JP2006247507A - Exhaust gas treatment apparatus and method - Google Patents
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- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 14
- 239000003054 catalyst Substances 0.000 description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 9
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- 229910052815 sulfur oxide Inorganic materials 0.000 description 2
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- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
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- 150000001298 alcohols Chemical class 0.000 description 1
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- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
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- 238000004523 catalytic cracking Methods 0.000 description 1
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- 229930195733 hydrocarbon Natural products 0.000 description 1
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- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
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- Treating Waste Gases (AREA)
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- Physical Or Chemical Processes And Apparatus (AREA)
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Abstract
Description
本発明は、大気汚染の防止にプラズマを利用する排ガス処理技術に係るものであり、詳しくは、排ガス中の有害成分を非熱プラズマを用いて分解させる排ガス処理装置及びその装置を用いる排ガス処理方法に関するものである。 The present invention relates to an exhaust gas treatment technology that uses plasma to prevent air pollution, and more specifically, an exhaust gas treatment device that decomposes harmful components in exhaust gas using non-thermal plasma, and an exhaust gas treatment method using the device. It is about.
従来、大気汚染を防止するために排ガス中の有害成分を無害化する排ガス処理については数多くの研究開発が行われており、それらの中にはプラズマと触媒を併用した排ガス処理装置も既に知られている。
このようなプラズマ及び触媒を利用するものとして、電極表面に触媒作用を有する金属などを被着した電極間にプラズマを発生させ，対象となる有害ガスを常温・常圧下で分解させるガス浄化装置（例えば、特許文献１参照）が提案されているが、この装置では、触媒として多種類の金属を使用できることが開示されているものの、これらの金属は電極上にメッキしたものに限られており、金属の形状に着目したものではない。
Conventionally, a lot of research and development has been conducted on exhaust gas treatment for detoxifying harmful components in exhaust gas in order to prevent air pollution. Among them, exhaust gas treatment devices using both plasma and catalyst are already known. ing.
A gas purification device that uses such plasma and catalyst to generate plasma between electrodes coated with catalytic metals on the electrode surface, and decomposes harmful gases of interest at normal temperature and pressure ( For example, Patent Document 1) has been proposed, but in this apparatus, although it is disclosed that many kinds of metals can be used as a catalyst, these metals are limited to those plated on electrodes, It does not focus on the shape of the metal.
また、鉄、金、白金をコーティングした電極を用いてその触媒作用について検討したこと（例えば、非特許文献１参照）が報告されているが、使用する触媒の形状は平面状のもののみである。さらに、DBD（Dielectric Barrier Discharge）プラズマの一方の電極を多数の針状電極とすることにより、開始電圧が低くなるとともにNO分解のエネルギー効率が向上すること（例えば、非特許文献２参照）が報告されている。しかし、その電極材質には真鍮の一種のみを用いるものであるうえに、金属の触媒作用には着目されていない。 Moreover, although it has been reported that the catalytic action was examined using an electrode coated with iron, gold, and platinum (see, for example, Non-Patent Document 1), the shape of the catalyst used is only planar. . Furthermore, it has been reported that by using one electrode of DBD (Dielectric Barrier Discharge) plasma as many needle-like electrodes, the starting voltage is lowered and the energy efficiency of NO decomposition is improved (see, for example, Non-Patent Document 2). Has been. However, in addition to using only one kind of brass as the electrode material, attention is not paid to the catalytic action of metal.
ところで、排ガス処理にプラズマを用いれば有害ガスを分解できることは良く知られているが，従来，プラズマを発生させるエネルギーが大きいことが問題であった。すなわち、電極間隔を狭めるとプラズマ発生電圧を低くすることができるが、プラズマ体積が減少するため有害ガス処理量あたりの使用エネルギーを減少させることができなかった。
本発明は、従来の技術における上記した実状に鑑みてなされたものである。すなわち、本発明の目的は、排ガス中の有害ガスの分解処理に、非熱プラズマを低電圧で発生させて省エネルギー化できる効率的な排ガス処理装置及びその処理方法を提供することにある。
By the way, although it is well known that harmful gases can be decomposed if plasma is used for exhaust gas treatment, conventionally, there has been a problem that the energy for generating plasma is large. That is, when the electrode interval is narrowed, the plasma generation voltage can be lowered, but the plasma volume is reduced, so that the energy used per harmful gas processing amount cannot be reduced.
