JPH07171765A - Grinding solution filling auxiliary tool and grinding solution filling method - Google Patents

Abstract

PURPOSE:To machine a section to a high-precision flatness by feeding a grinding solution efficiently to a grinding point in the cutting and recessing of hard-to-cut material such as ceramics by a peripheral cutting edge type grinder. CONSTITUTION:A grinding solution filling auxiliary tool 3 with a decompression part 6 is provided in the vicinity of a peripheral cutting edge type grinding wheel 1 in such a way as to insert the peripheral cutting edge type grinding wheel 1 therein, and a grinding solution is filled from a grinding solution lead-in part 7 through the decompression part 6. The grinding solution can be thereby fed efficiently being hardly impeded by an air layer 8 of positive pressure near the peripheral cutting edge type grinding wheel 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an external storage device for a computer, a grinding process such as cutting and grooving of a magnetic head used mainly in a fixed magnetic disk device, or a cutting and grooving process of difficult-to-cut materials such as ceramics. The present invention relates to a grinding fluid injection aid used for grinding and the like and a grinding fluid injection method.

[0002]

2. Description of the Related Art Processing of a thin film magnetic head will be described below as an example.

In recent years, the use of thin film magnetic heads has been increasing more and more in order to cope with higher recording density in magnetic disk devices which are external storage devices for computers. Along with this, the development of high-precision machining technology has become an urgent task.

FIG. 3 shows a perspective view of a thin film magnetic head. Further, FIG. 4 shows an enlarged cross section taken along the line AA of FIG. In the manufacture of such a thin film magnetic head, a plurality of thin film magnetic head element portions 10 are formed on a substrate 9, and then a plurality of element unit blocks are cut using an outer peripheral grindstone. After that, the air floating surface 11 is polished, and this is cut into individual thin film magnetic heads.

In the production of such a thin film magnetic head, the portion which requires particularly high precision processing is the gap depth dimension 12 shown in FIG.

The gap depth dimension 12 is regulated by polishing the air floating surface 11. A specific example is shown in FIG.
Will be explained. As shown in the figure, a block 14 having a plurality of elements is adhered to a jig 15 which is processed with high precision, and the air floating surface 11 of the block is processed.

However, the bonding surface of the block 14 to the jig 15 has a poor flatness due to the undulation when the outer peripheral blade grindstone 1 cuts the block 14, and when the bonding is performed,
As a result, the distance 16 from the bottom surface of the jig 15 to the APEX 13, which is the starting point of the gap depth shown in FIG. 4, is different for each element. Therefore, even if the processing is performed with high accuracy, the gap depth dimension 12 of each element in the block 14 has variations. To correct this, it is necessary to improve the flatness of the cutting surface in block cutting, but in cutting with the outer peripheral blade, the amount of grinding fluid supplied to the grinding point during processing is important, and due to this shortage, the cutting surface The accuracy may deteriorate. In the conventional technique, a method of increasing the flow rate and flow velocity of the grinding fluid was used. However, during processing, the grindstone rotates at high speed (for example, 10,000
~20,000min ^-1) to which Therefore, positive pressure of the air layer 8 is generated in the grinding wheel near as illustrated in FIG. 6, also inhibited the air layer in an attempt to inject a grinding fluid to the grinding point 2 However, there was a problem that it was not possible to inject the liquid sufficiently.

[0008]

As described above, in the conventional processing of the thin film magnetic head, since the sufficient grinding liquid is not supplied, the undulation of the block caused by the deterioration of the flatness of the cutting surface at the time of the cutting processing by the outer peripheral blade grindstone. High precision machining is difficult due to
There is a problem that the gap depth size of the head element in the block varies.

The present invention solves the above problems.
The purpose is to be able to cut the flatness of the cut surface well.

[0010]

In order to solve the above-mentioned object, in the present invention, an auxiliary tool for pouring a grinding fluid is provided in the vicinity of an outer peripheral edge grinding wheel of an outer peripheral edge type grinding machine to efficiently inject a grinding point. By doing so, it is intended to improve the flatness of the cut surface.

[0011]

According to the present invention, since the cut surface can be cut with good flatness, if applied to the processing of a thin film magnetic head, the block cut surface can be processed with good flatness, so that the position of the block can be accurately regulated. The gap depth dimensions of all the elements in the block can be regulated with high accuracy.

[0012]

EXAMPLE An example of the present invention will be described below.

FIG. 1 is a schematic view showing an embodiment of the present invention. In this, a grinding fluid injection assisting tool 3 is arranged in the vicinity of a grinding point 2 in the vicinity of the outer peripheral blade grindstone 1. A schematic diagram of the grinding fluid injection assisting tool 3 is shown in FIG. 2. As shown in the figure, the grinding fluid injection assisting tool 3 introduces the grinding fluid into the air inflow section 4, the air compression section 5, and the decompression section 6. It is configured by the introduction unit 7.

