツシュ状のアース電極2dと、アース
電極2dに対向して多孔板またはメツシュ状の放電極1
cが設けられる。さらに放電極1cとアース電極2dの
間に触媒機能を持つ粒状誘電体3dを設ける。A fifth embodiment is shown in FIG. A perforated plate or mesh-like ground electrode 2d on a surface perpendicular to the axis of the duct 7, and a perforated plate or mesh-like discharge electrode 1 facing the ground electrode 2d.
c is provided. Further, a granular dielectric material 3d having a catalytic function is provided between the discharge electrode 1c and the earth electrode 2d.
この場合、放電は放電極1cとアース電極2d間に電圧
を印加すると、触媒機能を持つ粒状誘電体3d表面に小
さい放電が観察され、更に電圧を上げると、粒状表面全
体に放電が見られる。この中を有・・・高電圧電源
・・・遮へい物。In this case, when a voltage is applied between the discharge electrode 1c and the earth electrode 2d, a small discharge is observed on the surface of the granular dielectric material 3d having a catalytic function, and when the voltage is further increased, a discharge is observed on the entire granular surface. Inside this is...high voltage power supply...shielding material.
・・・ダクト
害な物質を含む排ガスを通すことにより、排ガスを分解
することができる。...By passing the exhaust gas containing harmful substances through the duct, the exhaust gas can be decomposed.
Claims (1)
極およびアース電極の間に設けられる触媒機能を持つ誘
電体と、上記放電極およびアース電極に接続される高電
圧源とを備え、処理対象の排ガスを上記放電極とアース
電極との間の空間を通すことを特徴とするプラズマ排ガ
ス処理装置。A discharge electrode, a ground electrode facing the discharge electrode, a dielectric having a catalytic function provided between the discharge electrode and the ground electrode, and a high voltage source connected to the discharge electrode and the ground electrode, A plasma exhaust gas treatment device characterized in that exhaust gas to be treated passes through a space between the discharge electrode and the earth electrode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2073482A JPH03275119A (en) | 1990-03-26 | 1990-03-26 | Apparatus for treating exhaust gas with plasma |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2073482A JPH03275119A (en) | 1990-03-26 | 1990-03-26 | Apparatus for treating exhaust gas with plasma |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03275119A true JPH03275119A (en) | 1991-12-05 |
Family
ID=13519543
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2073482A Pending JPH03275119A (en) | 1990-03-26 | 1990-03-26 | Apparatus for treating exhaust gas with plasma |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03275119A (en) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1995031270A1 (en) * | 1994-05-11 | 1995-11-23 | Siemens Aktiengesellschaft | Device for detoxifying exhaust fumes from mobile equipments |
WO1997003746A1 (en) * | 1995-07-14 | 1997-02-06 | Siemens Aktiengesellschaft | Process and device for the plasma-chemical decomposition and/or destruction of harmful substances |
US5609736A (en) * | 1995-09-26 | 1997-03-11 | Research Triangle Institute | Methods and apparatus for controlling toxic compounds using catalysis-assisted non-thermal plasma |
JP2001157816A (en) * | 1999-12-02 | 2001-06-12 | Mitsubishi Electric Corp | Exhaust gas treatment device |
KR20020023779A (en) * | 2001-12-17 | 2002-03-29 | 김기호 | the manufacturing method of the plasma occurrence unit. |
KR20020035411A (en) * | 2000-11-04 | 2002-05-11 | 손훈기 | USE CATALYSIS AND PULSE TYPE PLASMA,PROCCESS AND DEVICE OF NOx AND SOx |
KR100434940B1 (en) * | 2000-12-12 | 2004-06-10 | 한국기계연구원 | Catalyst Reactor Activated for Treating Hazardous Gas with Nonthermal Plasma and Dielectric Heating and Method Treating thereof |
