JPH03269228A - Magnetostriction detector - Google Patents
Magnetostriction detectorInfo
- Publication number
- JPH03269228A JPH03269228A JP2069037A JP6903790A JPH03269228A JP H03269228 A JPH03269228 A JP H03269228A JP 2069037 A JP2069037 A JP 2069037A JP 6903790 A JP6903790 A JP 6903790A JP H03269228 A JPH03269228 A JP H03269228A
- Authority
- JP
- Japan
- Prior art keywords
- magnetostrictive
- magnetostriction
- film
- metal
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims abstract description 26
- 229910052751 metal Inorganic materials 0.000 claims abstract description 26
- 239000000843 powder Substances 0.000 claims abstract description 11
- 238000007747 plating Methods 0.000 claims description 23
- 238000001514 detection method Methods 0.000 claims description 14
- 239000002245 particle Substances 0.000 claims description 5
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 4
- 230000035699 permeability Effects 0.000 abstract description 4
- 230000003247 decreasing effect Effects 0.000 abstract 2
- 239000000463 material Substances 0.000 description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 12
- 239000007769 metal material Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 6
- 229910052759 nickel Inorganic materials 0.000 description 6
- 238000003756 stirring Methods 0.000 description 6
- 238000009499 grossing Methods 0.000 description 5
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 4
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 4
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 3
- 239000004327 boric acid Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 3
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- QXZUUHYBWMWJHK-UHFFFAOYSA-N [Co].[Ni] Chemical compound [Co].[Ni] QXZUUHYBWMWJHK-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- Measuring Magnetic Variables (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁歪検出器に関し、特に回転体シャフトに磁歪
金属をメッキすることにより磁歪膜に生じる磁歪を検出
することによりＩ−ルクを検出するトルク検出器に関す
る。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a magnetostrictive detector, and particularly to a magnetostrictive detector that detects I-luke by detecting magnetostriction generated in a magnetostrictive film by plating a rotating body shaft with magnetostrictive metal. Regarding torque detectors.
（従来の技術）
従来、シャフトに磁歪金属をメッキすることにより磁歪
膜に生じる磁歪を検出する技術としては特開昭５９−−
１６４９３１号公報があった。この技術は回転体シャツ
Ｉ・に磁歪金属をメッキすることにより磁歪膜を形成し
、該磁歪膜に生じる磁歪を検知してシャフトに加わるト
ルクを検出するものである。すなわち印加されるトルク
に応じて回転体シャフトが捩じれると、それに応じで磁
歪膜に生じる磁歪が変化するので、これを検出してトル
クの大きさを検出しうるものである。(Prior art) Conventionally, a technique for detecting magnetostriction generated in a magnetostrictive film by plating a shaft with magnetostrictive metal was disclosed in Japanese Patent Application Laid-open No. 59--
There was Publication No. 164931. In this technique, a magnetostrictive film is formed by plating a magnetostrictive metal on the rotating body shirt I, and the torque applied to the shaft is detected by detecting the magnetostriction generated in the magnetostrictive film. That is, when the rotating body shaft is twisted in accordance with the applied torque, the magnetostriction generated in the magnetostrictive film changes accordingly, and by detecting this, the magnitude of the torque can be detected.
（発明が解決しようとする課題）
しかしながら、この技術においての磁歪金属としては、
ニッケルメッキが使用されているが、これにより得られ
るトルク検出感度は極めて低く、決して満足いくものと
はいえなかった。(Problem to be solved by the invention) However, as a magnetostrictive metal in this technology,
Nickel plating is used, but the torque detection sensitivity obtained with this is extremely low and could not be said to be satisfactory.
本発明は上記の課題を解決したものであり、従来の磁歪
金属としてのニッケルメッキによるトル（１）
（２）
り検出器と比較して検出感度が高い磁歪作用によるトル
ク検出器を提供することを目的とする。The present invention solves the above problems, and provides a torque detector using magnetostrictive action that has higher detection sensitivity than conventional torque detectors using nickel plating as magnetostrictive metal. With the goal.
