JPH04201071A - Polishing jig and method for magnetic head slider - Google Patents

Abstract

PURPOSE:To drastically shorten the work time of a slider by fixing a slider blank to an anchor block seat, fitting a dummy narrow paper tablet thicker than the slider blank to an opposed position, and polishing the inclined face of the end of the slider blank by a lapping machine with the anchor block seat being made downward. CONSTITUTION:A slider blank 8 is fixed to the anchor block seat 2 in the position dividing the outer periphery of a block 1 equally in a haploid number, in plural anchor block seats 2, and a dummy narrow paper tablet 17 thicker than the slider blank 8 is fitted to one of the anchor block seats 2 opposed to this slider blank 8. The end of the slider blank 8 is obliquely polished by a lapping machine 14 with this anchor block seat 2 being made downward, and the slider inclined face is polished. Thus, the polishings of the slider floating face and slider inclined face can be executed, just as the slider blank 8 being fixed to the anchor block seat 2.

Description

[Detailed description of the invention] [Industrial application field]

The present invention relates to a polishing jig and a polishing method for polishing a magnetic head slider.

[Conventional technology]

A magnetic disk is a magnetic disk that records information along a circle. Writing and reading are performed by a magnetic head, and the magnetic head is attached to an accelerator arm that extends in the radial direction of the magnetic disk. attached. A floating head is used for a magnetic head for a hard disk to avoid damage due to contact with the medium. This is 0.4 μm due to the balance between the floating blade created by compressing the airflow due to the rotation of the disk on the slope at the front of the slider, and the force of the spring that presses the head against the disk.
A certain amount of floating height was obtained. A ceramic wafer is photolithographically processed to provide a coil, magnetic layer, and insulation to produce a substrate for a thin-film magnetic head, and this substrate is cut, ground, and polished to produce a magnetic head slider (hereinafter referred to as slider). FIG. 11 is a perspective view of the thin film slider. The slider 8a has a slider floating surface 8b and a slider inclined surface 8c.
, a groove 8d and a magnetic pole 8e. The thin film slider is 4mo+ long and has one or two read/write heads at the end. The slider has a slider air bearing surface 8b having a very hard surface specification by machining and lapping. This slider air bearing surface 8b determines how the slider flies over the surface of the magnetic disk. Typical flying height is 0
．． It is 254 micrometers. And this height is decreasing as desk data density increases. The front end of the air bearing surface (i.e. the end facing the read and write heads) is typically
Polished at a slight angle to the main surface. This angle is R
It is called AMP or taper angle and is on the order of 1 degree. This surface is called the slider slope 8c and is important for the flight characteristics of the slider because it helps move the slider away from the stopped disk. The RAMP angle can be easily and accurately measured with a microinterferometer. FIG. 9 is a plan view of a conventional polishing jig for a magnetic head slider, and FIG. 10 is a block diagram showing a method of polishing the air bearing surface of the slider using the polishing jig shown in FIG. In FIG. 9, a heat-softening adhesive 18 such as wax is thinly applied to the reference surface of a polishing jig 19 consisting of a cylindrical base plate 1 with guaranteed flatness, and the base plate 1 is applied to this surface. A strip-shaped slider blank 8 is placed and fixed at a position dividing the outer periphery of the slider into three parts, and the flying surface of the slider is polished using a lapping machine. Lapping is the process of lapping the surface of a workpiece (generally cast iron,
A lamp agent is added between the two to cause them to move relative to each other (relatively soft metals such as copper alloys or non-metallic materials such as hard wood and charcoal), and the lamp agent removes very small amounts of chips from the surface of the workpiece. This is the processing power that removes debris and finishes a smooth surface. In FIG. 10, slider blank material 8 is glued to adhesive 1.
The support hole 7 of the base plate I glued in step 8 is supported by the spherical support part 13a at the end of the support arm 13, the lap constant 114 is rotated, and the slurry 16 is added from the nozzle 15 to polish the slider air bearing surface. ing. When the lapping surface plate 14 is rotated, the polishing jig 19 rotates due to the difference in peripheral speed between the slider blank material 8 on the inner diameter side and the slider blank material 8 on the outer diameter side.