This invention is made | formed in view of the above-mentioned actual condition in a prior art. That is, an object of the present invention is to provide an efficient exhaust gas treatment apparatus and a treatment method thereof that can save energy by generating non-thermal plasma at a low voltage for the decomposition treatment of harmful gas in the exhaust gas.
本発明者らは、前記課題を解決するべく鋭意検討を重ねた結果、非熱プラズマを発生させる電極間領域内に、金属線等の線状の導電性物質を配置すると、これらが中間電極となり非熱プラズマの体積を減少させることなくプラズマ発生電圧を大幅に低下させることができ、かつ，金属線等の触媒効果により効率的に有害ガスを分解させることができることを知見し、本発明を完成させるに至った。 As a result of intensive studies to solve the above problems, the present inventors have arranged a linear conductive material such as a metal wire in an interelectrode region that generates non-thermal plasma. Discovered that plasma generation voltage can be greatly reduced without reducing the volume of non-thermal plasma, and that harmful gases can be efficiently decomposed by the catalytic effect of metal wires, etc., completing the present invention I came to let you.
すなわち、本発明は、排ガスの出入り口を設けた非熱プラズマ反応器と、その反応器の内部に配置された線状導電性物質と、その反応器内に非熱プラズマを発生させる手段とを備えたことを特徴とする排ガス処理装置である。
また、本発明は、非熱プラズマを用いる排ガス処理方法であって、排ガスを内部に線状導電性物質を設けた非熱プラズマ反応器内に導入し、その反応器に非熱プラズマを発生させて排ガス中の有害成分を分解させることを特徴とする排ガス処理方法である。
That is, the present invention includes a non-thermal plasma reactor provided with an exhaust gas inlet / outlet, a linear conductive substance disposed inside the reactor, and means for generating non-thermal plasma in the reactor. An exhaust gas treatment apparatus characterized by the above.
The present invention also relates to an exhaust gas treatment method using non-thermal plasma, wherein the exhaust gas is introduced into a non-thermal plasma reactor provided with a linear conductive substance therein, and non-thermal plasma is generated in the reactor. An exhaust gas treatment method characterized by decomposing harmful components in the exhaust gas.
本発明によれば、排ガス中の有害成分を従来よりも大幅に少ないエネルギーで効率的に分解させることができるから、各種排ガスの処理を低コストで簡易な装置を用いて行うことができ、工業的実施に有用である。 According to the present invention, harmful components in exhaust gas can be efficiently decomposed with much less energy than conventional, and therefore, various exhaust gases can be processed using a simple device at low cost. Useful for practical implementation.
本発明は、排ガス中に含まれる有害成分を非熱プラズマで処理する際に、反応器中の非熱プラズマを発生させる部位（プラズマ反応器内）に線状の導電性物質を配置し、その中に非処理成分である排ガスを流入させて、有害成分を従来よりも大幅に少ないエネルギーで分解させることができる排ガス処理装置及びその装置を用いる排ガス処理方法である。 In the present invention, when a harmful component contained in exhaust gas is treated with non-thermal plasma, a linear conductive material is disposed in a site (in the plasma reactor) where non-thermal plasma is generated in the reactor. An exhaust gas treatment apparatus capable of decomposing harmful components with much less energy than in the prior art by flowing exhaust gas, which is an untreated component, and an exhaust gas treatment method using the apparatus.
本発明によれば、従来の接触分解法を用いて処理されている各種排ガスの処理が可能である。処理できる排ガスとしては、揮発性有機溶剤、悪臭成分、ガス状無機酸化物などが含まれる工場等の排ガス、自動車等からの排ガスであって、例えば、ベンゼン、トルエン、キシレン等の炭化水素類、アルコール類、アルデヒド類、エステル類等の有機溶剤、硫化水素、メルカプタン類、アンモニア等の悪臭成分、窒素酸化物（ＮＯｘ）、硫黄酸化物（ＳＯｘ）、一酸化炭素等の無機酸化物等；を含むガスである。 According to the present invention, it is possible to treat various exhaust gases that have been treated using a conventional catalytic cracking method. Exhaust gas that can be treated is exhaust gas from factories and the like containing volatile organic solvents, malodorous components, gaseous inorganic oxides, etc., and exhaust gases from automobiles, for example, hydrocarbons such as benzene, toluene, xylene, Organic solvents such as alcohols, aldehydes and esters, malodorous components such as hydrogen sulfide, mercaptans, ammonia, inorganic oxides such as nitrogen oxides (NOx), sulfur oxides (SOx) and carbon monoxide; Contains gas.