（課題を解決するための手段）
木目的を達成するため、本発明が講した技術的手段は、
磁歪金属をメッキすることにより形成した磁歪膜に生じ
る磁歪を検出する磁歪検出回路を備えた磁歪検出器にお
いて、Ｐｒ２Ｏ１７、Ｔｂ２Ｃｏ１７、ＳｍＦｅ２、Ｔ
ｂＦｅ２ 、ＴｂＮｉ０．４ Ｆｅ１．５、ＴｂＦｃ２
等の超磁歪金属を粉末状にして前記磁歪金属に含有させ
ものである。また、前記超磁歪金属をメッキ溶液１リツ
トルあたり２〜３０ｇ含有させるとよい。(Means for solving the problem) In order to achieve the object, the technical means taken by the present invention are as follows:
In a magnetostrictive detector equipped with a magnetostrictive detection circuit that detects magnetostriction generated in a magnetostrictive film formed by plating magnetostrictive metal, Pr2O17, Tb2Co17, SmFe2, T
bFe2, TbNi0.4 Fe1.5, TbFc2
A giant magnetostrictive metal such as the following is made into powder and contained in the magnetostrictive metal. Further, it is preferable that 2 to 30 g of the giant magnetostrictive metal be contained per 1 liter of the plating solution.
さらに、前記超磁歪金属の粉末の粒径が１０μｍ以下に
させるとよい。Furthermore, it is preferable that the particle size of the giant magnetostrictive metal powder is 10 μm or less.
（作用）
」二記の手段からなる本発明は、従来のニッケルメツ４
−による磁歪金属の検出器の検出感度と比較して、検出
感度が極めて高い磁歪作用によるトルク検出器が得られ
るのである。(Function) The present invention, which consists of the following two means,
It is possible to obtain a magnetostrictive torque detector with extremely high detection sensitivity compared to the detection sensitivity of a magnetostrictive metal detector based on -.
（実施例） 以下、本発明の一実施例を図面を参照にして説明する。(Example) An embodiment of the present invention will be described below with reference to the drawings.
第１図において、回転体シャフト１ （このシャフトは
、例えば自動車のトランスミツシーノン出力シャフト、
ステアリングシャフトあるいはモータ等の出力シャフト
あるいはモータ等の出力シャフト等である）に、後述す
る本発明の磁歪金属に超磁歪金属が含有された材料をメ
ッキすることにより形成した磁歪膜２がシャフト１の全
周に渡り、配される。さらに、シャフト１には２個のコ
イルが筒状に巻回され、コイル３が励振用コイル３にば
、励振用発振器５が接続されている。また、出力コイル
４には、ダイオード６、コンデンサ７、抵抗８よりなる
平滑回路９が接続されている。In FIG. 1, a rotating body shaft 1 (this shaft is, for example, a transmission non-output shaft of an automobile,
A magnetostrictive film 2 formed by plating a magnetostrictive metal of the present invention, which will be described later, with a material containing a giant magnetostrictive metal is applied to the shaft 1 (such as a steering shaft or an output shaft of a motor, etc.). Distributed all around. Furthermore, two coils are wound around the shaft 1 in a cylindrical shape, and the excitation oscillator 5 is connected to the excitation coil 3 . Further, a smoothing circuit 9 consisting of a diode 6, a capacitor 7, and a resistor 8 is connected to the output coil 4.
この回路において、シャフト１にトルクが加わわらない
状態では、発振器５により生じるコイル３の磁界が、出
力用コイル４に伝達されて、これが平滑回路９により、
直流電圧に変換されて所定電圧が出力される。In this circuit, when no torque is applied to the shaft 1, the magnetic field of the coil 3 generated by the oscillator 5 is transmitted to the output coil 4, and this is transmitted to the output coil 4 by the smoothing circuit 9.
It is converted into a DC voltage and a predetermined voltage is output.
（３）
（４）
次に、シャフト１にトルクが加わり、シャフト１が捩じ
れると、磁歪膜２の透磁率が変化するが、後述する本磁
歪材料はニッケルを主成分としており、ニッケルは負の
磁歪効果を有するため、捩じれに対して透磁率が増大し
、出力電圧が減少する。(3) (4) Next, when torque is applied to the shaft 1 and the shaft 1 is twisted, the magnetic permeability of the magnetostrictive film 2 changes, but this magnetostrictive material, which will be described later, has nickel as its main component, and nickel has a negative Because it has a magnetostrictive effect, the permeability increases with twisting and the output voltage decreases.
ゆえに、トルクに応じた出力電圧（本磁歪材料の場合、
上記の如く傾きは負となる）が平滑回路９の出力端に得
られる。Therefore, the output voltage according to the torque (in the case of this magnetostrictive material,
As mentioned above, the slope is negative) is obtained at the output end of the smoothing circuit 9.