[Problem to be solved by the invention]

In conventional polishing jigs, adhesive 18 is used to fix the slider blank 8 to the reference surface of base plate 1, so the thickness of the adhesive layer must be formed extremely uniformly. required skill. Furthermore, when wax is used, the polishing jig must be heated to the melting point of the wax each time the slider blank material 8 is attached or removed, and a large amount of wax adheres to the slider blank + A8 after processing. There were problems such as the need for thorough cleaning. In addition, the conventional polishing method using a polishing jig can only polish the flying surface of the slider, and the polishing of the sloped surface of the slider, which is essential for a stable flow of air, requires a separate dedicated treatment. It was necessary to replace the fittings. This invention allows a slider blank material to be easily and accurately fixed to a polishing jig without using an adhesive, thereby polishing the flying surface of the slider and grooving the slider. It is an object of the present invention to provide a polishing jig and a polishing method for a magnetic head slider that can cut and polish the sloped surface of the slider.

[Means to solve the problem]

According to the invention of claim 1, the above object is achieved by a plurality of cylindrical base plates arranged near the outer periphery at positions that equally divide the outer periphery of the base plate into two times an odd number of 3 or more. a fixed pedestal, a slider blank fixing surface provided on each fixed pedestal, a plurality of cavities bored in the slider blank fixing surface, a diaphragm closing the cavities, and an oil pipe communicating with the cavities; This is achieved by providing an adjustment screw for adjusting the volume of the oil sealing portion in the oil pipe and a plurality of grindstone escape holes that match the punches carved into the fixed base when cutting the slider. The above object is achieved by the invention according to claim 2, in which among the plurality of fixing pedestals of the polishing jig for a magnetic head slider according to claim 1, a fixing pedestal at a position where the pedestal is equally divided into half of the plurality of fixing pedestals,
A slider blank material to be polished is fixed, a dummy strip thicker than the slider blank material is attached to one of the fixed pedestals opposite to the fixed pedestal to which this slider blank material is fixed, and the pedestal is turned downward, This is accomplished by grinding the slider slope with a ramp disc.

[For use]

According to claim 1 of the present invention, the slider blank material is fixed to a plurality of fixed pedestals arranged near the outer periphery of the pedestal at positions that equally divide the outer periphery of the pedestal into two times an odd number of 3 or more. Place the slider blank material on the surface, fill the oil pipe that communicates with the cavity of the fixed base with oil, and adjust the adjustment screw to expand the volume of the oil pipe.The diaphragm that closes cavity 1 is depressed and the slider Suction and fix the blank material. With the slider blank material fixed to the fixed pedestal, cut the slider blank material into a predetermined pinch using the grinding wheel on the fixed pedestal, and cut the slider blank material into a specified pinch using the grinding wheel for grinding. Add miso. Furthermore, the slider blank material is fixed to a fixed pedestal at a position that equally divides the outer circumference of the pedestal into half of the whole, supported by a support arm with the fixed pedestal facing downward, and placed on a lapping plate for relative movement. The slider air bearing surface can be polished. According to claim 2 of the present invention, a slider blank material is fixed to a fixed pedestal at a position that equally divides the outer circumference of the base plate into half of the plurality of fixed pedestals of the polishing jig according to claim 1. , one of the fixed pedestals facing this slider blank material
Attach a dummy strip that is thicker than the slider blank material, and use a lapping machine to polish the end of the slider blank diagonally with the fixed pedestal facing downward, thereby making it possible to polish the sloped surface of the slider. Next, the dummy strip is moved to a position opposite to another slider blank material, and the same processing is repeated to polish the slider inclined surface of the other slider blank material. According to this method, the slider air bearing surface and the slider inclined surface can be polished while the slider blank material is fixed to the fixed pedestal.