本発明における非熱プラズマを用いた排ガス処理においては、プラズマ発生部分に金属線などの線状導電性物質を配置、好ましくはアスペクト比(長さと直径の比)が５以上の細い線状導電性物質を分散させて配置することにより、
その導電性物質の端部が新たな放電点となって排ガス中の有害成分を効率的に分解させることができる。さらに、線状導電性物質の端部は有害成分を分解させる触媒としての作用も行うものである。
In the exhaust gas treatment using non-thermal plasma in the present invention, a linear conductive material such as a metal wire is disposed in the plasma generation portion, preferably a thin linear conductivity having an aspect ratio (ratio of length to diameter) of 5 or more. By dispersing and arranging the substances,
The end portion of the conductive material becomes a new discharge point, and harmful components in the exhaust gas can be efficiently decomposed. Furthermore, the end of the linear conductive material also acts as a catalyst for decomposing harmful components.
用いられる導電性物質としては、電圧を印加すると非熱プラズマを発生する線状導電性部材であれば使用可能であって、通常の鉄、銅などの金属線のみならず、炭素材料、カーボンナノチューブ、半導体細線、それらのウィスカー、ナノワイアなどが挙げられる。これらの導電性物質は、細い線状のものであってアスペクト比(長さと直径の比)が５程度以上、好ましくは５〜１００の微細な線状に切断したものを用いることが好ましい。また、これらの導電性物質は、反応器内で十分に分散されるように充填材中に保持されて配置することが好ましい。その充填材としては、ガスの通過を可能な限り妨げない多孔質のものが好ましく、例えば、ガラスウール、石英ウールなどが用いられる。 As the conductive material used, any linear conductive member that generates non-thermal plasma when a voltage is applied can be used. Not only a normal metal wire such as iron and copper, but also a carbon material, a carbon nanotube , Semiconductor fine wires, whiskers and nanowires thereof. It is preferable to use those conductive materials that are thin and have a fine line shape with an aspect ratio (length to diameter ratio) of about 5 or more, preferably 5 to 100. In addition, it is preferable that these conductive substances are disposed in a filler so as to be sufficiently dispersed in the reactor. The filler is preferably a porous material that does not obstruct the passage of gas as much as possible. For example, glass wool, quartz wool, or the like is used.
反応装置としては、従来公知のプラズマ装置において、電圧を印加して非熱プラズマを発生させるプラズマ反応器内に上記した線状の導電性物質を配置させたものであれば如何なる形状、構造のものも使用可能である。電圧印加方法としては、商用周波数乃至、低周波、高周波、マイクロ波が用いられる。 As a reaction apparatus, a conventional plasma apparatus having any shape and structure as long as the above-described linear conductive material is arranged in a plasma reactor that generates a non-thermal plasma by applying a voltage. Can also be used. As a voltage application method, a commercial frequency, a low frequency, a high frequency, or a microwave is used.
図１〜３は、本発明に用いられる一例のプラズマ反応器の構造を示す断面概略図を示す。図１には平行平板型のプラズマ反応器を示し、図２には平行平板型多段式プラズマ反応器を示し、また図３には同軸円筒型プラズマ反応器を示す。
実施例
以下、本発明について実施例などを用いてさらに具体的に説明するが、本発明はこれらの実施例によって何ら限定されるものではない。
1 to 3 are schematic cross-sectional views showing the structure of an example plasma reactor used in the present invention. 1 shows a parallel plate type plasma reactor, FIG. 2 shows a parallel plate type multistage plasma reactor, and FIG. 3 shows a coaxial cylindrical plasma reactor.
EXAMPLES Hereinafter, the present invention will be described in more detail with reference to examples, but the present invention is not limited to these examples.