なお、この構造においては、シャツＩ−１の捩じれ方向
の判別はできず、どちらの捩じれに対しても同等の出力
電圧が得られる。Note that in this structure, it is not possible to determine the direction in which the shirt I-1 is twisted, and the same output voltage can be obtained for either twist.
次に、磁歪膜の形成方法について説明する。Next, a method for forming a magnetostrictive film will be explained.
まず、−１１ｕの磁歪材料としてはその磁歪定数（飽和
磁歪）がニッケルのそれは約−３３付近にあり、鉄は約
−９付近にあり、またニッケルーコバルト合金も約−２
３〜−３３付近にある。First, as for -11u magnetostrictive materials, the magnetostriction constant (saturation magnetostriction) of nickel is around -33, iron is around -9, and nickel-cobalt alloy is around -2.
It is around 3 to -33.
本発明はこれらの一般の磁歪材料からなるメッキ液に第
１表に示す金属材料を含有したことにある。これらの金
属材料は、超磁歪材料と呼ばれ、Ｐｒ２Ｏ１７．１”ｂ
２Ｃｏ１７ 、Ｓ ｍ Ｆｅ２、ＴｂＦｅ２、Ｔ ｂ
Ｎ ｉ Ｏ，４Ｆｅ１．５、ＴｂＦｅ２等であり、その
磁歪定数は一般の磁歪材料と比較して、その磁歪定数が
１けたあるいは２けた大きい材料である。The present invention consists in containing the metal materials shown in Table 1 in a plating solution made of these general magnetostrictive materials. These metal materials are called giant magnetostrictive materials, and Pr2O17.1"b
2Co17, S m Fe2, TbFe2, T b
These materials include N i O, 4Fe1.5, TbFe2, etc., and the magnetostriction constant thereof is one or two orders of magnitude larger than that of general magnetostrictive materials.
本発明はこれらの超磁歪材料を約１０μｍ以丁の粉末状
にする。このことは後述する磁歪材料をシャフトにメッ
キする膜厚は数１０μｍ厚であるため、粒子が１０μｍ
以」二であると膜厚表面よりその粒子が飛びでることが
あり、さらに、メッキ液を攪拌することが難しくなるた
めである。In the present invention, these giant magnetostrictive materials are made into a powder having a size of approximately 10 μm or less. This means that the thickness of the magnetostrictive material plated on the shaft, which will be described later, is several tens of micrometers thick, so the particles are 10 micrometers thick.
Otherwise, the particles may fly out from the surface of the film, and furthermore, it becomes difficult to stir the plating solution.
上記の粉末状の粒子を第２表に示す硫酸ニッケル、塩化
ニッケル、はう酸からなる純粋の水に含有させたメッキ
液１リツトルあたり２〜３０ｇを攪拌させて含有させる
。この攪拌方法はエアー撹拌、スクリュウ攪拌、ポンプ
攪拌のどの方法によってもよい。2 to 30 g of the above-mentioned powder particles are added to pure water containing nickel sulfate, nickel chloride, and phosphoric acid as shown in Table 2 per liter of the plating solution by stirring. This stirring method may be any one of air stirring, screw stirring, and pump stirring.
なお硫酸ニッケル、塩化ニッケル、ホウ酸の含有量は純
粋の純粋の水１リットルあたりの重量含有量である。The contents of nickel sulfate, nickel chloride, and boric acid are the weight contents per liter of pure water.
次に磁歪膜の形成方法としては、電解メッキが好ましい
。すなわち、無電解メッキでは膜厚が１（５）
（６）
０μｍ程度が限度であるのに対し、電解メッキでは数１
０μｍ〜２Ｏ０μｍと極めて厚く形成できるのである。Next, as a method for forming the magnetostrictive film, electrolytic plating is preferred. In other words, in electroless plating, the film thickness is limited to about 1 (5) (6) 0 μm, whereas in electrolytic plating, it is several 1 μm.
It can be formed extremely thick, from 0 μm to 200 μm.
ごの様にして形成された磁歪膜は、数１０μｍ厚でシャ
フトに強固に接着された結晶質磁歪膜となるので、機械
的にも熱的にも堅固で信頼性が極めて高い。The magnetostrictive film formed in this manner is a crystalline magnetostrictive film with a thickness of several tens of micrometers and firmly adhered to the shaft, so it is mechanically and thermally strong and extremely reliable.
