JPH0592365A - Method of correcting ultra abrasive grain grinding wheel - Google Patents
Method of correcting ultra abrasive grain grinding wheelInfo
- Publication number
- JPH0592365A JPH0592365A JP25088791A JP25088791A JPH0592365A JP H0592365 A JPH0592365 A JP H0592365A JP 25088791 A JP25088791 A JP 25088791A JP 25088791 A JP25088791 A JP 25088791A JP H0592365 A JPH0592365 A JP H0592365A
- Authority
- JP
- Japan
- Prior art keywords
- grindstone
- superabrasive
- magnetic head
- grinding wheel
- general
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は磁気ディスク装置におけ
る磁気ヘッド及びその製造方法に係り、特に、磁気ヘッ
ド浮上面のレール幅を狭く且つ高精度に加工するため
の、超砥粒からなる薄刃砥石の成形に好適な修正法に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head in a magnetic disk device and a method of manufacturing the same, and more particularly to a thin blade grindstone made of superabrasive grains for narrowing the rail width of the air bearing surface of the magnetic head with high precision. The present invention relates to a modification method suitable for molding.
【0002】[0002]
【従来の技術】従来、磁気ヘッド等の硬脆材料の加工に
用いられる超砥粒薄刃砥石の修正は、昭和62年度精密
工学会春季大会学術講演会論文集p147に記載のよう
に、スティックと称する角棒状の一般砥石や、ドレッシ
ングボードと呼ばれる薄板状の一般砥石を加工機のテー
ブル上に固定し、高速回転する超砥粒薄刃砥石を一般砥
石に一般砥石の厚さ内の範囲で任意量だけ切り込んで砥
石先端を修正しており、磁気ヘッドのレールの成形加工
等においても上記により修正された超砥粒薄刃砥石をそ
のまま用いて加工していた。2. Description of the Related Art Conventionally, the correction of a superabrasive thin-blade grindstone used for processing hard and brittle materials such as magnetic heads has been described in p. 147, Proc. A square bar-shaped general grindstone called or a thin plate-shaped general grindstone called a dressing board is fixed on the table of the processing machine, and a high-speed rotating superabrasive grain thin blade grindstone is used as the general grindstone in an arbitrary amount within the range of the general grindstone. The tip of the grindstone is corrected by cutting only, and the superabrasive thin blade grindstone corrected as described above was used as it is for the forming processing of the rail of the magnetic head.
【0003】[0003]
【発明が解決しようとする課題】上記従来技術では、修
正による超砥粒砥石の形状劣化の点については考慮がさ
れておらず、修正後に超砥粒砥石先端がテーパ状にな
り、その様な砥石で加工された製品は溝あるいは切断面
の側面の直角度が悪いという問題があった。In the above prior art, no consideration is given to the deterioration of the shape of the superabrasive grindstone due to the modification, and the tip of the superabrasive grindstone is tapered after the modification. The product processed by the grindstone has a problem that the squareness of the side surface of the groove or the cut surface is bad.
【0004】特に磁気ディスク装置の磁気ヘッドのレー
ルの加工では、ヘッド浮上量を低減し、かつ浮上量の変
動を小さくするために、浮上面の幅を高精度に狭くしな
ければならず、端面の薄膜素子の寸法は小さくできない
ため、浮上面の肩部を微細な段付き形状にする必要があ
る。この時、砥石の精度が悪いとレールの精度の確保が
難しく、素子を傷つけたり、浮上量の変動が大きいとい
う問題があった。Particularly in the processing of the rail of the magnetic head of the magnetic disk device, the width of the air bearing surface must be narrowed with high precision in order to reduce the flying height of the head and to reduce the fluctuation of the flying height. Since the dimension of the thin film element cannot be reduced, it is necessary to make the shoulder portion of the air bearing surface into a fine stepped shape. At this time, if the precision of the grindstone is poor, it is difficult to secure the precision of the rail, and there is a problem that the element is damaged and the flying height varies greatly.
