JPH03274438A - Measuring apparatus of characteristic of sample and measuring method thereof - Google Patents
Measuring apparatus of characteristic of sample and measuring method thereofInfo
- Publication number
- JPH03274438A JPH03274438A JP2076516A JP7651690A JPH03274438A JP H03274438 A JPH03274438 A JP H03274438A JP 2076516 A JP2076516 A JP 2076516A JP 7651690 A JP7651690 A JP 7651690A JP H03274438 A JPH03274438 A JP H03274438A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- inner casing
- measuring
- casing
- holding rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 9
- 239000003507 refrigerant Substances 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000007710 freezing Methods 0.000 claims description 9
- 230000008014 freezing Effects 0.000 claims description 9
- 238000001816 cooling Methods 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 4
- 230000000704 physical effect Effects 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 7
- 230000003287 optical effect Effects 0.000 abstract description 3
- 238000012544 monitoring process Methods 0.000 abstract description 2
- 239000002826 coolant Substances 0.000 abstract 2
- 239000007789 gas Substances 0.000 description 6
- 239000001307 helium Substances 0.000 description 6
- 229910052734 helium Inorganic materials 0.000 description 6
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 6
- 238000009413 insulation Methods 0.000 description 5
- 239000002887 superconductor Substances 0.000 description 4
- 238000000691 measurement method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005057 refrigeration Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、酸化物超伝導体、半導体材料等の試料を、電
圧計、分光光度計等を用いて、所定の低温雰囲気下にお
いて、該試料の電気特性や光学特性等を測定するための
試料特性の測定装置及びその測定方法に関する。Detailed Description of the Invention [Industrial Application Field] The present invention is a method for measuring samples of oxide superconductors, semiconductor materials, etc. in a predetermined low-temperature atmosphere using a voltmeter, a spectrophotometer, etc. This invention relates to a sample characteristic measuring device and its measuring method for measuring the electrical characteristics, optical characteristics, etc. of a sample.
［従来の技術コ
従来、この種の低温状態における試料の特性値を測定す
る装置としては第２図に示すようなものが知られている
。[Prior Art] A device shown in FIG. 2 has been known as a device for measuring the characteristic values of a sample in this type of low-temperature state.
すなわち、この装置２０は、極低温冷凍機２１と圧縮機
２２とからなる極低温冷凍装置と、該極低温冷凍機２１
の低温生成部２１ａを収納保持した真空断熱容器２３と
、該真空断熱容器２３に連通接続された真空ポンプ２４
と真空計２５とからなる真空装置と、該低温生成部２１
ａに配設された試料ホルダ２６と、該真空断熱容器２３
内及び極低温冷凍機２ｌを常温にまで昇温するための温
度センサ２７及びヒータ２８を備えた加熱装置本体２９
と、を備えて構成されている。That is, this device 20 includes a cryogenic refrigerator consisting of a cryogenic refrigerator 21 and a compressor 22;
A vacuum insulated container 23 that houses and holds a low temperature generation section 21a, and a vacuum pump 24 that is connected in communication with the vacuum insulated container 23.
and a vacuum device consisting of a vacuum gauge 25, and the low temperature generation section 21.
The sample holder 26 disposed in a and the vacuum insulation container 23
Heating device main body 29 equipped with a temperature sensor 27 and a heater 28 for raising the temperature of the internal and cryogenic refrigerator 2L to room temperature
It is configured with the following.
［発明が解決しようとする課題］
上記した試料特性の測定装置２０は、極低温状態で任意
の試料の特性を測定した後、該試料を取り出したり、あ
るいは別の試料と交換する際には、極低温冷凍機２ｌの
作動を停止し、ヒータ２８によって常温まで昇温させて
から取り出し、交換する必要がある。[Problems to be Solved by the Invention] After the above-described sample characteristic measuring device 20 measures the characteristics of an arbitrary sample in a cryogenic state, when the sample is taken out or replaced with another sample, It is necessary to stop the operation of the cryogenic refrigerator 2l, raise the temperature to room temperature using the heater 28, and then take it out and replace it.