実際に、シャフトに磁歪膜を形成するにば、シャツＩ・
の磁歪膜の不必要な部分にマスクをし、木磁歪浴に浴太
し、所定時間通電すればよい。Actually, in order to form a magnetostrictive film on the shaft, Shirt I
The unnecessary portions of the magnetostrictive film may be masked, placed in a wood magnetostrictive bath, and energized for a predetermined period of time.
次に、第２図に示すような斜線状に形成した磁歪膜にも
本磁歪材料が使用される。Next, the present magnetostrictive material is also used for a magnetostrictive film formed in a diagonal shape as shown in FIG.
シャフト１０には、適宜間隔を配して斜線状に形成した
磁歪膜１１．１２が形成されており、方の磁歪膜１１に
対し他方の磁歪膜１２はその斜線方向が逆になるべく形
成される。なお、この斜線時制膜のシャツ１−の軸方向
に対する傾斜角は、２つの磁歪膜１１．１２の傾斜角が
互いに逆方向に等しくなるようにすれば良いが、好まし
くは、第２図に示した如く、シャフトの軸方向に対し、
磁歪膜１１が一４５度、磁歪膜１２が＋４５度となるべ
く形成するのが適当である。Magnetostrictive films 11 and 12 are formed on the shaft 10 in the form of diagonal lines at appropriate intervals, and the direction of the diagonal lines in one magnetostrictive film 11 is opposite to that of the other magnetostrictive film 12 as much as possible. . The inclination angle of this diagonal tense film with respect to the axial direction of the shirt 1- may be set so that the inclination angles of the two magnetostrictive films 11 and 12 are equal and opposite to each other, but preferably, as shown in FIG. For the axial direction of the shaft,
It is appropriate to form the magnetostrictive film 11 at 145 degrees and the magnetostrictive film 12 at +45 degrees.
次に、磁歪検出回路１３は、前記磁歪膜１１および磁歪
膜１２にそれぞれ対向してシャフト１０に筒状に巻回さ
れた、巻数の同じコイル１４およヒコイル１５を含むマ
ルチハイブレーク回路と、コンデンサ１６で構成される
平滑回路でなる交流直流交換回路で構成しである。また
、スイッチング用トランジスタ１７．１８およびバラン
スａ周整用の可変抵抗器１９がそれぞれ、配されている
。Next, the magnetostrictive detection circuit 13 includes a multi-high break circuit including a coil 14 and a coil 15 having the same number of turns, which are wound in a cylindrical shape around the shaft 10 facing the magnetostrictive film 11 and the magnetostrictive film 12, respectively; It is composed of an AC/DC exchange circuit consisting of a smoothing circuit composed of a capacitor 16. Furthermore, switching transistors 17 and 18 and a variable resistor 19 for adjusting the balance a are provided, respectively.
次に動作を説明する。シャツＩ・１０にトルクが印加さ
れないときは、トランジスタ１７．１８が交互にオン、
オフを繰り返す。このときはトランジスタ１７を流れる
コレクタ（又はエミッタ）電流ｉｃｌとトランジスタ１
８を流れるコレクタ（又はエミッタ）電流ｉｃ２の最大
値が等しくなるように可変抵抗器１９を調整すると、出
力端の電圧ＥｄｃはＯＶとなる。Next, the operation will be explained. When no torque is applied to shirt I.10, transistors 17 and 18 are turned on alternately.
Repeat off. At this time, the collector (or emitter) current icl flowing through transistor 17 and transistor 1
When the variable resistor 19 is adjusted so that the maximum values of the collector (or emitter) currents ic2 flowing through the terminals 8 are equal, the voltage Edc at the output terminal becomes OV.
また、この電流ｉｃｌによりコイル１４が、電流ｉｃ２
によりコイル１５がそれぞれ交互に励磁される。Also, this current icl causes the coil 14 to receive current ic2
The coils 15 are alternately excited.
（７）
（８）
次に、シャフト１０にトルクが第２図Ａ方向に印加され
たとすると、磁歪膜１１はその斜線方向がシャツ１−１
０の軸方向−４５度の傾斜を有するため、磁歪膜１１に
は圧縮力が、また磁歪膜１２なは張力がそれぞれ作用す
る。(7) (8) Next, if torque is applied to the shaft 10 in the direction A in FIG.
Since it has an inclination of -45 degrees in the axial direction of 0, a compressive force acts on the magnetostrictive film 11, and a tension force acts on the magnetostrictive film 12, respectively.