【0005】本発明の目的は、薄刃の超砥粒砥石を簡便
に、かつ、高精度に修正することができる砥石修正法を
提供し、磁気ヘッドを高精度に加工することにより、高
記録密度の磁気ディスク装置を提供することにある。An object of the present invention is to provide a grindstone repairing method capable of simply and accurately repairing a thin-blade superabrasive grindstone, and by processing a magnetic head with high accuracy, a high recording density can be obtained. To provide a magnetic disk device of the above.
【0006】[0006]
【課題を解決するための手段】上記目的を達成するため
に、本発明では、くし歯状のベースの上にドレッシング
用の一般砥石の薄いボードを貼り付け、ドレッシングボ
ードを貫通してベースの溝内に超砥粒砥石の先端を突き
出させながら修正する。In order to achieve the above object, according to the present invention, a thin board of a general grinding stone for dressing is attached on a comb-shaped base, and the groove of the base is penetrated through the dressing board. Fix while protruding the tip of the superabrasive grindstone inside.
【0007】[0007]
【作用】上記の技術的手段による働きは、次のとうりで
ある。The function of the above technical means is as follows.
【0008】超砥粒砥石をドレッシングボードに切り込
んだとき、ドレッシングボードの厚さを薄くし、砥石を
貫通させた状態で加工すると、超砥粒砥石側面とドレッ
シングボードとの接触弧の内外周での差が小さくなり、
ドレッシング距離が均一化され、側面のドレス量が内外
周でほぼ等しくなるため砥石側面のテーパは小さくな
る。When a superabrasive grindstone is cut into a dressing board and the dressing board is thinned and processed with the grindstone penetrating, the inside and outside of the contact arc between the side surface of the superabrasive grindstone and the dressing board. The difference between
The dressing distance is made uniform, and the amount of dressing on the side surface becomes substantially equal on the inner and outer circumferences, so the taper on the side surface of the grindstone becomes smaller.
【0009】このような砥石で加工された製品は直角度
が良く、磁気ヘッドの場合、レール幅のばらつきが小さ
く高精度に加工できるため、よりレール幅が狭く浮上量
の安定したヘッドを得ることができる。The product processed with such a grindstone has a good squareness, and in the case of a magnetic head, the variation in rail width is small and high-precision processing is possible. Therefore, a head with a narrower rail width and a stable flying height can be obtained. You can
【0010】[0010]
【実施例】以下、本発明の一実施例を図1により説明す
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG.
【0011】図1は、本発明の一実施例に係る超砥粒砥
石の修正法の略示構成図。図2は、図1のII−II線断面
図である。FIG. 1 is a schematic configuration diagram of a method of correcting a superabrasive grindstone according to an embodiment of the present invention. 2 is a sectional view taken along the line II-II in FIG.
【0012】図1において、1は研削盤(図示せず)の
砥石主軸、2は、砥石主軸1に取付けられた超砥粒砥石
で、この超砥粒砥石2は、金属からなる台金2bと、台
金2bの外周面にダイヤモンド等の硬質材料からなる砥
粒2cをフェノール等の樹脂や、銅などの金属、あるい
は無機質中に含ませて一体に成形された砥粒層2aとか
らなり、矢印方向に回転する。In FIG. 1, 1 is a grindstone spindle of a grinder (not shown), 2 is a superabrasive grindstone attached to the grindstone spindle 1, and this superabrasive grindstone 2 is a metal base 2b. And an abrasive grain layer 2a integrally formed on the outer peripheral surface of the base metal 2b by incorporating abrasive grains 2c made of a hard material such as diamond into a resin such as phenol, a metal such as copper, or an inorganic substance. , Rotate in the direction of the arrow.
【0013】3は、超砥粒砥石2を修正するための板状
をしたWA砥粒あるいはGC砥粒からなる一般砥石で、
等ピッチに配置された複数本の溝5を持つ、くし歯状の
ベース4にワックス6によって貼り付けられている。溝
5の寸法は、図2に見られるように超砥粒砥石2の砥石
厚さよりも幅広く、超砥粒砥石2の切込み量よりも深く
してあり、超砥粒砥石2が回転しても超砥粒砥石2の側
面及び端面が溝5の内壁に接触しないようにしてある。
このように構成した砥石修正法により超砥粒砥石2を高
精度に修正する動作を説明する。Reference numeral 3 is a general grindstone made of plate-shaped WA grinds or GC grinds for correcting the superabrasive grindstone 2.