しかるに、極低温冷凍機２１自体を含めて真空断熱容器
２３内を常温にするには極めて長い時間がかかる。その
結果、一回の測定に要する時間が２時間以上もかかつて
しまうことが多いという問題がある。この場合、冷凍機
２１自体が完全に昇温する前に真空断熱容器２３を取り
外して外気と接触させて昇温時間を短縮することも考え
られるが、昇温前に真空断熱容器２３を取り外すと、冷
凍機２１に霜が付着すると共に、試料自体にも霜が付着
し、試料が本来性する特性を失う可能性がある。However, it takes an extremely long time to bring the inside of the vacuum insulation container 23, including the cryogenic refrigerator 21 itself, to room temperature. As a result, there is a problem in that the time required for one measurement often takes more than two hours. In this case, it is possible to shorten the heating time by removing the vacuum insulation container 23 and bringing it into contact with outside air before the temperature of the refrigerator 21 itself rises completely, but if the vacuum insulation container 23 is removed before the temperature rises, In addition to frost adhering to the refrigerator 21, frost also adheres to the sample itself, which may cause the sample to lose its original characteristics.
本発明はかかる課題を解消するためになされたもので、
冷凍機の作動は維持したままで昇温時間を極めて短時間
とすることにより、一回の試料測定に要する時間を短縮
し、連続運転の効率を向上させることができる試料特性
の測定装置及びその測定方法を提供することを目的とす
る。The present invention was made to solve such problems,
A sample characteristic measuring device and its device capable of shortening the time required for one sample measurement and improving the efficiency of continuous operation by reducing the heating time to an extremely short time while maintaining the operation of the refrigerator. The purpose is to provide a measurement method.
［課題を解決するための手段１
上記目的を達成するため、本発明の試料特性の測定装置
は、所定の低温雰囲気のもとで、試料の電気特性等の物
性特性値を測定するための装置において、真空ポンプ装
置に接続された外側ケーシングと、冷媒の給排口を備え
ると共に、該外側ケーシング内に配設された試料収納保
持用の内側ケーシングと、該内側ケーシングに挿脱可能
に配設された試料保持用ロッドと、導熱材を介して冷却
ロッドの適所を該内側ケーシング周壁の任意位置に連結
した極低温冷凍装置と、該内側ケーシング内を常温に戻
すための加熱手段と、を有してなることを特徴とし、そ
の測定方法は、任意の試料を装着した試料保持用ロッド
を内側ケーシング内に収納保持した後、外側ケーシング
内を真空にすると共に、該内側ケーシング内に冷媒を充
填する工程と、真空雰囲気中で極低温冷凍装置により内
側ケーシングを冷却する工程と、所定の低温状態におい
て任意の測定手段により該試料の任意の物性特性値を測
定する工程と、極低温冷凍装置を低温状態としたまま、
加熱手段により内側ケーシング内のみを常温にまで昇温
する工程と、冷媒を放出しながら、試料保持用ロッドを
引き抜いて試料を取り出す工程と、を有し、極低温冷凍
装置を低温状態としたまま、上記各工程を繰返し遂行可
能にしたことを特徴とする。[Means for Solving the Problems 1] In order to achieve the above object, the sample characteristic measuring apparatus of the present invention is an apparatus for measuring physical property values such as electrical properties of a sample in a predetermined low temperature atmosphere. includes an outer casing connected to a vacuum pump device, a refrigerant supply/discharge port, an inner casing for storing and holding a sample disposed within the outer casing, and an inner casing configured to be removably inserted into the inner casing. A cryogenic freezing device that connects a cooling rod at an appropriate position to an arbitrary position on the peripheral wall of the inner casing via a heat conductive material, and a heating means for returning the inside of the inner casing to room temperature. The measurement method is to store and hold a sample holding rod with an arbitrary sample attached inside the inner casing, then evacuate the outer casing and fill the inner casing with a refrigerant. a step of cooling the inner casing with a cryogenic freezing device in a vacuum atmosphere; a step of measuring an arbitrary physical characteristic value of the sample with an arbitrary measuring means in a predetermined low temperature state; and a step of using a cryogenic freezing device. While keeping the temperature low,
The process includes a step of heating only the inside of the inner casing to room temperature using a heating means, and a step of removing the sample by pulling out the sample holding rod while releasing the refrigerant, leaving the cryogenic freezing device in a low temperature state. , is characterized in that each of the above steps can be performed repeatedly.
