JPH0326321B2 - - Google Patents

Info

Publication number
JPH0326321B2
JPH0326321B2 JP58037017A JP3701783A JPH0326321B2 JP H0326321 B2 JPH0326321 B2 JP H0326321B2 JP 58037017 A JP58037017 A JP 58037017A JP 3701783 A JP3701783 A JP 3701783A JP H0326321 B2 JPH0326321 B2 JP H0326321B2
Authority
JP
Japan
Prior art keywords
light
polarizing beam
beam splitter
axis
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58037017A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59162405A (ja
Inventor
Toshitsugu Ueda
Eiji Ogita
Daisuke Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP58037017A priority Critical patent/JPS59162405A/ja
Publication of JPS59162405A publication Critical patent/JPS59162405A/ja
Publication of JPH0326321B2 publication Critical patent/JPH0326321B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02029—Combination with non-interferometric systems, i.e. for measuring the object
    • G01B9/0203—With imaging systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP58037017A 1983-03-07 1983-03-07 光学式機械量測定装置 Granted JPS59162405A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58037017A JPS59162405A (ja) 1983-03-07 1983-03-07 光学式機械量測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58037017A JPS59162405A (ja) 1983-03-07 1983-03-07 光学式機械量測定装置

Publications (2)

Publication Number Publication Date
JPS59162405A JPS59162405A (ja) 1984-09-13
JPH0326321B2 true JPH0326321B2 (enrdf_load_stackoverflow) 1991-04-10

Family

ID=12485893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58037017A Granted JPS59162405A (ja) 1983-03-07 1983-03-07 光学式機械量測定装置

Country Status (1)

Country Link
JP (1) JPS59162405A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0914914A (ja) * 1994-06-06 1997-01-17 Kishimoto Sangyo Kk レーザスペックルパターンによる移動量の測定装置におけるレーザ光の照射方法ならびにその装置
GB0803701D0 (en) 2008-02-28 2008-04-09 Statoilhydro Asa Improved interferometric methods and apparatus for seismic exploration
CN102359814B (zh) * 2011-07-04 2012-11-07 苏州舜新仪器有限公司 三维激光运动姿态测量系统及方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6441205A (en) * 1987-08-07 1989-02-13 Nec Corp Inductance element for microwave

Also Published As

Publication number Publication date
JPS59162405A (ja) 1984-09-13

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