JPH03255887A - Shelf plate for calcination - Google Patents
Shelf plate for calcinationInfo
- Publication number
- JPH03255887A JPH03255887A JP2052826A JP5282690A JPH03255887A JP H03255887 A JPH03255887 A JP H03255887A JP 2052826 A JP2052826 A JP 2052826A JP 5282690 A JP5282690 A JP 5282690A JP H03255887 A JPH03255887 A JP H03255887A
- Authority
- JP
- Japan
- Prior art keywords
- shelf
- plate
- impurity
- calcined
- shelf plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001354 calcination Methods 0.000 title abstract 2
- 239000000919 ceramic Substances 0.000 claims abstract description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 13
- 238000010304 firing Methods 0.000 claims description 7
- 239000012535 impurity Substances 0.000 abstract description 6
- 238000001125 extrusion Methods 0.000 abstract description 3
- 239000011230 binding agent Substances 0.000 abstract description 2
- 229910010293 ceramic material Inorganic materials 0.000 abstract description 2
- 239000004014 plasticizer Substances 0.000 abstract description 2
- 239000002994 raw material Substances 0.000 abstract description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 3
- 229910052782 aluminium Inorganic materials 0.000 abstract 3
- 230000003628 erosive effect Effects 0.000 abstract 1
- 239000000314 lubricant Substances 0.000 abstract 1
- 239000000047 product Substances 0.000 description 16
- 239000000463 material Substances 0.000 description 10
- 239000000843 powder Substances 0.000 description 9
- 230000004927 fusion Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000005238 degreasing Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000011819 refractory material Substances 0.000 description 2
- 238000004901 spalling Methods 0.000 description 2
- 239000013585 weight reducing agent Substances 0.000 description 2
- 241000519995 Stachys sylvatica Species 0.000 description 1
- 235000015173 baked goods and baking mixes Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000006082 mold release agent Substances 0.000 description 1
- 210000000214 mouth Anatomy 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000011090 solid board Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Furnace Charging Or Discharging (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、電子工業部品等を載持して焼成する棚板の改
良に係る。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an improvement of a shelf board on which electronic industrial parts and the like are mounted and fired.
従来、電子工業部品等焼成用棚板としては、載持面が平
面状のアルミナ質耐火物が使用されているが、ムク板で
作られた棚板付耐火物の成分が載持焼成物に浸透して不
純物として悪影響を及ぼし、この影響を抑えるす場合に
は、棚板と載持焼成物の間に高純度アルミナセンターを
介在させ、更に、セッター上には敷粉を分散して棚板と
焼成物との接触、融着を防止している。Conventionally, alumina refractories with flat mounting surfaces have been used as shelves for firing electronic industrial parts, but the components of the refractories with shelves made of solid boards permeate into the fired products. In order to suppress this effect, a high-purity alumina center is interposed between the shelf board and the loaded fired material, and in addition, bedding powder is dispersed on the setter to prevent the shelf board and the fired material from forming. Prevents contact and fusion with fired products.
上記従来例に於いて、焼成物を棚板上に載持する方法は
、炉内処理等高温雰囲気に曝される場合には、棚板付耐
火物の成分が載持焼成物に浸透して不純物として悪影響
を及ぼす場合が多く、また、載持物との接触面積が大き
いため、融着現象が起こり、焼成物の表面に傷が生じ易
い。In the above conventional example, when the fired product is placed on a shelf, when exposed to a high-temperature atmosphere such as in a furnace, the components of the shelf-mounted refractory penetrate into the fired product and create impurities. In addition, since the contact area with the loaded object is large, a fusion phenomenon occurs, which tends to cause scratches on the surface of the fired product.
上記方法の改善策としての棚板と焼成物との間にセッタ
ーを介在させて、更にセンター上に敷粉を分散する方法
は、セッターの材質に高純度が要求されるためのコスト
が無視し得す、また繰り返し使用に限度があるために無
駄が多い。As an improvement to the above method, a method in which a setter is interposed between the shelf board and the fired product and the bedding powder is further dispersed on the center is negligible in cost because high purity is required for the material of the setter. However, since there is a limit to repeated use, there is a lot of waste.
同様に敷粉も繰り返し使用に限度があり、さらに、セン
ターをセントし、敷粉を均一に分散する工程の煩雑さも
、問題点として指摘されるため、棚板−セノターー敷粉
の組み合わせに代わる棚板が開発されるべきである。Similarly, there is a limit to the repeated use of bedding powder, and the complicated process of centering the center and dispersing the bedding powder evenly has also been pointed out as a problem, so a shelf as an alternative to the combination of shelf board, cenotar, and bedding powder has been pointed out. A board should be developed.
