JPS59142776A - Negative pressure slider and its manufacture - Google Patents

Abstract

PURPOSE:To easily manufacture a negative slider which has a negative pressure generation part with a precise step without employing conventional method such as ion etching by fixing two individually machined members together and constituting the negative pressure slider. CONSTITUTION:The negative pressure slider consists of slider pieces 10 and 20, and surfaces 11' and 21' are ground by a surface grinding machine and lapped by a lapping machine to obtain flat surfaces. Similarly, fixation surfaces 12 and 22 are also worked into flat surfaces. A chamfered part 13 for forming a glass bank is worked in the slider piece 10 and a groove part 23 is worked in the center of the slider piece 20 to form a side rail surface 21. The groove part 23 is formed by forming a groove 24 except on side rail surfaces 21 on both sides by a grinding machine, and grinding and polishing a projection part 25 in the center. The slider pieces 10 and 20 machined as mentioned above are welded together with glass on the fixation surfaces 11 and 12 and then a cross rail surface 11 and side rail surfaces 21 are lapped by the lapping machine.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a negative pressure slider and a method for manufacturing the same, and more particularly to a slider for a floating magnetic head having a negative pressure generating region and a method for manufacturing the same.

In a large-capacity magnetic disk drive used as an external storage device for a computer, when the disk is stationary, the magnetic slider and the disk come into contact, and the disk begins to rotate, causing the stone to rotate. Contact start-stop method (CSS method) in which pressure is generated by air as a viscous fluid, and in a steady rotation state, a constant flying height is achieved by the combination of this pressure and the load applied to the magnetic Radoslider. is used.

In recent years, as recording densities have increased, it has become necessary to reduce the amount of exudation, but in order to achieve this with the conventional magnetic rad slider, it is necessary to increase the load. However, if the load applied to the magnetic RAD slider is increased, the magnetic RAD slider is strongly pressed against the disk when the disk is stationary, so there is a risk of damaging the magnetic head or the disk when the disk is started.

A negative pressure slider has been introduced as a method to avoid such risks. As shown in Fig. 1, this negative pressure slider consists of a sight rail section 2 provided on both sides, a cross rail section 1 provided at the front of the slider, and a stepped section (negative pressure generating section) surrounded by them. 3, and a magnetic head 4 provided at the rear of both site rail sections 2, the cross rail section 1. The sight rail section 2 generates a pressure (positive pressure) higher than atmospheric pressure, and the negative pressure generating section 3 generates a
It is configured to generate pressure (negative pressure) lower than atmospheric pressure. Therefore, in this negative pressure slider, since negative pressure is generated at the same time as positive pressure, the load applied from the outside can be extremely small.Furthermore, when the relative speed between the slider and the disk is small, the generation of positive pressure is relatively small. When the relative velocity between the slider and the disk is large, the generation of negative pressure becomes relatively large, so a stable low flying height can be obtained over a wide speed range.

However, in manufacturing a negative pressure slider, there is a problem in that a step difference of several μm in the negative pressure generating portion must be made with high precision. In the conventional method, after polishing the entire surface of the slider to form a uniform plane, a mask was formed on the cross rail portion and the sight rail portion, and a negative pressure generating portion was created by a method such as ion etching.

However, this method is undesirable from a cost standpoint, as it involves many complicated and difficult steps, including mask formation and removal, and requires a long time for etching.

SUMMARY OF THE INVENTION An object of the present invention is to eliminate the drawbacks of conventional negative pressure sliders and to provide a negative pressure slider having a negative pressure generating section with highly accurate steps without using methods such as ion etching.

Another object of the present invention is to provide a manufacturing method that can easily manufacture a negative pressure slider having a negative pressure generating section with highly accurate steps without using conventional methods such as ion etching.

According to the present invention, in a floating magnetic heliometer slider having a negative pressure generating region, a first member having a groove in the traveling direction of a magnetic recording medium and having surfaces facing the medium on both sides, and a portion facing the medium are provided. and a rectangular parallelepiped second member fixed to the first member, and a negative pressure generating portion is formed in the groove of the first member between the first member and the second member. A negative pressure slider is obtained.

According to the present invention, a method of manufacturing a floating magnetic RAD slider having a negative pressure generating region includes a first member and a second member having surfaces facing a magnetic recording medium, and the first member has a surface facing a magnetic recording medium. A method for manufacturing a negative pressure slider is obtained in which the member is provided with a groove in the traveling direction of the medium, and the second member is fixed to the member so that the groove portion serves as a negative pressure generating portion.

Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 2 shows an embodiment of the invention. In FIG. 2(a), an embodiment of the present invention has been machined to have a slider piece 10 before forming a cross rail surface 11 and a slider piece 20 before forming a sight rail surface 21. In FIG. The surface 11' of the slider piece 10 that becomes the cross rail surface 11 and the surface 21' that becomes the site rail surface 21 of the slider piece 20 are as follows:
After grinding with a surface grinder, it is lapped with diamond abrasive grains with a lapping machine to form a flat surface with a flatness of 0.05 μm. In the same way, the fixed surfaces 12 and 22 also have a flatness of 0.0.
Process into a 5 μm flat surface. Further, the surface 11' and the fixed surface 1
2 and the surface 21' and the fixed surface 22 form a right angle with a tolerance of ±0.5°.

The slider piece 10 and the slider piece 20 are machined as shown in FIG. 2(b). In FIG. 2(b), the slider piece 10 has a chamfered portion 13 forming a glass reservoir.
A groove 23 is machined in the center of the slider piece 20 to form a sight rail surface 21. If the groove 23 at the center of the slider piece 20 were directly ground during machining, the groove 23 would be formed in a cylindrical shape, which is not preferable as a negative pressure generation area. As a manufacturing method to solve this problem, as shown in FIG.
υ by a grinder, leaving the sight rail surfaces 21 on both sides of
A groove 24 with a width of 50 μm is created. The depth of the groove is approximately 1 μm deeper than the depth of the groove 23 at the center of the slider piece 20. Next, as shown in FIG. 3(b), the slider piece 20 is ground and polished to form a step of about 5 μm in the negative pressure generation area of the negative pressure slider.
Make it about 1 μm deep. By using such a manufacturing method, the negative pressure slider is formed with a central groove having a bottom surface with a highly accurate flatness. The slider piece 10 and the slider piece 20 which have been machined in this way are glass-welded at the fixing surface 11 and the fixing surface 12, as shown in FIG. 2 Φ). At this time, it is important to obtain a uniform thickness over the entire surface of the bonded part, but this can be easily achieved by using glass that has good fluidity at high temperatures. By the way, the level difference between the cross rail surface 11 of the slider piece 10 and the site rail surface 21 of the slider piece 20 when they are fixed is ±1 μm because the negative pressure generating area of the through-hole piece 20 is ground 1 μm deep. It is not technically difficult with a good tolerance. After the slider piece 10 and the slider piece 20 are fixed together in this way, the cross rail surface 11 and the sight rail surface 21 that come into contact with the medium are lapped with diamond abrasive grains in the lapping machine, so that the negative pressure generation area 23 is It is wrapped so that a predetermined level difference is formed, and the cross rail surface 11 and the sight rail surface 21 have a flatness of 0.05 μm. Further, the slider is subjected to necessary processing, for example, the inclined surface 13' shown in FIG. 2(b), to form a negative pressure slider as shown in FIG. 2(c).

In this negative pressure slider, the step in the negative pressure generation area is
Accurate values with a tolerance of ±0.1 μm can be obtained for a given level difference, and the flatness of the negative pressure generating surface is 0.05 μm.
A flat surface can be obtained, and an ideal negative pressure generation area can be formed.

As explained above, the present invention utilizes a method for manufacturing a negative pressure slider in which a slider having a cross rail portion and a slider portion having a sight rail portion are fixedly attached to each other. A pressure slider can be obtained.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing a conventional negative pressure slider, and FIGS. 2 and 3 are diagrams showing a method of manufacturing a negative pressure slider according to an embodiment of the present invention. 1...Cross rail part @), 2...Sight rail part ((g), 3...Negative pressure generating part, 4
...Magnetic head, 10.20...Slider piece, 11.11'...Cross rail surface, 1
2, 22... Fixed surface, 13... Chamfered part, 131... Slanted part, 21... Sight rail surface, 21'... ... face, 23...
Groove portion (negative pressure generation area λ24...Groove, 25...
...Grinding section. 1 fat ξ 2θ biri (3 cuts of Toji Kaya)

Claims (2)

[Claims] (1) A floating magnetic RAD slider having a negative pressure generation area, which has a groove in the traveling direction of the magnetic recording medium, a first member having surfaces facing the medium on both sides, and a portion facing the medium; It has a rectangular parallelepiped second member fixed to the first member, and the first member and the second member form a negative pressure generating part in the groove of the first member. negative pressure slider. (2) A method for manufacturing a floating magnetic RAD slider having a negative pressure generating region, comprising a first member and a second member each having a surface facing a magnetic recording medium, and the first member has a surface facing the magnetic recording medium. A method for manufacturing a negative pressure slider, characterized in that a groove is provided in the traveling direction of the medium, and the second member is fixed so that the groove portion serves as a negative pressure generating portion.