［作 用］
かかる構成では、まず試料保持用ロッドを内側ケーシン
グ内に挿入して、試料を内側ケーシング内に収納保持す
る。[Function] In this configuration, the sample holding rod is first inserted into the inner casing, and the sample is housed and held within the inner casing.
該内側ケーシング内に冷媒を充填すると共に、外側ケー
シング内が所定の真空度以下になったときに極低温冷凍
装置を駆動して、内側ケーシング及びその内部を冷却す
る。The inner casing is filled with a refrigerant, and when the inside of the outer casing becomes less than a predetermined degree of vacuum, a cryogenic freezing device is driven to cool the inner casing and its interior.
そして、所定の低温状態において電圧計、分光光度計等
により、電気特性、光学特性等を測定する。Then, electrical characteristics, optical characteristics, etc. are measured in a predetermined low temperature state using a voltmeter, a spectrophotometer, or the like.
測定作業の終了後、極低温冷凍装置を低温状態としたま
ま、内側ケーシング内のみを常温にまで昇温し、冷媒を
放出しながら、試料保持用ロッドな引き抜いて試料を取
り外す。しかる後、次の試料を装着して再び該試料の特
性を測定する。After the measurement work is completed, the temperature inside the inner casing is raised to room temperature while the cryogenic freezing device remains in a low temperature state, and the sample is removed by pulling out the sample holding rod while releasing the refrigerant. Thereafter, the next sample is attached and the characteristics of the sample are measured again.
［実施例］ 以下、本発明の一実施例を図面に基づき説明する。[Example] Hereinafter, one embodiment of the present invention will be described based on the drawings.
１は本実施例にかかる試料特性の測定装置である。Reference numeral 1 denotes a sample characteristic measuring device according to this embodiment.
２は略筒状で有底の外側ケーシングであり、その側壁の
任意の位置には真空ポンプ３と連通するためのバイブ４
が接続されている。５は該バイブ４の任意位置に設けた
真空遮断用バルブであり、６は同じく該外側ケーシング
２の側壁の任意位置に固定配設した真空計である。真空
装置は、この真空ポンプ３及び真空計６、並びに公知の
真空機器を有して構成されている。Reference numeral 2 denotes a substantially cylindrical outer casing with a bottom, and a vibrator 4 for communicating with a vacuum pump 3 is provided at an arbitrary position on the side wall of the outer casing.
is connected. 5 is a vacuum cutoff valve provided at an arbitrary position on the vibrator 4, and 6 is a vacuum gauge fixedly arranged at an arbitrary position on the side wall of the outer casing 2. The vacuum device includes the vacuum pump 3, the vacuum gauge 6, and other known vacuum equipment.
また、この外側ケーシング２は、ステンレススチール等
から構成され、例えば、上面に開口部２ａ、、２ｂが形
成されている。該開口部２ａがらは後述する極低温冷凍
機１８が挿入配設されている。The outer casing 2 is made of stainless steel or the like, and has, for example, openings 2a, 2b formed in its upper surface. A cryogenic refrigerator 18, which will be described later, is inserted into the opening 2a.