【Example】

The present invention will be described in detail below based on the drawings. FIG. 1 is a plan view of a polishing jig for a magnetic head slider according to an embodiment of the present invention, and FIG. 2 is an enlarged perspective view showing a fixing base of the polishing jig shown in FIG. In FIG. 1, near the outer periphery of a cylindrical base 1, there is a fixed base 2 divided into six equal parts. This fixed pedestal 2 is 3
The number that is twice the above odd number, that is, 6°10.14. etc. is fine. This is so that when slider blanks 8 are attached to half of the fixed pedestals 2, as will be described later, the position of the fixed pedestals 2 facing the slider blanks 8 is vacant and the surfaces of the fixed pedestals 2 are parallel to each other. This is to make it happen. There are a plurality of cavities 9 on the slider blank fixing surface of the fixed base 2, and the cavities 9 correspond to the number of sliders cut out from the slider blank 8. A diaphragm 3 is formed in the cavity 9 with a predetermined pinch. Oil pipes 4 are formed on the lower surface of the cavity 9 and pass through each other, and oil 10 is sealed therein.The oil pipes 4 further penetrate the side surface of the base plate 1, and the adjustment screw 5 is screwed into the bottom surface of the cavity 9. The oil is sealed tightly. A grindstone relief groove 6 is carved into the fixed base 2. Figure 3 is an enlarged sectional view showing the slider blank placed on the fixing base of the polishing jig shown in Figure 1, and Figure 4 shows the slider blank being suctioned and fixed on the fixing base of Figure 3. FIG. In FIGS. 3 and 4, after positioning the slider blank 8 by applying it to the stepped part of the fixed base 2, loosen the adjustment screw 5 shown in FIG. , the volume of the oil sealed part of the oil pipe 4 is expanded, and the oil 1 sealed in the oil pipe 4 is expanded as shown in FIG.
Leads 0 downward. At this time, the diaphragm 3 made of a highly elastic film such as silicone rubber is sucked downward and becomes depressed. Therefore, the inside of the cavity 9 becomes a negative pressure, and the slider blank material 8 is sucked and fixed. In this state, the cutting grindstone 11 is used to cut the slider blank material 8 to the width of the slider 8a using the grindstone escape groove 6, and a groove 8d is provided in each slider 8a using the grooving grindstone 12. FIG. 5 is a plan view showing a state in which the slider blank material 8 is suctioned and fixed to the fixing base 2 of the polishing jig 19, and FIG.
FIG. 3 is a cross-sectional view showing a method of polishing the slider air bearing surface using the polishing jig 19 shown in the figure. As shown in FIG. 5, slider blanks 8 are fixed at three equally spaced positions among the six fixed pedestals 2. Next, the polishing jig 19 is turned downward, the support hole 7 is supported by the spherical support part 13a at the end of the support arm 13, the polishing jig is placed on the lamp surface plate 14, and the slider blank material 8 is lapped. It is applied to the surface of the board 14, and a slurry of a lapping material such as aluminum oxide or silicon carbide mixed with a working fluid such as light oil or spindle oil is injected from the nozzle 15, and the two are moved relative to each other to finish the work. When the lapping surface plate 14 is rotated, the polishing jig 19 is rotated due to the difference in circumferential speed between the slider blank material 8 on the inner diameter side and the slider blank material 8 on the outer diameter side.
It rotates on its own axis. FIG. 7 is a plan view of a polishing jig used in the polishing method according to the second embodiment of the present invention, and FIG. 8 is a sectional view showing the method of polishing the sloped surface of a slider according to the embodiment of the present invention. In FIGS. 7 and 8, slider blanks 8 are placed on the fixed pedestals 2 at three equally spaced locations among the six fixed pedestals.
to be fixed. In this state, the slider air bearing surface 8b is polished as shown in FIG. Next, a dummy strip 17 that is thicker than the slider blank 8 is fixed to a fixed pedestal at a position facing an arbitrary slider blank 8. The thickness of the dummy strip 17 is determined by the angle of the target slider slope 8C and the distance between the slider blank 8 and the dummy strip 17. At this time, a sufficient distance is provided between the fixed pedestals 2 so that the other two slider blanks 8 are not interfered with. The method of polishing the slider blank material 8 is the same as that shown in FIG. In this way, the inclined surface 8 of the slider blank material 8
After machining C, all the inclined surfaces 8C of the other two slider blanks 8 are polished. Above, we have described a polishing jig equipped with fixing jigs divided into six equal parts on the outer peripheral surface of a cylindrical base plate.
In the case of equal division, the polishing surface can be determined by the fixed pedestals 2 at three locations, so six fixed pedestals are sufficient, but for a polishing jig equipped with a fixing jig divided into 10 or 14 equal parts. Also, the flying surface and inclined surface of the slider can be processed in the same way. In that case, it is necessary to provide sufficient space so that the slider blank material 8 is not interfered with. When removing the slider from the fixed base 2 after polishing the slider floating surface 8b and slider inclined surface 8C,
The adjusting screw 5 is adjusted to reduce the volume of the oil pipe line 4, the diaphragm 3 is returned to its original position, the cavity 9 is applied with positive pressure, and the machined slider 8a is taken out from the fixed base 2.