It is attached by a wax 6 to a comb-shaped base 4 having a plurality of grooves 5 arranged at equal pitches. As shown in FIG. 2, the size of the groove 5 is wider than the thickness of the grindstone of the superabrasive grindstone 2 and deeper than the depth of cut of the superabrasive grindstone 2, even if the superabrasive grindstone 2 rotates. The side surface and the end surface of the superabrasive grindstone 2 are prevented from coming into contact with the inner wall of the groove 5.
The operation of correcting the superabrasive grindstone 2 with high precision by the grindstone correcting method thus configured will be described.
【0014】超砥粒砥石2を回転させ、研削液8を供給
しながら超砥粒砥石2を板状の一般砥石3の厚さよりも
深く切り込むと、超砥粒砥石2の砥粒層2aの内周側と
外周側とでは一般砥石3に接触している距離がことなる
ため、長く接している部分の方が砥粒層2aの脱落が多
くなり、超砥粒砥石2の断面形状はテーパ状になってし
まう。When the superabrasive grindstone 2 is rotated and the grinding fluid 8 is supplied while the superabrasive grindstone 2 is cut deeper than the thickness of the plate-shaped general grindstone 3, the abrasive layer 2a of the superabrasive grindstone 2 is formed. Since the inner circumference side and the outer circumference side have different distances in contact with the general grindstone 3, the abrasive grain layer 2a is more likely to fall off in the longer contact part, and the cross-sectional shape of the superabrasive grain grindstone 2 is tapered. It will be in a state.
【0015】図3は、超砥粒砥石2の側面と一般砥石3
との接触弧の内外周の差と、一般砥石3の厚さ及び超砥
粒砥石2の切り込み量との関係図である。一般砥石を貫
通させた場合、内外周差が0となる点があるが位置の設
定が困難であり、変動量も大である。そこで極めて薄い
一般砥石3を用い、切込み量に対して一般砥石3の厚さ
を薄くすることにより接触弧の内外周差を小さくし、砥
粒の脱落を一様にすることができる。FIG. 3 is a side view of a superabrasive grindstone 2 and a general grindstone 3.
FIG. 6 is a relationship diagram of the difference between the inner and outer circumferences of the contact arc with the thickness of the general grindstone 3 and the cut amount of the superabrasive grindstone 2. When a general grindstone is penetrated, there is a point that the difference between the inner and outer circumferences becomes 0, but it is difficult to set the position, and the variation amount is large. Therefore, by using an extremely thin general grindstone 3 and reducing the thickness of the general grindstone 3 with respect to the depth of cut, it is possible to reduce the difference between the inner and outer peripheries of the contact arcs and make the abrasive grains fall out uniformly.
【0016】超砥粒砥石2がすべて砥粒層2aからなる
オールブレードタイプの砥石でも同様に、一般砥石3の
厚さが薄くなるほど接触弧の内外周差は小さくなる。Similarly, even if the super-abrasive grindstone 2 is an all-blade type grindstone in which all of the grindstone layers 2a are used, the thinner the general grindstone 3 is, the smaller the difference between the inner and outer circumferences of the contact arc becomes.
【0017】このように修正された超砥粒砥石で磁気ヘ
ッド9を加工することにより、素子13を傷つけずに浮
上面10のレールの幅を精度良く狭く段付き形状に加工
することができる。By processing the magnetic head 9 with the superabrasive grindstone modified as described above, the rail width of the air bearing surface 10 can be accurately processed into a narrow stepped shape without damaging the element 13.