７は内部に試料を収納保持するための筒状の内側ケーシ
ングであり、上記した外側ケーシング２の上面開口部２
ｂから挿入されて、該外側ケーシング２の内部空間とは
隔絶された空間を形成している。この内側ケーシング７
の内部７ａには、試料保持用ロッド８がその後端開口部
７ｂから挿脱可能に配設されている。Reference numeral 7 denotes a cylindrical inner casing for storing and holding a sample inside, and the upper surface opening 2 of the outer casing 2 described above.
It is inserted from b and forms a space isolated from the internal space of the outer casing 2. This inner casing 7
A sample holding rod 8 is arranged in the interior 7a of the sample holding rod 8 so that it can be inserted and removed from the rear end opening 7b.
試料保持用ロッド８には、その先端に試料ホルダ９が固
着されていると共に、ヒータ１０及び温度センサ１）が
取り付けられている。なお、ヒータｌＯ及び温度センサ
１）はリード線１２．１３により外部の加熱装置本体１
４と接続されている。A sample holder 9 is fixed to the tip of the sample holding rod 8, and a heater 10 and a temperature sensor 1) are attached thereto. Note that the heater lO and temperature sensor 1) are connected to the external heating device main body 1 by lead wires 12.13.
4 is connected.
また、上記内側ケーシング７には、その側壁の任意の位
置に、ヘリウムガス等の冷媒を該内側ケーシング７内に
充填可能な給排ロアｃが形成されており、該給排ロアｃ
には給排管１５が接続されている。１６は該給排管１５
に配設したチャージ弁であり、１７はリリーフ弁である
。Further, the inner casing 7 has a supply/discharge lower c which can fill the inner casing 7 with a refrigerant such as helium gas, at an arbitrary position on the side wall thereof, and the supply/discharge lower c
A supply/discharge pipe 15 is connected to. 16 is the supply/discharge pipe 15
17 is a relief valve.
１８は極低温冷凍機であり、冷却ロッド１８ａ、１８ｂ
を有し、圧縮［１９と共に極低温冷凍装置を構成する。18 is a cryogenic refrigerator, cooling rods 18a, 18b
and constitutes a cryogenic refrigeration system together with compression [19].
該極低温冷凍機１８は、第１図に示すように、上記した
外側ケーシング２の上面開口部２ａから５冷却ロッド１
８ａ、１８ｂを該外側ケーシング２内に空密的に保持し
て挿着されている。また、導熱材１８ｃ及び１８ｄは熱
伝導性のよい金属等により形成され、内側ケーシング７
の側壁に溶接固着されており、該内側ケーシング７の側
壁材を介してその内部７ａに充填したヘリウムガスを冷
却可能に取り付けられている。The cryogenic refrigerator 18, as shown in FIG.
8a and 18b are inserted into the outer casing 2 in an air-tight manner. Further, the heat conductive materials 18c and 18d are formed of a metal or the like with good thermal conductivity, and the inner casing 7
The inner casing 7 is welded and fixed to the side wall of the inner casing 7 so that the helium gas filled inside the inner casing 7 can be cooled through the side wall material of the inner casing 7.
次に、かかる構成からなる本実施例の試料特性の測定装
置１を用いて、酸化物超伝導体の電気抵抗特性を測定す
る場合の測定方法を説明する。Next, a method for measuring electrical resistance characteristics of an oxide superconductor using the sample characteristic measuring apparatus 1 of this embodiment having such a configuration will be described.
（ａ）まず、試料を、試料保持用ロッド８の先端ホルダ
９に取り付けて内側ケーシング７内に挿入配設する。(a) First, a sample is attached to the tip holder 9 of the sample holding rod 8 and inserted into the inner casing 7.
（ｂ）真空ポンプ３を始動させると共に制御バルブ５を
開にして、真空計６でモニタしながら外側ケーシング２
内を所定の真空度（１ｔｏｒｒ）にする。(b) Start the vacuum pump 3 and open the control valve 5 to remove the outer casing 2 while monitoring with the vacuum gauge 6.