KR100477060B1 (en) * | 2001-12-24 | 2005-03-17 | 환경플라즈마(주) | Air pollutant gas(Odor, VOC, PFC, Dioxin, Toxic gas) treating system with multiple plate nonthermal plasma reactor |
KR100511568B1 (en) * | 2002-11-18 | 2005-09-02 | 한국에너지기술연구원 | Plasma reactor with dielectric electrode united by catalyst in one body |
JP2006021080A (en) * | 2004-07-06 | 2006-01-26 | Toshiba Corp | Discharge type gas treatment device |
KR100543529B1 (en) * | 2003-04-29 | 2006-01-31 | 국방과학연구소 | Air filtration system and method of the same |
WO2006031075A1 (en) * | 2004-09-15 | 2006-03-23 | Automit Co., Ltd. | Plasma apparatus for treating harmful gas |
JP2007144360A (en) * | 2005-11-30 | 2007-06-14 | Ngk Insulators Ltd | Electrode apparatus for plasma discharge |
JP2008272736A (en) * | 2007-04-03 | 2008-11-13 | Mitsubishi Electric Corp | Discharge electrode and air cleaning apparatus using the same |
FR2918293A1 (en) * | 2007-07-06 | 2009-01-09 | Ecole Polytechnique Etablissem | GAS TREATMENT BY SURFACE PLASMA |
-
1990
- 1990-03-26 JP JP2073482A patent/JPH03275119A/en active Pending
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1995031270A1 (en) * | 1994-05-11 | 1995-11-23 | Siemens Aktiengesellschaft | Device for detoxifying exhaust fumes from mobile equipments |
WO1997003746A1 (en) * | 1995-07-14 | 1997-02-06 | Siemens Aktiengesellschaft | Process and device for the plasma-chemical decomposition and/or destruction of harmful substances |
US5609736A (en) * | 1995-09-26 | 1997-03-11 | Research Triangle Institute | Methods and apparatus for controlling toxic compounds using catalysis-assisted non-thermal plasma |
US5843288A (en) * | 1995-09-26 | 1998-12-01 | Yamamoto; Toshiaki | Methods and apparatus for controlling toxic compounds using catalysis-assisted non-thermal plasma |
JP2001157816A (en) * | 1999-12-02 | 2001-06-12 | Mitsubishi Electric Corp | Exhaust gas treatment device |
KR20020035411A (en) * | 2000-11-04 | 2002-05-11 | 손훈기 | USE CATALYSIS AND PULSE TYPE PLASMA,PROCCESS AND DEVICE OF NOx AND SOx |
KR100434940B1 (en) * | 2000-12-12 | 2004-06-10 | 한국기계연구원 | Catalyst Reactor Activated for Treating Hazardous Gas with Nonthermal Plasma and Dielectric Heating and Method Treating thereof |
KR20020023779A (en) * | 2001-12-17 | 2002-03-29 | 김기호 | the manufacturing method of the plasma occurrence unit. |
KR100477060B1 (en) * | 2001-12-24 | 2005-03-17 | 환경플라즈마(주) | Air pollutant gas(Odor, VOC, PFC, Dioxin, Toxic gas) treating system with multiple plate nonthermal plasma reactor |
KR100511568B1 (en) * | 2002-11-18 | 2005-09-02 | 한국에너지기술연구원 | Plasma reactor with dielectric electrode united by catalyst in one body |
KR100543529B1 (en) * | 2003-04-29 | 2006-01-31 | 국방과학연구소 | Air filtration system and method of the same |
JP2006021080A (en) * | 2004-07-06 | 2006-01-26 | Toshiba Corp | Discharge type gas treatment device |
WO2006031075A1 (en) * | 2004-09-15 | 2006-03-23 | Automit Co., Ltd. | Plasma apparatus for treating harmful gas |
JP2007144360A (en) * | 2005-11-30 | 2007-06-14 | Ngk Insulators Ltd | Electrode apparatus for plasma discharge |
JP2008272736A (en) * | 2007-04-03 | 2008-11-13 | Mitsubishi Electric Corp | Discharge electrode and air cleaning apparatus using the same |
FR2918293A1 (en) * | 2007-07-06 | 2009-01-09 | Ecole Polytechnique Etablissem | GAS TREATMENT BY SURFACE PLASMA |
WO2009007588A1 (en) * | 2007-07-06 | 2009-01-15 | Ecole Polytechnique | Surface plasma gas processing |
JP2010532253A (en) * | 2007-07-06 | 2010-10-07 | エコール ポリテクニック | Surface plasma gas treatment |
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