【Effect of the invention】

According to claim 1, the present invention includes a cavity and a diaphragm in a plurality of fixed pedestals arranged on a pedestal. Slider blanks can be easily and accurately fixed using oil pipes and adjustment screws. Furthermore, you can add and cut miso while the slider is fixed to the fixed base. Furthermore, the slider blank material can be fixed to the fixed pedestals at positions equally distributed over half of the entire fixed pedestal, and the slider air bearing surface can be polished using a lapping machine with the polishing jig facing downward. Since the slider blank material can be quickly attached and removed in this way, the setup time can be significantly shortened and the cleaning process can also be simplified. Also, use the same jig to insert and cut the slider. Since the entire air bearing surface can be polished, a machining reference surface is always ensured and machining accuracy can be improved. According to claim 2, the slider blank material is fixed to a fixed pedestal at a position that equally divides the outer periphery of the pedestal into half of the plurality of fixed pedestals arranged on the pedestal, and Attach a dummy strip that is thicker than the slider blank to the slider blank, and with the fixed base facing downward, polish the sloped surface of the end of the slider blank using a ramp board. In this way, the flying surface of the slider as well as the inclined surface can be polished. Therefore, the processing time for the slider can be significantly shortened compared to the conventional method, and all the polishing operations can be performed on the same jig, so that the processing reference surface is always secured and processing accuracy can be improved.

[Brief explanation of the drawing]

FIG. 1 is a plan view of a polishing jig for a magnetic head slider according to an embodiment of the present invention, FIG. 2 is an enlarged perspective view showing a fixing base of the polishing jig shown in FIG. 1, and FIG. 4 is an enlarged sectional view showing a state in which the slider blank is fixed to the fixing base of the jig, FIG. 5 is the same as in FIG. 1 FIG. 6 is a sectional view showing a method of polishing the slider air bearing surface using the polishing jig shown in FIG. A plan view showing a slider blank material and a dummy strip fixed to a polishing jig used in the polishing method, FIG. 8 is a cross-sectional view showing a method for polishing a slider inclined surface according to an embodiment of the present invention, and FIG. 9 is a conventional one. FIG. 10 is a plan view of a polishing jig for a magnetic head slider, FIG. 10 is a structure showing a method of polishing the slider air bearing surface using the polishing jig shown in FIG. 9, and FIG. 11 is a perspective view of the slider. I: Base plate, 2: Fixed pedestal, 3: Diaphragm, 4: Oil pipe, 5: Adjustment screw, 6: Grinding wheel relief, 8 Nislider blank material, 8a Nislider, 8b Nislider - floating surface, 8b Nisli' DA1 slope, 8d: Groove, 9: Cavity, 14: U, surface plate, 17: Dummy strip, 19:
Polishing jig. Figure 9, ]3 Figure 10 - Dimensions) ” r〈〉 City - Ward

Claims (1)

[Scope of Claims] 1) A plurality of fixed pedestals arranged near the outer periphery of a cylindrical pedestal at positions that equally divide the periphery of the pedestal into two times an odd number of 3 or more; A slider blank fixing surface provided on each fixing pedestal, a plurality of cavities bored in the slider blank fixing surface, a diaphragm that closes the cavities, an oil pipe line communicating with the cavities, and an oil pipe line in the oil pipe line. A polishing jig for a magnetic head slider, characterized in that it is provided with an adjustment screw for adjusting the volume of the oil sealing part, and a plurality of grindstone escape grooves that match the pitch when cutting the slider carved in the fixed base. 2) Of the plurality of fixing pedestals of the magnetic head slider polishing jig according to claim 1, the slider blank material to be polished is fixed to the fixing pedestal at a position where the pedestal is equally divided into half, and A dummy strip thicker than the slider blank material is attached to one of the fixed pedestals facing the fixed pedestal to which the slider blank material is fixed, and the slider inclined surface is polished using a lapping machine with the pedestal facing downward. Features a magnetic head slider polishing method.