上記問題点を解決するために本発明では、純度99.5
%以上のアルミナセラミックスよりなり、肉厚部断面形
状が並列せる略三角形の中空部を有する板状体であって
、当該板状体の上・下面の少なくとも一面に対して、載
持する焼成物との接触面に凹凸部を形成した焼成用棚板
を開発した。In order to solve the above problems, the present invention has a purity of 99.5.
% or more of alumina ceramics, and has a substantially triangular hollow part in which the cross-sectional shapes of the thick portions are arranged in parallel, the fired product is placed on at least one of the upper and lower surfaces of the plate-shaped body. We have developed a baking shelf with uneven parts on the contact surface.
本焼成用棚板(1)はアルミナセラミックス材の純度を
99.5%以上とすることにより、棚板(1)そのもの
の耐熱性、耐蝕性を向上させることができると共に高温
および各種ガス雰囲気中での安定性が増し、棚板(1)
から載持焼成物への不純物の侵入も抑制することができ
る。The shelf board (1) for main firing is made of alumina ceramic material with a purity of 99.5% or more, so that the heat resistance and corrosion resistance of the shelf board (1) itself can be improved, and it can be used at high temperatures and in various gas atmospheres. Increased stability with shelves (1)
It is also possible to prevent impurities from entering the fired product.
また、本発明の焼成用棚板(1)は、中空構造(2)を
有する板状体で構成されるため、軽量化の要請に答え得
るとともに、熱容量の小さい省エネルギー型特性を保持
する。Moreover, since the baking shelf (1) of the present invention is composed of a plate-like body having a hollow structure (2), it can meet the demand for weight reduction and maintains energy-saving characteristics with a small heat capacity.
更に、上記中空構造(2)は略三角形の断面形状とする
ことにより耐クリープ性が高くなり、また中空構造を構
成するために棚板各部の肉厚が薄くなることにより、材
料として緻密なアルミナセラミックスを使用しているの
にも係わらず、割れ難く耐久ポーリング性が大きい。Furthermore, the hollow structure (2) has a substantially triangular cross-sectional shape, which increases creep resistance, and since the wall thickness of each part of the shelf board is thinner to form the hollow structure, dense alumina is used as the material. Despite using ceramics, it is hard to break and has great durability against poling.
言いかえれば、従来実現できなかった高純度アルミナセ
ラミックスで焼成用棚板を、初めて製造可能にした要件
、即ち、鐵密故に耐スポーリング性が劣る材質的問題点
の克服が、ムク板から中空構造体に代えることにより達
成された。In other words, the requirements that made it possible to manufacture firing shelves for the first time using high-purity alumina ceramics, which had not been possible in the past, were overcome, namely the material problem of poor spalling resistance due to iron density. This was achieved by replacing it with a structure.
また、棚板載持面に波形ひだ凹凸部(3)を設けること
により、載持焼成物との接触面積を低減して、棚板と載
持焼成物との融着現象を抑止し、敷粉の使用を回避し得
るようにすると共に、凹凸部(3)が焼成物との接触面
の間に空間を存在させるため、当該空間が焼成物の脱脂
作用を促進して焼成物の品質を高める。In addition, by providing the corrugated fold uneven portion (3) on the shelf board mounting surface, the contact area with the mounted fired product is reduced, suppressing the phenomenon of fusion between the shelf board and the mounted fired product, and In addition to making it possible to avoid the use of powder, since the uneven portion (3) creates a space between the contact surface with the fired product, the space promotes the degreasing effect of the fired product and improves the quality of the fired product. enhance
波形ひだ壮大起部(3)を押し出し成形法で形成する場
合も、その底部と載持焼成物の間の空間が、焼成物の脱
脂作用を促すため、従来の平板棚板と比較して有利とな
る。Even when the corrugated corrugated grand origin (3) is formed by extrusion molding, the space between the bottom and the loaded fired material promotes degreasing of the fired material, which is advantageous compared to conventional flat shelf boards. becomes.
