JPH03270879A - Thin cutting edge grinder wheel with hub - Google Patents

Abstract

PURPOSE:To simply perform at site the assembly of multiple blades having a specified processing pitch by forming a spacer part, which protrudes at the other surface of an abrasive grain layer outward in the axial direction, in a single piece with the surface of a hub on its abrasive grain layer side. CONSTITUTION:A spacer part 13c, which protrudes at the other surface of an abrasive grain layer 12 outward in the axial direction, is formed in a single piece with the surface of hub 13 on its abrasive gain layer 12 side. In the condition that this spacer 13c is ion contact, no stress will be generated in each abrasive grain layer 12, so that the grinding wheel 11 of thin cutting edge equipped with a hub can be assembled easily even at the site.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is applicable to ultra-precision processing such as cutting, dividing, and grooving of electronic and magnetic materials such as silicon wafers used in semiconductor devices and ferrite used in magnetic heads. This relates to a thin-edged whetstone with a hub used for machining.

[Prior art] In ultra-precision machining, such as cutting and dividing silicon wafers used for semiconductor devices at regular intervals, or grooving ferrite magnetic heads at regular intervals, these are processed using a single blade. Since productivity is poor if machining is carried out using a multi-blade type grindstone, conventionally a so-called multi-blade type thin-blade grindstone, which is a combination of a thin-walled annular electroformed grindstone, as shown in FIG. 4, has been used.

This involves inserting an annular spacer 2 having a thickness corresponding to the machining pitch onto the rotating shaft l, placing a thin annular electroformed grindstone 3.3 on both sides of this spacer 2, and then It has a structure in which an annular flanone 44 is inserted and fixed to a rotating shaft 1, and the rotating shaft 1 is rotated to cut the workpiece at predetermined intervals or to perform grooving. It is something that can be used.

[Problems to be Solved by the Invention] Generally, in the above-mentioned ultra-precision machining, the machining pitch is 1 mm or less, and high machining accuracy is required. However, in the above-mentioned conventional technology, since the roughness of the joint surface between the spacer and the grinding wheel has a large influence on the processing accuracy, it is necessary to perform lapping on both sides of the spacer, and since the spacer is thin, The lapping process itself was difficult, and it was difficult to obtain highly accurate spacers. Also, the thickness of the grinding wheel is l
If the grinding wheel is as thin as 0 to 60 μm, the adjustment of the tightening of the whetstone when assembling the multi-blade is very delicate, which may cause distortion or damage to the blade. There was a problem that the blade would break during cutting due to the starting point.

For this reason, assembly requires specialized technology and a high level of skill, making it difficult to assemble at the processing site.

Furthermore, when changing the machining pitch, the spacer must be replaced and the above-mentioned work must be performed each time, which inevitably reduces work efficiency.

[Means for Solving the Problems] The present invention has been made to solve the above-mentioned problems, and includes an annular hole having a smaller outer diameter on one side of a thin annular abrasive grain layer. A thin-blade whetstone with a hub coaxially fixed to the hub, characterized in that a spacer part is integrally formed on the surface of the hub on the abrasive layer side that protrudes axially outward from the other surface of the abrasive layer. shall be.

[Function] With a hub-equipped thin-blade grindstone having such a configuration, for example, the thickness of the spacer part can be adjusted to match the machining pitch! By combining two spacers having a diameter of /2 so that their respective spacer parts abut against each other, grooving or the like can be performed at a predetermined pitch.

In addition, since no stress is applied to each abrasive grain layer when the spacer parts are in contact with each other, there is no need to make delicate tightening adjustments during assembly, making it easy to use at the processing site. Can be assembled.

Furthermore, by preparing several types of hub-equipped thin-blade grindstones with different thicknesses of spacer parts and using them in combination, it is possible to immediately respond to changes in the machining pitch.

[Example] FIG. 1 is a sectional view showing an example of the present invention. This hub-equipped thin-blade grindstone 11 is coaxially fixed to a thin annular abrasive grain layer 12, which is an electroformed grindstone formed by multilayer electrodeposition of diamond, CBN, etc., and one surface 12a of this abrasive grain layer 12. The hub 13 is made of an annular aluminum alloy.

The outer diameter of the hub 13 is smaller than the outer diameter of the abrasive grain layer 12, and a mounting hole 13a is provided in the center to be inserted into the rotating shaft. Moreover, the outer peripheral part is a surface 1 fixed to the abrasive grain layer 12.
The cross-sectional shape becomes wider toward 3b.

The surface 13 of the hub 13 is fixed to the abrasive layer 12.
b shows a surface 12a of the abrasive grain layer 12 to which the hub 13 is fixed;
An annular spacer portion 13c protruding in the axial direction from the opposite surface +2b is formed integrally and coaxially with the hub I3. The outer diameter of this spacer portion 13ci is smaller than the inner diameter of the abrasive layer 12, and the axial distance between the axial center of the abrasive layer 12 and the end surface 13d of the spacer portion 13C, that is, the thickness of the spacer portion 13c is: It is set to 1/2 of the machining pitch.