【0018】図4は、従来の修正法で修正した超砥粒砥
石を用いて磁気ヘッド9を加工した時の断面図である。
砥石はテーパ形状になっており、指定量切り込んだ時、
テーパの量だけ浮上面10のレール幅がばらついてしま
う。図5は、0.1mmの厚さの一般砥石を用い、本発
明による砥石修正法で修正した超砥粒砥石で磁気ヘッド
を加工したときの断面図である。砥石のテーパが1μm
と小さいことから、加工された磁気ヘッドのレール側面
のテーパも小さく、レール幅のばらつきが小さくなる。
これにより浮上量は0.1μmから0.2μmが得ら
れ、浮上量の変動量も小さく高性能な磁気ディスク装置
を得ることができる。FIG. 4 is a sectional view when the magnetic head 9 is processed using a superabrasive grindstone modified by a conventional modification method.
The whetstone has a taper shape, and when you cut a specified amount,
The rail width of the air bearing surface 10 varies by the taper amount. FIG. 5 is a sectional view when a magnetic head is machined with a superabrasive grindstone modified by the grindstone modifying method according to the present invention using a general grindstone having a thickness of 0.1 mm. Grinding stone taper is 1 μm
Therefore, the taper of the rail side surface of the processed magnetic head is also small, and the variation in rail width is small.
As a result, the flying height can be obtained from 0.1 μm to 0.2 μm, and it is possible to obtain a high-performance magnetic disk device with a small variation in the flying height.
【0019】図6は、本発明の他の実施例の斜視図で、
硬脆材に溝加工や、段付き加工を行ない、インプロセス
で砥石修正を行なう場合である。研削盤(図示せず)の
テーブル13上で製品11の端面に一般砥石3をスペー
サ12を介して、一般砥石3の下部が空隙となるように
固定する。超砥粒砥石2で製品11を加工した後、引き
続き一般砥石3を通過させることにより、超砥粒砥石2
の形状を劣化させることなく修正を行ない、常に精度の
良い加工を行なうことができる。FIG. 6 is a perspective view of another embodiment of the present invention.
This is a case where a hard brittle material is subjected to groove processing or step processing and the grindstone is corrected in-process. The general grindstone 3 is fixed to the end surface of the product 11 on the table 13 of the grinder (not shown) via the spacer 12 so that the lower part of the general grindstone 3 becomes a void. After the product 11 is processed with the superabrasive grain grinding stone 2, the superabrasive grain grinding stone 2 is continuously passed through.
The shape can be corrected without deteriorating the shape, and accurate machining can always be performed.
【0020】[0020]
【発明の効果】本発明によれば、磁気ヘッドのレール部
の加工を高精度に行うことができるので、浮上量が0.
1μmから0.2μmの磁気ヘッドを得ることができ、
それに対応して記録密度が70Mbit/inch2 以
上の高性能な磁気ディスク装置が得られる。According to the present invention, since the rail portion of the magnetic head can be processed with high accuracy, the flying height can be reduced to 0.
It is possible to obtain a magnetic head of 1 μm to 0.2 μm,
Correspondingly, a high-performance magnetic disk device having a recording density of 70 Mbit / inch 2 or more can be obtained.
【0021】また、砥石断面が直角になっているため、
磁気ヘッド加工時の砥石側面の砥粒層の脱落が少なく、
砥石の長寿命化が図れ、他の硬脆材の高精度加工にも応
用できる。Since the grindstone has a right angle cross section,
Less loss of the abrasive grain layer on the side of the grindstone when processing the magnetic head,
The life of the grindstone can be extended and it can be applied to high precision machining of other hard and brittle materials.
【図1】図1は、本発明の第一の実施例の斜視図、FIG. 1 is a perspective view of a first embodiment of the present invention,
【図2】図1のII−II線断面図、2 is a sectional view taken along line II-II of FIG.
【図3】一般砥石の厚さ及び砥石の切込み量と、砥石側
面と一般砥石との接触弧の内外周差との関係の説明図、FIG. 3 is an explanatory view of the relationship between the thickness of a general grindstone and the cutting amount of the grindstone, and the difference between the inner and outer circumferences of the contact arc between the side surface of the grindstone and the general grindstone;
【図4】[Figure 4]
【図5】磁気ヘッドのレール部加工時の断面図。FIG. 5 is a cross-sectional view of a magnetic head when processing a rail portion.