本発明の焼成用棚板は一見、構造が複雑なだめ製造コス
トの上昇を来すように思われるが、押し出し成形できる
構造を特徴とし、内部中空構造も上面のひだ状突起形状
も押し出し成形により良い加工精度で製造され、しかも
低コストである。At first glance, the baking shelf of the present invention seems to have a complicated structure and increase production costs, but it is characterized by a structure that can be extruded, and both the internal hollow structure and the pleated shape of the upper surface can be easily extruded. Manufactured with high precision and low cost.
以下に本発明の焼成用棚板の作用および実施例に就いて
詳述するが棚板の大きさ、形状、材質、材質の純度、凹
凸もしくはひだ壮大起部の形状、中空部形状等は本実施
例に限定されないことは当然のことである。The function and examples of the baking shelf of the present invention will be described in detail below, but the size, shape, material, purity of the material, shape of irregularities or folds, shape of the hollow part, etc. It goes without saying that the invention is not limited to the examples.
純度99.5%のアルミナ原料、バインダー、可塑剤、
離型剤を混合し、真空押出成形機により、肉厚部に並列
せる略三角形中空部(2)を有する棚板(1)の成形体
を連続的に得て、当該成形体を1650℃で2時間焼成
し、260x130x6twの棚板を得る。Alumina raw material with a purity of 99.5%, binder, plasticizer,
A mold release agent was mixed and a vacuum extrusion molding machine was used to continuously obtain a molded body of a shelf board (1) having approximately triangular hollow portions (2) arranged in parallel with the thick part, and the molded body was heated at 1650°C. Bake for 2 hours to obtain a shelf board of 260x130x6tw.
本焼成用棚板の焼成物載持面には、波形ひだ壮大起部(
3)を設は載持焼成物との接触面積を可能な限り小さく
する。On the surface of the final firing shelf that holds the baked goods, there are large corrugated folds (
3) is designed to minimize the contact area with the loaded fired product.
上記棚板を従来の平板型アルミナ質耐火物棚板(260
X130X10tm)と特性比較を行ったところ、クリ
ープ特性は同等で、棚板重量は約40%減少した。The above shelf board was replaced with a conventional flat plate type alumina refractory shelf board (260
When comparing the properties with that of the new model (X130X10tm), the creep properties were the same, and the shelf weight was reduced by about 40%.
また、アルミナ部品被焼成物(アルミナ99.5%、サ
イズ50X80X20B)の焼成を、本発明の棚板と従
来の平板型アルミナ質耐火物棚板を使用して1560℃
の温度で2時間行ったところ、本発明の焼成用棚板が敷
粉を使用せずに焼成が可能であったのに対し、一方の平
板型アルミナ質耐火物棚板では棚板の成分であるシリカ
の影響により、棚板との接触面である焼成物の底面に白
点が生じ、敷粉だげでなく、セッターの使用が必要であ
ることが確認された。In addition, alumina parts to be fired (alumina 99.5%, size 50 x 80 x 20 B) were fired at 1560°C using the shelf board of the present invention and the conventional flat alumina refractory shelf board.
When the firing was carried out at a temperature of Due to the influence of a certain silica, white spots appeared on the bottom of the fired product, which is the surface that comes in contact with the shelf board, and it was confirmed that it was necessary to use a setter in addition to using a bedding powder.
第1表に上記本発明の棚板と従来の平板型アルミナ質耐
火物棚板の特性比較を示す。Table 1 shows a comparison of the characteristics of the above-mentioned shelf board of the present invention and the conventional flat plate type alumina refractory shelf board.
第1表が示すように本発明の焼成用棚板は、特に、見掛
気孔率とベント量で優れた値を示す。As shown in Table 1, the baking shelf of the present invention exhibits particularly excellent values in apparent porosity and vent amount.
尚、第1表のベント量測定条件は、スパン240mm、
荷重500g (φ100酊)、温度1500℃、3時
間である。In addition, the vent amount measurement conditions in Table 1 are: span 240 mm;
The load was 500g (φ100mm), the temperature was 1500°C, and the duration was 3 hours.
第1表
ひだ状突起(3)の断面形状は、口承の半円形断面の他
、半長円形、台形、矩形、三角形でも良い。The cross-sectional shape of the fold-like protrusion (3) in Table 1 may be semi-elliptical, trapezoidal, rectangular, or triangular in addition to the semicircular cross-section of the oral cavity.
本発明の焼成用棚板は材質が高純度であるので良好な耐
熱性、耐蝕性を示し、各種雰囲気中での安定性が高いと
ともに載持焼成物への不純物の侵入も抑制することがで
きる。Since the baking shelf of the present invention is made of high-purity material, it exhibits good heat resistance and corrosion resistance, and is highly stable in various atmospheres, as well as being able to suppress the intrusion of impurities into the baked products held thereon. .