To obtain the hub-equipped thin-blade grindstone 11 having such a configuration, first, a hub 13 having an outer diameter that is the same as the outer diameter of the abrasive layer 12 to be formed is formed by cutting, and the abrasive grains of this hub 13 are formed by cutting. layer 12
After masking the hub 13 except for the portion where the abrasive layer 12 is formed, the abrasive grain layer 12 of a predetermined thickness is formed by electrodeposition.

Next, the outer diameter of the hub I3 is molded to a predetermined size. Thereafter, a portion of the hub I3 that does not allow dimensional change is masked, and the outer circumferential surface of the hub 13 is melted using an alkaline solution or the like to expose the cutting edge of the abrasive grain layer 12.

The hub-equipped thin-blade grindstone 11 configured as described above can be used to cut, divide, and groove a workpiece. To perform the machining, use two thin-blade grindstones with hubs, as shown in Figure 2.

11 are assembled so that their respective spacer portions are in contact with each other, and then fitted onto the rotating shaft 14 and fixed. At this time, since the interval between the abrasive grain layers 1212 of the thin blade grindstone 11° II with both hubs corresponds to a predetermined machining pitch, ultra-precision machining such as cutting and grooving can be performed at a constant interval.

According to the present invention, stress is not applied to each abrasive grain layer when the spacer portions are in contact with each other, and there is no risk of distortion or damage, which is difficult to fix in the conventional way. No need to adjust the tightness. As a result, anyone can easily assemble the multi-blade at the work site without requiring any special skills or skills, making it extremely simple.

Furthermore, by fixing the abrasive grain layer to the hub, the rigidity is improved, and this L makes it possible to prevent a decrease in machining accuracy due to runout.

Furthermore, when grooving a magnetic head, as shown in FIG.
Grooves 15a... having a letter-shaped cross section are formed, and then grooves 15b are formed.
However, when such processing is performed with a multi-blade shown in Fig. 4, a groove 15 with a V-shaped cross section is created.
The cutting edge of the grinding wheel must protrude more than necessary by the depth of a, and the protrusion of the grinding wheel increases relative to the thickness of the blade, which may cause damage to the grinding wheel or run-out of the cutting edge during processing. There was a risk of reducing machining accuracy. However, in this embodiment, the outer circumference of the hub 13 has a wider cross-sectional shape toward the surface 13b fixed to the abrasive grain layer 12, and the degree of inclination is greater than that of the V-shaped groove of the workpiece 15. By making the diameter smaller, it becomes possible to insert the tip 13e of the outer peripheral portion of the hub 13 into the V-shaped groove 5a of the workpiece 15 to form the groove. Therefore, the amount of protrusion of the cutting edge of the grinding wheel can be reduced, and the tip 13e on the outer periphery of the hub 13 reinforces the threshold 1i property of the grinding wheel, suppressing runout of the cutting edge, and making deep cuts while maintaining machining accuracy. and high-speed machining.

In this embodiment, the thickness of the spacer portion 13c is set to 1/2 of the machining pitch, and such a thin-blade grindstone 11 with a hub is
Although several types of thin-blade grindstones with hubs with different thicknesses of spacer portions are prepared in advance, and by combining these, it becomes possible to easily perform cutting divisions and grooving with different machining pitches. At this time, it may be possible to combine it with a hub-equipped thin-blade grindstone that does not have a spacer part.

In addition, in this embodiment, the material constituting the hub 13 is as follows:
In addition to ensuring weight reduction and sufficient rigidity, the material must be soluble in an alkaline electrolyte during manufacturing, so the material is not limited to aluminum alloy or any other material that has the above-mentioned functions. Further, the manufacturing method of such a thin-blade whetstone with a hub is not limited to the above-described manufacturing method as long as sufficient machining accuracy and strength as a grindstone can be maintained.

[Effects of the Invention] As described above, according to the present invention, it is possible to easily assemble and feed multi-plates having a predetermined processing pitch at a work site. Furthermore, since no stress is applied to the abrasive grain layer during assembly, it is possible to prevent distortion and damage from occurring and maintain high processing accuracy.

In addition, by considering thin-blade grindstones with hubs with different thicknesses of the spacer part and using them in combination, it is possible to immediately respond to changes in the machining pitch, improving work efficiency. can.

[Brief explanation of drawings]

FIG. 1 is a sectional view showing one embodiment of the present invention, and FIG.
The figures and FIG. 3 show an example of the use of this embodiment. Moreover, FIG. 4 is a sectional view showing a conventional example. l... Thin blade grindstone with hub, 2... Abrasive grain layer, 3... Hub, 3a... Mounting hole, 3c Spacer part, 4. Rotating shaft, 5. Workpiece material.

Claims (1)

[Scope of Claims] A thin-blade grindstone with a hub, which has a thin annular abrasive grain layer and a toroidal hub having a smaller outer diameter coaxially fixed to one side of the abrasive grain layer, the abrasive grain layer side of the hub. A thin-blade whetstone with a hub, characterized in that a spacer portion projecting axially outward from the other surface of the abrasive grain layer is integrally formed on the surface.