The operation of this embodiment constructed as described above will be described.
Therefore, description will be made below with reference to FIGS. First, Figure 1 and Figure
As shown in 2, inject grinding fluid so as to pinch the periphery of the grinding wheel 1
The auxiliary tool 3 is arranged. High-speed rotation of the peripheral edge grinding wheel 1 (10,
000 to 20,000 min ^-1) Of the positive pressure
The air layer 8 assists the injection of grinding fluid as the outer peripheral blade 1 rotates.
It collides with the air inflow part 4 of the tool 3. At this time, the air layer 8
The part is peeled off from the vicinity of the outer peripheral blade grindstone 1. Also, the rest
The further air layer 8 flows in from the air inflow part 4. This air
Layer 8 is compressed in air compression section 5 and then opened in decompression section 6.
Therefore, the grinding fluid introducing section 7 is connected to the depressurizing section 6 which is depressurized.
If the grinding fluid is injected, most of the air layer 8 will be
Being peeled from the vicinity of the peripheral whetstone 1 and the remaining
Since the air layer 8 is also decompressed by the decompression unit 6, the air layer
Efficiently reach the grinding point 2 without being disturbed by 8
can do. At this time, the air inflow part 4, the air compression part
The decompression unit 6 and the decompression unit 6 are arranged as shown in FIG.
The gap between the outer peripheral edge grinding wheel 1 and the outer peripheral blade 5 is the air inflow part 4, the pressure reducing part 6
Gap that is sufficiently smaller than the gap of
Needs to be larger than the gap of the air inflow part 4.
is there. In addition, these have a small surface roughness and are integrated without steps.
It is preferable to manufacture it with a thing, and the movement of the outer peripheral blade grindstone 1 etc.
External to the object, for example, fixed more firmly than the grindstone shaft housing
As a result, a predetermined effect can be obtained.

Explaining an application example of the present invention, for example, in the processing of a thin film magnetic head, when the thin film head substrate is cut, the peripheral edge grindstone 1 has a plate thickness of, for example, 0.5 mm or less. Since the depth is 3 mm or more and the outer peripheral blade grindstone 1 is rotating at a high speed, the amount of the grinding liquid reaching the grinding point 2 inside the substrate 9 is obstructed by the positive pressure air layer 8 and the like. It is very small compared to the supply amount, so that it causes clogging of the outer peripheral edge grinding wheel 1, deterioration of grindability such as spillage, and causes deterioration of cutting surface accuracy such as cutting surface flatness and deterioration of cutting surface due to generation of grinding heat. However, according to the present embodiment, since the grinding liquid can be efficiently supplied up to the grinding point, it is possible to prevent deterioration of the cutting surface accuracy and deterioration of the cutting surface.

In the present embodiment, the thin film magnetic head processing has been described as an example. However, when the thin blade outer peripheral blade grindstone 1 is used at high speed, cutting or grooving of a difficult-to-cut material such as ceramics or the outer peripheral blade grindstone 1 is performed. It is possible to adapt even when grinding a flat surface.

[0017]

According to the present invention, it is possible to prevent the grindability of the grindstone from deteriorating in the cutting process of the difficult-to-cut material and process the flatness of the cut surface with high accuracy. In addition, it can be expected that the work-affected layer caused by the grinding heat of the ground surface and the like can be reduced. By applying the present invention to the processing of a magnetic head, for example, the gap depth dimension of a thin film magnetic head or the like can be regulated with high accuracy and with little variation.

[Brief description of drawings]

FIG. 1 is a schematic view showing a grinding fluid injection assisting tool according to an embodiment of the present invention.

FIG. 2 is a sectional view showing a grinding fluid injection assisting tool according to an embodiment of the present invention.

FIG. 3 is a perspective view showing a thin film magnetic head.

FIG. 4 is an enlarged cross-sectional view taken along the line AA of the thin film magnetic head.

FIG. 5 is a perspective view of a method of processing a thin film magnetic head.

FIG. 6 is a schematic view of a conventional grinding fluid injection method.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Peripheral blade grindstone 2 Grinding point 3 Grinding liquid injection aid 4 Air inflow part 5 Air compression part 6 Decompression part 7 Grinding liquid introduction part 8 Air layer 9 Substrate 10 Thin film magnetic head element part 11 Air floating surface 12 Gap depth dimension 13 APEX 14 blocks 15 jigs 16 distances

Claims (2)

[Claims] 1. A grinding fluid injection assisting tool, which is installed in such a manner that a grindstone is sandwiched in the vicinity of a peripheral edge grindstone in a process of cutting and grooving using the outer peripheral edge grindstone, which occurs in the outer peripheral edge grindstone. An inflow part for inflowing air, and a pressurizing part for pressurizing the air entering the inflow part between the outer peripheral blade grindstone,
A grinding fluid injection assisting tool, comprising: a decompression section for decompressing the air pressurized by the pressure section with the outer peripheral blade grindstone, and a supply port for supplying a grinding fluid to the decompression section. 2. A grinding fluid pouring method, characterized in that a positive pressure air flow generated in the vicinity of the outer peripheral blade grindstone is compressed and released to reduce the pressure and pouring the grinding fluid into the depressurized portion.