The interior is brought to a predetermined degree of vacuum (1 torr).
（Ｃ）チャージ弁１６を開にして内側ケーシング７内に
ヘリウムガスを充填する。このときリリーフ弁１７を作
動させながら行ない所定の圧力に調整する。(C) Open the charge valve 16 and fill the inner casing 7 with helium gas. At this time, the pressure is adjusted to a predetermined value while operating the relief valve 17.
（ｄ）極低温冷凍機１８を起動すると共に、外側ケーシ
ング２内の真空度が１０−３ｔｏｒｒ以下になったとこ
ろで、真空遮断用バルブ５を閉にする。(d) Start up the cryogenic refrigerator 18 and close the vacuum cutoff valve 5 when the degree of vacuum in the outer casing 2 becomes 10 -3 torr or less.
（ｅ）極低温冷凍機１８により、冷却ロッド１８ａ、１
８ｂ及び導熱材１８ｃ、１８ｄを介して内側ケーシング
７内が一２６０″Ｃになるまで冷却放置する。なお、こ
の所要時間は約１００分間であった。(e) The cooling rods 18a and 1 are cooled by the cryogenic refrigerator 18.
The inside of the inner casing 7 was left to cool down to 1260''C via the heat conductive materials 18c and 18d.The time required for this was about 100 minutes.
（ｄ）かかる温度雰囲気下において、電圧計を作動し、
上記試料、酸化物超伝導体の電気抵抗特性を測定する。(d) operating a voltmeter in such a temperature atmosphere;
The electrical resistance characteristics of the above sample, the oxide superconductor, are measured.
（ｅ）測定後、試料保持用ロッド８に取り付けたヒータ
１０をＯＮにし、温度センサ１）で温度を検知しながら
常温になるまで放置する。なお、この所要時間は約１０
分間であった。(e) After the measurement, the heater 10 attached to the sample holding rod 8 is turned on, and the sample is left until the temperature reaches room temperature while the temperature is detected by the temperature sensor 1). The time required for this is approximately 10
It was a minute.
（ｆ）常温になったところで、ヘリウムガスを放出させ
ながら、試料保持用ロッド８を内側ケーシング７から引
き抜（。(f) When the temperature reaches room temperature, the sample holding rod 8 is pulled out from the inner casing 7 while releasing helium gas (.
（ｇ）試料ホルダ９から試料を取り外した後、次の試料
を装着して、上記と同様に、内側ケーシング７内にセッ
トする。そして、再びヘリウムガスの充填、内側ケーシ
ング７内の冷却を行なう。このとき、極低温冷凍機１８
は外側ケーシング２内部において既に低温状態に維持さ
れている。したがって、試料をセットすれば、直後に内
側ケーシング７内を冷却することができるので、このと
き該内側ケーシング７内が所定温度まで冷却されるのに
要した時間は約１５分間であった。(g) After removing the sample from the sample holder 9, attach the next sample and set it in the inner casing 7 in the same manner as above. Then, filling with helium gas and cooling the inside of the inner casing 7 are performed again. At this time, the cryogenic refrigerator 18
is already maintained at a low temperature inside the outer casing 2. Therefore, since the inside of the inner casing 7 can be cooled immediately after setting the sample, the time required for the inside of the inner casing 7 to cool to a predetermined temperature was about 15 minutes.
上記したように、本実施例の測定方法では、極低温冷凍
装置を一端冷却すれば、常に低温状態に維持させてる（
ことができる。また、昇温する場合も内側ケーシング内
のみを昇温させることができる。したがって、昇温開始
時から次の試料を装着して所定温度まで冷却するために
要する時間は３０分以下である。As mentioned above, in the measurement method of this example, once the cryogenic refrigeration equipment is cooled, it is always maintained at a low temperature (
be able to. Moreover, when raising the temperature, only the inside of the inner casing can be heated. Therefore, the time required from the start of temperature increase to attach the next sample and cool it to a predetermined temperature is 30 minutes or less.