ここで磁歪膜が負の磁歪効果を有するとすれば、透磁率
は磁歪膜１１で増大し、磁歪膜１２で減少する。ゆえに
、電流ｉｃｌが減少し、電流ｉｃ２が増大する。出力電
圧Ｅｄｃは、１ｃｌ−ｉｃ２に応じた電圧を平滑した直
流電流であり、これは、第３図に示すようにトルクＴに
比例して得られる。If the magnetostrictive film has a negative magnetostrictive effect, the magnetic permeability increases in the magnetostrictive film 11 and decreases in the magnetostrictive film 12. Therefore, current icl decreases and current ic2 increases. The output voltage Edc is a direct current obtained by smoothing a voltage corresponding to 1 cl-ic2, and is obtained in proportion to the torque T as shown in FIG.
ここで、シャフト１０の回転方向が逆になれば、上述し
た動作と逆の現象が各磁歪膜１１．１２に生じるため、
コイル１４とコイル１５のインダクタンスの大小関係が
逆転するので、正負のトルク検出が可能である。Here, if the rotational direction of the shaft 10 is reversed, a phenomenon opposite to the above-mentioned operation will occur in each magnetostrictive film 11, 12.
Since the magnitude relationship of the inductances of the coil 14 and the coil 15 is reversed, positive and negative torque detection is possible.
次に磁歪膜の形成方法は前述の構成のトルク検出器と同
様に第１表のニッケルメッキ液に、超磁歪金属材料を粉
末化して含有させたものをメッキ液としてメッキを行う
と、メッキの厚みが約５０μｍのものが得られた。Next, the method for forming the magnetostrictive film is as follows: plating is performed using the nickel plating solution shown in Table 1 as a plating solution containing a powdered giant magnetostrictive metal material, as in the case of the torque detector with the above-mentioned configuration. A material having a thickness of about 50 μm was obtained.
第４図が実際に用いられるマスクパターンである。この
マスクパターン４０を、シャツ１〜ＩＯに、図示Ｂ方向
に巻きつけてメッキすればよい。ここでは、磁歪膜の全
幅Ｘを２５ｍｍ、４５度に傾斜した斜線状磁歪膜の幅即
ち、マスクパターン４ｏの穴４１の幅ｙを２ｍｍ、間隙
Ｚを３ｍｍとしである。FIG. 4 shows the mask pattern actually used. This mask pattern 40 may be wrapped around the shirts 1 to IO in the direction B in the figure and plated. Here, the total width X of the magnetostrictive film is 25 mm, the width of the diagonal magnetostrictive film tilted at 45 degrees, that is, the width y of the hole 41 of the mask pattern 4o is 2 mm, and the gap Z is 3 mm.
以上の様にして磁歪膜を形成したシャフトは、残留磁気
および歪を除去するためにアニール処理される。アニー
ル条件としては、炉にて４５ｏ。The shaft on which the magnetostrictive film is formed as described above is annealed to remove residual magnetism and distortion. The annealing conditions were 45o in a furnace.
Ｃ１１時間程度が好ましい。About C11 hours is preferable.
このシャフトにコイルをそれぞれ巻回し、前記の磁歪検
出回路を接続すれば良い。A coil may be wound around each shaft and the magnetostriction detection circuit described above may be connected to the shaft.
実施■よ
第５図に前記条件にて形成されたトルク検出器の出力特
性を示す。メッキ条件は第１表の各条件であり、シャフ
ト径は８ｍｍ、各コイルの巻回数は共に５００ターン、
また、第５図の諸条件は電源電圧Ｖｃｃは９．ＯＶ、マ
ルチハイブレーク回路の発振周波数７．５ＫＨｚの条件
で行う。FIG. 5 shows the output characteristics of the torque detector formed under the above conditions. The plating conditions were as shown in Table 1, the shaft diameter was 8 mm, the number of turns of each coil was 500 turns,
Further, the conditions in FIG. 5 are that the power supply voltage Vcc is 9. OV, the oscillation frequency of the multi-high break circuit is 7.5 KHz.
（９）
（１０）
第２表に示すように純粋の水１リットル当たり３００［
、塩化ニッケル／１５ｇ、ホウ酸３５ｇが含有されたメ
ッキ液に、このメッキ液１リツトル当たり超磁歪金属材
料ＳｍＦｅ２を３ｇ含有されたメッキ液から得られた磁
歪膜による出力特性を測定する。(9) (10) As shown in Table 2, 300[
The output characteristics of a magnetostrictive film obtained from a plating solution containing 15 g of nickel chloride, 35 g of boric acid, and 3 g of giant magnetostrictive metal material SmFe2 per liter of the plating solution are measured.