図４に示すプラズマ実験装置を用いて、ＮＯを含むガスの分解を行った。この装置のプラズマチャンバは、２枚のＡｌ製電極(80mmφ)のそれぞれを石英ガラスで覆い、１０ｍｍ間隔で対向させ、その電極間空間内に敷いた石英ウールの中に、導電性物質として素線０．１ｍｍφのＳＵＳメッシュを斜めに１〜２ｍｍ幅で切断したもの（ＳＵＳ細線）１．９ｇを分散させた。
次に、その２つの電極間に５０Ｈｚ交流で電圧１８〜２５ｋＶを印加してプラズマを発生させた。
その装置内に、ＮＯ１０００ｐｐｍ、酸素２．７％を含む窒素ガスを流量２０ｍｌ／ｍｉｎ．で導入し、ＮＯの分解反応を行った。この反応後の流出ガスについて２台のガスクロマトグラフ、ＮＯｘ計, 質量分析計で分析した。比較のため、ＳＵＳ細線を用いないものについても同様に分析した。
得られた結果を図５に示した。図５には、印加電圧とＮＯ分解率との関係を示す。図５に見るように、ＳＵＳ細線を用いた場合には、ＳＵＳ細線無しの場合に比べてはるかに高いＮＯｘ分解率を得た。ただし、ＳＵＳ細線無しでもさらに高電圧にすれば同等の分解率を達成できるが、プラズマ処理にＳＵＳ細線を加えることにより低電圧で効率的に有害ガスを分解できることがわかる。
The gas containing NO was decomposed using the plasma experimental apparatus shown in FIG. The plasma chamber of this device covers each of two Al electrodes (80 mmφ) with quartz glass and faces each other at intervals of 10 mm, and a strand as a conductive substance in quartz wool laid in the space between the electrodes. 1.9 g of a SUS mesh of 0.1 mmφ cut diagonally with a width of 1 to 2 mm (SUS fine wire) was dispersed.
Next, a voltage of 18 to 25 kV was applied between the two electrodes at 50 Hz alternating current to generate plasma.
In the apparatus, nitrogen gas containing 1000 ppm NO and 2.7% oxygen was supplied at a flow rate of 20 ml / min. The NO decomposition reaction was carried out. The effluent gas after the reaction was analyzed by two gas chromatographs, NOx meters, and mass spectrometers. For comparison, the same analysis was also performed on a sample not using the SUS fine wire.
The obtained results are shown in FIG. FIG. 5 shows the relationship between the applied voltage and the NO decomposition rate. As shown in FIG. 5, when the SUS fine wire was used, a much higher NOx decomposition rate was obtained compared to the case without the SUS fine wire. However, it can be seen that even if no SUS fine wire is used, an equivalent decomposition rate can be achieved by further increasing the voltage, but by adding the SUS fine wire to the plasma treatment, harmful gases can be efficiently decomposed at a low voltage.
実施例１において、装置のプラズマチャンバに用いたＳＵＳ細線に代えて、導電性物質として直径０．０５ｍｍφのＰｄ線を２〜３ｍｍに切断したもの（Ｐｄワイヤ）０．０４５ｇを用いたこと以外は、実施例１と同じ装置を用い、同様にプラズマを発生させた。その装置内に、反応ガスとしてＮＯ１０００ｐｐｍを含み、かつそれぞれ酸素濃度を２．７％、４．１％及び６．３％を含む窒素ガスを流量２０ｍｌ／ｍｉｎ．で導入し、ＮＯの分解反応を行った。この反応後の流出ガスについて実施例１と同様にして分析した。比較のため、Ｐｄワイヤ無しのもの、実験装置内にＰｄ／Ａｌ２Ｏ３（５％）０．９４ｇを石英ウール中にまぶしたものについても同様に分析した。
得られた結果を図６に示した。図６には、反応ガス中の酸素濃度とＮＯ分解率との関係を示す。図６に見るように、酸素濃度が高くなるといずれの場合もＮＯｘ分解率は低下するが、Ｐｄ線は全ての酸素濃度に対してＮＯｘ分解率は向上した。一方、Ｐｄ／Ａｌ２Ｏ３触媒の場合には触媒無しの場合と同等以下であった。
In Example 1, instead of the SUS thin wire used for the plasma chamber of the apparatus, 0.045 g of Pd wire having a diameter of 0.05 mmφ cut into 2 to 3 mm (Pd wire) was used as the conductive material. Using the same apparatus as in Example 1, plasma was generated in the same manner. In the apparatus, nitrogen gas containing 1000 ppm of NO as a reaction gas and oxygen concentrations of 2.7%, 4.1% and 6.3% was supplied at a flow rate of 20 ml / min. The NO decomposition reaction was carried out. The effluent gas after this reaction was analyzed in the same manner as in Example 1. For comparison, the same analysis was performed for a sample without Pd wire and a sample in which 0.94 g of Pd / Al 2 O 3 (5%) was applied in quartz wool in an experimental apparatus.
The obtained results are shown in FIG. FIG. 6 shows the relationship between the oxygen concentration in the reaction gas and the NO decomposition rate. As shown in FIG. 6, the NOx decomposition rate decreased in any case as the oxygen concentration increased, but the NOx decomposition rate of the Pd line improved with respect to all oxygen concentrations. On the other hand, in the case of the Pd / Al 2 O 3 catalyst, it was equal to or less than that in the case of no catalyst.