また、本発明の焼成用棚板は、中空構造を有する薄板で
構成されるため、軽量化の要請に答え得るとともに、熱
容量の小さい省エネルギー型特性を保持する。Further, since the baking shelf of the present invention is composed of a thin plate having a hollow structure, it can meet the demand for weight reduction and maintains energy-saving characteristics with a small heat capacity.
更に、上記中空構造により耐クリープ性が高くなり、肉
厚が薄いので耐スポーリング性も大きくすることができ
る。Furthermore, the hollow structure increases the creep resistance, and the thin wall thickness also increases the spalling resistance.
また、棚板上面に形成した凹凸ないしひだ壮大起部によ
り、融着現象を抑止し、敷粉の使用を回避し得る。In addition, the irregularities or large folds formed on the upper surface of the shelf board prevent the phenomenon of fusion and avoid the use of bedding powder.
更に、従来のセンターをセントし、敷粉を均一に分散す
る工程の煩雑さが解消され、炉詰め作業を効率良く行い
得る。Furthermore, the complexity of the conventional process of centering and uniformly dispersing bedding powder is eliminated, and the furnace filling work can be performed efficiently.
第1図は本発明の焼成用棚板の外観図を示す。 (1)焼成用棚板 (2)中空部 (3)ひだ壮大起部 FIG. 1 shows an external view of the baking shelf of the present invention. (1) Shelf board for firing (2) Hollow part (3) Grand opening of folds
Claims (1)
肉厚部断面形状が並列せる略三角形の中空部を有する板
状体であって、当該板状体の上・下面の少なくとも一面
に対して、載持する焼成物との接触面に凹凸部を形成し
たことを特徴とする焼成用棚板。Made of alumina ceramics with a purity of over 99.5%,
A plate-like body having a substantially triangular hollow part with parallel cross-sectional shapes of the thick parts, and having an uneven part on at least one of the upper and lower surfaces of the plate-like body, on the contact surface with the fired product to be mounted. A shelf board for firing characterized by having a shape.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2052826A JPH03255887A (en) | 1990-03-06 | 1990-03-06 | Shelf plate for calcination |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2052826A JPH03255887A (en) | 1990-03-06 | 1990-03-06 | Shelf plate for calcination |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03255887A true JPH03255887A (en) | 1991-11-14 |
Family
ID=12925656
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2052826A Pending JPH03255887A (en) | 1990-03-06 | 1990-03-06 | Shelf plate for calcination |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03255887A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009084066A (en) * | 2007-09-27 | 2009-04-23 | Kyocera Corp | Ceramic structure, method of manufacturing the same, and member for semiconductor or liquid crystal manufactiring apparatus using the same |
WO2012076319A1 (en) * | 2010-12-09 | 2012-06-14 | Saint-Gobain Industriekeramik Rödental GmbH | Ceramic plate for kiln car bodies and fireproof linings |
WO2013174742A3 (en) * | 2012-05-23 | 2014-03-13 | Saint-Gobain Industriekeramik Rödental GmbH | Ceramic plate for a shelf system |
-
1990
- 1990-03-06 JP JP2052826A patent/JPH03255887A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009084066A (en) * | 2007-09-27 | 2009-04-23 | Kyocera Corp | Ceramic structure, method of manufacturing the same, and member for semiconductor or liquid crystal manufactiring apparatus using the same |
WO2012076319A1 (en) * | 2010-12-09 | 2012-06-14 | Saint-Gobain Industriekeramik Rödental GmbH | Ceramic plate for kiln car bodies and fireproof linings |
WO2013174742A3 (en) * | 2012-05-23 | 2014-03-13 | Saint-Gobain Industriekeramik Rödental GmbH | Ceramic plate for a shelf system |
CN104395682A (en) * | 2012-05-23 | 2015-03-04 | 圣戈班工业陶瓷罗登塔尔有限责任公司 | Ceramic plate for a shelf system |
JP2015522784A (en) * | 2012-05-23 | 2015-08-06 | サン−ゴバン インドゥストリーケラミク レーデンタール ゲゼルシャフト ミット ベシュレンクテル ハフツングSAINT−GOBAIN IndustrieKeramik Roedental GmbH | Ceramic plate for shelf system |
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