災施桝Ｉ
次に上記と同じ条件下でＳｍＦｅ２を１０ｇ含有させた
メッキ液から得られた磁歪膜による出力特性を実施例１
と同一の条件下で測定する。Next, Example 1 shows the output characteristics of a magnetostrictive film obtained from a plating solution containing 10 g of SmFe2 under the same conditions as above.
Measured under the same conditions as.
比較例
さらに、Ｓ ｍ Ｆ ｅ２を含有しない従来のメッキ液
からなる磁歪膜による出力特性を上記と同一の条件下で
測定する。Comparative Example Furthermore, the output characteristics of a magnetostrictive film made of a conventional plating solution that does not contain S m Fe2 are measured under the same conditions as above.
第５図かられかるように、実施例１、実施例２の出力特
性は比較例と比較して、３〜５倍の値を示し、トルク検
出器として非常に満足のいくものである。As can be seen from FIG. 5, the output characteristics of Examples 1 and 2 are 3 to 5 times higher than those of the comparative example, and are very satisfactory as torque detectors.
なお上記に使用された超磁歪金属材料として、第１表に
示した材料に限定されるものでなく、ＤｙＦｅ２ 、Ｈ
ｏＦｅ２ 、ＥｒＦｅ２ 、ＴｍＦｅ２ 、ＣｏＦｅ２
Ｏ４等の超磁歪金属材料を使用できる。The giant magnetostrictive metal materials used above are not limited to those shown in Table 1, but include DyFe2, H
oFe2, ErFe2, TmFe2, CoFe2
Giant magnetostrictive metal materials such as O4 can be used.
また、本発明はトルク検出器について、説明したが、こ
れに限定されるものでなく、−１１１Ｗの圧力検出器に
も使用できる。Moreover, although the present invention has been described with respect to a torque detector, it is not limited thereto, and can also be used as a -111W pressure detector.
本発明は、磁歪金属をメッキすることにより形成した磁
歪膜に生じる磁歪を検出する磁歪検出回路を備えた磁歪
検出器において、Ｐ ｒ２Ｏ１７、Ｔｂ２Ｃｏ１７ 、
ＳｍＦｅ２、ＴｂＦｅ２ 、ＴｂＮｉ０．４ Ｆｅ１．
５、Ｔ ｂ Ｆ ｅ２等の超磁歪金属を粉末状にして前
記磁歪金属に含有したことからなる磁歪検出器であるた
め、検出感度が高く、精度のよい１〜ルク検出が可能と
なる。The present invention provides a magnetostrictive detector equipped with a magnetostrictive detection circuit that detects magnetostriction generated in a magnetostrictive film formed by plating magnetostrictive metal.Pr2O17, Tb2Co17,
SmFe2, TbFe2, TbNi0.4 Fe1.
5. Since the magnetostrictive detector is made by containing a giant magnetostrictive metal such as T b Fe2 in powder form in the magnetostrictive metal, the detection sensitivity is high and accurate 1 to 1 lux detection is possible.
第
表
第
表
硫酸ニッケル、塩化ニッケル、ホウ酸の含有量は水１
’Ｊツ（・ルあたりの重量含有量、超磁歪材料であるＳ
ｍＦｅ２はメッキ液１リツトルあたりの重量含有量。Table Table Contents of nickel sulfate, nickel chloride, and boric acid are water 1
'J Tsu(・Weight content per Le, S which is a giant magnetostrictive material
mFe2 is the weight content per liter of plating solution.
第１図は本発明の超磁歪金属材料を使用したＩ・ルク検
出器の実施例を示す図、第２図は本発明の超磁歪金属材
料を使用した別のトルク検出器を示す図、第３図は第２
図から構成されるトルク検出器の検出特性を示すグラフ
、第４図は第２図から構成されるトルク検出器の磁歪膜
を形成する際のマスクパターンを示す図、第５図は第２
図から構成されるトルク検出器において本発明の超磁歪
金属材料をそれぞれ３ｇ、１０ｇ含有さゼたものと、超
磁歪金属材料を全く含有させない場合の検出実験結果を
示す図。
■、１０・・・回転体シャフト、２．１１．１２・・・
磁歪膜（磁歪金属）、FIG. 1 is a diagram showing an example of an I-lux detector using the giant magnetostrictive metal material of the present invention, FIG. 2 is a diagram showing another torque detector using the giant magnetostrictive metal material of the present invention, and FIG. Figure 3 is the second
4 is a graph showing the detection characteristics of the torque detector constructed as shown in FIG.