【図6】本発明の第二の実施例の斜視図。FIG. 6 is a perspective view of a second embodiment of the present invention.
1…砥石主軸、 2…超砥粒砥石、 3…一般砥石、 4…ベ−ス。 1 ... Grindstone main spindle, 2 ... Super abrasive grain grindstone, 3 ... General grindstone, 4 ... Base
───────────────────────────────────────────────────── フロントページの続き (72)発明者 竹下 幸二 神奈川県小田原市国府津2880番地株式会社 日立製作所小田原工場内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Koji Takeshita 2880 Kozu, Odawara City, Kanagawa Prefecture Hitachi Ltd. Odawara Factory
Claims (4)
切断、あるいは溝加工、あるいは段付き加工を行なうダ
イヤモンド等の硬質砥粒からなる超砥粒薄刃砥石におい
て、薄板上のドレッシング用一般砥石の超砥粒砥石通過
部下部に空隙を設け超砥粒砥石を貫通させた状態で成形
することを特徴とする超砥粒砥石の修正方法。1. A dressing on a thin plate in a super-abrasive thin-edged grindstone made of hard abrasive grains such as diamond, which is rotated at high speed around a spindle of a grindstone to cut hard or brittle material, or to perform groove processing or step processing. A method of repairing a superabrasive grindstone, characterized by forming a space under a superabrasive grain grindstone passing portion of a general grindstone for use in a state where the superabrasive grindstone is penetrated.
された超砥粒砥石を用いた磁気ヘッド浮上面のレール加
工法。2. A rail processing method for an air bearing surface of a magnetic head according to claim 1, wherein a superabrasive grindstone formed by the correction method is used.
砥石を用いて浮上面の肩部を段付き形状に加工され、レ
ールの幅を狭くして浮上面の面積を少なくした磁気ヘッ
ド。3. The magnetic head according to claim 1, wherein the shoulder of the air bearing surface is processed into a stepped shape by using the formed superabrasive grindstone, and the width of the rail is narrowed to reduce the area of the air bearing surface. ..
砥石によって加工された磁気ヘッドを設け浮上量が0.
2μm以下となり、記録密度70Mb/inch2 以上
の磁気ディスク装置。4. The magnetic head machined by the molded superabrasive grindstone according to claim 1, wherein a flying height is set to 0.
A magnetic disk device with a recording density of 70 Mb / inch 2 or more, which is 2 μm or less.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25088791A JPH0592365A (en) | 1991-09-30 | 1991-09-30 | Method of correcting ultra abrasive grain grinding wheel |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25088791A JPH0592365A (en) | 1991-09-30 | 1991-09-30 | Method of correcting ultra abrasive grain grinding wheel |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0592365A true JPH0592365A (en) | 1993-04-16 |
Family
ID=17214501
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP25088791A Pending JPH0592365A (en) | 1991-09-30 | 1991-09-30 | Method of correcting ultra abrasive grain grinding wheel |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0592365A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011009324A (en) * | 2009-06-24 | 2011-01-13 | Disco Abrasive Syst Ltd | Dress board holding table and cutting device |
JP2012187693A (en) * | 2011-03-14 | 2012-10-04 | Disco Corp | Dressing material and dressing method |
JP2012187692A (en) * | 2011-03-14 | 2012-10-04 | Disco Corp | Dressing material and dressing method |
-
1991
- 1991-09-30 JP JP25088791A patent/JPH0592365A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011009324A (en) * | 2009-06-24 | 2011-01-13 | Disco Abrasive Syst Ltd | Dress board holding table and cutting device |
JP2012187693A (en) * | 2011-03-14 | 2012-10-04 | Disco Corp | Dressing material and dressing method |
JP2012187692A (en) * | 2011-03-14 | 2012-10-04 | Disco Corp | Dressing material and dressing method |
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