実施例１において、装置のプラズマチャンバに用いたＳＵＳ細線に代えて、導電性物質として長さ２ｍ、直径０．０５ｍｍφのＰｄ線を逐次切断し、それぞれ１本、８本、３２本、約６００本を石英ウール内に分散させ、反応ガスとして実施例２に用いたと同じガスを同様に導入し、ＮＯの分解反応を行った。この反応後の流出ガスについて分析した結果を図７に示した。
その結果、図７に見るように横軸を本数とすると、全長（したがってＰｄ重量)は一定で変わらないにもかかわらず, ＮＯｘ分解率は分散させたＰｄの本数とともに増加した。
In Example 1, instead of the SUS thin wire used in the plasma chamber of the apparatus, a Pd wire having a length of 2 m and a diameter of 0.05 mmφ was sequentially cut as a conductive material, and 1, 8, 32, and approximately 600, respectively. The book was dispersed in quartz wool, and the same gas as used in Example 2 was introduced as a reaction gas in the same manner to carry out NO decomposition reaction. The result of analyzing the effluent gas after this reaction is shown in FIG.
As a result, as shown in FIG. 7, when the horizontal axis is the number, the NOx decomposition rate increases with the number of dispersed Pd, although the total length (and hence the Pd weight) is constant and does not change.
実施例１に用いた装置において、導電性物質としてそれぞれＮｉ(0.025φ、 10mを2〜3mmに切断したもの）０．０２９ｇまたはＦｅ(ウール状物）０．３５ｇを用い、同様にしてＮＯの分解反応を行った。この反応後の流出ガスについて分析した結果を図８に示した。その結果、使用した導電性物質は、ほぼ同等のＮＯｘ分解率を示したが、副生成物Ｎ２Ｏの生成は金属種による触媒効果の違いによる差異が大きく、ＰｄとＳＵＳが良好であることがわかった。 In the apparatus used in Example 1, 0.029 g of Ni (0.025φ, 10 m cut to 2 to 3 mm) or 0.35 g of Fe (wool-like material) was used as the conductive material, respectively. A decomposition reaction was performed. The result of analyzing the effluent gas after this reaction is shown in FIG. As a result, the conductive material used showed almost the same NOx decomposition rate, but the production of by-product N 2 O was largely different due to the difference in catalytic effect depending on the metal species, and Pd and SUS were good. I understood.
実施例１に用いた装置において、導電性物質としてウール状鉄０．３５ｇを用い、ＮＯ１０００ｐｐｍを含み、
酸素を含まない窒素ガスの分解反応を行った。また、導電性物質を用いない場合についても同様に分解反応を行った。
その生成ガスを分析した結果を図９に示した。その結果、ウール状鉄を用いた場合には、それを用いない場合に比べて、同一電圧ではるかに高いＮＯｘ分解率を与えた。触媒によって低電圧で効率的に有害ガスを分解できることがわかる。このときの電源出力を比較すると、ＮＯｘの９８％を分解するのに要したパワーは触媒無しの場合に１９Ｗであるのに対して、触媒有りでは９．０Ｗと１／２以下であった。
In the apparatus used in Example 1, using 0.35 g of wool-like iron as a conductive substance, containing NO 1000 ppm,
The decomposition reaction of nitrogen gas not containing oxygen was performed. Also, the decomposition reaction was performed in the same manner when no conductive material was used.
The result of analyzing the generated gas is shown in FIG. As a result, when wool iron was used, a much higher NOx decomposition rate was given at the same voltage than when it was not used. It can be seen that the catalyst can efficiently decompose harmful gases at a low voltage. Comparing the power output at this time, the power required to decompose 98% of NOx was 19 W in the absence of the catalyst, whereas it was 9.0 W with the catalyst and less than ½.