The figure which shows the result of a detection experiment when the torque detector constructed as shown in the figure contains 3 g and 10 g of the giant magnetostrictive metal material of the present invention, respectively, and when the giant magnetostrictive metal material is not contained at all. ■, 10...Rotating body shaft, 2.11.12...
Magnetostrictive film (magnetostrictive metal),
Claims (3)
に生じる磁歪を検出する磁歪検出回路を備えた磁歪検出
器において、Ｐｒ２Ｏ１７、Ｔｂ２Ｃｏ１７、ＳｍＦｅ
２、ＴｂＦｅ２、ＴｂＮｉ０．４Ｆｅ１．５、ＴｂＦｅ
２等の超磁歪金属を粉末状にして前記磁歪金属に含有し
たことを特徴とする磁歪検出器。(1) In a magnetostrictive detector equipped with a magnetostrictive detection circuit that detects magnetostriction generated in a magnetostrictive film formed by plating magnetostrictive metal, Pr2O17, Tb2Co17, SmFe
2, TbFe2, TbNi0.4Fe1.5, TbFe
A magnetostrictive detector characterized in that a giant magnetostrictive metal of grade 2 is contained in powder form in the magnetostrictive metal.
３０ｇ含有させたことを特徴とする請求項１記載の磁歪
検出器。(2) 2 to 2 to 1 liter of the giant magnetostrictive metal per liter of plating solution
The magnetostrictive detector according to claim 1, characterized in that the magnetostrictive detector contains 30 g.
ることを特徴とする請求項１記載の磁歪検出器。(3) The magnetostrictive detector according to claim 1, wherein the particle size of the giant magnetostrictive metal powder is 10 μm or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2069037A JP2822556B2 (en) | 1990-03-19 | 1990-03-19 | Magnetostrictive detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2069037A JP2822556B2 (en) | 1990-03-19 | 1990-03-19 | Magnetostrictive detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03269228A true JPH03269228A (en) | 1991-11-29 |
| JP2822556B2 JP2822556B2 (en) | 1998-11-11 |
Family
ID=13390984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2069037A Expired - Lifetime JP2822556B2 (en) | 1990-03-19 | 1990-03-19 | Magnetostrictive detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2822556B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0817286A1 (en) * | 1996-07-01 | 1998-01-07 | General Motors Corporation | Magnetostrictive composites |
| US5907105A (en) * | 1997-07-21 | 1999-05-25 | General Motors Corporation | Magnetostrictive torque sensor utilizing RFe2 -based composite materials |
| US6779409B1 (en) | 1997-01-27 | 2004-08-24 | Southwest Research Institute | Measurement of torsional dynamics of rotating shafts using magnetostrictive sensors |
| US7131339B2 (en) | 1997-01-27 | 2006-11-07 | Southwest Research Institute | Measurement of torsional dynamics of rotating shafts using magnetostrictive sensors |
| JP2021155798A (en) * | 2020-03-26 | 2021-10-07 | 株式会社Ｕｓリサーチ | Method of producing alloy thin film, and alloy thin film |
-
1990
- 1990-03-19 JP JP2069037A patent/JP2822556B2/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0817286A1 (en) * | 1996-07-01 | 1998-01-07 | General Motors Corporation | Magnetostrictive composites |
| US6779409B1 (en) | 1997-01-27 | 2004-08-24 | Southwest Research Institute | Measurement of torsional dynamics of rotating shafts using magnetostrictive sensors |
| US7131339B2 (en) | 1997-01-27 | 2006-11-07 | Southwest Research Institute | Measurement of torsional dynamics of rotating shafts using magnetostrictive sensors |
| US5907105A (en) * | 1997-07-21 | 1999-05-25 | General Motors Corporation | Magnetostrictive torque sensor utilizing RFe2 -based composite materials |
| JP2021155798A (en) * | 2020-03-26 | 2021-10-07 | 株式会社Ｕｓリサーチ | Method of producing alloy thin film, and alloy thin film |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2822556B2 (en) | 1998-11-11 |
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