JPH0326302B2 - - Google Patents

Info

Publication number
JPH0326302B2
JPH0326302B2 JP17219586A JP17219586A JPH0326302B2 JP H0326302 B2 JPH0326302 B2 JP H0326302B2 JP 17219586 A JP17219586 A JP 17219586A JP 17219586 A JP17219586 A JP 17219586A JP H0326302 B2 JPH0326302 B2 JP H0326302B2
Authority
JP
Japan
Prior art keywords
negative pressure
pressure
port
nozzle
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17219586A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6330675A (ja
Inventor
Katsuhiko Odajima
Hiroyuki Mikami
Motonari Ikehata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Priority to JP17219586A priority Critical patent/JPS6330675A/ja
Publication of JPS6330675A publication Critical patent/JPS6330675A/ja
Publication of JPH0326302B2 publication Critical patent/JPH0326302B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
  • Control Of Fluid Pressure (AREA)
JP17219586A 1986-07-22 1986-07-22 真空圧レギユレ−タ Granted JPS6330675A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17219586A JPS6330675A (ja) 1986-07-22 1986-07-22 真空圧レギユレ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17219586A JPS6330675A (ja) 1986-07-22 1986-07-22 真空圧レギユレ−タ

Publications (2)

Publication Number Publication Date
JPS6330675A JPS6330675A (ja) 1988-02-09
JPH0326302B2 true JPH0326302B2 (enrdf_load_stackoverflow) 1991-04-10

Family

ID=15937340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17219586A Granted JPS6330675A (ja) 1986-07-22 1986-07-22 真空圧レギユレ−タ

Country Status (1)

Country Link
JP (1) JPS6330675A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0298280U (enrdf_load_stackoverflow) * 1989-01-24 1990-08-06
US6056008A (en) * 1997-09-22 2000-05-02 Fisher Controls International, Inc. Intelligent pressure regulator

Also Published As

Publication number Publication date
JPS6330675A (ja) 1988-02-09

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