実施例１に用いた装置において、導電性物質としてウール状鉄０．３５ｇを用いた。その装置に非処理ガスとして、ベンゼン５０ｐｐｍ、酸素１０％、窒素１０％を含むヘリウムガスを導入したこと以外は、実施例１と同様にして分解反応を行った。また比較のため、ウール鉄無しのものについても分解反応を行った。
その生成ガスを分析した結果を図１０に示した。その結果、ウール状鉄ありの場合には、ウール鉄無し比べて同一電圧で極めて高いベンゼン分解率を与えた。ベンゼンの９５％分解に必要な電源パワーはウール状鉄無しの場合６．７Ｗ、有りの場合４．３Ｗで、３５％の省エネルギーとなっている。このことは、導電性物質の存在によって低電圧・低電力で効率的に有害ガスを分解できることがわかる。
In the apparatus used in Example 1, 0.35 g of wool-like iron was used as the conductive material. The decomposition reaction was performed in the same manner as in Example 1 except that helium gas containing 50 ppm of benzene, 10% oxygen, and 10% nitrogen was introduced into the apparatus as a non-treatment gas. For comparison, the decomposition reaction was also carried out for those without wool iron.
The result of analyzing the generated gas is shown in FIG. As a result, in the case with wool-like iron, an extremely high benzene decomposition rate was given at the same voltage compared to the case without wool iron. The power supply power required for 95% decomposition of benzene is 6.7 W without wool-like iron, and 4.3 W with it, which is 35% energy saving. This shows that harmful gas can be efficiently decomposed at low voltage and low power by the presence of a conductive substance.
１・・・電極
２・・・誘電体（ガラス等）
３・・・充填材（ガラスウール等）
４・・・線状導電性物質
DESCRIPTION OF SYMBOLS 1 ... Electrode 2 ... Dielectric material (glass etc.)
3 ... Filler (glass wool, etc.)
4 ... Linear conductive material
Claims (4)
In an exhaust gas treatment method using non-thermal plasma, exhaust gas is introduced into a non-thermal plasma reactor provided with a linear conductive substance inside, and non-thermal plasma is generated in the reactor to decompose harmful components in the exhaust gas. An exhaust gas treatment method, characterized by comprising:
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007190498A (en) * | 2006-01-19 | 2007-08-02 | Gunma Univ | Gas treatment method and its device |
| WO2015108660A1 (en) * | 2014-01-14 | 2015-07-23 | Applied Materials, Inc. | Nitrogen oxide abatement in semiconductor fabrication |
| CN105268125A (en) * | 2015-03-17 | 2016-01-27 | 青岛瑞利特新材料科技有限公司 | Silver nanowire PM 2.5 prevention mask filter element |
| JP2016093762A (en) * | 2014-11-12 | 2016-05-26 | 愛知電機株式会社 | Ammonia processing device and ammonia processing method using microwave nonequilibrium plasma |
| JP2016168581A (en) * | 2015-03-16 | 2016-09-23 | 岩谷産業株式会社 | Nitrous oxide gas decomposing apparatus, and method therefor |
| JP2018037213A (en) * | 2016-08-30 | 2018-03-08 | ダイハツ工業株式会社 | Fuel cell system |
| JP2018137199A (en) * | 2017-02-24 | 2018-08-30 | ダイハツ工業株式会社 | Fuel cell system |
| CN113440989A (en) * | 2021-08-11 | 2021-09-28 | 河南三棵树新材料科技有限公司 | Dielectric barrier discharge reactor for in-situ purification of pollutants by carbon nano tube and application |
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| JPH0326356U (en) * | 1989-07-25 | 1991-03-18 |
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| JPH0326356U (en) * | 1989-07-25 | 1991-03-18 |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007190498A (en) * | 2006-01-19 | 2007-08-02 | Gunma Univ | Gas treatment method and its device |
| WO2015108660A1 (en) * | 2014-01-14 | 2015-07-23 | Applied Materials, Inc. | Nitrogen oxide abatement in semiconductor fabrication |
| JP2016093762A (en) * | 2014-11-12 | 2016-05-26 | 愛知電機株式会社 | Ammonia processing device and ammonia processing method using microwave nonequilibrium plasma |
| JP2016168581A (en) * | 2015-03-16 | 2016-09-23 | 岩谷産業株式会社 | Nitrous oxide gas decomposing apparatus, and method therefor |
| CN105268125A (en) * | 2015-03-17 | 2016-01-27 | 青岛瑞利特新材料科技有限公司 | Silver nanowire PM 2.5 prevention mask filter element |
| JP2018037213A (en) * | 2016-08-30 | 2018-03-08 | ダイハツ工業株式会社 | Fuel cell system |
| JP2018137199A (en) * | 2017-02-24 | 2018-08-30 | ダイハツ工業株式会社 | Fuel cell system |
| CN113440989A (en) * | 2021-08-11 | 2021-09-28 | 河南三棵树新材料科技有限公司 | Dielectric barrier discharge reactor for in-situ purification of pollutants by carbon nano tube and application |
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