［比較例］
第２図に示した従来の装置により、上記実施例と同様に
、酸化物超伝導体の電気抵抗特性を測定した。[Comparative Example] Using the conventional apparatus shown in FIG. 2, the electrical resistance characteristics of an oxide superconductor were measured in the same manner as in the above example.
まず、この装置２０にはヘリウムガス充填が不要である
ので、かかる操作を除き、上記（ａ）〜（ｅ）に掲げた
操作と同様の操作を行う。したがって、ここまでは上記
実施例の場合とほぼ同様の時間を要する。First, since this device 20 does not require helium gas filling, operations similar to those listed in (a) to (e) above are performed except for this operation. Therefore, up to this point, almost the same amount of time as in the case of the above embodiment is required.
一方、電気抵抗特性測定後、ヒータ２８により常温まで
昇温するのに要した時間は約６０分間であった。これは
、極低温冷凍１ａ２１自体も昇温させる必要があるため
である。また、試料交換後に所定温度まで冷却する時間
も、極低温冷凍機２１自体が昇温しでいたため約６０分
間を要した。On the other hand, after measuring the electrical resistance characteristics, it took about 60 minutes to raise the temperature to room temperature using the heater 28. This is because it is necessary to raise the temperature of the cryogenic refrigerator 1a21 itself. In addition, it took about 60 minutes to cool down to a predetermined temperature after sample exchange because the temperature of the cryogenic refrigerator 21 itself had already risen.
したがって、特性値測定終了後、昇温開始時から次の試
料を装着して該試料が冷却されるまで２時間余りを要し
、上記した実施例と比較して４倍程度長（かかった。Therefore, after the characteristic value measurements were completed, it took more than two hours from the time the temperature started to rise until the next sample was attached and the sample was cooled, which was about four times longer than in the above-mentioned example.
［発明の効果］
本発明にかかる試料特性の測定装置及びその測定方法に
よれば、極低温冷凍装置を低温状態に維持したまま、試
料に対する冷却・昇温操作を施すことができ、試料特性
の測定に要する時間を極めて短時間とすることができる
。[Effects of the Invention] According to the sample characteristic measuring device and its measuring method according to the present invention, it is possible to perform cooling and temperature raising operations on the sample while maintaining the cryogenic freezing device at a low temperature, and the sample characteristic can be The time required for measurement can be made extremely short.
第１図は本発明の試料特性の測定装置の一実施例を示す
概略構成図、第２図は従来の試料特性の測定装置を示す
概略構成図、である。
１．２０・・・・−・試料特性の測定装置２・・・・・
・外側ケーシング
３．２４・・・・・・真空ポンプ
６．２５・・・・・・真空計
７・・・・・・内側ケーシング
８・・・・・・試料保持用ロッド
９．２６−・・・・・試料ホルダ
１０．２８・・・・・・ヒータ
１）．２７・・・・・・温度センサ
１４．２９−・・・・・加熱装置本体
１５・・・・・・冷媒給排管
１８．２Ｌ・−・・−・極低温冷凍機
２３・・・・・・真空断熱容器FIG. 1 is a schematic diagram showing an embodiment of the sample characteristic measuring device of the present invention, and FIG. 2 is a schematic diagram showing a conventional sample characteristic measuring device. 1.20・・・・・Measuring device for sample characteristics 2・・・・・
・Outer casing 3.24...Vacuum pump 6.25...Vacuum gauge 7...Inner casing 8...Sample holding rod 9.26-... ...Sample holder 10.28...Heater 1). 27...Temperature sensor 14.29-...Heating device main body 15...Refrigerant supply/discharge pipe 18.2L...Cryogenic refrigerator 23...・・Vacuum insulation container
Claims (2)
物性特性値を測定するための装置において、 真空ポンプ装置に接続された外側ケーシン グと、 冷媒の給排口を備えると共に、該外側ケー シング内に配設された試料収納保持用の内側ケーシング
と、 該内側ケーシングに挿脱可能に配設された 試料保持用ロッドと、 導熱材を介して冷却ロッドの適所を該内側 ケーシング周壁の任意位置に連結した極低温冷凍装置と
、 該内側ケーシング内を常温に戻すための加 熱手段と、 を有してなることを特徴とする試料特性の測定装置。(1) A device for measuring physical property values such as electrical properties of a sample in a predetermined low-temperature atmosphere, which is equipped with an outer casing connected to a vacuum pump device, a refrigerant supply/discharge port, and a refrigerant supply/discharge port. An inner casing for storing and holding a sample disposed inside the outer casing, a sample holding rod detachably disposed in the inner casing, and a cooling rod connected to an appropriate position on the peripheral wall of the inner casing via a heat conductive material. A sample characteristic measuring device comprising: a cryogenic freezing device connected to an arbitrary position; and a heating means for returning the inside of the inner casing to room temperature.
ーシング内に収納保持した後、外側 ケーシング内を真空にすると共に、該内側 ケーシング内に冷媒を充填する工程と、 真空雰囲気中で極低温冷凍装置により内側 ケーシングを冷却する工程と、 所定の低温状態において任意の測定手段に より該試料の任意の物性特性値を測定する工程と、 極低温冷凍装置を低温状態としたまま、加 熱手段により内側ケーシング内のみを常温にまで昇温す
る工程と、 冷媒を放出しながら、試料保持用ロッドを 引き抜いて試料を取り出す工程と、 を有し、極低温冷凍装置を低温状態としたまま、上記各
工程を繰返し遂行可能にしたことを特徴とする試料特性
の測定方法。(2) After storing and holding the sample holding rod with an arbitrary sample attached inside the inner casing, the inside of the outer casing is evacuated and the inner casing is filled with a refrigerant; a step of cooling the inner casing with a freezing device; a step of measuring an arbitrary physical property value of the sample with an arbitrary measuring means in a predetermined low temperature state; The process includes the steps of heating only the inside of the casing to room temperature, and the step of removing the sample by pulling out the sample holding rod while releasing the refrigerant. A method for measuring sample characteristics, characterized in that it can be carried out repeatedly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2076516A JPH087120B2 (en) | 1990-03-26 | 1990-03-26 | Sample characteristic measuring device and measuring method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2076516A JPH087120B2 (en) | 1990-03-26 | 1990-03-26 | Sample characteristic measuring device and measuring method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03274438A true JPH03274438A (en) | 1991-12-05 |
| JPH087120B2 JPH087120B2 (en) | 1996-01-29 |
Family
ID=13607439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2076516A Expired - Fee Related JPH087120B2 (en) | 1990-03-26 | 1990-03-26 | Sample characteristic measuring device and measuring method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH087120B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022530162A (en) * | 2019-04-26 | 2022-06-27 | ソウル大学校産学協力団 | Probe system for low temperature ultra-precision heat transport measurement and measuring equipment including it |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6168547A (en) * | 1984-09-12 | 1986-04-08 | Hitachi Ltd | Cryogenic tester |
| JPS6293745U (en) * | 1985-12-04 | 1987-06-15 |
-
1990
- 1990-03-26 JP JP2076516A patent/JPH087120B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6168547A (en) * | 1984-09-12 | 1986-04-08 | Hitachi Ltd | Cryogenic tester |
| JPS6293745U (en) * | 1985-12-04 | 1987-06-15 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022530162A (en) * | 2019-04-26 | 2022-06-27 | ソウル大学校産学協力団 | Probe system for low temperature ultra-precision heat transport measurement and measuring equipment including it |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH087120B2 (en) | 1996-01-29 |
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